Search results for: semiconductor gas sensor
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 1303

Search results for: semiconductor gas sensor

1303 Development of a Combustible Gas Detector with Two Sensor Modules to Enable Measuring Range of Low Concentration

Authors: Young Gyu Kim, Sangguk Ahn, Gyoutae Park, Hiesik Kim

Abstract:

In the gas industrial fields, there are many problems to detect extremely small amounts of combustible gas (CH₄) if a conventional semiconductor is used. Those reasons are that measuring is difficult at the low concentration level, the stabilization time is long, and an initial response time is slow. In this study, we propose a method to solve these issues using two specific sensors to overcome the circumstances of temperature and humidity. This idea is to combine a catalytic and a semiconductor type sensor and to utilize every advantage from every sensor’s characteristic. In order to achieve the goal, we reduced fluctuations of a gas sensor for temperature and humidity by applying designed circuits for sensing temperature and humidity. And we induced the best calibration line of gas sensors through adjusting a weight value corresponding to changeable patterns of temperature and humidity after their data are previously acquired and stored. We proposed and developed the gas leak detector using two sensor modules, which is first operated by a semiconductor sensor for measuring small gas quantities and second a catalytic type sensor is detected if measuring range of the first sensor is beyond. We conclusively verified characteristics of sharp sensitivity and fast response time against even at lower gas concentration level through experiments other than a conventional gas sensor. We think that our proposed idea is very useful if another gas leak is developed to enable measuring extremely small quantities of toxic and flammable gases.

Keywords: gas sensor, leak detector, lower concentration, and calibration

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1302 Design and Characterization of a CMOS Process Sensor Utilizing Vth Extractor Circuit

Authors: Rohana Musa, Yuzman Yusoff, Chia Chieu Yin, Hanif Che Lah

Abstract:

This paper presents the design and characterization of a low power Complementary Metal Oxide Semiconductor (CMOS) process sensor. The design is targeted for implementation using Silterra’s 180 nm CMOS process technology. The proposed process sensor employs a voltage threshold (Vth) extractor architecture for detection of variations in the fabrication process. The process sensor generates output voltages in the range of 401 mV (fast-fast corner) to 443 mV (slow-slow corner) at nominal condition. The power dissipation for this process sensor is 6.3 µW with a supply voltage of 1.8V with a silicon area of 190 µm X 60 µm. The preliminary result of this process sensor that was fabricated indicates a close resemblance between test and simulated results.

Keywords: CMOS process sensor, PVT sensor, threshold extractor circuit, Vth extractor circuit

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1301 Highly Sensitive, Low-Cost Oxygen Gas Sensor Based on ZnO Nanoparticles

Authors: Xin Chang, Daping Chu

Abstract:

Oxygen gas sensing technology has progressed since the last century and it has been extensively used in a wide range of applications such as controlling the combustion process by sensing the oxygen level in the exhaust gas of automobiles to ensure the catalytic converter is in a good working condition. Similar sensors are also used in industrial boilers to make the combustion process economic and environmentally friendly. Different gas sensing mechanisms have been developed: ceramic-based potentiometric equilibrium sensors and semiconductor-based sensors by oxygen absorption. In this work, we present a highly sensitive and low-cost oxygen gas sensor based on Zinc Oxide nanoparticles (average particle size of 35nm) dispersion in ethanol. The sensor is able to measure the pressure range from 103 mBar to 10-5 mBar with a sensitivity of more than 102 mA/Bar. The sensor is also erasable with heat.

Keywords: nanoparticles, oxygen, sensor, ZnO

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1300 Integrated Flavor Sensor Using Microbead Array

Authors: Ziba Omidi, Min-Ki Kim

Abstract:

This research presents the design, fabrication and application of a flavor sensor for an integrated electronic tongue and electronic nose that can allow rapid characterization of multi-component mixtures in a solution. The odor gas and liquid are separated using hydrophobic porous membrane in micro fluidic channel. The sensor uses an array composed of microbeads in micromachined cavities localized on silicon wafer. Sensing occurs via colorimetric and fluorescence changes to receptors and indicator molecules that are attached to termination sites on the polymeric microbeads. As a result, the sensor array system enables simultaneous and near-real-time analyses using small samples and reagent volumes with the capacity to incorporate significant redundancies. One of the key parts of the system is a passive pump driven only by capillary force. The hydrophilic surface of the fluidic structure draws the sample into the sensor array without any moving mechanical parts. Since there is no moving mechanical component in the structure, the size of the fluidic structure can be compact and the fabrication becomes simple when compared to the device including active microfluidic components. These factors should make the proposed system inexpensive to mass-produce, portable and compatible with biomedical applications.

Keywords: optical sensor, semiconductor manufacturing, smell sensor, taste sensor

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1299 A Wireless Sensor Network Protocol for a Car Parking Space Monitoring System

Authors: Jung-Ho Moon, Myung-Gon Yoon, Tae Kwon Ha

Abstract:

This paper presents a wireless sensor network protocol for a car parking monitoring system. A wireless sensor network for the purpose is composed of multiple sensor nodes, a sink node, a gateway, and a server. Each of the sensor nodes is equipped with a 3-axis AMR sensor and deployed in the center of a parking space. The sensor node reads its sensor values periodically and transmits the data to the sink node if the current and immediate past sensor values show a difference exceeding a threshold value. The operations of the sink and sensor nodes are described in detail along with flow diagrams. The protocol allows a low-duty cycle operation of the sensor nodes and a flexible adjustment of the threshold value used by the sensor nodes.

Keywords: car parking monitoring, sensor node, wireless sensor network, network protocol

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1298 Response Evaluation of Electronic Nose with Polymer-Composite and Metal Oxide Semiconductor Sensor towards Microbiological Quality of Rapeseed

Authors: Marcin Tadla, Robert Rusinek, Jolanta Wawrzyniak, Marzena Gawrysiak-Witulska, Agnieszka Nawrocka, Marek Gancarz

Abstract:

Rapeseeds were evaluated and classified by the static-headspace sampling method using electronic noses during the 25 days spoilage period. The Cyranose 320 comprising 32 polymer-composite sensors and VCA (Volatile Compound Analyzer - made in Institute of Agrophysics) built of 8 metal-oxide semiconductor (MOS) sensors were used to obtain sensor response (∆R/R). Each sample of spoiled material was divided into three parts and the degree of spoilage was measured four ways: determination of ergosterol content (ERG), colony forming units (CFU) and measurement with both e-noses. The study showed that both devices responsive to changes in the fungal microflora. Cyranose and VCA registered the change of domination microflora of fungi. After 7 days of storage, typical fungi for soil disappeared and appeared typical for storeroom was observed. In both cases, response ∆R/R decreased to the end of experiment, while ERG and JTK increased. The research was supported by the National Centre for Research and Development (NCBR), Grant No. PBS2/A8/22/2013.

Keywords: electronic nose, fungal microflora, metal-oxide sensor, polymer-composite sensors

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1297 Barrier Lowering in Contacts between Graphene and Semiconductor Materials

Authors: Zhipeng Dong, Jing Guo

Abstract:

Graphene-semiconductor contacts have been extensively studied recently, both as a stand-alone diode device for potential applications in photodetectors and solar cells, and as a building block to vertical transistors. Graphene is a two-dimensional nanomaterial with vanishing density-of-states at the Dirac point, which differs from conventional metal. In this work, image-charge-induced barrier lowering (BL) in graphene-semiconductor contacts is studied and compared to that in metal Schottky contacts. The results show that despite of being a semimetal with vanishing density-of-states at the Dirac point, the image-charge-induced BL is significant. The BL value can be over 50% of that of metal contacts even in an intrinsic graphene contacted to an organic semiconductor, and it increases as the graphene doping increases. The dependences of the BL on the electric field and semiconductor dielectric constant are examined, and an empirical expression for estimating the image-charge-induced BL in graphene-semiconductor contacts is provided.

Keywords: graphene, semiconductor materials, schottky barrier, image charge, contacts

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1296 Implementation of Sensor Fusion Structure of 9-Axis Sensors on the Multipoint Control Unit

Authors: Jun Gil Ahn, Jong Tae Kim

Abstract:

In this paper, we study the sensor fusion structure on the multipoint control unit (MCU). Sensor fusion using Kalman filter for 9-axis sensors is considered. The 9-axis inertial sensor is the combination of 3-axis accelerometer, 3-axis gyroscope and 3-axis magnetometer. We implement the sensor fusion structure among the sensor hubs in MCU and measure the execution time, power consumptions, and total energy. Experiments with real data from 9-axis sensor in 20Mhz show that the average power consumptions are 44mW and 48mW on Cortx-M0 and Cortex-M3 MCU, respectively. Execution times are 613.03 us and 305.6 us respectively.

Keywords: 9-axis sensor, Kalman filter, MCU, sensor fusion

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1295 Nanocrystalline Na0.1V2O5.nH2Oxerogel Thin Film for Gas Sensing

Authors: M. S. Al-Assiri, M. M. El-Desoky, A. A. Bahgat

Abstract:

Nanocrystalline thin film of Na0.1V2O5.nH2O xerogel obtained by sol-gel synthesis was used as a gas sensor. Gas sensing properties of different gases such as hydrogen, petroleum and humidity were investigated. Applying XRD and TEM the size of the nanocrystals is found to be 7.5 nm. SEM shows a highly porous structure with submicron meter-sized voids present throughout the sample. FTIR measurement shows different chemical groups identifying the obtained series of gels. The sample was n-type semiconductor according to the thermoelectric power and electrical conductivity. It can be seen that the sensor response curves from 130°C to 150°C show a rapid increase in sensitivity for all types of gas injection, low response values for heating period and the rapid high response values for cooling period. This result may suggest that this material is able to act as gas sensor during the heating and cooling process.

Keywords: sol-gel, thermoelectric power, XRD, TEM, gas sensing

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1294 Electrotechnology for Silicon Refining: Plasma Generator and Arc Furnace Installations and Theoretical Base

Authors: Ashot Navasardian, Mariam Vardanian, Vladik Vardanian

Abstract:

The photovoltaic and the semiconductor industries are in growth and it is necessary to supply a large amount of silicon to maintain this growth. Since silicon is still the best material for the manufacturing of solar cells and semiconductor components so the pure silicon like solar grade and semiconductor grade materials are demanded. There are two main routes for silicon production: metallurgical and chemical. In this article, we reviewed the electrotecnological installations and systems for semiconductor manufacturing. The main task is to design the installation which can produce SOG Silicon from river sand by one work unit.

Keywords: metallurgical grade silicon, solar grade silicon, impurity, refining, plasma

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1293 Valuation on MEMS Pressure Sensors and Device Applications

Authors: Nurul Amziah Md Yunus, Izhal Abdul Halin, Nasri Sulaiman, Noor Faezah Ismail, Ong Kai Sheng

Abstract:

The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

Keywords: pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS

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1292 An Introductory Study on Optimization Algorithm for Movable Sensor Network-Based Odor Source Localization

Authors: Yossiri Ariyakul, Piyakiat Insom, Poonyawat Sangiamkulthavorn, Takamichi Nakamoto

Abstract:

In this paper, the method of optimization algorithm for sensor network comprised of movable sensor nodes which can be used for odor source localization was proposed. A sensor node is composed of an odor sensor, an anemometer, and a wireless communication module. The odor intensity measured from the sensor nodes are sent to the processor to perform the localization based on optimization algorithm by which the odor source localization map is obtained as a result. The map can represent the exact position of the odor source or show the direction toward it remotely. The proposed method was experimentally validated by creating the odor source localization map using three, four, and five sensor nodes in which the accuracy to predict the position of the odor source can be observed.

Keywords: odor sensor, odor source localization, optimization, sensor network

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1291 Performance Comparison of a Low Cost Air Quality Sensor with a Commercial Electronic Nose

Authors: Ünal Kızıl, Levent Genç, Sefa Aksu, Ahmet Tapınç

Abstract:

The Figaro AM-1 sensor module which employs TGS 2600 model gas sensor in air quality assessment was used. The system was coupled with a microprocessor that enables sensor module to create warning message via telephone. This low cot sensor system’s performance was compared with a Diagnose II commercial electronic nose system. Both air quality sensor and electronic nose system employ metal oxide chemical gas sensors. In the study experimental setup, data acquisition methods for electronic nose system, and performance of the low cost air quality system were evaluated and explained.

Keywords: air quality, electronic nose, environmental quality, gas sensor

Procedia PDF Downloads 444
1290 Study of a Fabry-Perot Resonator

Authors: F. Hadjaj, A. Belghachi, A. Halmaoui, M. Belhadj, H. Mazouz

Abstract:

A laser is essentially an optical oscillator consisting of a resonant cavity, an amplifying medium and a pumping source. In semiconductor diode lasers, the cavity is created by the boundary between the cleaved face of the semiconductor crystal and air and also has reflective properties as a result of the differing refractive indices of the two media. For a GaAs-air interface a reflectance of 0.3 is typical and therefore the length of the semiconductor junction forms the resonant cavity. To prevent light, being emitted in unwanted directions from the junction and Sides perpendicular to the required direction are roughened. The objective of this work is to simulate the optical resonator Fabry-Perot and explore its main characteristics, such as FSR, Finesse, Linewidth, Transmission and so on that describe the performance of resonator.

Keywords: Fabry-Perot Resonator, laser diod, reflectance, semiconductor

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1289 Design of Permanent Sensor Fault Tolerance Algorithms by Sliding Mode Observer for Smart Hybrid Powerpack

Authors: Sungsik Jo, Hyeonwoo Kim, Iksu Choi, Hunmo Kim

Abstract:

In the SHP, LVDT sensor is for detecting the length changes of the EHA output, and the thrust of the EHA is controlled by the pressure sensor. Sensor is possible to cause hardware fault by internal problem or external disturbance. The EHA of SHP is able to be uncontrollable due to control by feedback from uncertain information, on this paper; the sliding mode observer algorithm estimates the original sensor output information in permanent sensor fault. The proposed algorithm shows performance to recovery fault of disconnection and short circuit basically, also the algorithm detect various of sensor fault mode.

Keywords: smart hybrid powerpack (SHP), electro hydraulic actuator (EHA), permanent sensor fault tolerance, sliding mode observer (SMO), graphic user interface (GUI)

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1288 Adding Protelium Gas Sensor for Smartphone to Reduce Explosion in Indonesia

Authors: Alfi Al Fahreizy

Abstract:

By using LPG (Liquid Protelium Gas), it is very difficult to detect gas leak. Consequently, there is so many incident of gas leak that makes explosion which is occurred in many regions of Indonesia. In this paper, the researcher tries to overcome with it by adding gas sensor for LPG in a smartphone. The aim is to choose the best sensor and how to use it . The methode is to choose sensor by selecting from sensor data sheet qualitatively by giving grade from 1 to 5. Flow chart is shown to make best steps notification that possible to implemented in smartphone.

Keywords: energy conversion, gas leak, smartphone, explosion, LPG

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1287 SFO-ECRSEP: Sensor Field Optimızation Based Ecrsep For Heterogeneous WSNS

Authors: Gagandeep Singh

Abstract:

The sensor field optimization is a serious issue in WSNs and has been ignored by many researchers. As in numerous real-time sensing fields the sensor nodes on the corners i.e. on the segment boundaries will become lifeless early because no extraordinary safety is presented for them. Accordingly, in this research work the central objective is on the segment based optimization by separating the sensor field between advance and normal segments. The inspiration at the back this sensor field optimization is to extend the time spam when the first sensor node dies. For the reason that in normal sensor nodes which were exist on the borders may become lifeless early because the space among them and the base station is more so they consume more power so at last will become lifeless soon.

Keywords: WSNs, ECRSEP, SEP, field optimization, energy

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1286 Security Threats on Wireless Sensor Network Protocols

Authors: H. Gorine, M. Ramadan Elmezughi

Abstract:

In this paper, we investigate security issues and challenges facing researchers in wireless sensor networks and countermeasures to resolve them. The broadcast nature of wireless communication makes Wireless Sensor Networks prone to various attacks. Due to resources limitation constraint in terms of limited energy, computation power and memory, security in wireless sensor networks creates different challenges than wired network security. We will discuss several attempts at addressing the issues of security in wireless sensor networks in an attempt to encourage more research into this area.

Keywords: wireless sensor networks, network security, light weight encryption, threats

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1285 Investigation of Al/Si, Au/Si and Au/GaAs Interfaces by Positron Annihilation Spectroscopy

Authors: Abdulnasser S. Saleh

Abstract:

The importance of metal-semiconductor interfaces comes from the fact that most electronic devices are interconnected using metallic wiring that forms metal–semiconductor contacts. The properties of these contacts can vary considerably depending on the nature of the interface with the semiconductor. Variable-energy positron annihilation spectroscopy has been applied to study interfaces in Al/Si, Au/Si, and Au/GaAs structures. A computational modeling by ROYPROF program is used to analyze Doppler broadening results in order to determine kinds of regions that positrons are likely to sample. In all fittings, the interfaces are found 1 nm thick and act as an absorbing sink for positrons diffusing towards them and may be regarded as highly defective. Internal electric fields were found to influence positrons diffusing to the interfaces and unable to force them cross to the other side. The materials positron affinities are considered in understanding such motion. The results of these theoretical fittings have clearly demonstrated the sensitivity of interfaces in any fitting attempts of analyzing positron spectroscopy data and gave valuable information about metal-semiconductor interfaces.

Keywords: interfaces, semiconductor, positron, defects

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1284 A New Realization of Multidimensional System for Grid Sensor Network

Authors: Yang Xiong, Hua Cheng

Abstract:

In this paper, for the basic problem of wireless sensor network topology control and deployment, the Roesser model in rectangular grid sensor networks is presented. In addition, a general constructive realization procedure will be proposed. The procedure enables a distributed implementation of linear systems on a sensor network. A non-trivial example is illustrated.

Keywords: grid sensor networks, Roesser model, state-space realization, multidimensional systems

Procedia PDF Downloads 655
1283 Trions in Semiconductor Quantum Dot System

Authors: Jayden Leonard, Nguyen Que Huong

Abstract:

In this work, we study the Trion state in a spherical quantum dot of a direct band gap semiconductor with a shell of organic material. The electronic structure of the Trion due to degenerate valence band will be considered. The coupling between the wannier exciton inside the dot and the Frenkel exciton in the shell will make the Trion state become hybrid. The competition between “semiconductor” and “organic” phases of the Trion and the transitions between them depend on Parameters of the system such as the materials, the size of the dot and the thickness of the shell, etc… and could be manipulated using those parameters.

Keywords: trion, exciton, quantum dot, heterostructure

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1282 A Car Parking Monitoring System Using a Line-Topology Wireless Sensor Network

Authors: Dae Il Kim, Jungho Moon, Tae Yun Chung

Abstract:

This paper presents a car parking monitoring system using a wireless sensor network. The presented sensor network has a line-shaped topology and adopts a TDMA-based protocol for allowing multi-hop communications. Sensor nodes are deployed in the ground of an outdoor parking lot in such a way that a sensor node monitors a parking space. Each sensor node detects the availability of the associated parking space and transmits the detection result to a sink node via intermediate sensor nodes existing between the source sensor node and the sink node. We evaluate the feasibility of the presented sensor network and the TDMA-based communication protocol through experiments using 11 sensor nodes deployed in a real parking lot. The result shows that the presented car parking monitoring system is robust to changes in the communication environments and efficient for monitoring parking spaces of outdoor parking lots.

Keywords: multi-hop communication, parking monitoring system, TDMA, wireless sensor network

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1281 Synchronization of Semiconductor Laser Networks

Authors: R. M. López-Gutiérrez, L. Cardoza-Avendaño, H. Cervantes-de Ávila, J. A. Michel-Macarty, C. Cruz-Hernández, A. Arellano-Delgado, R. Carmona-Rodríguez

Abstract:

In this paper, synchronization of multiple chaotic semiconductor lasers is achieved by appealing to complex system theory. In particular, we consider dynamical networks composed by semiconductor laser, as interconnected nodes, where the interaction in the networks are defined by coupling the first state of each node. An interesting case is synchronized with master-slave configuration in star topology. Nodes of these networks are modeled for the laser and simulated by Matlab. These results are applicable to private communication.

Keywords: chaotic laser, network, star topology, synchronization

Procedia PDF Downloads 566
1280 Determination of Optical Constants of Semiconductor Thin Films by Ellipsometry

Authors: Aïssa Manallah, Mohamed Bouafia

Abstract:

Ellipsometry is an optical method based on the study of the behavior of polarized light. The light reflected on a surface induces a change in the polarization state which depends on the characteristics of the material (complex refractive index and thickness of the different layers constituting the device). The purpose of this work is to determine the optical properties of semiconductor thin films by ellipsometry. This paper describes the experimental aspects concerning the semiconductor samples, the SE400 ellipsometer principle, and the results obtained by direct measurements of ellipsometric parameters and modelling using appropriate software.

Keywords: ellipsometry, optical constants, semiconductors, thin films

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1279 A Review of Security Attacks and Intrusion Detection Schemes in Wireless Sensor Networks: A Survey

Authors: Maleh Yassine, Ezzati Abdellah

Abstract:

Wireless Sensor Networks (WSNs) are currently used in different industrial and consumer applications, such as earth monitoring, health related applications, natural disaster prevention, and many other areas. Security is one of the major aspects of wireless sensor networks due to the resource limitations of sensor nodes. However, these networks are facing several threats that affect their functioning and their life. In this paper we present security attacks in wireless sensor networks, and we focus on a review and analysis of the recent Intrusion Detection schemes in WSNs.

Keywords: wireless sensor networks, security attack, denial of service, IDS, cluster-based model, signature based IDS, hybrid IDS

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1278 Modalmetric Fiber Sensor and Its Applications

Authors: M. Zyczkowski, P. Markowski, M. Karol

Abstract:

The team from IOE MUT is developing fiber optic sensors for the security systems for 15 years. The conclusions of the work indicate that these sensors are complicated. Moreover, these sensors are expensive to produce and require sophisticated signal processing methods.We present the results of the investigations of three different applications of the modalmetric sensor: • Protection of museum collections and heritage buildings, • Protection of fiber optic transmission lines, • Protection of objects of critical infrastructure. Each of the presented applications involves different requirements for the system. The results indicate that it is possible to developed a fiber optic sensor based on a single fiber. Modification of optoelectronic parts with a change of the length of the sensor and the method of reflections of propagating light at the end of the sensor allows to adjust the system to the specific application.

Keywords: modalmetric fiber optic sensor, security sensor, optoelectronic parts, signal processing

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1277 Gas Sensor Based On a One-Dimensional Nano-Grating Au/ Co/ Au/ TiO2 Magneto-Plasmonic Structure

Authors: S. M. Hamidi, M. Afsharnia

Abstract:

Gas sensors based on magneto-plasmonic (MP) structures have attracted much attention due to the high signal to noise ratio in these type of sensors. In these sensors, both the plasmonic and the MO properties of the resulting MP structure become interrelated because the surface Plasmon resonance (SPR) of the metallic medium. This interconnection can be modified the sensor responses and enhanced the signal to noise ratio. So far the sensor features of multilayered structures made of noble and ferromagnetic metals as Au/Co/Au MP multilayer with TiO2 sensor layer have been extensively studied, but their SPR assisted sensor response need to the krestchmann configuration. Here, we present a systematic study on the new MP structure based on one-dimensional nano-grating Au/ Co/ Au/ TiO2 multilayer to utilize as an inexpensive and easy to use gas sensor.

Keywords: Magneto-plasmonic structures, Gas sensor, nano-garting

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1276 Performance Analysis of N-Tier Grid Protocol for Resource Constrained Wireless Sensor Networks

Authors: Jai Prakash Prasad, Suresh Chandra Mohan

Abstract:

Modern wireless sensor networks (WSN) consist of small size, low cost devices which are networked through tight wireless communications. WSN fundamentally offers cooperation, coordination among sensor networks. Potential applications of wireless sensor networks are in healthcare, natural disaster prediction, data security, environmental monitoring, home appliances, entertainment etc. The design, development and deployment of WSN based on application requirements. The WSN design performance is optimized to improve network lifetime. The sensor node resources constrain such as energy and bandwidth imposes the limitation on efficient resource utilization and sensor node management. The proposed N-Tier GRID routing protocol focuses on the design of energy efficient large scale wireless sensor network for improved performance than the existing protocol.

Keywords: energy efficient, network lifetime, sensor networks, wireless communication

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1275 A Spatial Point Pattern Analysis to Recognize Fail Bit Patterns in Semiconductor Manufacturing

Authors: Youngji Yoo, Seung Hwan Park, Daewoong An, Sung-Shick Kim, Jun-Geol Baek

Abstract:

The yield management system is very important to produce high-quality semiconductor chips in the semiconductor manufacturing process. In order to improve quality of semiconductors, various tests are conducted in the post fabrication (FAB) process. During the test process, large amount of data are collected and the data includes a lot of information about defect. In general, the defect on the wafer is the main causes of yield loss. Therefore, analyzing the defect data is necessary to improve performance of yield prediction. The wafer bin map (WBM) is one of the data collected in the test process and includes defect information such as the fail bit patterns. The fail bit has characteristics of spatial point patterns. Therefore, this paper proposes the feature extraction method using the spatial point pattern analysis. Actual data obtained from the semiconductor process is used for experiments and the experimental result shows that the proposed method is more accurately recognize the fail bit patterns.

Keywords: semiconductor, wafer bin map, feature extraction, spatial point patterns, contour map

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1274 Design and Simulation of MEMS-Based Capacitive Pressure Sensors

Authors: Kirankumar B. Balavalad, Bhagyashree Mudhol, B. G. Sheeparamatti

Abstract:

MEMS sensor have gained popularity in automotive, biomedical, and industrial applications. In this paper, the design and simulation of conventional, slotted, and perforated MEMS capacitive pressure sensor is proposed. Polysilicon material is used as diaphragm material that deflects due to applied pressure. Better sensitivity is the main advantage of conventional pressure sensor as compared with other two sensors and perforated pressure sensor achieves large operating pressure range. The proposed MEMS sensor demonstrated with diaphragm length 50um, gap depth 3um is being modelled. The simulation is carried out for different types of MEMS capacitive pressure sensor using COMSOL Multiphysics and Coventor ware.

Keywords: MEMS, conventional pressure sensor, slotted and perforated diaphragm, COMSOL multiphysics, coventor ware

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