Search results for: Lyapunov-based control scheme

Authors: Mohd Zuhair, Ram Babu Roy

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This paper presents an overview of the accessibility, design, and functioning of health insurance plans launched by state governments in India. In recent years, the governments of several states in India have come forward to provide health insurance coverage for the low-income group and rural population to reduce the out of pocket expenditure (OPE) on healthcare. Different health insurance schemes have different structures and offerings which differ in the different demographic factors. This study will portray a comparative analysis of the various health insurance schemes by analyzing different offerings and finance generation of the schemes. The comparative analysis will explain the lesson to be learned from these schemes and extend the existing knowledge of the health insurance in India. This would help in recognizing tension between various drivers and identifying issues pertaining to the sustainability of health insurance schemes in India.

Keywords: Health insurance, out of pocket expenditure, universal healthcare, sustainability.

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Authors: Ali Ghaffari, Mansour Nikkhah Bahrami, Hesam Parsa

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In this paper a comprehensive model of a fossil fueled power plant (FFPP) is developed in order to evaluate the performance of a newly designed turbine follower controller. Considering the drawbacks of previous works, an overall model is developed to minimize the error between each subsystem model output and the experimental data obtained at the actual power plant. The developed model is organized in two main subsystems namely; Boiler and Turbine. Considering each FFPP subsystem characteristics, different modeling approaches are developed. For economizer, evaporator, superheater and reheater, first order models are determined based on principles of mass and energy conservation. Simulations verify the accuracy of the developed models. Due to the nonlinear characteristics of attemperator, a new model, based on a genetic-fuzzy systems utilizing Pittsburgh approach is developed showing a promising performance vis-à-vis those derived with other methods like ANFIS. The optimization constraints are handled utilizing penalty functions. The effect of increasing the number of rules and membership functions on the performance of the proposed model is also studied and evaluated. The turbine model is developed based on the equation of adiabatic expansion. Parameters of all evaluated models are tuned by means of evolutionary algorithms. Based on the developed model a fuzzy PI controller is developed. It is then successfully implemented in the turbine follower control strategy of the plant. In this control strategy instead of keeping control parameters constant, they are adjusted on-line with regard to the error and the error rate. It is shown that the response of the system improves significantly. It is also shown that fuel consumption decreases considerably.

Keywords: Attemperator, Evolutionary algorithms, Fossil fuelled power plant (FFPP), Fuzzy set theory, Gain scheduling

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Authors: Amil Daraz, Suheel Abdullah Malik, Tahir Saleem, Sajid Ali Bhati

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In this paper, Integral Proportional (I-P) controller is employed for superheated steam temperature control system. The Ziegler-Nichols (Z-N) method is used for the tuning of I-P controller. The performance analysis of Z-N based I-P controller is assessed on superheated steam system of 500-MW boiler. The comparison of transient response parameters such as rise time, settling time, and overshoot is made with Z-N based Proportional Integral (PI) controller. It is observed from the results that Z-N based I-P controller completely eliminates the overshoot in the output response.

Keywords: Superheated steam, process reaction curve, PI and I-P controller, Ziegler-Nichols tuning.

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Authors: F. Raja, M. Rahgozar, F. Oroumchian

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XML is a markup language which is becoming the standard format for information representation and data exchange. A major purpose of XML is the explicit representation of the logical structure of a document. Much research has been performed to exploit logical structure of documents in information retrieval in order to precisely extract user information need from large collections of XML documents. In this paper, we describe an XML information retrieval weighting scheme that tries to find the most relevant elements in XML documents in response to a user query. We present this weighting model for information retrieval systems that utilize plausible inferences to infer the relevance of elements in XML documents. We also add to this model the Dempster-Shafer theory of evidence to express the uncertainty in plausible inferences and Dempster-Shafer rule of combination to combine evidences derived from different inferences.

Keywords: Dempster-Shafer theory, plausible inferences, XMLinformation retrieval.

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Authors: Mohana Sundaram Muthuvalu, Jumat Sulaiman

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In this paper, application of the complexity reduction approach based on half- and quarter-sweep iteration concepts with Jacobi iterative method for solving composite trapezoidal (CT) algebraic equations is discussed. The performances of the methods for CT algebraic equations are comparatively studied by their application in solving linear Fredholm integral equations of the second kind. Furthermore, computational complexity analysis and numerical results for three test problems are also included in order to verify performance of the methods.

Keywords: Complexity reduction approach, Composite trapezoidal scheme, Jacobi method, Linear Fredholm integral equations

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Authors: K. A. Navas, S. Archana Thampy, M. Sasikumar

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Medical image data hiding has strict constrains such as high imperceptibility, high capacity and high robustness. Achieving these three requirements simultaneously is highly cumbersome. Some works have been reported in the literature on data hiding, watermarking and stegnography which are suitable for telemedicine applications. None is reliable in all aspects. Electronic Patient Report (EPR) data hiding for telemedicine demand it blind and reversible. This paper proposes a novel approach to blind reversible data hiding based on integer wavelet transform. Experimental results shows that this scheme outperforms the prior arts in terms of zero BER (Bit Error Rate), higher PSNR (Peak Signal to Noise Ratio), and large EPR data embedding capacity with WPSNR (Weighted Peak Signal to Noise Ratio) around 53 dB, compared with the existing reversible data hiding schemes.

Keywords: Biomedical imaging, Data security, Datacommunication, Teleconferencing.

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Authors: Zanariah Mohd Yusof, Siti Khuzaimah Soid, Ahmad Sukri Abd Aziz, Seripah Awang Kechil

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Unsteady magnetohydrodynamics (MHD) boundary layer flow and heat transfer over a continuously stretching surface in the presence of radiation is examined. By similarity transformation, the governing partial differential equations are transformed to a set of ordinary differential equations. Numerical solutions are obtained by employing the Runge-Kutta-Fehlberg method scheme with shooting technique in Maple software environment. The effects of unsteadiness parameter, radiation parameter, magnetic parameter and Prandtl number on the heat transfer characteristics are obtained and discussed. It is found that the heat transfer rate at the surface increases as the Prandtl number and unsteadiness parameter increase but decreases with magnetic and radiation parameter.

Keywords: Heat transfer, magnetohydrodynamics, radiation, unsteadiness.

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Authors: Dhaksha Vivekanandan

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DeFi is a network that avoids reliance on financial intermediaries through its peer-to-peer financial network. DeFi operates outside of government control; hence, it is important for us to understand its impacts. This study employs a literature review to understand DeFi and its emergence, as well as its implications on transparency, social impact, and regulation. Further, three case studies are analysed within the context of these categories. DeFi’s provision of increased transparency poses environmental and storage costs and can lead to user privacy being endangered. DeFi allows for the provision of entrepreneurial incentives and protection against monetary censorship and capital control. Despite DeFi's transparency issues and volatility costs, it has huge potential to reduce poverty; however, regulation surrounding DeFi still requires further tightening by governments.

Keywords: DeFi, transparency, regulation, social impact.

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Authors: Jyotsna Singh, Parul Garg, Alok Nath De

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In this paper, we present a non-blind technique of adding the watermark to the Fourier spectral components of audio signal in a way such that the modified amplitude does not exceed the maximum amplitude spread (MAS). This MAS is due to individual Discrete fourier transform (DFT) coefficients in that particular frame, which is derived from the Energy Spreading function given by Schroeder. Using this technique one can store double the information within a given frame length i.e. overriding the watermark on the host of equal length with least perceptual distortion. The watermark is uniformly floating on the DFT components of original signal. This helps in detecting any intentional manipulations done on the watermarked audio. Also, the scheme is found robust to various signal processing attacks like presence of multiple watermarks, Additive white gaussian noise (AWGN) and mp3 compression.

Keywords: Discrete Fourier Transform, Spreading Function, Watermark, Pseudo Noise Sequence, Spectral Masking Effect

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Authors: H. Yazdani, K. Ghorbanian

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This paper deals with modeling and simulation of the plasma actuator with OpenFOAM. Plasma actuator is one of the newest devices in flow control techniques which can delay separation by inducing external momentum to the boundary layer of the flow. The effects of the plasma actuators on the external flow are incorporated into Navier-Stokes computations as a body force vector which is obtained as a product of the net charge density and the electric field. In order to compute this body force vector, the model solves two equations: One for the electric field due to the applied AC voltage at the electrodes and the other for the charge density representing the ionized air. The simulation result is compared to the experimental and typical values which confirms the validity of the modeling.

Keywords: Active flow control, flow field, OpenFOAM, plasma actuator.

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Authors: I. V. Singh, A. Singh

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In this paper, mesh-free element free Galerkin (EFG) method is extended to solve two-dimensional potential flow problems. Two ideal fluid flow problems (i.e. flow over a rigid cylinder and flow over a sphere) have been formulated using variational approach. Penalty and Lagrange multiplier techniques have been utilized for the enforcement of essential boundary conditions. Four point Gauss quadrature have been used for the integration on two-dimensional domain (Ω) and nodal integration scheme has been used to enforce the essential boundary conditions on the edges (┌). The results obtained by EFG method are compared with those obtained by finite element method. The effects of scaling and penalty parameters on EFG results have also been discussed in detail.

Keywords: Meshless, EFG method, potential flow, Lagrange multiplier method, penalty method, penalty parameter and scaling parameter

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Authors: Yi-Ting Mai, Chun-Chuan Yang, Cheng-Jung Wen

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IEEE 802.16 is a new wireless technology standard, it has some advantages, including wider coverage, higher bandwidth, and QoS support. As the new wireless technology for last mile solution, there are designed two models in IEEE 802.16 standard. One is PMP (point to multipoint) and the other is Mesh. In this paper we only focus on IEEE 802.16 Mesh model. According to the IEEE 802.16 standard description, Mesh model has two scheduling modes, centralized and distributed. Considering the pros and cons of the two scheduling, we present the combined scheduling QoS framework that the BS (Base Station) controls time frame scheduling and selects the shortest path from source to destination directly. On the other hand, we propose the Expedited Queue mechanism to cut down the transmission time. The EQ mechanism can reduce a lot of end-to-end delay in our QoS framework. Simulation study has shown that the average delay is smaller than contrasts. Furthermore, our proposed scheme can also achieve higher performance.

Keywords: IEEE 802.16 Mesh, Scheduling, Expedited Queue, QoS.

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Authors: Heroe Wijanto, Sugihartono, Suhartono Tjondronegoro, Kuspriyanto

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The use of High Order Statistics (HOS) analysis is expected to provide so many candidates of features that can be selected for pattern recognition. More candidates of the feature can be extracted using simple manipulation through a specific mathematical function prior to the HOS analysis. Feature extraction method using HOS analysis combined with Difference to the Nth-Power manipulation has been examined in application for Automatic Modulation Recognition (AMR) to perform scheme recognition of three digital modulation signal, i.e. QPSK-16QAM-64QAM in the AWGN transmission channel. The simulation results is reported when the analysis of HOS up to order-12 and the manipulation of Difference to the Nth-Power up to N = 4. The obtained accuracy rate of AMR using the method of Simple Decision obtained 90% in SNR > 10 dB in its classifier, while using the method of Voted Decision is 96% in SNR > 2 dB.

Keywords: modulation, automatic modulation recognition, feature analysis, feature manipulation.

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Authors: Wang Xue, Liu Dan, Liu Ying, Wang Molin, Qian Zhihong

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A low-complexity, high-accurate frequency offset estimation for multi-band orthogonal frequency division multiplexing (MB-OFDM) based ultra-wide band systems is presented regarding different carrier frequency offsets, different channel frequency responses, different preamble patterns in different bands. Utilizing a half-cycle Constant Amplitude Zero Auto Correlation (CAZAC) sequence as the preamble sequence, the estimator with a semi-cross contrast scheme between two successive OFDM symbols is proposed. The CRLB and complexity of the proposed algorithm are derived. Compared to the reference estimators, the proposed method achieves significantly less complexity (about 50%) for all preamble patterns of the MB-OFDM systems. The CRLBs turn out to be of well performance.

Keywords: CAZAC, Frequency Offset, Semi-cross Contrast, MB-OFDM, UWB

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Authors: Samir A. Emam, Ali El Domiaty

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Friction-stir welding has received a huge interest in the last few years. The many advantages of this promising process have led researchers to present different theoretical and experimental explanation of the process. The way to quantitatively and qualitatively control the different parameters of the friction-stir welding process has not been paved. In this study, a refined energybased model that estimates the energy generated due to friction and plastic deformation is presented. The effect of the plastic deformation at low energy levels is significant and hence a scale factor is introduced to control its effect. The predicted heat energy and the obtained maximum temperature using our model are compared to the theoretical and experimental results available in the literature and a good agreement is obtained. The model is applied to AA6000 and AA7000 series.

Keywords: Friction-stir welding, Energy, Aluminum Alloys.

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Authors: Ananth Kamath, Ankit Kant, Aravind Srivatsa, Harisha J.A

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Compression algorithms reduce the redundancy in data representation to decrease the storage required for that data. Lossless compression researchers have developed highly sophisticated approaches, such as Huffman encoding, arithmetic encoding, the Lempel-Ziv (LZ) family, Dynamic Markov Compression (DMC), Prediction by Partial Matching (PPM), and Burrows-Wheeler Transform (BWT) based algorithms. Decompression is also required to retrieve the original data by lossless means. A compression scheme for text files coupled with the principle of dynamic decompression, which decompresses only the section of the compressed text file required by the user instead of decompressing the entire text file. Dynamic decompressed files offer better disk space utilization due to higher compression ratios compared to most of the currently available text file formats.

Keywords: Compression, Dynamic Decompression, Text file format, Portable Document Format, Compression Ratio.

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Authors: Raj Kumar Samanta, Partha Bhattacharjee Gautam Sanyal

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In this paper, a mathematical model is proposed to estimate the dropping probabilities of cellular wireless networks by queuing handoff instead of reserving guard channels. Usually, prioritized handling of handoff calls is done with the help of guard channel reservation. To evaluate the proposed model, gamma inter-arrival and general service time distributions have been considered. Prevention of some of the attempted calls from reaching to the switching center due to electromagnetic propagation failure or whimsical user behaviour (missed call, prepaid balance etc.), make the inter-arrival time of the input traffic to follow gamma distribution. The performance is evaluated and compared with that of guard channel scheme.

Keywords: Cellular wireless networks, non-classical traffic, mathematicalmodel, guard channel, queuing, handoff.

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Authors: Violina R. Angelova, Vanja I. Akova, Stefan V. Krustev, Krasimir I. Ivanov

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A field study was conducted to evaluate the efficacy of safflower plant for phytoremediation of contaminated soils. The experiment was performed on an agricultural fields contaminated by the Non-Ferrous-Metal Works near Plovdiv, Bulgaria. Field experiments with randomized complete block design with five treatments (control, compost amendments added at 20 and 40 t/daa, and vermicompost amendments added at 20 and 40 t/daa) were carried out. The quality of safflower seeds and oil (heavy metals and fatty acid composition) were determined. Tested organic amendments significantly influenced the chemical composition of safflower seeds and oil. The compost and vermicompost treatments significantly reduced heavy metals concentration in safflower seeds and oils, but the effect differed among them. Addition of vermicompost and compost leads to an increase in the content of palmitic acid and linoleic acid, and a decrease in the stearic and oleic acids compared with the control. A significant increase in the quantity of saturated acids was observed in the variants with 20 t/daa of compost and 20 t/daa of vermicompost (9.1 and 8.9% relative to the control). Safflower is a plant which is tolerant to heavy metals and can be successfully used in the phytoremediation of heavy metal contaminated soils. The processing of seeds to oil and using the obtained oil for nutritional purposes will greatly reduce the cost of phytoremediation.

Keywords: Heavy metals, organic amendments, phytoremediation, safflower.

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Authors: Hadjikhani R.

Abstract:

Anxiety is a common disorder that attacks many people in society and often accompanied by physiological sensations such as tachycardia, chest pain, shortness of breath, insensitivity and etc. The purpose of this study is to characterize the putative anxiolytic-like effects of DEV (dichloromethane extracts of valerian) using the elevated plus maze (EPM) in rats. DEV was dissolved in DMSO and orally administered at different doses to adult male wistar rats, 0.5, 1.5 and 3 hours before behavioral evaluation in an EPM respectively. Control rats were treated with an equal volume of DMSO. Single treatment of DEV (at 0.1,0.2. 0.3, and 0.4 g/kg) significantly increased time-spent and arm entries into open arms of EPM versus control groups (p<0.05).However, no changes in the locomotor activity ccured. This result suggests that DEV might prove to be an effective anxiolytic agent.

Keywords: Anxiety, Dichloromethane extracts, Valerian, Rat

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Authors: S. N. Deepa, G. Sugumaran

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This paper proposes a new algebraic scheme to design a PID controller for higher order linear time invariant continuous systems. Modified PSO (MPSO) based model order formulation techniques have applied to obtain the effective formulated second order system. A controller is tuned to meet the desired performance specification by using pole-zero cancellation method. Proposed PID controller is attached with both higher order system and formulated second order system. The closed loop response is observed for stabilization process and compared with general PSO based formulated second order system. The proposed method is illustrated through numerical example from literature.

Keywords: Higher order systems, model order formulation, modified particle swarm optimization, PID controller, pole-zero cancellation.

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Authors: Farhan Beg

Abstract:

This paper presents a method for the efficient implementation of a unidirectional or bidirectional DC/DC converter. The DC/DC converter is used essentially for energy exchange between the low voltage service battery and a high voltage battery commonly found in Electric Vehicle applications. In these applications, apart from cost, efficiency of design is an important characteristic. A useful way to reduce the size of electronic equipment in the electric vehicles is proposed in this paper. The technique simplifies the mechanical complexity and maximizes the energy usage using the latest converter control techniques. Moreover a bidirectional battery charger for hybrid electric vehicles is also implemented in this paper. Several simulations on the test system have been carried out in Matlab/Simulink environment. The results exemplify the robustness of the proposed design methodology in case of a 1.5 KW DC-DC converter.

Keywords: DC-DC converters, Electric Vehicles, Direct Current Control.

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Authors: Savita Sindhu, Shruti Vashist

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A wireless body area sensor network (WBASN) is composed of a central node and heterogeneous sensors to supervise the physiological signals and functions of the human body. This overwhelmimg area has stimulated new research and calibration processes, especially in the area of WBASN’s attainment and fidelity. In the era of mobility or imbricated WBASN’s, system performance incomparably degrades because of unstable signal integrity. Hence, it is mandatory to define mitigation techniques in the design to avoid interference. There are various mitigation methods available e.g. diversity techniques, equalization, viterbi decoder etc. This paper presents equalization mitigation scheme in WBASNs to improve the signal integrity. Eye diagrams are also given to represent accuracy of the signal. Maximum no. of symbols is taken to authenticate the signal which in turn results in accuracy and increases the overall performance of the system.

Keywords: Wireless body area network, equalizer, RLS, LMS.

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Authors: Christian Mayr, Holger Eisenreich, Stephan Henker, René Schüffny

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Image convolution similar to the receptive fields found in mammalian visual pathways has long been used in conventional image processing in the form of Gabor masks. However, no VLSI implementation of parallel, multi-layered pulsed processing has been brought forward which would emulate this property. We present a technical realization of such a pulsed image processing scheme. The discussed IC also serves as a general testbed for VLSI-based pulsed information processing, which is of interest especially with regard to the robustness of representing an analog signal in the phase or duration of a pulsed, quasi-digital signal, as well as the possibility of direct digital manipulation of such an analog signal. The network connectivity and processing properties are reconfigurable so as to allow adaptation to various processing tasks.

Keywords: Neural image processing, pulse computation application, pulsed Gabor convolution, VLSI pulse routing.

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Authors: Atul Krishna Banik

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Nonlinear response behaviour of a cracked RC beam under harmonic excitation is analysed to investigate various instability phenomena like, bifurcation, jump phenomena etc. The nonlinearity of the system arises due to opening and closing of the cracks in the RC beam and is modelled as a cubic polynomial. In order to trace different branches at the bifurcation point on the response curve (amplitude versus frequency of excitation plot), an arc length continuation technique along with the incremental harmonic balance (IHBC) method is employed. The stability of the solution is investigated by the Floquet theory using Hsu-s scheme. The periodic solutions obtained by the IHBC method are compared with these obtained by the numerical integration of the equation of motion. Characteristics of solutions fold bifurcation, jump phenomena and from stable to unstable zones are identified.

Keywords: Incremental harmonic balance, arc-length continuation, bifurcation, jump phenomena.

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Authors: Abdoulaye Diop, Nahid Emad, Thierry Winter, Mohamed Hilia

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Data assets protection is a crucial issue in the cybersecurity field. Companies use logical access control tools to vault their information assets and protect them against external threats, but they lack solutions to counter insider threats. Nowadays, insider threats are the most significant concern of security analysts. They are mainly individuals with legitimate access to companies information systems, which use their rights with malicious intents. In several fields, behavior anomaly detection is the method used by cyber specialists to counter the threats of user malicious activities effectively. In this paper, we present the step toward the construction of a user and entity behavior analysis framework by proposing a behavior anomaly detection model. This model combines machine learning classification techniques and graph-based methods, relying on linear algebra and parallel computing techniques. We show the utility of an ensemble learning approach in this context. We present some detection methods tests results on an representative access control dataset. The use of some explored classifiers gives results up to 99% of accuracy.

Keywords: Cybersecurity, data protection, access control, insider threat, user behavior analysis, ensemble learning, high performance computing.

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Authors: P. S. Van Staden, M. M. Campbell

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Vacant City of Cape Town-owned land lying unutilized and -productive could be developed for land uses such as urban agriculture that may improve the livelihoods of low income families. The new City of Cape Town zoning scheme includes an Urban Agriculture zoning for the first time. Unstructured qualitative interviews among town planners revealed their optimism about this inclusion as it will provide low-income residents with opportunities to generate an income. An existing farming community at Philippi, located within the municipal boundary of the city, was approached and empirical data obtained through questionnaires provided proof that urban agriculture could be viable in a coastal metropolitan city such as Cape Town even if farmers only produce for their own households. The lease method proposed for urban agriculture is a usufruct agreement conferring the right to another party, other than the legal owner, to enjoy the use and advantages of the property.

Keywords: Land uses, urban agriculture.

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Authors: Eunji Choi, Borang Park, Youngjae Choi, Jinwoo Moon

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In this study, a predictive model for estimating the metabolism (MET) of human body was developed for the optimal control of indoor thermal environment. Human body images for indoor activities and human body joint coordinated values were collected as data sets, which are used in predictive model. A deep learning algorithm was used in an initial model, and its number of hidden layers and hidden neurons were optimized. Lastly, the model prediction performance was analyzed after the model being trained through collected data. In conclusion, the possibility of MET prediction was confirmed, and the direction of the future study was proposed as developing various data and the predictive model.

Keywords: Deep learning, indoor quality, metabolism, predictive model.

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Authors: J. D. Mallapur, Supriya H., Santosh B. K., Tej H.

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The cellular network is one of the emerging areas of communication, in which the mobile nodes act as member for one base station. The cluster based communication is now an emerging area of wireless cellular multimedia networks. The cluster renders fast communication and also a convenient way to work with connectivity. In our scheme we have proposed an optimization technique for the fuzzy cluster nodes, by categorizing the group members into three categories like long refreshable member, medium refreshable member and short refreshable member. By considering long refreshable nodes as static nodes, we compute the new membership values for the other nodes in the cluster. We compare their previous and present membership value with the threshold value to categorize them into three different members. By which, we optimize the nodes in the fuzzy clusters. The simulation results show that there is reduction in the cluster computational time and iterational time after optimization.

Keywords: Clusters, fuzzy and optimization.

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Authors: J. Joy, T. H. New, I. H. Ibrahim

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A computational study on bio-inspired NACA63₄-021 hydrofoils with leading-edge protuberances has been carried out to investigate their hydrodynamic flow control characteristics at a Reynolds number of 14,000 and different angles-of-attack. The numerical simulations were performed using ANSYS FLUENT and based on Reynolds-Averaged Navier-Stokes (RANS) solver mode incorporated with k-ω Shear Stress Transport (SST) turbulence model. The results obtained indicate varying flow phenomenon along the peaks and troughs over the span of the hydrofoils. Compared to the baseline hydrofoil with no leading-edge protuberances, the leading-edge modified hydrofoils tend to reduce flow separation extents along the peak regions. In contrast, there are increased flow separations in the trough regions of the hydrofoil with leading-edge protuberances. Interestingly, it was observed that dissimilar flow separation behaviour is produced along different peak- or trough-planes along the hydrofoil span, even though the troughs or peaks are physically similar at each interval for a particular hydrofoil. Significant interactions between adjacent flow structures produced by the leading-edge protuberances have also been observed. These flow interactions are believed to be responsible for the dissimilar flow separation behaviour along physically similar peak- or trough-planes.

Keywords: Computational Fluid Dynamics, Flow separation control, Hydrofoils, Leading-edge protuberances.

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Authors: Luc Conti, Dimitry Dumont-Fillon, Harald van Lintel, Eric Chappel

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Flow control valves comprise a silicon flexible membrane that deflects against a substrate, usually made of glass, containing pillars, an outlet hole, and anti-stiction features. However, there is a strong interest in using silicon instead of glass as substrate material, as it would simplify the process flow by allowing the use of well controlled anisotropic etching. Moreover, specific devices demanding a bending of the substrate would also benefit from the inherent outstanding mechanical strength of monocrystalline silicon. Unfortunately, direct Si-Si bonding is not easily achieved with highly structured wafers since residual stress may prevent the good adhesion between wafers. Using a thermoplastic polymer, such as parylene, as intermediate layer is not well adapted to this design as the wafer-to-wafer alignment is critical. An alternative anodic bonding method using an intermediate borosilicate layer has been successfully tested. This layer has been deposited onto the silicon substrate. The bonding recipe has been adapted to account for the presence of the SOI buried oxide and intermediate glass layer in order not to exceed the breakdown voltage. Flow control valves dedicated to infusion of viscous fluids at very high pressure have been made and characterized. The results are compared to previous data obtained using the standard anodic bonding method.

Keywords: Anodic bonding, evaporated glass, microfluidic valve, drug delivery.

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