Search results for: Deep neural networks
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 2696

Search results for: Deep neural networks

656 An Auxiliary Technique for Coronary Heart Disease Prediction by Analyzing ECG Based on ResNet and Bi-LSTM

Authors: Yang Zhang, Jian He

Abstract:

Heart disease is one of the leading causes of death in the world, and coronary heart disease (CHD) is one of the major heart diseases. Electrocardiogram (ECG) is widely used in the detection of heart diseases, but the traditional manual method for CHD prediction by analyzing ECG requires lots of professional knowledge for doctors. This paper presents sliding window and continuous wavelet transform (CWT) to transform ECG signals into images, and then ResNet and Bi-LSTM are introduced to build the ECG feature extraction network (namely ECGNet). At last, an auxiliary system for CHD prediction was developed based on modified ResNet18 and Bi-LSTM, and the public ECG dataset of CHD from MIMIC-3 was used to train and test the system. The experimental results show that the accuracy of the method is 83%, and the F1-score is 83%. Compared with the available methods for CHD prediction based on ECG, such as kNN, decision tree, VGGNet, etc., this method not only improves the prediction accuracy but also could avoid the degradation phenomenon of the deep learning network.

Keywords: Bi-LSTM, CHD, coronary heart disease, ECG, electrocardiogram, ResNet, sliding window.

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655 Environmental Inspection using WSANs Based on Multi-agent Coordination Method

Authors: Mohammad J. Heydari, Farnaz Derakhshan

Abstract:

In this paper, we focus on the problem of driving and herding a collection of autonomous actors to a given area. Then, a new method based on multi-agent coordination is proposed for solving the problem. In our proposed method, we assume that the environment is covered by sensors. When an event is occurred, sensors forward information to a sink node. Based on received information, the sink node will estimate the direction and the speed of movement of actors and announce the obtained value to the actors. The actors coordinate to reach the target location.

Keywords: Coordination, Environmental Inspection, Multiagent systems, Wireless Sensor and Actor Networks (WSANs)

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654 Analysis and Protection of Soil in Controlled Regime Using Techniques Adapted to the Specifics of Precision Agriculture

Authors: Voicu Petre, Oaida Mircea, Surugiu Petru

Abstract:

It is now unanimously accepted that conventional agriculture has led to the emergence and intensification of some forms of soil and environmental degradation, some of which are due to poorly applied or insufficiently substantiated technological measures. For this reason, the elaboration of any agricultural technology requires a deep knowledge of all the factors involved as well as of the interaction relations between them. This is also the way in which the research will be approached in this paper. Despite the fact that at European level the implementation of precision agriculture has a low level compared to some countries located on the American continent, it is emerging not only as an alternative to conventional agriculture but, as a viable way to preserve the quality of the environment in general, and the edaphic environment in particular. This gives an increased importance to the research in this paper through physical, chemical, biological, mineralogical and micromorphological analytical determinations, processing of analytical results, identification of processes, causes, factors, establishment of soil quality indicators and the perspective of measurements from distance by satellite techniques of some of these soil properties (humidity, temperature, pH, N, P, K and so on).

Keywords: Conventional agriculture, environmental degradation, precision agriculture, soil.

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653 Variation of Quality of Roller-Compacted Concrete Based on Consistency

Authors: C. Chhorn, S. H. Han, S. W. Lee

Abstract:

Roller-compacted concrete (RCC) has been used for decades in many pavement applications due to its economic cost and high construction speed. However, due to the lack of deep researches and experiences, this material has not been widely employed. An RCC mixture with appropriate consistency can induce high compacted density, while high density can induce good aggregate interlock and high strength. Consistency of RCC is mainly known to define its constructability. However, it was not well specified how this property may affect other properties of a constructed RCC pavement (RCCP). This study suggested the possibility of an ideal range of consistency that may provide adequate quality of RCCP. In this research, five sections of RCCP consisted of both 13 mm and 19 mm aggregate sections were investigated. The effects of consistency on compacted depth, strength, international roughness index (IRI), skid resistance are examined. From this study, a new range of consistency is suggested for RCCP application.

Keywords: Compacted depth, consistency, international roughness index, pavement, roller-compacted concrete, skid resistance, strength.

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652 The Framework of BeeBot: Binus Multi-Client of Intelligent Telepresence Robot

Authors: Widod Budiharto, Muhsin Shodiq, Bayu Kanigoro, Jurike V. Moniaga Hutomo

Abstract:

We present a BeeBot, Binus Multi-client Intelligent Telepresence Robot, a custom-build robot system specifically designed for teleconference with multiple person using omni directional actuator. The robot is controlled using a computer networks, so the manager/supervisor can direct the robot to the intended person to start a discussion/inspection. People tracking and autonomous navigation are intelligent features of this robot. We build a web application for controlling the multi-client telepresence robot and open-source teleconference system used. Experimental result presented and we evaluated its performance.

Keywords: Telepresence robot, robot vision, intelligent robot.

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651 Deep Web Content Mining

Authors: Shohreh Ajoudanian, Mohammad Davarpanah Jazi

Abstract:

The rapid expansion of the web is causing the constant growth of information, leading to several problems such as increased difficulty of extracting potentially useful knowledge. Web content mining confronts this problem gathering explicit information from different web sites for its access and knowledge discovery. Query interfaces of web databases share common building blocks. After extracting information with parsing approach, we use a new data mining algorithm to match a large number of schemas in databases at a time. Using this algorithm increases the speed of information matching. In addition, instead of simple 1:1 matching, they do complex (m:n) matching between query interfaces. In this paper we present a novel correlation mining algorithm that matches correlated attributes with smaller cost. This algorithm uses Jaccard measure to distinguish positive and negative correlated attributes. After that, system matches the user query with different query interfaces in special domain and finally chooses the nearest query interface with user query to answer to it.

Keywords: Content mining, complex matching, correlation mining, information extraction.

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650 Authentication Analysis of the 802.11i Protocol

Authors: Zeeshan Furqan, Shahabuddin Muhammad, Ratan Guha

Abstract:

IEEE has designed 802.11i protocol to address the security issues in wireless local area networks. Formal analysis is important to ensure that the protocols work properly without having to resort to tedious testing and debugging which can only show the presence of errors, never their absence. In this paper, we present the formal verification of an abstract protocol model of 802.11i. We translate the 802.11i protocol into the Strand Space Model and then prove the authentication property of the resulting model using the Strand Space formalism. The intruder in our model is imbued with powerful capabilities and repercussions to possible attacks are evaluated. Our analysis proves that the authentication of 802.11i is not compromised in the presented model. We further demonstrate how changes in our model will yield a successful man-in-the-middle attack.

Keywords: authentication, formal analysis, formal verification, security.

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649 Machine Learning-Enabled Classification of Climbing Using Small Data

Authors: Nicholas Milburn, Yu Liang, Dalei Wu

Abstract:

Athlete performance scoring within the climbing domain presents interesting challenges as the sport does not have an objective way to assign skill. Assessing skill levels within any sport is valuable as it can be used to mark progress while training, and it can help an athlete choose appropriate climbs to attempt. Machine learning-based methods are popular for complex problems like this. The dataset available was composed of dynamic force data recorded during climbing; however, this dataset came with challenges such as data scarcity, imbalance, and it was temporally heterogeneous. Investigated solutions to these challenges include data augmentation, temporal normalization, conversion of time series to the spectral domain, and cross validation strategies. The investigated solutions to the classification problem included light weight machine classifiers KNN and SVM as well as the deep learning with CNN. The best performing model had an 80% accuracy. In conclusion, there seems to be enough information within climbing force data to accurately categorize climbers by skill.

Keywords: Classification, climbing, data imbalance, data scarcity, machine learning, time sequence.

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648 Comparative Analysis of Machine Learning Tools: A Review

Authors: S. Sarumathi, M. Vaishnavi, S. Geetha, P. Ranjetha

Abstract:

Machine learning is a new and exciting area of artificial intelligence nowadays. Machine learning is the most valuable, time, supervised, and cost-effective approach. It is not a narrow learning approach; it also includes a wide range of methods and techniques that can be applied to a wide range of complex realworld problems and time domains. Biological image classification, adaptive testing, computer vision, natural language processing, object detection, cancer detection, face recognition, handwriting recognition, speech recognition, and many other applications of machine learning are widely used in research, industry, and government. Every day, more data are generated, and conventional machine learning techniques are becoming obsolete as users move to distributed and real-time operations. By providing fundamental knowledge of machine learning tools and research opportunities in the field, the aim of this article is to serve as both a comprehensive overview and a guide. A diverse set of machine learning resources is demonstrated and contrasted with the key features in this survey.

Keywords: Artificial intelligence, machine learning, deep learning, machine learning algorithms, machine learning tools.

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647 Design of Domain-Specific Software Systems with Parametric Code Templates

Authors: Kostyantyn Yermashov, Karsten Wolke, Karl Hayo Siemsen

Abstract:

Domain-specific languages describe specific solutions to problems in the application domain. Traditionally they form a solution composing black-box abstractions together. This, usually, involves non-deep transformations over the target model. In this paper we argue that it is potentially powerful to operate with grey-box abstractions to build a domain-specific software system. We present parametric code templates as grey-box abstractions and conceptual tools to encapsulate and manipulate these templates. Manipulations introduce template-s merging routines and can be defined in a generic way. This involves reasoning mechanisms at the code templates level. We introduce the concept of Neurath Modelling Language (NML) that operates with parametric code templates and specifies a visualisation mapping mechanism for target models. Finally we provide an example of calculating a domain-specific software system with predefined NML elements.

Keywords: software design, code templates, domain-specific languages, modelling languages, generic tools

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646 Evolution of Autonomous Vehicles and Advanced Automated Car Parking Development

Authors: Kwok Tak Kit

Abstract:

The trend of autonomous vehicles is the future solution to road networks congestion in terms of their advanced ability to drive closer together and at higher speeds than humans can do safely. Infrastructure sector can drive the economic prosperity and provide a balance and inclusive growth of sustainable economy development. In this paper, the road infrastructure and the future development of electric car, self-driving of autonomous vehicles and the increasing demand of automated car parking system are critically revised and this paper aims to provide the insight and achieve better sustainable infrastructure and community in smart city.

Keywords: Autonomous vehicles, sustainable infrastructure, real time parking, automated car parking.

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645 A Predictive Rehabilitation Software for Cerebral Palsy Patients

Authors: J. Bouchard, B. Prosperi, G. Bavre, M. Daudé, E. Jeandupeux

Abstract:

Young patients suffering from Cerebral Palsy are facing difficult choices concerning heavy surgeries. Diagnosis settled by surgeons can be complex and on the other hand decision for patient about getting or not such a surgery involves important reflection effort. Proposed software combining prediction for surgeries and post surgery kinematic values, and from 3D model representing the patient is an innovative tool helpful for both patients and medicine professionals. Beginning with analysis and classification of kinematics values from Data Base extracted from gait analysis in 3 separated clusters, it is possible to determine close similarity between patients. Prediction surgery best adapted to improve a patient gait is then determined by operating a suitable preconditioned neural network. Finally, patient 3D modeling based on kinematic values analysis, is animated thanks to post surgery kinematic vectors characterizing the closest patient selected from patients clustering.

Keywords: Cerebral Palsy, Clustering, Crouch Gait, 3-D Modeling.

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644 New Multipath Node-Disjoint Routing Based on AODV Protocol

Authors: V. Zangeneh, S. Mohammadi

Abstract:

Today, node-disjoint routing becomes inessential technique in communication of packets among various nodes in networks. Meanwhile AODV (Ad Hoc On-demand Multipath Distance Vector) creates single-path route between a pair of source and destination nodes. Some researches has done so far to make multipath node-disjoint routing based on AODV protocol. But however their overhead and end-to-end delay are relatively high, while the detail of their code is not available too. This paper proposes a new approach of multipath node-disjoint routing based on AODV protocol. Then the algorithm of analytical model is presented. The extensive results of this algorithm will be presented in the next paper.

Keywords: AODV; MANET; Multipath Routing; Node-disjoint;transmission delay.

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643 Managing your Online Reputation: Issues of Ethics, Trust and Privacy in a Wired, “No Place to Hide“ World

Authors: Karen Armstrong

Abstract:

This paper examines the issues, the dangers and the saving graces of life in a transparent global community where there is truly “no place to hide". In recent years, social networks and online groups have transformed issues of privacy and the ways in which we perceive and interact with others. The idea of reputation is critical to this dynamic. The discussion begins with a brief etymological history of the concept of reputation and moves to an exploration of how and why online communication changes our basic nature, our various selves and the Bakhtin idea of the polyphonic nature of truth. The discussion considers the damaging effects of bullying and gossip, both of which constitute an assault on reputation and the latter of which is not limited to the lifetime of the person. It concludes with guidelines and specific recommendations.

Keywords: online reputation, gossip, cyberbullying, privacy

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642 Design of Buffer Management for Industry to Avoid Sensor Data- Conflicts

Authors: Dae-ho Won, Jong-wook Hong, Yeon-Mo Yang, Jinung An

Abstract:

To reduce accidents in the industry, WSNs(Wireless Sensor networks)- sensor data is used. WSNs- sensor data has the persistence and continuity. therefore, we design and exploit the buffer management system that has the persistence and continuity to avoid and delivery data conflicts. To develop modules, we use the multi buffers and design the buffer management modules that transfer sensor data through the context-aware methods.

Keywords: safe management system, buffer management, context-aware, input data stream

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641 Effect of CW Laser Annealing on Silicon Surface for Application of Power Device

Authors: Satoru Kaneko, Takeshi Ito, Kensuke Akiyama, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Yasuo Hirabayashi, Takeshi Ozawa, Akira Matsuno, Takashi Nire, Hiroshi Funakubo, Mamoru Yoshimoto

Abstract:

As application of re-activation of backside on power device Insulated Gate Bipolar Transistor (IGBT), laser annealing was employed to irradiate amorphous silicon substrate, and resistivities were measured using four point probe measurement. For annealing the amorphous silicon two lasers were used at wavelength of visible green (532 nm) together with Infrared (793 nm). While the green laser efficiently increased temperature at top surface the Infrared laser reached more deep inside and was effective for melting the top surface. A finite element method was employed to evaluate time dependent thermal distribution in silicon substrate.

Keywords: laser, annealing, silicon, recrystallization, thermal distribution, resistivity, finite element method, absorption, melting point, latent heat of fusion.

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640 Depletion Layer Parameters of Al-MoO3-P-CdTe-Al MOS Structures

Authors: A. C. Sarmah

Abstract:

The Al-MoO3-P-CdTe-Al MOS sandwich structures were fabricated by vacuum deposition method on cleaned glass substrates. Capacitance versus voltage measurements were performed at different frequencies and sweep rates of applied voltages for oxide and semiconductor films of different thicknesses. In the negative voltage region of the C-V curve a high differential capacitance of the semiconductor was observed and at high frequencies (<10 kHz) the transition from accumulation to depletion and further to deep depletion was observed as the voltage was swept from negative to positive. A study have been undertaken to determine the value of acceptor density and some depletion layer parameters such as depletion layer capacitance, depletion width, impurity concentration, flat band voltage, Debye length, flat band capacitance, diffusion or built-in-potential, space charge per unit area etc. These were determined from C-V measurements for different oxide and semiconductor thicknesses.

Keywords: Debye length, Depletion width, flat band capacitance, impurity concentration.

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639 Application of Generalized Autoregressive Score Model to Stock Returns

Authors: Katleho Daniel Makatjane, Diteboho Lawrence Xaba, Ntebogang Dinah Moroke

Abstract:

The current study investigates the behaviour of time-varying parameters that are based on the score function of the predictive model density at time t. The mechanism to update the parameters over time is the scaled score of the likelihood function. The results revealed that there is high persistence of time-varying, as the location parameter is higher and the skewness parameter implied the departure of scale parameter from the normality with the unconditional parameter as 1.5. The results also revealed that there is a perseverance of the leptokurtic behaviour in stock returns which implies the returns are heavily tailed. Prior to model estimation, the White Neural Network test exposed that the stock price can be modelled by a GAS model. Finally, we proposed further researches specifically to model the existence of time-varying parameters with a more detailed model that encounters the heavy tail distribution of the series and computes the risk measure associated with the returns.

Keywords: Generalized autoregressive score model, stock returns, time-varying.

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638 Innovative Methods of Improving Train Formation in Freight Transport

Authors: Jaroslav Masek, Juraj Camaj, Eva Nedeliakova

Abstract:

The paper is focused on the operational model for transport the single wagon consignments on railway network by using two different models of train formation. The paper gives an overview of possibilities of improving the quality of transport services. Paper deals with two models used in problematic of train formatting - time continuously and time discrete. By applying these models in practice, the transport company can guarantee a higher quality of service and expect increasing of transport performance. The models are also applicable into others transport networks. The models supplement a theoretical problem of train formation by new ways of looking to affecting the organization of wagon flows.

Keywords: Train formation, wagon flows, marshalling yard, railway technology.

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637 Evaluation of Robust Feature Descriptors for Texture Classification

Authors: Jia-Hong Lee, Mei-Yi Wu, Hsien-Tsung Kuo

Abstract:

Texture is an important characteristic in real and synthetic scenes. Texture analysis plays a critical role in inspecting surfaces and provides important techniques in a variety of applications. Although several descriptors have been presented to extract texture features, the development of object recognition is still a difficult task due to the complex aspects of texture. Recently, many robust and scaling-invariant image features such as SIFT, SURF and ORB have been successfully used in image retrieval and object recognition. In this paper, we have tried to compare the performance for texture classification using these feature descriptors with k-means clustering. Different classifiers including K-NN, Naive Bayes, Back Propagation Neural Network , Decision Tree and Kstar were applied in three texture image sets - UIUCTex, KTH-TIPS and Brodatz, respectively. Experimental results reveal SIFTS as the best average accuracy rate holder in UIUCTex, KTH-TIPS and SURF is advantaged in Brodatz texture set. BP neuro network works best in the test set classification among all used classifiers.

Keywords: Texture classification, texture descriptor, SIFT, SURF, ORB.

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636 Factors Contributing Towards Technology Development in Small Firms

Authors: Davinder Singh, Jaimal Singh Khamba, Tarun Nanda

Abstract:

The importance of MSMEs in India became crucial in rural areas because it promoted economic growth. MSMEs play a significant role in the economic growth of the country owing to production, exports and employment. Technology development reflect a critical way in which organization respond to either technological or market challenges. The present survey examines the characteristics of technology development in MSMEs. The results show that Indian MSMEs do not co-operate with universities and R&D institutes. Government policies also affect the technology development activities. The awareness about the R&D infrastructure is very low as shown by the results in the study. There is a need to understand and assess the real needs of the MSMEs and accordingly devise approaches that ensure their sustainable growth.

Keywords: MSMEs, technology development, networks, financial management and R&D infrastructure.

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635 Intervention Targeting in Environmental Networks

Authors: Chukwudi Henry Dike

Abstract:

We explore targeted subsidy in a set-up for which manufacturing firms in a waste-spillover network make endogenous production decisions. Here, games of substitution in digraphs arises where waste-producing firms internalise negative externality in a quadratic fashion. We find neutrality in intervention policies that create or reduce spillover links. Most importantly, we observe centrality distinction in asymmetric digraphs so that the dependence and power of each firm play unique roles. Here we see that in targeted subsidy, a firm with greater centrality guarantees optimal welfare improvement. This centrality however measures the weakness of each firm’s Nash-based link to other neighbourhood firms i.e., lower negative externality.

Keywords: Centrality, externality, key-player, Nash-Equilibrium.

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634 Reliability of Digital FSO Links in Europe

Authors: Zdenek Kolka, Otakar Wilfert, Viera Biolkova

Abstract:

The paper deals with an analysis of visibility records collected from 210 European airports to obtain a realistic estimation of the availability of Free Space Optical (FSO) data links. Commercially available optical links usually operate in the 850nm waveband. Thus the influence of the atmosphere on the optical beam and on the visible light is similar. Long-term visibility records represent an invaluable source of data for the estimation of the quality of service of FSO links. The model used characterizes both the statistical properties of fade depths and the statistical properties of individual fade durations. Results are presented for Italy, France, and Germany.

Keywords: Computer networks, free-space optical links, meteorology, quality of service.

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633 Deep Reinforcement Learning for Optimal Decision-making in Supply Chains

Authors: Nitin Singh, Meng Ling, Talha Ahmed, Tianxia Zhao, Reinier van de Pol

Abstract:

We propose the use of Reinforcement Learning (RL) as a viable alternative for optimizing supply chain management, particularly in scenarios with stochasticity in product demands. RL’s adaptability to changing conditions and its demonstrated success in diverse fields of sequential decision-making make it a promising candidate for addressing supply chain problems. We investigate the impact of demand fluctuations in a multi-product supply chain system and develop RL agents with learned generalizable policies. We provide experimentation details for training RL agents and a statistical analysis of the results. We study generalization ability of RL agents for different demand uncertainty scenarios and observe superior performance compared to the agents trained with fixed demand curves. The proposed methodology has the potential to lead to cost reduction and increased profit for companies dealing with frequent inventory movement between supply and demand nodes.

Keywords: Inventory Management, Reinforcement Learning, Supply Chain Optimization, Uncertainty.

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632 Suitable Die Shaping for a Rectangular Shape Bottle by Application of FEM and AI Technique

Authors: N. Ploysook, R. Rugsaj, C. Suvanjumrat

Abstract:

The characteristic requirement for producing rectangular shape bottles was a uniform thickness of the plastic bottle wall. Die shaping was a good technique which controlled the wall thickness of bottles. An advance technology which was the finite element method (FEM) for blowing parison to be a rectangular shape bottle was conducted to reduce waste plastic from a trial and error method of a die shaping and parison control method. The artificial intelligent (AI) comprised of artificial neural network and genetic algorithm was selected to optimize the die gap shape from the FEM results. The application of AI technique could optimize the suitable die gap shape for the parison blow molding which did not depend on the parison control method to produce rectangular bottles with the uniform wall. Particularly, this application can be used with cheap blow molding machines without a parison controller therefore it will reduce cost of production in the bottle blow molding process.

Keywords: AI, bottle, die shaping, FEM.

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631 Enhancement of Capacity in a MC-CDMA based Cognitive Radio Network Using Non-Cooperative Game Model

Authors: Kalyani J. Kulkarni, Bharat S. Chaudhari

Abstract:

This paper addresses the issue of resource allocation in the emerging cognitive technology. Focusing the Quality of Service (QoS) of Primary Users (PU), a novel method is proposed for the resource allocation of Secondary Users (SU). In this paper, we propose the unique Utility Function in the game theoretic model of Cognitive Radio which can be maximized to increase the capacity of the Cognitive Radio Network (CRN) and to minimize the interference scenario. Utility function is formulated to cater the need of PUs by observing Signal to Noise ratio. Existence of Nash Equilibrium for the postulated game is established.

Keywords: Cognitive Networks, Game Theory, Nash Equilibrium, Resource Allocation.

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630 Suspended Matter Model on Alsat-1 Image by MLP Network and Mathematical Morphology: Prototypes by K-Means

Authors: S. Loumi, H. Merrad, F. Alilat, B. Sansal

Abstract:

In this article, we propose a methodology for the characterization of the suspended matter along Algiers-s bay. An approach by multi layers perceptron (MLP) with training by back propagation of the gradient optimized by the algorithm of Levenberg Marquardt (LM) is used. The accent was put on the choice of the components of the base of training where a comparative study made for four methods: Random and three alternatives of classification by K-Means. The samples are taken from suspended matter image, obtained by analytical model based on polynomial regression by taking account of in situ measurements. The mask which selects the zone of interest (water in our case) was carried out by using a multi spectral classification by ISODATA algorithm. To improve the result of classification, a cleaning of this mask was carried out using the tools of mathematical morphology. The results of this study presented in the forms of curves, tables and of images show the founded good of our methodology.

Keywords: Classification K-means, mathematical morphology, neural network MLP, remote sensing, suspended particulate matter

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629 A Taxonomy of Internal Attacks in Wireless Sensor Network

Authors: Muhammad R Ahmed, Xu Huang, Dharmendra Sharma

Abstract:

Developments in communication technologies especially in wireless have enabled the progress of low-cost and lowpower wireless sensor networks (WSNs). The features of such WSN are holding minimal energy, weak computational capabilities, wireless communication and an open-medium nature where sensors are deployed. WSN is underpinned by application driven such as military applications, the health sector, etc. Due to the intrinsic nature of the network and application scenario, WSNs are vulnerable to many attacks externally and internally. In this paper we have focused on the types of internal attacks of WSNs based on OSI model and discussed some security requirements, characterizers and challenges of WSNs, by which to contribute to the WSN-s security research.

Keywords: Wireless sensor network, internal attacks, security, OSI model.

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628 Wetting Characterization of High Aspect Ratio Nanostructures by Gigahertz Acoustic Reflectometry

Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

Abstract:

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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627 Numerical Analysis on Triceratops Restraining System: Failure Conditions of Tethers

Authors: Srinivasan Chandrasekaran, Manda Hari Venkata Ramachandra Rao

Abstract:

Increase in the oil and gas exploration in ultra deep-water demands an adaptive structural form of the platform. Triceratops has superior motion characteristics compared to that of the Tension Leg Platform and Single Point Anchor Reservoir platforms, which is well established in the literature. Buoyant legs that support the deck are position-restrained to the sea bed using tethers with high axial pretension. Environmental forces that act on the platform induce dynamic tension variations in the tethers, causing the failure of tethers. The present study investigates the dynamic response behavior of the restraining system of the platform under the failure of a single tether of each buoyant leg in high sea states. Using the rain-flow counting algorithm and the Goodman diagram, fatigue damage caused to the tethers is estimated, and the fatigue life is predicted. Results shows that under failure conditions, the fatigue life of the remaining tethers is quite alarmingly low.

Keywords: Fatigue life, Failure analysis, PM spectrum, rain flow counting, triceratops.

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