Search results for: Wavelength Converter.
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 392

Search results for: Wavelength Converter.

152 Mitigation of Flicker using STATCOM with Three-Level 12-pulse Voltage Source Inverter

Authors: Ali Z a'fari

Abstract:

Voltage flicker is a disturbance in electrical power systems. The reason for this disturbance is mainly the large nonlinear loads such as electric arc furnaces. Synchronous static compensator (STATCOM) is considered as a proper technique to mitigate the voltage flicker. Application of more suitable and precise power electronic converter leads to a more precise performance of the compensator. In this paper a three-level 12-pulse voltage source inverter (VSI) with a 12-terminal transformer connected to the ac system is studied and the obtained results are compared with the performance of a STATCOM using a simple two-level VSI and an optimal and more precise performance of the proposed scheme is achieved.

Keywords: Flicker mitigation, STATCOM, Inverter, 12-pulse, 3- level

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151 Model Predictive Control of Three Phase Inverter for PV Systems

Authors: Irtaza M. Syed, Kaamran Raahemifar

Abstract:

This paper presents a model predictive control (MPC) of a utility interactive three phase inverter (TPI) for a photovoltaic (PV) system at commercial level. The proposed model uses phase locked loop (PLL) to synchronize the TPI with the power electric grid (PEG) and performs MPC control in a dq reference frame. TPI model consists of a boost converter (BC), maximum power point tracking (MPPT) control, and a three-leg voltage source inverter (VSI). The operational model of VSI is used to synthesize the sinusoidal current and track the reference. The model is validated using a 35.7 kW PV system in Matlab/Simulink. Implementation results show simplicity and accuracy, as well as reliability of the model.

Keywords: Model predictive control, three phase voltage source inverter, PV system, Matlab/Simulink.

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150 Optimal Switching Strategies for Tracking of Currents of Voltage Source Converters

Authors: R. Oloomi, M. A. Sadrnia

Abstract:

This paper proposes a new optimal feedback controller for voltage source converters VSC's, for current regulated voltage source converters, which allows compensate the harmonics of current produced by nonlinear loads and load reactive power. The aim of the present paper is to describe a novel switching signal generation technique called optimal controller which guarantees that the injected currents follow the reference currents determined by the compensation strategy, with the smallest possible tracking error and fixed switching frequency. It is compared with well-known hysteresis current controller HCC. The validity of presented method and its comparison with HCC is studied through simulation results.

Keywords: Hysteresis Current Controller, Optimal Controller, Switching pattern, Voltage Source Converter.

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149 Active Disturbance Rejection Control for Wind System Based On a DFIG

Authors: R. Chakib, A. Essadki, M. Cherkaoui

Abstract:

This paper proposes the study of a robust control of the doubly fed induction generator (DFIG) used in a wind energy production. The proposed control is based on the linear active disturbance rejection control (ADRC) and it is applied to the control currents rotor of the DFIG, the DC bus voltage and active and reactive power exchanged between the DFIG and the network. The system under study and the proposed control are simulated using MATLAB/SIMULINK.

Keywords: Doubly fed induction generator DFIG, Active disturbance rejection control ADRC, Vector control, MPPT, Extended state observer, back to back converter, Wind turbine.

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148 Group Velocity Dispersion Management of Microstructure Optical Fibers

Authors: S. M. Abdur Razzak, M. A. Rashid, Y. Namihira, A. Sayeem

Abstract:

A simple microstructure optical fiber design based on an octagonal cladding structure is presented for simultaneously controlling dispersion and leakage properties. The finite difference method with anisotropic perfectly matched boundary layer is used to investigate the guiding properties. It is demonstrated that octagonal photonic crystal fibers with four rings can assume negative ultra-flattened dispersion of -19 + 0.23 ps/nm/km in the wavelength range of 1.275 μm to 1.68 μm, nearly zero ultra-flattened dispersion of 0 ± 0.40 ps/nm/km in a 1.38 to 1.64 μm, and low confinement losses less than 10-3 dB/km in the entire band of interest.

Keywords: Finite difference modeling, group velocity dispersion, optical fiber design, photonic crystal fiber.

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147 An Analytical Comparison between Open Loop, PID and Fuzzy Logic Based DC-DC Boost Convertor

Authors: Muhammad Mujtaba Asad, Razali Bin Hassan, Fahad Sherwani

Abstract:

This paper explains about the voltage output for DC to DC boost converter between open loop, PID controller and fuzzy logic controller through Matlab Simulink. Simulink input voltage was set at 12V and the voltage reference was set at 24V. The analysis on the deviation of voltage resulted that the difference between reference voltage setting and the output voltage is always lower. Comparison between open loop, PID and FLC shows that, the open loop circuit having a bit higher on the deviation of voltage. The PID circuit boosts for FLC has a lesser deviation of voltage and proved that it is such a better performance on control the deviation of voltage during the boost mode.

Keywords: Boost Convertors, Power Electronics, PID, Fuzzy logic, Open loop.

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146 Vertical Micromirror Fabrication by X-ray Lithography for Single Mode Optical Fiber Switching Applications

Authors: R. Chimchang, R. Tongta, R. Phatthanakun

Abstract:

Inthis paper, design and fabrication of vertical micromirror for optical switching applications of single mode optical fibers are proposed. The structure of micromirror will be created from negative photoresist (SU-8) on X-ray lithography using X-ray from synchrotron light source. The properties of X-ray from synchrotron light source are high-energy electrons which can construct materials that have a high aspect ratio. In addition, the technique of gold coating of reflective material has been used for change direction of light between two pairs of optical fibers. At a wavelength of 1310 nm with minimum average loss of 5.305 dB is obtained.

Keywords: vertical micromirror, negative photoresist, X-ray lithography

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145 Development of an Infrared Thermography Method with CO2 Laser Excitation, Applied to Defect Detection in CFRP

Authors: Sam-Ang Keo, Franck Brachelet, Florin Breaban, Didier Defer

Abstract:

This paper presents a NDT by infrared thermography with excitation CO2 Laser, wavelength of 10.6 μm. This excitation is the controllable heating beam, confirmed by a preliminary test on a wooden plate 1.2 m x 0.9 m x 1 cm. As the first practice, this method is applied to detecting the defect in CFRP heated by the Laser 300 W during 40 s. Two samples 40 cm x 40 cm x 4.5 cm are prepared, one with defect, another one without defect. The laser beam passes through the lens of a deviation device, and heats the samples placed at a determinate position and area. As a result, the absence of adhesive can be detected. This method displays prominently its application as NDT with the composite materials. This work gives a good perspective to characterize the laser beam, which is very useful for the next detection campaigns.

Keywords: CO2 LASER, Infrared Thermography, NDT, CFRP, Defect Detection.

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144 Implementation and Comparison between Two Algorithms of Three-Level Neutral Point Clamped Voltage Source Inverter

Authors: K. Benamrane, T. Abdelkrim, T. Benslimane, Aeh. Benkhelifa, B. Bezza

Abstract:

This paper presents a comparison between two Pulse Width Modulation (PWM) algorithms applied to a three-level Neutral Point Clamped (NPC) Voltage Source Inverter (VSI). The first algorithm applied is the triangular-sinusoidal strategy; the second is the Space Vector Pulse Width Modulation (SVPWM) strategy. In the first part, we present a topology of three-level NCP VSI. After that, we develop the two PWM strategies to control this converter. At the end the experimental results are presented.

Keywords: Multilevel inverter, Space vector pulse width modulation (SVPWM), triangular-sinusoidal strategy.

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143 An Active Rectifier with Time-Domain Delay Compensation to Enhance the Power Conversion Efficiency

Authors: Shao-Ku Kao

Abstract:

This paper presents an active rectifier with time-domain delay compensation to enhance the efficiency. A delay calibration circuit is designed to convert delay time to voltage and adaptive control on/off delay in variable input voltage. This circuit is designed in 0.18 mm CMOS process. The input voltage range is from 2 V to 3.6 V with the output voltage from 1.8 V to 3.4 V. The efficiency can maintain more than 85% when the load from 50 Ω ~ 1500 Ω for 3.6 V input voltage. The maximum efficiency is 92.4 % at output power to be 38.6 mW for 3.6 V input voltage.

Keywords: Wireless power transfer, active diode, delay compensation, time to voltage converter, PCE.

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142 Vector Control of Multimotor Drive

Authors: Archana S. Nanoty, A. R. Chudasama

Abstract:

Three-phase induction machines are today a standard for industrial electrical drives. Cost, reliability, robustness and maintenance free operation are among the reasons these machines are replacing dc drive systems. The development of power electronics and signal processing systems has eliminated one of the greatest disadvantages of such ac systems, which is the issue of control. With modern techniques of field oriented vector control, the task of variable speed control of induction machines is no longer a disadvantage. The need to increase system performance, particularly when facing limits on the power ratings of power supplies and semiconductors, motivates the use of phase number other than three, In this paper a novel scheme of connecting two, three phase induction motors in parallel fed by two inverters; viz. VSI and CSI and their vector control is presented.

Keywords: Field oriented control, multiphase induction motor, power electronics converter.

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141 Soliton Interaction in Multi-Core Optical Fiber: Application to WDM System

Authors: S. Arun Prakash, V. Malathi, M. S. Mani Rajan

Abstract:

The analytical bright two soliton solution of the 3- coupled nonlinear Schrödinger equations with variable coefficients in birefringent optical fiber is obtained by Darboux transformation method. To the design of ultra-speed optical devices, Soliton interaction and control in birefringence fiber is investigated. Lax pair is constructed for N coupled NLS system through AKNS method. Using two-soliton solution, we demonstrate different interaction behaviors of solitons in birefringent fiber depending on the choice of control parameters. Our results shows that interactions of optical solitons have some specific applications such as construction of logic gates, optical computing, soliton switching, and soliton amplification in wavelength division multiplexing (WDM) system.

Keywords: Optical soliton, soliton interaction, soliton switching, WDM.

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140 Resonant-Based Capacitive Pressure Sensor Read-Out Oscillating at 1.67 GHz in 0.18

Authors: Yong Wang, Wang Ling Goh, Jung Hyup Lee, Kevin T. C. Chai, Minkyu Je

Abstract:

This paper presents a resonant-based read-out circuit for capacitive pressure sensors. The proposed read-out circuit consists of an LC oscillator and a counter. The circuit detects the capacitance changes of a capacitive pressure sensor by means of frequency shifts from its nominal operation frequency. The proposed circuit is designed in 0.18m CMOS with an estimated power consumption of 43.1mW. Simulation results show that the circuit has a capacitive resolution of 8.06kHz/fF, which enables it for high resolution pressure detection.

Keywords: Capacitance-to-frequency converter, Capacitive pressure sensor, Digital counter, LC oscillator.

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139 A Novel Method for Blood Glucose Measurement by Noninvasive Technique Using Laser

Authors: V.Ashok, A.Nirmalkumar, N.Jeyashanthi

Abstract:

A method and apparatus for noninvasive measurement of blood glucose concentration based on transilluminated laser beam via the Index Finger has been reported in this paper. This method depends on atomic gas (He-Ne) laser operating at 632.8nm wavelength. During measurement, the index finger is inserted into the glucose sensing unit, the transilluminated optical signal is converted into an electrical signal, compared with the reference electrical signal, and the obtained difference signal is processed by signal processing unit which presents the results in the form of blood glucose concentration. This method would enable the monitoring blood glucose level of the diabetic patient continuously, safely and noninvasively.

Keywords: Anisotropy factor, Blood glucose, Diabetes Mellitus, Noninvasive method, Photo detectors.

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138 A Semi-Cylindrical Capacitive Sensor Used for Soil Moisture Measurement

Authors: Subir Das, Tuhin Subhra Sarkar, Badal Chakraborty

Abstract:

Differing from the structure of traditional parallel plate capacitive sensor a semi cylindrical capacitive sensor has been introduced in this present work to measure the soil moisture conveniently. Here, the numerical analysis method to evaluate the capacitance from the semi-cylindrical capacitive sensor is analyzed and discussed. The changes of capacitance with the variation of soil moisture obtained linear in the nano farad range (nF) and which converted into voltage variation by using proper signal conditioning circuit. Experimental results depict the satisfactory performance of the sensor for measurement of soil moisture in the range of 0 to 70%. We investigated the linearity of 4% of FSO and sensitivity of 70 mV/unit percentage changes in soil moisture level (DB).

Keywords: Semi cylindrical Capacitive Sensor, Capacitance to Voltage converter Circuit, Soil Moisture.

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137 Online Computing System for Cctuple-Precision Computation with Fortran

Authors: Takemitsu Hasegawa, Yohsuke Hosoda

Abstract:

Computations with higher than the IEEE 754 standard double-precision (about 16 significant digits) are required recently. Although there are available software routines in Fortran and C for high-precision computation, users are required to implement such routines in their own computers with detailed knowledges about them. We have constructed an user-friendly online system for octupleprecision computation. In our Web system users with no knowledges about high-precision computation can easily perform octupleprecision computations, by choosing mathematical functions with argument(s) inputted, by writing simple mathematical expression(s) or by uploading C program(s). In this paper we enhance the Web system above by adding the facility of uploading Fortran programs, which have been widely used in scientific computing. To this end we construct converter routines in two stages.

Keywords: Fortran, numerical computation, octuple-precision, Web.

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136 Design of EDFA Gain Controller based on Disturbance Observer Technique

Authors: Seong-Ho Song, Ki-Seob Kim, Seon-Woo Lee, Seop-Hyeong Park

Abstract:

Based on a theoretical erbium-doped fiber amplifier (EDFA) model, we have proposed an application of disturbance observer(DOB) with proportional/integral/differential(PID) controller to EDFA for minimizing gain-transient time of wavelength -division-multiplexing (WDM) multi channels in optical amplifier in channel add/drop networks. We have dramatically reduced the gain-transient time to less than 30μsec by applying DOB with PID controller to the control of amplifier gain. The proposed DOB-based gain control algorithm for EDFA was implemented as a digital control system using TI's DSP(TMS320C28346) chip and experimental results of the system verify the excellent performance of the proposed gain control methodology.

Keywords: EDFA, Disturbance observer, gain control, WDM.

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135 Direct Torque Control - DTC of Induction Motor Used for Piloting a Centrifugal Pump Supplied by a Photovoltaic Generator

Authors: S. Abouda, F. Nollet, A. Chaari, N. Essounbouli, Y. Koubaa

Abstract:

In this paper we propose the study of a centrifugal pump control system driven by a three-phase induction motor, which is supplied by a PhotoVoltaic PV generator. The system includes solar panel, a DC / DC converter equipped with its MPPT control, a voltage inverter to three-phase Pulse Width Modulation - PWM and a centrifugal pump driven by a three phase induction motor. In order to control the flow of the centrifugal pump, a Direct Torque Control - DTC of the induction machine is used. To illustrate the performances of the control, simulation results are carried out using Matlab/Simulink.

Keywords: Photovoltaic generators, Maximum power point tracking (MPPT), DC/DC converters, Induction motor, Direct torque control (DTC).

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134 Development of a Real Time Axial Force Measurement System and IoT-Based Monitoring for Smart Bearing

Authors: Hassam Ahmed, Yuanzhi Liu, Yassine Selami, Wei Tao, Hui Zhao

Abstract:

The purpose of this research is to develop a real time axial force measurement system for a smart bearing through the use of strain-gauges, whereby the data acquisition is performed by an Arduino microcontroller due to its easy manipulation and low-cost. The measured signal is acquired and then discretized using a Wheatstone Bridge and an Analog-Digital Converter (ADC) respectively. For bearing monitoring, a real time monitoring system based on Internet of things (IoT) and Bluetooth were developed. Experimental tests were performed on a bearing within a force range up to 600 kN. The experimental results show that there is a proportional linear relationship between the applied force and the output voltage, and the error R squared is within 0.9878 based on the regression analysis.

Keywords: Bearing, force measurement, IoT, strain gauge.

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133 Dimensioning of Subsynchronous Cascade for Speed Regulation of Two-Motors 6kv Conveyer Drives

Authors: M. Kasumović, A. Hodžić, M. Tešanović

Abstract:

One way for optimum loading of overdimensioning conveyers is speed (capacity) decrement, with attention for production capabilities and demands. At conveyers which drives with three phase slip-ring induction motor, technically reasonable solution for conveyer (driving motors) speed regulation is using constant torque subsynchronous cascade with static semiconductor converter and transformer for energy reversion to the power network. In the paper is described mathematical model for parameter calculation of two-motors 6 kV subsynchronous cascade. It is also demonstrated that applying of this cascade gave several good properties, foremost in electrical energy saving, also in improving of other energy indexes, and finally that results in cost reduction of complete electrical motor drive.

Keywords: Conveyer with rubber belt, electrical motor drive, sub synchronous cascade

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132 Comparative Study between Classical P-Q Method and Modern Fuzzy Controller Method to Improve the Power Quality of an Electrical Network

Authors: A. Morsli, A.Tlemçani, N. Ould Cherchali, M. S. Boucherit

Abstract:

This article presents two methods for the compensation of harmonics generated by a nonlinear load. The first is the classic method P-Q. The second is the controller by modern method of artificial intelligence specifically fuzzy logic. Both methods are applied to a shunt Active Power Filter (sAPF) based on a three-phase voltage converter at five levels NPC topology. In calculating the harmonic currents of reference, we use the algorithm P-Q and pulse generation, we use the intersective PWM. For flexibility and dynamics, we use fuzzy logic. The results give us clear that the rate of Harmonic Distortion issued by fuzzy logic is better than P-Q.

Keywords: Fuzzy logic controller, P-Q method, Pulse Width Modulation (PWM), shunt Active Power Filter (sAPF), Total Harmonic Distortion (THD).

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131 Compact Tunable 10 W picosecond Sourcebased on Yb-doped Fiber Amplification of Gain Switch Laser Diode

Authors: Hongjun Liu, Cunxiao Gao, Jintao Tao, Wei Zhao, Yishan Wang

Abstract:

A compact tunable 10 W picosecond source based on Yb-doped fiber amplification of gain switch laser diode has been demonstrated. A gain switch semiconductor laser diode was used as the seed source, and a multi-stage single mode Yb-doped fiber preamplifier was combined with two large mode area double-clad Yb-doped fiber main amplifiers to construct the amplification system. The tunable pulses with high stability and excellent beam quality (M2<1.2) of 10 W average power 150 ps pulse duration at 1 MHz repetition rate were obtained. The central wavelength with the line width of 2.5-3 nm was tunable from 1053 nm to 1073 nm.

Keywords: Fiber laser, fiber amplifier, picosecond laser, highpower laser

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130 A Novel Single-Wavelength All-Optical Flip-Flop Employing Single SOA-MZI

Authors: H. Kaatuzian, M. Sedghi, S. Khatami

Abstract:

In this paper, by exploiting a single semiconductor optical amplifier-Mach Zehnder Interferometer (SOA-MZI), an integratable all-optical flip-flop (AOFF) is proposed. It is composed of a SOA-MZI with a bidirectional coupler at the output. Output signals of both bar and crossbar of the SOA-MZI is fed back to SOAs located in the arms of the Mach-Zehnder Interferometer (MZI). The injected photon-rates to the SOAs are modulated by feedback signals in order to form optical flip-flop. According to numerical analysis, Gaussian optical pulses with the energy of 15.2 fJ and 20 ps duration with the full width at half-maximum criterion, can switch the states of the SR-AOFF. Also simulation results show that the SR-AOFF has the contrast ratio of 8.5 dB between two states with the transition time of nearly 20 ps.

Keywords: All Optical, Flip-Flop, Mach-Zehnder Interferometer (MZI), Semiconductor Optical Amplifier (SOA).

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129 CFD Effect of the Tidal Grating in Opposite Directions

Authors: N. M. Thao, I. Dolguntseva, M. Leijon

Abstract:

Flow blockages referring to the increase in flow are being considered as a vital equipment for marine current energy conversion. However, the shape of these devices will result in extracted energy under the operation. The present work investigates the effect of two configurations of a grating, convergent and divergent that located upstream, to the water flow velocity. The flow characteristics are studied by Computational Fluid Dynamic simulation by using the ANSYS Fluent solver for these specified arrangements of the grating. The results indicate that distinguished characteristics of flow velocity between “convergent” and “divergent” grating placements is up to 10% in confined conditions. Furthermore, the velocity in case of convergent grating is higher than that of divergent grating.

Keywords: Marine current energy, marine current energy converter, turbine grating, RANS simulation, water flow velocity.

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128 Simulink Model of Reference Frame Theory Based Three Phase Shunt Active Filter

Authors: P. Nammalvar, P. Meganathan, A. Balamuguran

Abstract:

Among various active filters, shunt active filter is a viable solution for reactive power and harmonics compensation. In this paper, the SRF plan is used to generate current reference for compensation and conventional PI controllers were used as the controller to compensate the reactive power. The design of the closed loop controllers is reserved simple by modeling them as first order systems. Computationally uncomplicated and efficient SVM system is used in the present work for better utilization of dc bus voltage. The rating of shunt active filter has been finalized based on the reactive power demand of the selected reactive load. The proposed control and SVM technique are validated by simulating in MATLAB software.

Keywords: Shunt Active Filter, Space vector pulse width modulation, Voltage Source Converter, Reactive Power, Synchronous Reference Frame, Point of common coupling.

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127 Comparative Performance Analysis of Fiber Delay Line Based Buffer Architectures for Contention Resolution in Optical WDM Networks

Authors: Manoj Kumar Dutta

Abstract:

Wavelength Division Multiplexing (WDM) technology is the most promising technology for the proper utilization of huge raw bandwidth provided by an optical fiber. One of the key problems in implementing the all-optical WDM network is the packet contention. This problem can be solved by several different techniques. In time domain approach the packet contention can be reduced by incorporating Fiber Delay Lines (FDLs) as optical buffer in the switch architecture. Different types of buffering architectures are reported in literatures. In the present paper a comparative performance analysis of three most popular FDL architectures are presented in order to obtain the best contention resolution performance. The analysis is further extended to consider the effect of different fiber non-linearities on the network performance.

Keywords: WDM network, contention resolution, optical buffering, non-linearity, throughput.

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126 Channels Splitting Strategy for Optical Local Area Networks of Passive Star Topology

Authors: Peristera Baziana

Abstract:

In this paper, we present a network configuration for a WDM LANs of passive star topology that assume that the set of data WDM channels is split into two separate sets of channels, with different access rights over them. Especially, a synchronous transmission WDMA access algorithm is adopted in order to increase the probability of successful transmission over the data channels and consequently to reduce the probability of data packets transmission cancellation in order to avoid the data channels collisions. Thus, a control pre-transmission access scheme is followed over a separate control channel. An analytical Markovian model is studied and the average throughput is mathematically derived. The performance is studied for several numbers of data channels and various values of control phase duration.

Keywords: Access algorithm, channels division, collisions avoidance, wavelength division multiplexing.

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125 Spectral Broadening in an InGaAsP Optical Waveguide with χ(3) Nonlinearity Including Two Photon Absorption

Authors: Keigo Matsuura, Isao Tomita

Abstract:

We have studied a method to widen the spectrum of optical pulses that pass through an InGaAsP waveguide for application to broadband optical communication. In particular, we have investigated the competitive effect between spectral broadening arising from nonlinear refraction (optical Kerr effect) and shrinking due to two photon absorption in the InGaAsP waveguide with χ(3) nonlinearity. The shrunk spectrum recovers broadening by the enhancement effect of the nonlinear refractive index near the bandgap of InGaAsP with a bandgap wavelength of 1490 nm. The broadened spectral width at around 1525 nm (196.7 THz) becomes 10.7 times wider than that at around 1560 nm (192.3 THz) without the enhancement effect, where amplified optical pulses with a pulse width of ∼ 2 ps and a peak power of 10 W propagate through a 1-cm-long InGaAsP waveguide with a cross-section of 4 (μm)2.

Keywords: InGaAsP Waveguide, χ(3) Nonlinearity, Spectral Broadening.

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124 Optimal Sizing of SSSC Controllers to Minimize Transmission Loss and a Novel Model of SSSC to Study Transient Response

Authors: A. M. El-Zonkoly

Abstract:

In this paper, based on steady-state models of Flexible AC Transmission System (FACTS) devices, the sizing of static synchronous series compensator (SSSC) controllers in transmission network is formed as an optimization problem. The objective of this problem is to reduce the transmission losses in the network. The optimization problem is solved using particle swarm optimization (PSO) technique. The Newton-Raphson load flow algorithm is modified to consider the insertion of the SSSC devices in the network. A numerical example, illustrating the effectiveness of the proposed algorithm, is introduced. In addition, a novel model of a 3- phase voltage source converter (VSC) that is suitable for series connected FACTS a controller is introduced. The model is verified by simulation using Power System Blockset (PSB) and Simulink software.

Keywords: FACTS, Modeling, PSO, SSSC, Transmission lossreduction.

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123 Surface Modification by EUV laser Beam based on Capillary Discharge

Authors: O. Frolov, K. Kolacek, J. Schmidt, J. Straus, V. Prukner, A. Shukurov

Abstract:

Many applications require surface modification and micro-structuring of polymers. For these purposes is mainly used ultraviolet (UV) radiation from excimer lamps or excimer lasers. However, these sources have a decided disadvantage - degrading the polymer deep inside due to relatively big radiation penetration depth which may exceed 100 μm. In contrast, extreme ultraviolet (EUV) radiation is absorbed in a layer approximately 100 nm thick only. In this work, the radiation from a discharge-plasma EUV source (with wavelength 46.9 nm) based on a capillary discharge driver is focused with a spherical Si/Sc multilayer mirror for surface modification of PMMA sample or thin gold layer (thickness about 40 nm). It was found that the focused EUV laser beam is capable by one shot to ablate PMMA or layer of gold, even if the focus is significantly influenced by astigmatism.

Keywords: ablation, capillary discharge, EUV laser, surface modification

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