Search results for: fluid systems
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 5136

Search results for: fluid systems

2106 The Exploitation of Balancing an Inverted Pendulum System Using Sliding Mode Control

Authors: Sheren H. Salah, Ahmed Y. Ben Sasi

Abstract:

The inverted pendulum system is a classic control problem that is used in universities around the world. It is a suitable process to test prototype controllers due to its high non-linearities and lack of stability. The inverted pendulum represents a challenging control problem, which continually moves toward an uncontrolled state. This paper presents the possibility of balancing an inverted pendulum system using sliding mode control (SMC). The goal is to determine which control strategy delivers better performance with respect to pendulum’s angle and cart's position. Therefore, proportional-integral-derivative (PID) is used for comparison. Results have proven SMC control produced better response compared to PID control in both normal and noisy systems.

Keywords: Inverted pendulum (IP) proportional-integralderivative (PID), sliding mode control (SMC).

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2105 Current Issues on Enterprise Architecture Implementation Evaluation

Authors: Fatemeh Nikpay, Rodina Binti Ahmad, Babak Darvish Rouhani

Abstract:

Enterprise Architecture (EA) is employed by enterprises for providing integrated Information Systems (ISs) in order to support alignment of their business and Information Technology (IT). Evaluation of EA implementation can support enterprise to reach intended goals. There are some problems in current evaluation methods of EA implementation that lead to ineffectiveness implementation of EA. This paper represents current issues on evaluation of EA implementation. In this regard, we set the framework in order to represent evaluation’s issues based on their functionality and structure. The results of this research not only increase the knowledge of evaluation, but also could be useful for both academics and practitioners in order to realize the current situation of evaluations.

Keywords: Current issues on EA, implementation evaluation, Evaluation, Enterprise Architecture, Evaluation of Enterprise Architecture Implementation.

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2104 Extracting Multiword Expressions in Machine Translation from English to Urdu using Relational Data Approach

Authors: Kashif Bilal, Uzair Muhammad, Atif Khan, M. Nasir Khan

Abstract:

Machine Translation, (hereafter in this document referred to as the "MT") faces a lot of complex problems from its origination. Extracting multiword expressions is also one of the complex problems in MT. Finding multiword expressions during translating a sentence from English into Urdu, through existing solutions, takes a lot of time and occupies system resources. We have designed a simple relational data approach, in which we simply set a bit in dictionary (database) for multiword, to find and handle multiword expression. This approach handles multiword efficiently.

Keywords: Machine Translation, Multiword Expressions, Urdulanguage processing, POS (stands for Parts of Speech) Tagging forUrdu, Expert Systems.

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2103 Comparison of SVC and STATCOM in Static Voltage Stability Margin Enhancement

Authors: Mehrdad Ahmadi Kamarposhti, Mostafa Alinezhad

Abstract:

One of the major causes of voltage instability is the reactive power limit of the system. Improving the system's reactive power handling capacity via Flexible AC transmission System (FACTS) devices is a remedy for prevention of voltage instability and hence voltage collapse. In this paper, the effects of SVC and STATCOM in Static Voltage Stability Margin Enhancement will be studied. AC and DC representations of SVC and STATCOM are used in the continuation power flow process in static voltage stability study. The IEEE-14 bus system is simulated to test the increasing loadability. It is found that these controllers significantly increase the loadability margin of power systems.

Keywords: SVC, STATCOM, Voltage Collapse, Maximum Loading Point.

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2102 Simulation Based Performance Comparison of Different Control Methods of ZSI Feeding Industrial Drives

Authors: Parag Nihawan, Ravinder Singh Bhatia, Dinesh Kumar Jain

Abstract:

Industrial drives are source of serious power quality problems. In this, two typical industrial drives have been dealt with, namely, FOC induction motor drives and DTC induction motor drive. The Z-source inverter is an emerging topology of power electronic converters which is capable of buck boost characteristics. The performances of different control methods based Z-source inverters feeding these industrial drives have been investigated, in this work. The test systems have been modeled and simulated in MATLAB/SIMULINK. The results obtained after carrying out these simulations have been used to draw the conclusions.

Keywords: Z-Source Inverter, total harmonic distortion, direct torque control, field orientation control.

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2101 Biocompatible Ionic Liquids in Liquid – Liquid Extraction of Lactic Acid: A Comparative Study

Authors: Konstantza Tonova, Ivan Svinyarov, Milen G. Bogdanov

Abstract:

Ionic liquids consisting of a phosphonium cationic moiety and a saccharinate anion are synthesized and compared with their precursors, phosphonium chlorides, in reference to their extraction efficiency towards L-lactic acid. On the base of measurements of the acid and the water partitioning in the equilibrium biphasic systems, the molar ratios between acid, water and ionic liquid are estimated which allows to deduce the lactic acid extractive pathway. The effect of a salting-out addition that strengthens hydrophobicity in both phases is studied in view to reveal the best biphasic system with respect to IL low toxicity and high extraction efficiency.

Keywords: Biphasic system, Extraction, Ionic liquids, Lactic acid.

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2100 Toward an Architecture of a Component-Based System Supporting Separation of Non- Functional Concerns

Authors: Jerzy Nogiec, Kelley Trombly-Freytag, Shangping Ren

Abstract:

The promises of component-based technology can only be fully realized when the system contains in its design a necessary level of separation of concerns. The authors propose to focus on the concerns that emerge throughout the life cycle of the system and use them as an architectural foundation for the design of a component-based framework. The proposed model comprises a set of superimposed views of the system describing its functional and non-functional concerns. This approach is illustrated by the design of a specific framework for data analysis and data acquisition and supplemented with experiences from using the systems developed with this framework at the Fermi National Accelerator Laboratory.

Keywords: Distributed system, component-based technology, separation of concerns, software development, supervisory and control, QoS

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2099 Realization of Electronically Tunable Current- Mode Multiphase Sinusoidal Oscillators Using CFTAs

Authors: Prungsak Uttaphut

Abstract:

An implementation of current-mode multiphase sinusoidal oscillators is presented. Using CFTA-based lossy integrators, odd and odd/even phase systems can be realized with following advantages. The condition of oscillation and frequency of oscillation can be orthogonally tuned. The high output impedances facilitate easy driving an external load without additional current buffers. The proposed MSOs provide odd or even phase signals that are equally spaced in phase and equal amplitude. The circuit requires one CFTA, one resistor and one grounded capacitor per phase without additional current amplifier. The results of PSPICE simulations using CMOS CFTA are included to verify theory.

Keywords: multiphase sinusoidal oscillator, current-mode, CFTA, lossy integrator

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2098 Optimal Voltage and Frequency Control of a Microgrid Using the Harmony Search Algorithm

Authors: Hossein Abbasi

Abstract:

The stability is an important topic to plan and manage the energy in the microgrids as the same as the conventional power systems. The voltage and frequency stability is one of the most important issues recently studied in microgrids. The objectives of this paper are the modelling and designing of the components and optimal controllers for the voltage and frequency control of the AC/DC hybrid microgrid under the different disturbances. Since the PI controllers have the advantages of simple structure and easy implementation, so they are designed and modeled in this paper. The harmony search (HS) algorithm is used to optimize the controllers’ parameters. According to the achieved results, the PI controllers have a good performance in voltage and frequency control of the microgrid.

Keywords: Frequency control, HS algorithm, microgrid, PI controller, voltage control.

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2097 Optical Wireless Sensor Networks Based on VLC with PLC-Ethernet Interface

Authors: Heejin Lee, Yeonjoo Kim, Kyungrak Sohn

Abstract:

We present a white LED-based optical wireless communication systems for indoor ubiquitous sensor networks. Each sensor node could access to the server through the PLC (Power Line Communication)-Ethernet interface. The proposed system offers a full-duplex wireless link by using different wavelengths to reduce the inter-symbol interference between uplink and downlink. Through the 1-to-n optical wireless sensor network and PLC modem, the mobile terminals send a temperature data to server. The data transmission speed and distance are 115.2kbps and about 60cm, respectively.

Keywords: Visible light communications, LED lighting, powerline communications, ubiquitous sensor networks, full-duplex links

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2096 Mitigation of Flicker using STATCOM with Three-Level 12-pulse Voltage Source Inverter

Authors: Ali Z a'fari

Abstract:

Voltage flicker is a disturbance in electrical power systems. The reason for this disturbance is mainly the large nonlinear loads such as electric arc furnaces. Synchronous static compensator (STATCOM) is considered as a proper technique to mitigate the voltage flicker. Application of more suitable and precise power electronic converter leads to a more precise performance of the compensator. In this paper a three-level 12-pulse voltage source inverter (VSI) with a 12-terminal transformer connected to the ac system is studied and the obtained results are compared with the performance of a STATCOM using a simple two-level VSI and an optimal and more precise performance of the proposed scheme is achieved.

Keywords: Flicker mitigation, STATCOM, Inverter, 12-pulse, 3- level

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2095 Improvements in Navy Data Networks and Tactical Communication Systems

Authors: Laurent Enel, Franck Guillem

Abstract:

This paper considers the benefits gained by using an efficient quality of service management such as DiffServ technique to improve the performance of military communications. Low delay and no blockage must be achieved especially for real time tactical data. All traffic flows generated by different applications do not need same bandwidth, same latency, same error ratio and this scalable technique of packet management based on priority levels is analysed. End to end architectures supporting various traffic flows and including lowbandwidth and high-delay HF or SHF military links as well as unprotected Internet sub domains are studied. A tuning of Diffserv parameters is proposed in accordance with different loads of various traffic and different operational situations.

Keywords: Military data networks, Quality of service, Tacticalsystems.

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2094 A Preliminary Development of Virtual Sightseeing Website for Thai Temples on Rattanakosin Island

Authors: P. Jomsri

Abstract:

Currently, the sources of cultures and tourist attractions are presented in online documentary form only. In order to make them more virtual, the researcher then collected and presented them in the form of Virtual Temple. The prototype, which is a replica of the actual location, was developed to the website and allows people who are interested in Rattanakosin Island can see in form of Panorama Pan View. By this way, anyone can access the data and appreciate the beauty of Rattanakosin Island in the virtual model like the real place.

The result from the experiment showed that the levels of the knowledge on Thai temples in Rattanakosin Island increased; moreover, the users were highly satisfied with the systems. It can be concluded that virtual temples can support to publicize Thai arts, cultures and travels, as well as it can be utilized effectively.

Keywords: Virtual sightseeing, rattanakosin island, Thai temples.

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2093 An Expert System Designed to Be Used with MOEAs for Efficient Portfolio Selection

Authors: K. Metaxiotis, K. Liagkouras

Abstract:

This study presents an Expert System specially designed to be used with Multiobjective Evolutionary Algorithms (MOEAs) for the solution of the portfolio selection problem. The validation of the proposed hybrid System is done by using data sets from Hang Seng 31 in Hong Kong, DAX 100 in Germany and FTSE 100 in UK. The performance of the proposed system is assessed in comparison with the Non-dominated Sorting Genetic Algorithm II (NSGAII). The evaluation of the performance is based on different performance metrics that evaluate both the proximity of the solutions to the Pareto front and their dispersion on it. The results show that the proposed hybrid system is efficient for the solution of this kind of problems.

Keywords: Expert Systems, Multiobjective optimization, Evolutionary Algorithms, Portfolio Selection.

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2092 Distributed Frequency Synchronization for Global Synchronization in Wireless Mesh Networks

Authors: Jung-Hyun Kim, Jihyung Kim, Kwangjae Lim, Dong Seung Kwon

Abstract:

In this paper, our focus is to assure a global frequency synchronization in OFDMA-based wireless mesh networks with local information. To acquire the global synchronization in distributed manner, we propose a novel distributed frequency synchronization (DFS) method. DFS is a method that carrier frequencies of distributed nodes converge to a common value by repetitive estimation and averaging step and sharing step. Experimental results show that DFS achieves noteworthy better synchronization success probability than existing schemes in OFDMA-based mesh networks where the estimation error is presented.

Keywords: OFDMA systems, Frequency synchronization, Distributed networks, Multiple groups.

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2091 Application of Neural Network for Contingency Ranking Based on Combination of Severity Indices

Authors: S. Jadid, S. Jalilzadeh

Abstract:

In this paper, an improved technique for contingency ranking using artificial neural network (ANN) is presented. The proposed approach is based on multi-layer perceptrons trained by backpropagation to contingency analysis. Severity indices in dynamic stability assessment are presented. These indices are based on the concept of coherency and three dot products of the system variables. It is well known that some indices work better than others for a particular power system. This paper along with test results using several different systems, demonstrates that combination of indices with ANN provides better ranking than a single index. The presented results are obtained through the use of power system simulation (PSS/E) and MATLAB 6.5 software.

Keywords: composite indices, transient stability, neural network.

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2090 Disturbance Observer-Based Predictive Functional Critical Control of a Table Drive System

Authors: Toshiyuki Satoh, Hiroki Hara, Naoki Saito, Jun-ya Nagase, Norihiko Saga

Abstract:

This paper addresses a control system design for a table drive system based on the disturbance observer (DOB)-based predictive functional critical control (PFCC). To empower the previously developed DOB-based PFC to handle constraints on controlled outputs, we propose to take a critical control approach. To this end, we derive the transfer function representation of the PFC controller and yield a detailed design procedure. The effectiveness of the proposed method is confirmed through an experimental evaluation.

Keywords: Critical control, disturbance observer, mechatronics, motion control, predictive functional control, table drive systems.

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2089 IntelligentLogger: A Heavy-Duty Vehicles Fleet Management System Based on IoT and Smart Prediction Techniques

Authors: D. Goustouridis, A. Sideris, I. Sdrolias, G. Loizos, N.-Alexander Tatlas, S. M. Potirakis

Abstract:

Both daily and long-term management of a heavy-duty vehicles and construction machinery fleet is an extremely complicated and hard to solve issue. This is mainly due to the diversity of the fleet vehicles – machinery, which concerns not only the vehicle types, but also their age/efficiency, as well as the fleet volume, which is often of the order of hundreds or even thousands of vehicles/machineries. In the present paper we present “InteligentLogger”, a holistic heavy-duty fleet management system covering a wide range of diverse fleet vehicles. This is based on specifically designed hardware and software for the automated vehicle health status and operational cost monitoring, for smart maintenance. InteligentLogger is characterized by high adaptability that permits to be tailored to practically any heavy-duty vehicle/machinery (of different technologies -modern or legacy- and of dissimilar uses). Contrary to conventional logistic systems, which are characterized by raised operational costs and often errors, InteligentLogger provides a cost-effective and reliable integrated solution for the e-management and e-maintenance of the fleet members. The InteligentLogger system offers the following unique features that guarantee successful heavy-duty vehicles/machineries fleet management: (a) Recording and storage of operating data of motorized construction machinery, in a reliable way and in real time, using specifically designed Internet of Things (IoT) sensor nodes that communicate through the available network infrastructures, e.g., 3G/LTE; (b) Use on any machine, regardless of its age, in a universal way; (c) Flexibility and complete customization both in terms of data collection, integration with 3rd party systems, as well as in terms of processing and drawing conclusions; (d) Validation, error reporting & correction, as well as update of the system’s database; (e) Artificial intelligence (AI) software, for processing information in real time, identifying out-of-normal behavior and generating alerts; (f) A MicroStrategy based enterprise BI, for modeling information and producing reports, dashboards, and alerts focusing on vehicles– machinery optimal usage, as well as maintenance and scraping policies; (g) Modular structure that allows low implementation costs in the basic fully functional version, but offers scalability without requiring a complete system upgrade.

Keywords: E-maintenance, predictive maintenance, IoT sensor nodes, cost optimization, artificial intelligence, heavy-duty vehicles.

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2088 Optimal Operation of a Photovoltaic Induction Motor Drive Water Pumping System

Authors: Nelson K. Lujara

Abstract:

The performance characteristics of a photovoltaic induction motor drive water pumping system with and without maximum power tracker is analyzed and presented. The analysis is done through determination and assessment of critical loss components in the system using computer aided design (CAD) tools for optimal operation of the system. The results can be used to formulate a well-calibrated computer aided design package of photovoltaic water pumping systems based on the induction motor drive. The results allow the design engineer to pre-determine the flow rate and efficiency of the system to suit particular application.

Keywords: Photovoltaic, water pumping, losses, induction motor.

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2087 Determination the Curve Number Catchment by Using GIS and Remote Sensing

Authors: Abouzar Nasiri, Hamid Alipur

Abstract:

In recent years, geographic information systems (GIS) and remote sensing using has increased to estimate runoff catchment. In this research, runoff curve number maps for captive catchment of Tehran by helping GIS and also remote sensing which based on factors such as vegetation, lands using, group of soil hydrology and hydrological conditions were obtained. Runoff curve numbers map was obtained by combining these maps in ARC GIS and SCS table. To evaluate the accuracy of the results, the maximum flow rate of flood which was obtained from curve numbers, was compared with the measured maximum flood rate at the watershed outlet and correctness of curve numbers were approved.

Keywords: Curve number, GIS, Remote sensing, Runoff.

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2086 Embedded Singly Diagonally Implicit Runge-Kutta –Nystrom Method Order 5(4) for the Integration of Special Second Order ODEs

Authors: Fudziah Ismail

Abstract:

In this paper a new embedded Singly Diagonally Implicit Runge-Kutta Nystrom fourth order in fifth order method for solving special second order initial value problems is derived. A standard set of test problems are tested upon and comparisons on the numerical results are made when the same set of test problems are reduced to first order systems and solved using the existing embedded diagonally implicit Runge-Kutta method. The results suggests the superiority of the new method.

Keywords: Runge-Kutta Nystrom, Special second orderproblems.

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2085 Application of Advanced Oxidation Processes to Mefenamic Acid Elimination

Authors: Olga Gimeno, Javier Rivas, Angel Encinas, Fernando Beltran

Abstract:

The elimimation of mefenamic acid has been carried out by photolysis, ozonation, adsorption onto activated carbon (AC) and combinations of the previous single systems (O3+AC and O3+UV). The results obtained indicate that mefenamic acid is not photo-reactive, showing a relatively low quantum yield of the order of 6 x 10-4 mol Einstein-1. Application of ozone to mefenamic aqueous solutions instantaneously eliminates the pharmaceutical, achieving simultaneously a 40% of mineralization. Addition of AC to the ozonation process does not enhance the process, moreover, mineralization is completely inhibited if compared to results obtained by single ozonation. The combination of ozone and UV radiation led to the best results in terms of mineralization (60% after 120 min).

Keywords: Photolysis, mefenamic acid, ozone, activated carbon.

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2084 A New Robust Stability Criterion for Dynamical Neural Networks with Mixed Time Delays

Authors: Guang Zhou, Shouming Zhong

Abstract:

In this paper, we investigate the problem of the existence, uniqueness and global asymptotic stability of the equilibrium point for a class of neural networks, the neutral system has mixed time delays and parameter uncertainties. Under the assumption that the activation functions are globally Lipschitz continuous, we drive a new criterion for the robust stability of a class of neural networks with time delays by utilizing the Lyapunov stability theorems and the Homomorphic mapping theorem. Numerical examples are given to illustrate the effectiveness and the advantage of the proposed main results.

Keywords: Neural networks, Delayed systems, Lyapunov function, Stability analysis.

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2083 Comparing Emotion Recognition from Voice and Facial Data Using Time Invariant Features

Authors: Vesna Kirandziska, Nevena Ackovska, Ana Madevska Bogdanova

Abstract:

The problem of emotion recognition is a challenging problem. It is still an open problem from the aspect of both intelligent systems and psychology. In this paper, both voice features and facial features are used for building an emotion recognition system. A Support Vector Machine classifiers are built by using raw data from video recordings. In this paper, the results obtained for the emotion recognition are given, and a discussion about the validity and the expressiveness of different emotions is presented. A comparison between the classifiers build from facial data only, voice data only and from the combination of both data is made here. The need for a better combination of the information from facial expression and voice data is argued.

Keywords: Emotion recognition, facial recognition, signal processing, machine learning.

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2082 Matlab/Simulink Simulation of Solar Energy Storage System

Authors: Mustafa A. Al-Refai

Abstract:

This paper investigates the energy storage  technologies that can potentially enhance the use of solar energy.  Water electrolysis systems are seen as the principal means of  producing a large amount of hydrogen in the future. Starting from the  analysis of the models of the system components, a complete  simulation model was realized in the Matlab-Simulink environment.  Results of the numerical simulations are provided. The operation of  electrolysis and photovoltaic array combination is verified at various  insulation levels. It is pointed out that solar cell arrays and  electrolysers are producing the expected results with solar energy  inputs that are continuously varying.

Keywords: Electrolyzer, Simulink, solar energy, storage system.

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2081 A Security Analysis for Home Gateway Architectures

Authors: Pierre Parrend, Stephane Frenot

Abstract:

Providing Services at Home has become over the last few years a very dynamic and promising technological domain. It is likely to enable wide dissemination of secure and automated living environments. We propose a methodology for identifying threats to Services at Home Delivery systems, as well as a threat analysis of a multi-provider Home Gateway architecture. This methodology is based on a dichotomous positive/preventive study of the target system: it aims at identifying both what the system must do, and what it must not do. This approach completes existing methods with a synthetic view of potential security flaws, thus enabling suitable measures to be taken into account. Security implications of the evolution of a given system become easier to deal with. A prototype is built based on the conclusions of this analysis.

Keywords: Security requirements, Connected Home, OSGi, Sofware Components.

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2080 Artificial Neural Network based Web Application Firewall for SQL Injection

Authors: Asaad Moosa

Abstract:

In recent years with the rapid development of Internet and the Web, more and more web applications have been deployed in many fields and organizations such as finance, military, and government. Together with that, hackers have found more subtle ways to attack web applications. According to international statistics, SQL Injection is one of the most popular vulnerabilities of web applications. The consequences of this type of attacks are quite dangerous, such as sensitive information could be stolen or authentication systems might be by-passed. To mitigate the situation, several techniques have been adopted. In this research, a security solution is proposed using Artificial Neural Network to protect web applications against this type of attacks. The solution has been experimented on sample datasets and has given promising result. The solution has also been developed in a prototypic web application firewall called ANNbWAF.

Keywords: Artificial Neural Networks ANN, SQL Injection, Web Application Firewall WAF, Web Application Scanner WAS.

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2079 The Hybrid Knowledge Model for Product Development Management

Authors: Heejung Lee, Hyo-Won Suh

Abstract:

Hybrid knowledge model is suggested as an underlying framework for product development management. It can support such hybrid features as ontologies and rules. Effective collaboration in product development environment depends on sharing and reasoning product information as well as engineering knowledge. Many studies have considered product information and engineering knowledge. However, most previous research has focused either on building the ontology of product information or rule-based systems of engineering knowledge. This paper shows that F-logic based knowledge model can support such desirable features in a hybrid way.

Keywords: Ontology, rule, F-logic, product development.

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2078 Frequency Response of Complex Systems with Localized Nonlinearities

Authors: E. Menga, S. Hernandez

Abstract:

Finite Element Models (FEMs) are widely used in order to study and predict the dynamic properties of structures and usually, the prediction can be obtained with much more accuracy in the case of a single component than in the case of assemblies. Especially for structural dynamics studies, in the low and middle frequency range, most complex FEMs can be seen as assemblies made by linear components joined together at interfaces. From a modelling and computational point of view, these types of joints can be seen as localized sources of stiffness and damping and can be modelled as lumped spring/damper elements, most of time, characterized by nonlinear constitutive laws. On the other side, most of FE programs are able to run nonlinear analysis in time-domain. They treat the whole structure as nonlinear, even if there is one nonlinear degree of freedom (DOF) out of thousands of linear ones, making the analysis unnecessarily expensive from a computational point of view. In this work, a methodology in order to obtain the nonlinear frequency response of structures, whose nonlinearities can be considered as localized sources, is presented. The work extends the well-known Structural Dynamic Modification Method (SDMM) to a nonlinear set of modifications, and allows getting the Nonlinear Frequency Response Functions (NLFRFs), through an ‘updating’ process of the Linear Frequency Response Functions (LFRFs). A brief summary of the analytical concepts is given, starting from the linear formulation and understanding what the implications of the nonlinear one, are. The response of the system is formulated in both: time and frequency domain. First the Modal Database is extracted and the linear response is calculated. Secondly the nonlinear response is obtained thru the NL SDMM, by updating the underlying linear behavior of the system. The methodology, implemented in MATLAB, has been successfully applied to estimate the nonlinear frequency response of two systems. The first one is a two DOFs spring-mass-damper system, and the second example takes into account a full aircraft FE Model. In spite of the different levels of complexity, both examples show the reliability and effectiveness of the method. The results highlight a feasible and robust procedure, which allows a quick estimation of the effect of localized nonlinearities on the dynamic behavior. The method is particularly powerful when most of the FE Model can be considered as acting linearly and the nonlinear behavior is restricted to few degrees of freedom. The procedure is very attractive from a computational point of view because the FEM needs to be run just once, which allows faster nonlinear sensitivity analysis and easier implementation of optimization procedures for the calibration of nonlinear models.

Keywords: Frequency response, nonlinear dynamics, structural dynamic modification, softening effect, rubber.

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2077 Study of Fast Etching of Silicon for the Fabrication of Bulk Micromachined MEMS Structures

Authors: V. Swarnalatha, A. V. Narasimha Rao, P. Pal

Abstract:

The present research reports the investigation of fast etching of silicon for the fabrication of microelectromechanical systems (MEMS) structures using silicon wet bulk micromachining. Low concentration tetramethyl-ammonium hydroxide (TMAH) and hydroxylamine (NH2OH) are used as main etchant and additive, respectively. The concentration of NH2OH is varied to optimize the composition to achieve best etching characteristics such as high etch rate, significantly high undercutting at convex corner for the fast release of the microstructures from the substrate, and improved etched surface morphology. These etching characteristics are studied on Si{100} and Si{110} wafers as they are most widely used in the fabrication of MEMS structures as wells diode, transistors and integrated circuits.

Keywords: KOH, MEMS, micromachining, silicon, TMAH, wet anisotropic etching.

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