Search results for: displacement sensor

Authors: Z. Ezzouine, A. Nakheli

Abstract:

This paper presents a high position electromagnetic sensor system (HPESS) that is applicable for moving object detection. The authors have developed a high-performance position sensor prototype dedicated to students’ laboratory. The challenge was to obtain a highly accurate and real-time sensor that is able to calculate position, length or displacement. An electromagnetic solution based on a two coil induction principal was adopted. The HPESS converts mechanical motion to electric energy with direct contact. The output signal can then be fed to an electronic circuit. The voltage output change from the sensor is captured by data acquisition system using LabVIEW software. The displacement of the moving object is determined. The measured data are transmitted to a PC in real-time via a DAQ (NI USB -6281). This paper also describes the data acquisition analysis and the conditioning card developed specially for sensor signal monitoring. The data is then recorded and viewed using a user interface written using National Instrument LabVIEW software. On-line displays of time and voltage of the sensor signal provide a user-friendly data acquisition interface. The sensor provides an uncomplicated, accurate, reliable, inexpensive transducer for highly sophisticated control systems.

Keywords: electromagnetic sensor, accurately, data acquisition, position measurement

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Authors: Young-San Shin, Seongsoo Lee

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Hall sensor is widely used to measure rotation angle. When the Hall voltage is measured for linear displacement, it is converted to angular displacement using arctangent function, which requires a large lookup table. In this paper, a lookup table reduction technique is presented for angle measurement. When the input of the lookup table is small within a certain threshold, the change of the outputs with respect to the change of the inputs is relatively small. Thus, several inputs can share same output, which significantly reduce the lookup table size. Its error analysis was also performed, and the threshold was determined so as to maintain the error less than 1°. When the Hall voltage has 11-bit resolution, the lookup table size is reduced from 1,024 samples to 279 samples.

Keywords: hall sensor, angle measurement, lookup table, arctangent

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Authors: Yadollah Hezarjaribi, Mahdie Yari Esboi

Abstract:

In this paper, a novel MEMS capacitive pressure sensor with small size and high sensitivity is presented. This sensor has the separated clamped square diaphragm and the movable plate. The diaphragm material is polysilicon. The movable and fixed plates and mechanical coupling are gold. The substrate and diaphragm are pyrex glass and polysilicon, respectively. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes with pressure for this reason with this design is improved the capacitance and sensitivity with small size. This sensor is designed for low pressure between 0-60 mmHg that is used for medical application such as treatment of an incurable disease called glaucoma. The size of this sensor is 350×350 µm2 and the thickness of the diaphragm is 2µm with 1μ air gap. This structure is designed by intellisuite software. In this MEMS capacitive pressure sensor the sensor sensitivity, diaphragm mechanical sensitivity for polysilicon diaphragm are 0.0469Pf/mmHg, 0.011 μm/mmHg, respectively. According to the simulating results for low pressure, the structure with polysilicon diaphragm has more change of the displacement and capacitance, this leads to high sensitivity than other diaphragms.

Keywords: glaucoma, MEMS capacitive pressure sensor, square clamped diaphragm, polysilicon

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Authors: Juree Hong, Sanggeun Lee, Jungmok Seo, Taeyoon Lee

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We report a facile synthesis of metal nano particles (NPs) on graphene layer via galvanic displacement reaction between graphene-buffered copper (Cu) and metal ion-containing salts. Diverse metal NPs can be formed on graphene surface and their morphologies can be tailored by controlling the concentration of metal ion-containing salt and immersion time. The obtained metal NP-decorated single-layer graphene (SLG) has been used as hydrogen gas (H2) sensing material and exhibited highly sensitive response upon exposure to 2% of H2.

Keywords: metal nanoparticle, galvanic displacement reaction, graphene, hydrogen sensor

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Authors: Jung-Ho Moon, Myung-Gon Yoon, Tae Kwon Ha

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This paper presents a wireless sensor network protocol for a car parking monitoring system. A wireless sensor network for the purpose is composed of multiple sensor nodes, a sink node, a gateway, and a server. Each of the sensor nodes is equipped with a 3-axis AMR sensor and deployed in the center of a parking space. The sensor node reads its sensor values periodically and transmits the data to the sink node if the current and immediate past sensor values show a difference exceeding a threshold value. The operations of the sink and sensor nodes are described in detail along with flow diagrams. The protocol allows a low-duty cycle operation of the sensor nodes and a flexible adjustment of the threshold value used by the sensor nodes.

Keywords: car parking monitoring, sensor node, wireless sensor network, network protocol

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Authors: Jun Gil Ahn, Jong Tae Kim

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In this paper, we study the sensor fusion structure on the multipoint control unit (MCU). Sensor fusion using Kalman filter for 9-axis sensors is considered. The 9-axis inertial sensor is the combination of 3-axis accelerometer, 3-axis gyroscope and 3-axis magnetometer. We implement the sensor fusion structure among the sensor hubs in MCU and measure the execution time, power consumptions, and total energy. Experiments with real data from 9-axis sensor in 20Mhz show that the average power consumptions are 44mW and 48mW on Cortx-M0 and Cortex-M3 MCU, respectively. Execution times are 613.03 us and 305.6 us respectively.

Keywords: 9-axis sensor, Kalman filter, MCU, sensor fusion

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Authors: Jin Y. Park, Jeong Wan Lee

Abstract:

An experimental and analytical research on shear buckling of a comparably large polymer composite I-section is presented. It is known that shear buckling load of a large span composite beam is difficult to determine experimentally. In order to sensitively detect shear buckling of the tested I-section, twenty strain rosettes and eight displacement sensors were applied and attached on the web and flange surfaces. The tested specimen was a pultruded composite beam made of vinylester resin, E-glass, carbon fibers and micro-fillers. Various coupon tests were performed before the shear buckling test to obtain fundamental material properties of the I-section. An asymmetric four-point bending loading scheme was utilized for the shear test. The loading scheme resulted a high shear and almost zeros moment condition at the center of the web panel. The shear buckling load was successfully determined after analyzing the obtained test data from strain rosettes and displacement sensors. An analytical approach was also performed to verify the experimental results and to support the discussed experimental program.

Keywords: strain sensor, displacement sensor, shear buckling, polymer composite I-section, asymmetric loading

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Authors: Ali Raza, Rūta Rimašauskienė

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In the current work, the fused deposition modelling (FDM) technique is used to manufacture PLA reinforced with carbon fibre composite structures with two unique layer patterns, 0°\0° and 0°\90°. The purpose of the study is to investigate the dynamic characteristics of each fabricated composite structure. The Macro Fiber Composite (MFC) is embedded with 0°/0° and 0°/90° structures to investigate the effect of an MFC (M8507-P2 type) patch on vibration amplitude suppression under dynamic loading circumstances. First, modal analysis testing was performed using a Polytec 3D laser vibrometer to identify bending mode shapes, natural frequencies, and vibration amplitudes at the corresponding natural frequencies. To determine the stiffness of each structure, several loads were applied at the free end of the structure, and the deformation was recorded using a laser displacement sensor. The findings confirm that a structure with 0°\0° layers pattern was found to have more stiffness compared to a 0°\90° structure. The maximum amplitude suppression in each structure was measured using a laser displacement sensor at the first resonant frequency when the control voltage signal with optimal phase was applied to the MFC. The results confirm that the 0°/0° pattern's structure exhibits a higher displacement reduction than the 0°/90° pattern. Moreover, stiffer structures have been found to perform amplitude suppression more effectively.

Keywords: carbon fibre composite, MFC, modal analysis stiffness, stiffness

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Authors: Nurul Amziah Md Yunus, Izhal Abdul Halin, Nasri Sulaiman, Noor Faezah Ismail, Ong Kai Sheng

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The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

Keywords: pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS

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Authors: Yossiri Ariyakul, Piyakiat Insom, Poonyawat Sangiamkulthavorn, Takamichi Nakamoto

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In this paper, the method of optimization algorithm for sensor network comprised of movable sensor nodes which can be used for odor source localization was proposed. A sensor node is composed of an odor sensor, an anemometer, and a wireless communication module. The odor intensity measured from the sensor nodes are sent to the processor to perform the localization based on optimization algorithm by which the odor source localization map is obtained as a result. The map can represent the exact position of the odor source or show the direction toward it remotely. The proposed method was experimentally validated by creating the odor source localization map using three, four, and five sensor nodes in which the accuracy to predict the position of the odor source can be observed.

Keywords: odor sensor, odor source localization, optimization, sensor network

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Authors: Ünal Kızıl, Levent Genç, Sefa Aksu, Ahmet Tapınç

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The Figaro AM-1 sensor module which employs TGS 2600 model gas sensor in air quality assessment was used. The system was coupled with a microprocessor that enables sensor module to create warning message via telephone. This low cot sensor system’s performance was compared with a Diagnose II commercial electronic nose system. Both air quality sensor and electronic nose system employ metal oxide chemical gas sensors. In the study experimental setup, data acquisition methods for electronic nose system, and performance of the low cost air quality system were evaluated and explained.

Keywords: air quality, electronic nose, environmental quality, gas sensor

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Authors: Sungsik Jo, Hyeonwoo Kim, Iksu Choi, Hunmo Kim

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In the SHP, LVDT sensor is for detecting the length changes of the EHA output, and the thrust of the EHA is controlled by the pressure sensor. Sensor is possible to cause hardware fault by internal problem or external disturbance. The EHA of SHP is able to be uncontrollable due to control by feedback from uncertain information, on this paper; the sliding mode observer algorithm estimates the original sensor output information in permanent sensor fault. The proposed algorithm shows performance to recovery fault of disconnection and short circuit basically, also the algorithm detect various of sensor fault mode.

Keywords: smart hybrid powerpack (SHP), electro hydraulic actuator (EHA), permanent sensor fault tolerance, sliding mode observer (SMO), graphic user interface (GUI)

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Authors: Alfi Al Fahreizy

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By using LPG (Liquid Protelium Gas), it is very difficult to detect gas leak. Consequently, there is so many incident of gas leak that makes explosion which is occurred in many regions of Indonesia. In this paper, the researcher tries to overcome with it by adding gas sensor for LPG in a smartphone. The aim is to choose the best sensor and how to use it . The methode is to choose sensor by selecting from sensor data sheet qualitatively by giving grade from 1 to 5. Flow chart is shown to make best steps notification that possible to implemented in smartphone.

Keywords: energy conversion, gas leak, smartphone, explosion, LPG

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Authors: Gagandeep Singh

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The sensor field optimization is a serious issue in WSNs and has been ignored by many researchers. As in numerous real-time sensing fields the sensor nodes on the corners i.e. on the segment boundaries will become lifeless early because no extraordinary safety is presented for them. Accordingly, in this research work the central objective is on the segment based optimization by separating the sensor field between advance and normal segments. The inspiration at the back this sensor field optimization is to extend the time spam when the first sensor node dies. For the reason that in normal sensor nodes which were exist on the borders may become lifeless early because the space among them and the base station is more so they consume more power so at last will become lifeless soon.

Keywords: WSNs, ECRSEP, SEP, field optimization, energy

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Authors: H. Gorine, M. Ramadan Elmezughi

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In this paper, we investigate security issues and challenges facing researchers in wireless sensor networks and countermeasures to resolve them. The broadcast nature of wireless communication makes Wireless Sensor Networks prone to various attacks. Due to resources limitation constraint in terms of limited energy, computation power and memory, security in wireless sensor networks creates different challenges than wired network security. We will discuss several attempts at addressing the issues of security in wireless sensor networks in an attempt to encourage more research into this area.

Keywords: wireless sensor networks, network security, light weight encryption, threats

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Authors: Michele Sinico

Abstract:

The psychological present has an actual extension. When a sequence of instantaneous stimuli falls in this short interval of time, observers perceive a compresence of events in succession and the temporal order depends on the qualitative relationships between the perceptual properties of the events. Two experiments were carried out to study the influence of perceptual grouping, with and without temporal displacement, on the duration of auditory sequences. The psychophysical method of adjustment was adopted. The first experiment investigated the effect of temporal displacement of a white noise on sequence duration. The second experiment investigated the effect of temporal displacement, along the pitch dimension, on temporal shortening of sequence. The results suggest that the temporal order of sounds, in the case of temporal displacement, is organized along the pitch dimension.

Keywords: time perception, perceptual present, temporal displacement, Gestalt laws of perceptual organization

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Authors: Yang Xiong, Hua Cheng

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In this paper, for the basic problem of wireless sensor network topology control and deployment, the Roesser model in rectangular grid sensor networks is presented. In addition, a general constructive realization procedure will be proposed. The procedure enables a distributed implementation of linear systems on a sensor network. A non-trivial example is illustrated.

Keywords: grid sensor networks, Roesser model, state-space realization, multidimensional systems

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Authors: Dae Il Kim, Jungho Moon, Tae Yun Chung

Abstract:

This paper presents a car parking monitoring system using a wireless sensor network. The presented sensor network has a line-shaped topology and adopts a TDMA-based protocol for allowing multi-hop communications. Sensor nodes are deployed in the ground of an outdoor parking lot in such a way that a sensor node monitors a parking space. Each sensor node detects the availability of the associated parking space and transmits the detection result to a sink node via intermediate sensor nodes existing between the source sensor node and the sink node. We evaluate the feasibility of the presented sensor network and the TDMA-based communication protocol through experiments using 11 sensor nodes deployed in a real parking lot. The result shows that the presented car parking monitoring system is robust to changes in the communication environments and efficient for monitoring parking spaces of outdoor parking lots.

Keywords: multi-hop communication, parking monitoring system, TDMA, wireless sensor network

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Authors: Soner Cubuk, Ozge Yilmaz, Ece Kok Yetimoglu, M. Vezir Kahraman

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In this work, a polymer based highly selective fluorescence sensor membrane was prepared by the photopolymerization technique for the determination Cd(II) ion. Sensor characteristics such as effects of pH, response time and foreign ions on the fluorescence intensity of the sensor were also studied. Under optimized conditions, the polymeric sensor shows a rapid, stable and linear response for 4.45x10-⁹ mol L-¹ - 4.45x10-⁸ mol L-¹ Cd(II) ion with the detection limit of 6.23x10-¹⁰ mol L-¹. In addition, sensor membrane was selective which is not affected by common foreign metal ions. The concentrations of the foreign ions such as Pb²+, Co²+, Ag+, Zn²+, Cu²+, Cr³+ are 1000-fold higher than Cd(II) ions. Moreover, the developed polymeric sensor was successfully applied to the determination of cadmium ions in food and water samples. This work was supported by Marmara University, Commission of Scientific Research Project.

Keywords: cadmium(II), fluorescence, photopolymerization, polymeric sensor

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Authors: Rohana Musa, Yuzman Yusoff, Chia Chieu Yin, Hanif Che Lah

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This paper presents the design and characterization of a low power Complementary Metal Oxide Semiconductor (CMOS) process sensor. The design is targeted for implementation using Silterra’s 180 nm CMOS process technology. The proposed process sensor employs a voltage threshold (V_th) extractor architecture for detection of variations in the fabrication process. The process sensor generates output voltages in the range of 401 mV (fast-fast corner) to 443 mV (slow-slow corner) at nominal condition. The power dissipation for this process sensor is 6.3 µW with a supply voltage of 1.8V with a silicon area of 190 µm X 60 µm. The preliminary result of this process sensor that was fabricated indicates a close resemblance between test and simulated results.

Keywords: CMOS process sensor, PVT sensor, threshold extractor circuit, Vth extractor circuit

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Authors: Nhat Linh Ho, Thanh-Phong Dao, Shyh-Chour Huang, Hieu Giang Le

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This paper presents a design and optimization for a compliant gripper. The gripper is constructed based on the concept of compliant mechanism with flexure hinge. A passive force regulation mechanism is presented to control the grasping force a micro-sized object instead of using a sensor force. The force regulation mechanism is designed using the planar springs. The gripper is expected to obtain a large range of displacement to handle various sized objects. First of all, the statics and dynamics of the gripper are investigated by using the finite element analysis in ANSYS software. And then, the design parameters of the gripper are optimized via Taguchi method. An orthogonal array L₉ is used to establish an experimental matrix. Subsequently, the signal to noise ratio is analyzed to find the optimal solution. Finally, the response surface methodology is employed to model the relationship between the design parameters and the output displacement of the gripper. The design of experiment method is then used to analyze the sensitivity so as to determine the effect of each parameter on the displacement. The results showed that the compliant gripper can move with a large displacement of 213.51 mm and the force regulation mechanism is expected to be used for high precision positioning systems.

Keywords: flexure hinge, compliant mechanism, compliant gripper, force regulation mechanism, Taguchi method, response surface methodology, design of experiment

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Authors: Sathapath Kilaso

Abstract:

Nowadays, Today, wireless sensor networks are an important technology that works with Internet of Things. It is receiving various data from many sensor. Then sent to processing or storing. By wireless network or through the Internet. The devices around us are intelligent, can receiving/transmitting and processing data and communicating through the system. There are many applications of wireless sensor networks, such as smart city, smart farm, environmental management, weather. This article will explore the use of wireless sensor networks in Thailand and collect data from Thai Thesis database in 2012-2017. How to Implementing Wireless Sensor Network Technology. Advantage from this study To know the usage wireless technology in many fields. This will be beneficial for future research. In this study was found the most widely used wireless sensor network in agriculture field. Especially for smart farms. And the second is the adoption of the environment. Such as weather stations and water inspection.

Keywords: wireless sensor network, smart city, survey, Adhoc Network

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Authors: Maleh Yassine, Ezzati Abdellah

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Wireless Sensor Networks (WSNs) are currently used in different industrial and consumer applications, such as earth monitoring, health related applications, natural disaster prevention, and many other areas. Security is one of the major aspects of wireless sensor networks due to the resource limitations of sensor nodes. However, these networks are facing several threats that affect their functioning and their life. In this paper we present security attacks in wireless sensor networks, and we focus on a review and analysis of the recent Intrusion Detection schemes in WSNs.

Keywords: wireless sensor networks, security attack, denial of service, IDS, cluster-based model, signature based IDS, hybrid IDS

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Authors: M. Zyczkowski, P. Markowski, M. Karol

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The team from IOE MUT is developing fiber optic sensors for the security systems for 15 years. The conclusions of the work indicate that these sensors are complicated. Moreover, these sensors are expensive to produce and require sophisticated signal processing methods.We present the results of the investigations of three different applications of the modalmetric sensor: • Protection of museum collections and heritage buildings, • Protection of fiber optic transmission lines, • Protection of objects of critical infrastructure. Each of the presented applications involves different requirements for the system. The results indicate that it is possible to developed a fiber optic sensor based on a single fiber. Modification of optoelectronic parts with a change of the length of the sensor and the method of reflections of propagating light at the end of the sensor allows to adjust the system to the specific application.

Keywords: modalmetric fiber optic sensor, security sensor, optoelectronic parts, signal processing

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Authors: S. M. Hamidi, M. Afsharnia

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Gas sensors based on magneto-plasmonic (MP) structures have attracted much attention due to the high signal to noise ratio in these type of sensors. In these sensors, both the plasmonic and the MO properties of the resulting MP structure become interrelated because the surface Plasmon resonance (SPR) of the metallic medium. This interconnection can be modified the sensor responses and enhanced the signal to noise ratio. So far the sensor features of multilayered structures made of noble and ferromagnetic metals as Au/Co/Au MP multilayer with TiO2 sensor layer have been extensively studied, but their SPR assisted sensor response need to the krestchmann configuration. Here, we present a systematic study on the new MP structure based on one-dimensional nano-grating Au/ Co/ Au/ TiO2 multilayer to utilize as an inexpensive and easy to use gas sensor.

Keywords: Magneto-plasmonic structures, Gas sensor, nano-garting

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Authors: Mojtaba Ahmadabadi, Akbar Masoudi, Morteza Rezai

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In this paper, using the finite element method, the effect of soil and wall characteristics was investigated. Thirty and two different models were studied by different parameters. These studies could calculate displacement at any height of the wall for frictional-cohesive soils. The main purpose of this research is to determine the most effective soil characteristics in reducing the wall displacement. Comparing different models showed that the overall increase in internal friction angle, angle of friction between soil and wall and modulus of elasticity reduce the replacement of the wall. In addition, increase in special weight of soil will increase the wall displacement. Based on results, it can be said that all wall displacements were overturning and in the backfill, soil was bulging. Results show that the highest impact is seen in reducing wall displacement, internal friction angle, and the angle friction between soil and wall. One of the advantages of this study is taking into account all the parameters of the soil and walls replacement distribution in wall and backfill soil. In this paper, using the finite element method and considering all parameters of the soil, we investigated the impact of soil parameter in wall displacement. The aim of this study is to provide the best conditions in reducing the wall displacement and displacement wall and soil distribution.

Keywords: retaining wall, fem, soil and wall interaction, angle of internal friction of the soil, wall displacement

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Authors: Jai Prakash Prasad, Suresh Chandra Mohan

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Modern wireless sensor networks (WSN) consist of small size, low cost devices which are networked through tight wireless communications. WSN fundamentally offers cooperation, coordination among sensor networks. Potential applications of wireless sensor networks are in healthcare, natural disaster prediction, data security, environmental monitoring, home appliances, entertainment etc. The design, development and deployment of WSN based on application requirements. The WSN design performance is optimized to improve network lifetime. The sensor node resources constrain such as energy and bandwidth imposes the limitation on efficient resource utilization and sensor node management. The proposed N-Tier GRID routing protocol focuses on the design of energy efficient large scale wireless sensor network for improved performance than the existing protocol.

Keywords: energy efficient, network lifetime, sensor networks, wireless communication

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Authors: Chao Xu

Abstract:

Selecting ground motion intensity measures reasonably is one of the very important issues to affect the input ground motions selecting and the reliability of vulnerability analysis results. In this paper, inelastic spectral displacement is used as an alternative intensity measure to characterize the ground motion damage potential. The inelastic spectral displacement is calculated based modal pushover analysis and inelastic spectral displacement based incremental dynamic analysis is developed. Probability seismic demand analysis of a six story and an eleven story RC frame are carried out through cloud analysis and advanced incremental dynamic analysis. The sufficiency and efficiency of inelastic spectral displacement are investigated by means of regression and residual analysis, and compared with elastic spectral displacement. Vulnerability curves are developed based on inelastic spectral displacement. The study shows that inelastic spectral displacement reflects the impact of different frequency components with periods larger than fundamental period on inelastic structural response. The damage potential of ground motion on structures with fundamental period prolonging caused by structural soften can be caught by inelastic spectral displacement. To be compared with elastic spectral displacement, inelastic spectral displacement is a more sufficient and efficient intensity measure, which reduces the uncertainty of vulnerability analysis and the impact of input ground motion selection on vulnerability analysis result.

Keywords: vulnerability, probability seismic demand analysis, ground motion intensity measure, sufficiency, efficiency, inelastic time history analysis

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Authors: Ch. Sandeep Kumar Subudhi, S. Sivanandam

Abstract:

Our system is to monitor the human body temperature, blood pressure (BP), Pulse Rate and ECG and tracking the patient location. In our system the body temperature is detected by using LM35 temperature sensor, blood pressure is detected by the BP sensor, pulse rate is detected by the ear plug pulse sensor and the ECG is detected by the three lead ECG sensor in the working environment of the patient. The sensed information is sent to the PIC16F877 microcontroller through signal conditioning circuit. A desired amount of sensor value is set and if it is exceeded preliminary steps should be taken by indication by buzzer. The sensor information will be transmitted from the patient unit to the main controller unit with the help of Zigbee communication medium which is connected with the microcontrollers in the both units. The main controller unit will send those sensor data as well as the location of that patient by the help of GPS module to the observer/doctor. The observer/doctor can receive the SMS sent by GSM module and further decision can be taken. The message is sent to a cell phone using global system mobile (GSM) Modem. MAX232 acts as a driver between microcontroller and modem.

Keywords: LM35, heart beat sensor, ECG Sensor, BP Sensor, Zigbee module, GSM module, GPS module, PIC16F877A microcontroller

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Authors: Kirankumar B. Balavalad, Bhagyashree Mudhol, B. G. Sheeparamatti

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MEMS sensor have gained popularity in automotive, biomedical, and industrial applications. In this paper, the design and simulation of conventional, slotted, and perforated MEMS capacitive pressure sensor is proposed. Polysilicon material is used as diaphragm material that deflects due to applied pressure. Better sensitivity is the main advantage of conventional pressure sensor as compared with other two sensors and perforated pressure sensor achieves large operating pressure range. The proposed MEMS sensor demonstrated with diaphragm length 50um, gap depth 3um is being modelled. The simulation is carried out for different types of MEMS capacitive pressure sensor using COMSOL Multiphysics and Coventor ware.

Keywords: MEMS, conventional pressure sensor, slotted and perforated diaphragm, COMSOL multiphysics, coventor ware

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