Search results for: Input saturation

Authors: Zöhre Kara Kayikci, Günther Palm

Abstract:

A word recognition architecture based on a network of neural associative memories and hidden Markov models has been developed. The input stream, composed of subword-units like wordinternal triphones consisting of diphones and triphones, is provided to the network of neural associative memories by hidden Markov models. The word recognition network derives words from this input stream. The architecture has the ability to handle ambiguities on subword-unit level and is also able to add new words to the vocabulary during performance. The architecture is implemented to perform the word recognition task in a language processing system for understanding simple command sentences like “bot show apple".

Keywords: Hebbian learning, hidden Markov models, neuralassociative memories, word recognition.

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Authors: M. Z Md Zain, M. O. Tokhi, M. S. Alam

Abstract:

This paper describes a practical approach to design and develop a hybrid learning with acceleration feedback control (HLC) scheme for input tracking and end-point vibration suppression of flexible manipulator systems. Initially, a collocated proportionalderivative (PD) control scheme using hub-angle and hub-velocity feedback is developed for control of rigid-body motion of the system. This is then extended to incorporate a further hybrid control scheme of the collocated PD control and iterative learning control with acceleration feedback using genetic algorithms (GAs) to optimize the learning parameters. Experimental results of the response of the manipulator with the control schemes are presented in the time and frequency domains. The performance of the HLC is assessed in terms of input tracking, level of vibration reduction at resonance modes and robustness with various payloads.

Keywords: Flexible manipulator, iterative learning control, vibration suppression.

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Authors: Rui Antunes

Abstract:

This article presents a simple way to perform programmed voice commands for the interface with commercial Digital and Analogue Input/Output PCI cards, used in Robotics and Automation applications. Robots and Automation equipment can "listen" to voice commands and perform several different tasks, approaching to the human behavior, and improving the human- machine interfaces for the Automation Industry. Since most PCI Digital and Analogue Input/Output cards are sold with several DLLs included (for use with different programming languages), it is possible to add speech recognition capability, using a standard speech recognition engine, compatible with the programming languages used. It was created in this work a Visual Basic 6 (the world's most popular language) application, that listens to several voice commands, and is capable to communicate directly with several standard 128 Digital I/O PCI Cards, used to control complete Automation Systems, with up to (number of boards used) x 128 Sensors and/or Actuators.

Keywords: Speech Recognition, Automation, Robotics.

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Authors: Siddhartha Bhattacharyya, Paramartha Dutta, Ujjwal Maulik, Prashanta Kumar Nandi

Abstract:

The paper describes a self supervised parallel self organizing neural network (PSONN) architecture for true color image segmentation. The proposed architecture is a parallel extension of the standard single self organizing neural network architecture (SONN) and comprises an input (source) layer of image information, three single self organizing neural network architectures for segmentation of the different primary color components in a color image scene and one final output (sink) layer for fusion of the segmented color component images. Responses to the different shades of color components are induced in each of the three single network architectures (meant for component level processing) by applying a multilevel version of the characteristic activation function, which maps the input color information into different shades of color components, thereby yielding a processed component color image segmented on the basis of the different shades of component colors. The number of target classes in the segmented image corresponds to the number of levels in the multilevel activation function. Since the multilevel version of the activation function exhibits several subnormal responses to the input color image scene information, the system errors of the three component network architectures are computed from some subnormal linear index of fuzziness of the component color image scenes at the individual level. Several multilevel activation functions are employed for segmentation of the input color image scene using the proposed network architecture. Results of the application of the multilevel activation functions to the PSONN architecture are reported on three real life true color images. The results are substantiated empirically with the correlation coefficients between the segmented images and the original images.

Keywords: Colour image segmentation, fuzzy set theory, multi-level activation functions, parallel self-organizing neural network.

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Authors: Muhammad M. A. S. Mahmoud

Abstract:

Natural gas sweetening process is a controlled process that must be done at maximum efficiency and with the highest quality. In this work, due to complexity and non-linearity of the process, the H2S gas separation and the intelligent fuzzy controller, which is used to enhance the process, are simulated in MATLAB – Simulink. New design of fuzzy control for Gas Separator is discussed in this paper. The design is based on the utilization of linear state-estimation to generate the internal knowledge-base that stores input-output pairs. The obtained input/output pairs are then used to design a feedback fuzzy controller. The proposed closed-loop fuzzy control system maintains the system asymptotically-stability while it enhances the system time response to achieve better control of the concentration of the output gas from the tower. Simulation studies are carried out to illustrate the Gas Separator system performance.

Keywords: Gas separator, gas sweetening, intelligent controller, fuzzy control.

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Authors: Yan Ma, ShunBao Li

Abstract:

A new approach is adopted in this paper based on Turk and Pentland-s eigenface method. It was found that the probability density function of the distance between the projection vector of the input face image and the average projection vector of the subject in the face database, follows Rayleigh distribution. In order to decrease the false acceptance rate and increase the recognition rate, the input face image has been recognized using two thresholds including the acceptance threshold and the rejection threshold. We also find out that the value of two thresholds will be close to each other as number of trials increases. During the training, in order to reduce the number of trials, the projection vectors for each subject has been averaged. The recognition experiments using the proposed algorithm show that the recognition rate achieves to 92.875% whilst the average number of judgment is only 2.56 times.

Keywords: Eigenface, Face Recognition, Threshold, Rayleigh Distribution, Feature Extraction

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Authors: S. Sowmyayani

Abstract:

The advancement of computer-aided design helps the medical force and security force. Some applications include biometric recognition, elderly fall detection, face recognition, cancer recognition, tumor recognition, etc. This paper deals with different machine learning algorithms that are more generically used for any health care system. The most focused problems are classification and regression. With the rise of big data, machine learning has become particularly important for solving problems. Machine learning uses two types of techniques: supervised learning and unsupervised learning. The former trains a model on known input and output data and predicts future outputs. Classification and regression are supervised learning techniques. Unsupervised learning finds hidden patterns in input data. Clustering is one such unsupervised learning technique. The above-mentioned models are discussed briefly in this paper.

Keywords: Supervised learning, unsupervised learning, regression, neural network.

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Authors: Ying-Wen Bai, Ju-Maw Chen

Abstract:

To successfully provide a fast FIR filter with FTT algorithms, overlapped-save algorithms can be used to lower the computational complexity and achieve the desired real-time processing. As the length of the input block increases in order to improve the efficiency, a larger volume of zero padding will greatly increase the computation length of the FFT. In this paper, we use the overlapped block digital filtering to construct a parallel structure. As long as the down-sampling (or up-sampling) factor is an exact multiple lengths of the impulse response of a FIR filter, we can process the input block by using a parallel structure and thus achieve a low-complex fast FIR filter with overlapped-save algorithms. With a long filter length, the performance and the throughput of the digital filtering system will also be greatly enhanced.

Keywords: FIR Filter, Overlapped-save Algorithm, ParallelStructure

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Authors: Vishal Awasthi, Krishna Raj

Abstract:

In many communication and signal processing systems, it is highly desirable to implement an efficient narrow-band filter that decimate or interpolate the incoming signals. This paper presents hardware efficient compensated CIC filter over a narrow band frequency that increases the speed of down sampling by using multiplierless decimation filters with polyphase FIR filter structure. The proposed work analyzed the performance of compensated CIC filter on the bases of the improvement of frequency response with reduced hardware complexity in terms of no. of adders and multipliers and produces the filtered results without any alterations. CIC compensator filter demonstrated that by using compensation with CIC filter improve the frequency response in passed of interest 26.57% with the reduction in hardware complexity 12.25% multiplications per input sample (MPIS) and 23.4% additions per input sample (APIS) w.r.t. FIR filter respectively.

Keywords: Multirate filtering, Narrow-band Signaling, Compensation Theory, CIC filter, Decimation, Compensation filter.

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Authors: N. H. Othman, N. Udin, M. Ishak, L. H. Shah

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This study focuses on the effect of pin taper tool ratio on friction stir welding of magnesium alloy AZ31. Two pieces of AZ31 alloy with thickness of 6 mm were friction stir welded by using the conventional milling machine. The shoulder diameter used in this experiment is fixed at 18 mm. The taper pin ratio used are varied at 6:6, 6:5, 6:4, 6:3, 6:2 and 6:1. The rotational speeds that were used in this study were 500 rpm, 1000 rpm and 1500 rpm, respectively. The welding speeds used are 150 mm/min, 200 mm/min and 250 mm/min. Microstructure observation of welded area was studied by using optical microscope. Equiaxed grains were observed at the TMAZ and stir zone indicating fully plastic deformation. Tool pin diameter ratio 6/1 causes low heat input to the material because of small contact surface between tool surface and stirred materials compared to other tool pin diameter ratio. The grain size of stir zone increased with increasing of ratio of rotational speed to transverse speed due to higher heat input. It is observed that worm hole is produced when excessive heat input is applied. To evaluate the mechanical properties of this specimen, tensile test was used in this study. Welded specimens using taper pin ratio 6:1 shows higher tensile strength compared to other taper pin ratio up to 204 MPa. Moreover, specimens using taper pin ratio 6:1 showed better tensile strength with 500 rpm of rotational speed and 150mm/min welding speed.

Keywords: Friction stir welding, magnesium AZ31, cylindrical taper tool, taper pin ratio.

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Authors: Francisco J. Lopez-Jaquez, Sandra E. Ramirez-Jara

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This paper presents an implementation and performance test of a distributed motion control system based on a master-slave configuration used to move a plasma-cutting torch over a predefined trajectory. The master is a general-purpose computer running on an open source operating system platform and software developer. Software running in the master computer generates commands on real time and we measure performance based on a selected set of differences between expected and observed distances. We are testing the null hypothesis that the outcome trajectory is identical to the input against the alternative hypothesis that there is a shift to the right or left of the input one. We used the Wilcoxon signed ranks test method for the hypothesis test.

Keywords: Distributed, motion, control, real-time, contouring.

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Authors: Hazem M. El-Bakry

Abstract:

Neural processors have shown good results for detecting a certain character in a given input matrix. In this paper, a new idead to speed up the operation of neural processors for character detection is presented. Such processors are designed based on cross correlation in the frequency domain between the input matrix and the weights of neural networks. This approach is developed to reduce the computation steps required by these faster neural networks for the searching process. The principle of divide and conquer strategy is applied through image decomposition. Each image is divided into small in size sub-images and then each one is tested separately by using a single faster neural processor. Furthermore, faster character detection is obtained by using parallel processing techniques to test the resulting sub-images at the same time using the same number of faster neural networks. In contrast to using only faster neural processors, the speed up ratio is increased with the size of the input image when using faster neural processors and image decomposition. Moreover, the problem of local subimage normalization in the frequency domain is solved. The effect of image normalization on the speed up ratio of character detection is discussed. Simulation results show that local subimage normalization through weight normalization is faster than subimage normalization in the spatial domain. The overall speed up ratio of the detection process is increased as the normalization of weights is done off line.

Keywords: Fast Character Detection, Neural Processors, Cross Correlation, Image Normalization, Parallel Processing.

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Authors: Jae-Min Yu, Hyoung-Ho Doh, Ji-Su Kim, Dong-Ho Lee, Sung-Ho Nam

Abstract:

A reconfigurable manufacturing system (RMS) is an advanced system designed at the outset for rapid changes in its hardware and software components in order to quickly adjust its production capacity and functionally. Among various operational decisions, this study considers the scheduling problem that determines the input sequence and schedule at the same time for a given set of parts. In particular, we consider the practical constraints that the numbers of pallets/fixtures are limited and hence a part can be released into the system only when the fixture required for the part is available. To solve the integrated input sequencing and scheduling problems, we suggest a priority rule based approach in which the two sub-problems are solved using a combination of priority rules. To show the effectiveness of various rule combinations, a simulation experiment was done on the data for a real RMS, and the test results are reported.

Keywords: Reconfigurable manufacturing system, scheduling, priority rules, multiple process plans, pallets/fixtures

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Authors: Jihyung Kim, Taejin Kim, Sungho Park, Jun-Dong Cho

Abstract:

A conventional binding method for low power in a high-level synthesis mainly focuses on finding an optimal binding for an assumed input data, and obtains only one binding table. In this paper, we show that a binding method which uses multiple binding tables gets better solution compared with the conventional methods which use a single binding table, and propose a dynamic bus binding scheme for low power using multiple binding tables. The proposed method finds multiple binding tables for the proper partitions of an input data, and switches binding tables dynamically to produce the minimum total switching activity. Experimental result shows that the proposed method obtains a binding solution having 12.6-28.9% smaller total switching activity compared with the conventional methods.

Keywords: low power, bus binding, switching activity, multiplebinding tables

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Authors: Hamza A. Ali, Waleed A. J. Rasheed

Abstract:

The use of neural networks for recognition application is generally constrained by their inherent parameters inflexibility after the training phase. This means no adaptation is accommodated for input variations that have any influence on the network parameters. Attempts were made in this work to design a neural network that includes an additional mechanism that adjusts the threshold values according to the input pattern variations. The new approach is based on splitting the whole network into two subnets; main traditional net and a supportive net. The first deals with the required output of trained patterns with predefined settings, while the second tolerates output generation dynamically with tuning capability for any newly applied input. This tuning comes in the form of an adjustment to the threshold values. Two levels of supportive net were studied; one implements an extended additional layer with adjustable neuronal threshold setting mechanism, while the second implements an auxiliary net with traditional architecture performs dynamic adjustment to the threshold value of the main net that is constructed in dual-layer architecture. Experiment results and analysis of the proposed designs have given quite satisfactory conducts. The supportive layer approach achieved over 90% recognition rate, while the multiple network technique shows more effective and acceptable level of recognition. However, this is achieved at the price of network complexity and computation time. Recognition generalization may be also improved by accommodating capabilities involving all the innate structures in conjugation with Intelligence abilities with the needs of further advanced learning phases.

Keywords: Classification, Recognition, Neural Networks, Pattern Recognition, Generalization.

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Authors: M. A. Elbagermia, A. I. Alajtala, M. Alkerzab

Abstract:

This study compares the quality of different brands of Portland Cement (PC) available in Libyan market. The amounts of chemical constituents like SiO2, Al2O3, Fe2O3, CaO, MgO, SO3 and Lime Saturation Factor (LSF) were determined in accordance with Libyan (L.S.S) and Amrican (A.S.S) Standard Specifications. All the cement studies were found to be good for concrete work especially where no special property is required. The chemical and mineralogical analyses for studied clinker samples show that the dominant phases composition are C3S and C2S while the C3A and C4AF are less abundant.

Keywords: Portland cement, Chemical Composition, Libyan market, X-ray fluorescence.

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Authors: Zahra Ghadampour, Gholamreza Rakhshandehroo

Abstract:

A concern that researchers usually face in different applications of Artificial Neural Network (ANN) is determination of the size of effective domain in time series. In this paper, trial and error method was used on groundwater depth time series to determine the size of effective domain in the series in an observation well in Union County, New Jersey, U.S. different domains of 20, 40, 60, 80, 100, and 120 preceding day were examined and the 80 days was considered as effective length of the domain. Data sets in different domains were fed to a Feed Forward Back Propagation ANN with one hidden layer and the groundwater depths were forecasted. Root Mean Square Error (RMSE) and the correlation factor (R2) of estimated and observed groundwater depths for all domains were determined. In general, groundwater depth forecast improved, as evidenced by lower RMSEs and higher R2s, when the domain length increased from 20 to 120. However, 80 days was selected as the effective domain because the improvement was less than 1% beyond that. Forecasted ground water depths utilizing measured daily data (set #1) and data averaged over the effective domain (set #2) were compared. It was postulated that more accurate nature of measured daily data was the reason for a better forecast with lower RMSE (0.1027 m compared to 0.255 m) in set #1. However, the size of input data in this set was 80 times the size of input data in set #2; a factor that may increase the computational effort unpredictably. It was concluded that 80 daily data may be successfully utilized to lower the size of input data sets considerably, while maintaining the effective information in the data set.

Keywords: Neural networks, groundwater depth, forecast.

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Authors: L. Rodriguez-Benitez, J. Moreno-Garcia, J.J. Castro-Schez, C. Solana, L. Jimenez

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In this paper the use of sequential machines for recognizing actions taken by the objects detected by a general tracking algorithm is proposed. The system may deal with the uncertainty inherent in medium-level vision data. For this purpose, fuzzification of input data is performed. Besides, this transformation allows to manage data independently of the tracking application selected and enables adding characteristics of the analyzed scenario. The representation of actions by means of an automaton and the generation of the input symbols for finite automaton depending on the object and action compared are described. The output of the comparison process between an object and an action is a numerical value that represents the membership of the object to the action. This value is computed depending on how similar the object and the action are. The work concludes with the application of the proposed technique to identify the behavior of vehicles in road traffic scenes.

Keywords: Approximate reasoning, finite state machines, video analysis.

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Authors: Syed Sohail Abbas, Sergei Popov

Abstract:

In this paper, a fibre laser at 546 nm has been studied for a signal power of -30 dB. Er3+-doped ZBLAN fibre has been used by upconversion pumping of a 980 nm laser diode. Gain saturation effect has been investigated in detail. Laser performance has also been discussed. An efficiency of 35% has been calculated with a length of 5 mm fibre laser. Results show that Er3+-doped ZBLAN is a promising candidate for optical amplification at 546 nm.

Keywords: Compact visible lasers, Erbium doped, Gainsaturation, Green laser, Optical fibre lasers

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Authors: Tatiana A. Dolenko, Sergey A. Burikov, Alexander O. Efitorov, Sergey A. Dolenko

Abstract:

In this study, a comparative analysis of the approaches associated with the use of neural network algorithms for effective solution of a complex inverse problem – the problem of identifying and determining the individual concentrations of inorganic salts in multicomponent aqueous solutions by the spectra of Raman scattering of light – is performed. It is shown that application of artificial neural networks provides the average accuracy of determination of concentration of each salt no worse than 0.025 M. The results of comparative analysis of input data compression methods are presented. It is demonstrated that use of uniform aggregation of input features allows decreasing the error of determination of individual concentrations of components by 16-18% on the average.

Keywords: Inverse problems, multi-component solutions, neural networks, Raman spectroscopy.

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Authors: Ming-Hui Lee, Iau-Teh Wang

Abstract:

The innovative fuzzy estimator is used to estimate the ground motion acceleration of the retaining structure in this study. The Kalman filter without the input term and the fuzzy weighting recursive least square estimator are two main portions of this method. The innovation vector can be produced by the Kalman filter, and be applied to the fuzzy weighting recursive least square estimator to estimate the acceleration input over time. The excellent performance of this estimator is demonstrated by comparing it with the use of difference weighting function, the distinct levels of the measurement noise covariance and the initial process noise covariance. The availability and the precision of the proposed method proposed in this study can be verified by comparing the actual value and the one obtained by numerical simulation.

Keywords: Earthquake, Fuzzy Estimator, Kalman Filter, Recursive Least Square Estimator.

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Authors: Hassan Faraji Baghtash

Abstract:

In this paper, a low voltage high performance current mirror is presented. Its most important specifications, which are improved in this work, are analyzed and formulated proving that it has such outstanding merits as: Very low input resistance of 26mΩ, very wide current dynamic range of 8 decades from 10pA to 1mA (160dB) together with an extremely low current copy error of less than 0.6ppm, and very low input and output voltages. Furthermore, the proposed current mirror bandwidth is 944MHz utilizing very low power consumption (267μW) and transistors count. HSPICE simulation results are performed using TSMC 0.18μm CMOS technology utilizing 1.8V single power supply, confirming the theoretically proved outstanding performance of the proposed current mirror. Monte Carlo simulation of its most important parameter is also examined showing its sufficiently resistance against technology process variations.

Keywords: Current mirror/source, high accuracy, low voltage, wide dynamic range.

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Authors: Farhad Kolahan, A. Hamid Khajavi

Abstract:

In this paper, a set of experimental data has been used to assess the influence of abrasive water jet (AWJ) process parameters in cutting 6063-T6 aluminum alloy. The process variables considered here include nozzle diameter, jet traverse rate, jet pressure and abrasive flow rate. The effects of these input parameters are studied on depth of cut (h); one of most important characteristics of AWJ. The Taguchi method and regression modeling are used in order to establish the relationships between input and output parameters. The adequacy of the model is evaluated using analysis of variance (ANOVA) technique. In the next stage, the proposed model is embedded into a Simulated Annealing (SA) algorithm to optimize the AWJ process parameters. The objective is to determine a suitable set of process parameters that can produce a desired depth of cut, considering the ranges of the process parameters. Computational results prove the effectiveness of the proposed model and optimization procedure.

Keywords: AWJ machining, Mathematical modeling, Simulated Annealing, Optimization

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Authors: Kyunghoon Kim, Sungjoon Shim, Jun Tae Kim, Jong Tae Kim

Abstract:

In a wireless communication system, a predistorter(PD) is often employed to alleviate nonlinear distortions due to operating a power amplifier near saturation, thereby improving the system performance and reducing the interference to adjacent channels. This paper presents a new adaptive polynomial digital predistorter(DPD). The proposed DPD uses Coordinate Rotation Digital Computing(CORDIC) processors and PD process by pipelined architecture. It is simpler and faster than conventional adaptive polynomial DPD. The performance of the proposed DPD is proved by MATLAB simulation.

Keywords: DPD, CORDIC.

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Authors: Hazem M. El-Bakry, Nikos Mastorakis

Abstract:

Fast forecasting of stock market prices is very important for strategic planning. In this paper, a new approach for fast forecasting of stock market prices is presented. Such algorithm uses new high speed time delay neural networks (HSTDNNs). The operation of these networks relies on performing cross correlation in the frequency domain between the input data and the input weights of neural networks. It is proved mathematically and practically that the number of computation steps required for the presented HSTDNNs is less than that needed by traditional time delay neural networks (TTDNNs). Simulation results using MATLAB confirm the theoretical computations.

Keywords: Fast Forecasting, Stock Market Prices, Time Delay NeuralNetworks, Cross Correlation, Frequency Domain.

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Authors: Tetsuki Taniguchi, Yoshio Karasawa

Abstract:

This paper describes a subarray based low computational design method of multiuser massive multiple input multiple output (MIMO) system. In our previous works, use of large array is assumed only in transmitter, but this study considers the case both of transmitter and receiver sides are equipped with large array antennas. For this aim, receive arrays are also divided into several subarrays, and the former proposed method is modified for the synthesis of a large array from subarrays in both ends. Through computer simulations, it is verified that the performance of the proposed method is degraded compared with the original approach, but it can achieve the improvement in the aspect of complexity, namely, significant reduction of the computational load to the practical level.

Keywords: Massive multiple input multiple output (MIMO), multiuser, large array, subarray, zero forcing, singular value decomposition.

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Authors: Tianchai Suksri, Satean Tunyasrirut

Abstract:

This paper presents design and implements the T-DOF PI controller design for a speed control of induction motor. The voltage source inverter type space vector pulse width modulation technique is used the drive system. This scheme leads to be able to adjust the speed of the motor by control the frequency and amplitude of the input voltage. The ratio of input stator voltage to frequency should be kept constant. The T-DOF PI controller design by root locus technique is also introduced to the system for regulates and tracking speed response. The experimental results in testing the 120 watt induction motor from no-load condition to rated condition show the effectiveness of the proposed control scheme.

Keywords: PI controller, root locus technique, space vector pulse width modulation, induction motor.

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Authors: D.Katherasan, Madana Sashikant, S.Sandeep Bhat, P.Sathiya

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Bead-on-plate welds were carried out on AISI 316L (N) austenitic stainless steel (ASS) using flux cored arc welding (FCAW) process. The bead on plates weld was conducted as per L25 orthogonal array. In this paper, the weld bead geometry such as depth of penetration (DOP), bead width (BW) and weld reinforcement (R) of AISI 316L (N) ASS are investigated. Taguchi approach is used as statistical design of experiment (DOE) technique for optimizing the selected welding input parameters. Grey relational analysis and desirability approach are applied to optimize the input parameters considering multiple output variables simultaneously. Confirmation experiment has also been conducted to validate the optimized parameters.

Keywords: bead-on-plate welding, bead profiles, desirability approach, grey relational analysis

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Authors: Sudipta Majumdar

Abstract:

This paper presents a method for identification of a linear time invariant (LTI) autonomous all pole system using singular value decomposition. The novelty of this paper is two fold: First, MUSIC algorithm for estimating complex frequencies from real measurements is proposed. Secondly, using the proposed algorithm, we can identify the coefficients of differential equation that determines the LTI system by switching off our input signal. For this purpose, we need only to switch off the input, apply our complex MUSIC algorithm and determine the coefficients as symmetric polynomials in the complex frequencies. This method can be applied to unstable system and has higher resolution as compared to time series solution when, noisy data are used. The classical performance bound, Cramer Rao bound (CRB), has been used as a basis for performance comparison of the proposed method for multiple poles estimation in noisy exponential signal.

Keywords: MUSIC algorithm, Cramer Rao bound, frequency estimation.

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Authors: Ali Eltayeb Muhsin, Mohamed Elhadi Elsari

Abstract:

The substrate heater designed for this investigation is a front side substrate heating system. It consists of 10 conventional tungsten halogen lamps and an aluminum reflector, total input electrical power of 5 kW. The substrate is heated by means of a radiation from conventional tungsten halogen lamps directed to the substrate through a glass window. This design allows easy replacement of the lamps and maintenance of the system. Within 2 to 6 minutes the substrate temperature reaches 500 to 830 C by varying the vertical distance between the glass window and the substrate holder. Moreover, the substrate temperature can be easily controlled by controlling the input power to the system. This design gives excellent opportunity to deposit many deferent films at deferent temperatures in the same deposition time. This substrate heater was successfully used for Chemical Vapor Deposition (CVD) of many thin films, such as Silicon, iron, etc.

Keywords: CVD, Halogen Lamp, Substrate Heater, Thin Films.

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