Search results for: Digital All-Pass Filter.

Authors: O. Z. Jasim

Abstract:

An accuracy digital map must satisfy the users for two main requirements, first, map must be visually readable and second, all the map elements must be in a good representation. These two requirements hold especially true for map generalization which aims at simplifying the representation of cartographic data. Different scales of maps are very important for any decision in any maps with different scales such as master plan and all the infrastructures maps in civil engineering. Cartographer cannot project the data onto a piece of paper, but he has to worry about its readability. The map layout of any geodatabase is very important, this layout is help to read, analyze or extract information from the map. There are many principles and guidelines of generalization that can be find in the cartographic literature. A manual reduction method for generalization depends on experience of map maker and therefore produces incompatible results. Digital generalization, rooted from conventional cartography, has become an increasing concern in both Geographic Information System (GIS) and mapping fields. This project is intended to review the state of the art of the new technology and help to understand the needs and plans for the implementation of digital generalization capability as well as increase the knowledge of production topographic maps.

Keywords: Cartography, digital generalization, mapping, GIS.

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Authors: S. Mohan Kumar, Rajashekar Patil, Tanuja Ajit Desphande

Abstract:

It is necessary to incorporate technological advances achieved in the field of engineering into dentistry in order to enhance the process of diagnosis, treatment planning and enable the doctors to render better treatment to their patients. To achieve this ultimate goal long distance collaborations are often necessary. This paper discusses the various collaborative tools and their applications to solve a few burning problems confronted by the dentists. Customization is often the solution to most of the problems. But rapid designing, development and cost effective manufacturing is a difficult task to achieve. This problem can be solved using the technique of digital manufacturing. Cases from 6 major branches of dentistry have been discussed and possible solutions with the help of state of art technology using rapid digital manufacturing have been proposed in the present paper. The paper also entails the usage of existing tools in collaborative and digital manufacturing area.

Keywords: Customisation, collaborative tools, dentistry, digital manufacturing.

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Authors: Nidal F. Shilbayeh, Belal AbuHaija, Zainab N. Al-Qudsy

Abstract:

In this paper, a hybrid blind digital watermarking system using Discrete Wavelet Transform (DWT) and Contourlet Transform (CT) has been implemented and tested. The implemented combined digital watermarking system has been tested against five common types of image attacks. The performance evaluation shows improved results in terms of imperceptibility, robustness, and high tolerance against these attacks; accordingly, the system is very effective and applicable.

Keywords: DWT, contourlet transform, digital image watermarking, copyright protection, geometric attack.

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Authors: Takashi Shimizu, Tomoaki Hashimoto

Abstract:

A class of implicit systems is known as a more generalized class of systems than a class of explicit systems. To establish a control method for such a generalized class of systems, we adopt model predictive control method which is a kind of optimal feedback control with a performance index that has a moving initial time and terminal time. However, model predictive control method is inapplicable to systems whose all state variables are not exactly known. In other words, model predictive control method is inapplicable to systems with limited measurable states. In fact, it is usual that the state variables of systems are measured through outputs, hence, only limited parts of them can be used directly. It is also usual that output signals are disturbed by process and sensor noises. Hence, it is important to establish a state estimation method for nonlinear implicit systems with taking the process noise and sensor noise into consideration. To this purpose, we apply the model predictive control method and unscented Kalman filter for solving the optimization and estimation problems of nonlinear implicit systems, respectively. The objective of this study is to establish a model predictive control with unscented Kalman filter for nonlinear implicit systems.

Keywords: Model predictive control, unscented Kalman filter, nonlinear systems, implicit systems.

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Authors: Pinaki Pratim Acharjya, Dibyendu Ghoshal

Abstract:

Image matching methods play a key role in deciding correspondence between two image scenes. This paper presents a method for the matching of digital images using mathematical morphology. The proposed method has been applied to real life images. The matching process has shown successful and promising results.

Keywords: Digital image, gradients, image matching, mathematical morphology.

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Authors: R. Poonsuph

Abstract:

Technological innovation plays a crucial role in virtual healthcare services. A growing number of telehealth platforms are concentrating on using digital tools to improve the quality and availability of care. As a result, telehealth represents an opportunity to redesign the way health services are delivered. The research objective is to discover a new business model for digital health services and related industries to participate with telehealth solutions. The business opportunity is valuable for healthcare investors as a startup company to further investigations or implement the telehealth platform. The paper presents a digital healthcare business model and business opportunities to related industries. These include digital healthcare services extending from a traditional business model and use cases of business opportunities to related industries. Although there are enormous business opportunities, telehealth is still challenging due to the patient adaption and digital transformation process within a healthcare organization.

Keywords: telehealth, Internet hospital, HealthTech, InsurTech

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Authors: Bruno Vilić Belina, Ivan Župan

Abstract:

Smart industry concepts and digital transformation are very popular in many industries. They develop their own digital platforms, which have an important role in innovations and transactions. The main idea of smart industry digital platforms is central data collection, industrial data integration and data usage for smart applications and services. This paper presents the development of a digital platform for building critical infrastructure protection systems in smart industries. Different service contraction modalities in Service Level Agreements (SLAs), Customer Relationship Management (CRM) relations, trends and changes in business architectures (especially process business architecture) for the purpose of developing infrastructural production and distribution networks, information infrastructure meta-models and generic processes by critical infrastructure owner demanded by critical infrastructure law, satisfying cybersecurity requirements and taking into account hybrid threats are researched.

Keywords: Cybersecurity, critical infrastructure, smart industries, digital platform.

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Authors: T Panigrahi, G Panda, Mulgrew

Abstract:

This paper introduces a new approach for the performance analysis of adaptive filter with error saturation nonlinearity in the presence of impulsive noise. The performance analysis of adaptive filters includes both transient analysis which shows that how fast a filter learns and the steady-state analysis gives how well a filter learns. The recursive expressions for mean-square deviation(MSD) and excess mean-square error(EMSE) are derived based on weighted energy conservation arguments which provide the transient behavior of the adaptive algorithm. The steady-state analysis for co-related input regressor data is analyzed, so this approach leads to a new performance results without restricting the input regression data to be white.

Keywords: Error saturation nonlinearity, transient analysis, impulsive noise.

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Authors: Halil Ersin Soken, Chingiz Hajiyev

Abstract:

In the normal operation conditions of a pico satellite, conventional Unscented Kalman Filter (UKF) gives sufficiently good estimation results. However, if the measurements are not reliable because of any kind of malfunction in the estimation system, UKF gives inaccurate results and diverges by time. This study, introduces Robust Unscented Kalman Filter (RUKF) algorithms with the filter gain correction for the case of measurement malfunctions. By the use of defined variables named as measurement noise scale factor, the faulty measurements are taken into the consideration with a small weight and the estimations are corrected without affecting the characteristic of the accurate ones. Two different RUKF algorithms, one with single scale factor and one with multiple scale factors, are proposed and applied for the attitude estimation process of a pico satellite. The results of these algorithms are compared for different types of measurement faults in different estimation scenarios and recommendations about their applications are given.

Keywords: attitude algorithms, Kalman filters, robustestimation.

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Authors: Daniel Gonzales, Zev Winkelman, Trung Tran, Ricardo Sanchez, Dulani Woods, John Hollywood

Abstract:

We have developed a distributed computing capability, Digital Forensics Compute Cluster (DFORC2) to speed up the ingestion and processing of digital evidence that is resident on computer hard drives. DFORC2 parallelizes evidence ingestion and file processing steps. It can be run on a standalone computer cluster or in the Amazon Web Services (AWS) cloud. When running in a virtualized computing environment, its cluster resources can be dynamically scaled up or down using Kubernetes. DFORC2 is an open source project that uses Autopsy, Apache Spark and Kafka, and other open source software packages. It extends the proven open source digital forensics capabilities of Autopsy to compute clusters and cloud architectures, so digital forensics tasks can be accomplished efficiently by a scalable array of cluster compute nodes. In this paper, we describe DFORC2 and compare it with a standalone version of Autopsy when both are used to process evidence from hard drives of different sizes.

Keywords: Cloud computing, cybersecurity, digital forensics, Kafka, Kubernetes, Spark.

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Authors: Il Young Song, Du Yong Kim, Vladimir Shin

Abstract:

This paper reports on a receding horizon filtering for mobile robot systems with cross-correlated sensor noises and uncertainties. Also, the effect of uncertain parameters in the state of the tracking error model performance is considered. A distributed fusion receding horizon filter is proposed. The distributed fusion filtering algorithm represents the optimal linear combination of the local filters under the minimum mean square error criterion. The derivation of the error cross-covariances between the local receding horizon filters is the key of this paper. Simulation results of the tracking mobile robot-s motion demonstrate high accuracy and computational efficiency of the distributed fusion receding horizon filter.

Keywords: Distributed fusion, fusion formula, Kalman filter, multisensor, receding horizon, wheeled mobile robot

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Authors: Salah Al-Din I. Badran, Samad Ahmadi, Dylan Menzies, Ismail Shahin

Abstract:

This paper describes a new efficient blind source separation method; in this method we uses a non-uniform filter bank and a new structure with different sub-bands. This method provides a reduced permutation and increased convergence speed comparing to the full-band algorithm. Recently, some structures have been suggested to deal with two problems: reducing permutation and increasing the speed of convergence of the adaptive algorithm for correlated input signals. The permutation problem is avoided with the use of adaptive filters of orders less than the full-band adaptive filter, which operate at a sampling rate lower than the sampling rate of the input signal. The decomposed signals by analysis bank filter are less correlated in each sub-band than the input signal at full-band, and can promote better rates of convergence.

Keywords: Blind source separation (BSS), estimates, full-band, mixtures, Sub-band.

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Authors: J. Mbihi

Abstract:

This paper presents a dynamic architecture of digital duty-cycle modulation control drivers. Compared to most oversampling digital modulation schemes encountered in industrial electronics, its novelty is founded on a number of relevant merits including; embedded positive and negative feedback loops, internal modulation clock, structural simplicity, elementary building operators, no explicit need of samples of the nonlinear duty-cycle function when computing the switching modulated signal, and minimum number of design parameters. A prototyping digital control driver is synthesized and well tested within MATLAB/Simulink workspace. Then, the virtual simulation results and performance obtained under a sample of relevant instrumentation and control systems are presented, in order to show the feasibility, the reliability, and the versatility of target applications, of the proposed class of low cost and high quality digital control drivers in industrial electronics.

Keywords: Dynamic architecture, virtual simulation, duty-cycle modulation, digital control drivers, industrial electronics.

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Authors: Igor Belykh

Abstract:

Anti-scatter grids used in radiographic imaging for the contrast enhancement leave specific artifacts. Those artifacts may be visible or may cause Moiré effect when digital image is resized on a diagnostic monitor. In this paper we propose an automated grid artifactsdetection and suppression algorithm which is still an actual problem. Grid artifacts detection is based on statistical approach in spatial domain. Grid artifacts suppression is based on Kaiser bandstop filter transfer function design and application avoiding ringing artifacts. Experimental results are discussed and concluded with description of advantages over existing approaches.

Keywords: Computed radiography, grid artifacts, image filtering.

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Authors: G. Schirripa Spagnolo, M. De Santis

Abstract:

The protection of the contents of digital products is referred to as content authentication. In some applications, to be able to authenticate a digital product could be extremely essential. For example, if a digital product is used as a piece of evidence in the court, its integrity could mean life or death of the accused. Generally, the problem of content authentication can be solved using semifragile digital watermarking techniques. Recently many authors have proposed Computer Generated Hologram Watermarking (CGHWatermarking) techniques. Starting from these studies, in this paper a semi-fragile Computer Generated Hologram coding technique is proposed, which is able to detect malicious tampering while tolerating some incidental distortions. The proposed technique uses as watermark an encrypted image, and it is well suitable for digital image authentication.

Keywords: Asymmetric cryptography, Semi-Fragile watermarking, Image authentication, Hologram watermark, Public- Key Cryptography, RSA.

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Authors: Mahmoud Elmezain, Ayoub Al-Hamadi, Robert Niese, Bernd Michaelis

Abstract:

Real-time hand tracking is a challenging task in many computer vision applications such as gesture recognition. This paper proposes a robust method for hand tracking in a complex environment using Mean-shift analysis and Kalman filter in conjunction with 3D depth map. The depth information solve the overlapping problem between hands and face, which is obtained by passive stereo measuring based on cross correlation and the known calibration data of the cameras. Mean-shift analysis uses the gradient of Bhattacharyya coefficient as a similarity function to derive the candidate of the hand that is most similar to a given hand target model. And then, Kalman filter is used to estimate the position of the hand target. The results of hand tracking, tested on various video sequences, are robust to changes in shape as well as partial occlusion.

Keywords: Computer Vision and Image Analysis, Object Tracking, Gesture Recognition.

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Authors: Kavala Kiran Kumar, R. Govardhana Rao

Abstract:

Active power filter continues to be a powerful tool to control harmonics in power systems thereby enhancing the power quality. This paper presents a fuzzy tuned PID controller based shunt active filter to diminish the harmonics caused by non linear loads like thyristor bridge rectifiers and imbalanced loads. Here Fuzzy controller provides the tuning of PID, based on firing of thyristor bridge rectifiers and variations in input rms current. The shunt APF system is implemented with three phase current controlled Voltage Source Inverter (VSI) and is connected at the point of common coupling for compensating the current harmonics by injecting equal but opposite filter currents. These controllers are capable of controlling dc-side capacitor voltage and estimating reference currents. Hysteresis Current Controller (HCC) is used to generate switching signals for the voltage source inverter. Simulation studies are carried out with non linear loads like thyristor bridge rectifier along with unbalanced loads and the results proved that the APF along with fuzzy tuned PID controller work flawlessly for different firing angles of non linear load.

Keywords: Active power filters (APF), Fuzzy logic controller (FLC), Hysteresis current controller (HCC), PID, Total harmonic Distortion (THD), Voltage source inverter (VSI).

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Authors: Zeeshan Hamid, Sarwar Mehmood Azhar, Hammad Basir

Abstract:

In today’s era, it is no news that organizations should demonstrate honest conduct as well as ethical administration. Therefore, the concept of corporate social responsibility (subsequently CSR) has created its tag upon the company’s focal point as well as marketing communications, and will continue in the future. The importance of CSR has increased in the last decade, and this concept has attracted global attention. The notion of CSR has strategic significance for many organizations. However, businesses are not adapting the activities of CSR that benefit to all of its stakeholders (including society). The main reason is the practitioners are unfortunately unable to comprehend its importance; and therefore, the activities of the CSR are so detached from the business activities. Hence, it is required to develop an understanding that the activities of CSR are not only beneficial for the society but it also benefit to business. This paper focuses on the concept of strategic CSR, and develops a theoretical framework that will help practitioners to filter and chose the activities of CSR that are strategic in nature.

Keywords: Economic responsibility, ethical responsibility, legal responsibility, philanthropic responsibility, strategic corporate social responsibility, value chain activities filter.

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Authors: Wei-Pin Tseng, Jie-Chung Lou, Ming-Ching Wu, Huang-Ming Fang

Abstract:

For stricter drinking water regulations in the future, reducing the humic acid and disinfection byproducts in raw water, namely, trihalomethanes (THMs) and haloacetic acids (HAAs) is worthy for research. To investigate the removal of waterborne organic material using a lab-scale of bio-activated carbon filter under different EBCT, the concentrations of humic acid prepared were 0.01, 0.03, 0.06, 0.12, 0.17, 0.23, and 0.29 mg/L. Then we conducted experiments using a pilot plant with in-field of the serially connected bio-activated carbon filters and hollow fiber membrane processes employed in traditional water purification plants. Results showed under low TOC conditions of humic acid in influent (0.69 to 1.03 mg TOC/L) with an EBCT of 30 min, 40 min, and 50 min, TOC removal rates increases with greater EBCT, attaining about 39 % removal rate. The removal rate of THMs and HAAs by BACF was 54.8 % and 89.0 %, respectively.

Keywords: Bio-activated carbon filter, hollow fiber membrane, humic acid, THMs, HAAs, Water Treatment

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Authors: Mihaela Popescu, Alexandru Bitoleanu, Mircea Dobriceanu, Vlad Suru

Abstract:

The aim of this paper is to identify an optimum control strategy of three-phase shunt active filters to minimize the total harmonic distortion factor of the supply current. A classical PIPI cascade control solution of the output current of the active filterand the voltage across the DC capacitor based on Modulus–Optimum criterion is taken into consideration. The control system operation has been simulated using Matlab-Simulink environment and the results agree with the theoretical expectation. It is shown that there is an optimum value of the DC-bus voltage which minimizes the supply current harmonic distortion factor. It corresponds to the equality of the apparent power at the output of the active filter and the apparent power across the capacitor. Finally, predicted results are verified experimentally on a MaxSine active power filter.

Keywords: Active filtering, Controller tuning, Modulus Optimum criterion, Optimum control.

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Authors: Yeon-kug Moon, Kang-Yoon Lee, Yun-Jae Won, Seung-Ok Lim

Abstract:

This paper describes a low-voltage and low-power channel selection analog front end with continuous-time low pass filters and highly linear programmable gain amplifier (PGA). The filters were realized as balanced Gm-C biquadratic filters to achieve a low current consumption. High linearity and a constant wide bandwidth are achieved by using a new transconductance (Gm) cell. The PGA has a voltage gain varying from 0 to 65dB, while maintaining a constant bandwidth. A filter tuning circuit that requires an accurate time base but no external components is presented. With a 1-Vrms differential input and output, the filter achieves -85dB THD and a 78dB signal-to-noise ratio. Both the filter and PGA were implemented in a 0.18um 1P6M n-well CMOS process. They consume 3.2mW from a 1.8V power supply and occupy an area of 0.19mm2.

Keywords: component ; Channel selection filters, DC offset, programmable gain amplifier, tuning circuit

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Authors: Michal Natora, Felix Franke, Klaus Obermayer

Abstract:

Linear convolutive filters are fast in calculation and in application, and thus, often used for real-time processing of continuous data streams. In the case of transient signals, a filter has not only to detect the presence of a specific waveform, but to estimate its arrival time as well. In this study, a measure is presented which indicates the performance of detectors in achieving both of these tasks simultaneously. Furthermore, a new sub-class of linear filters within the class of filters which minimize the quadratic response is proposed. The proposed filters are more flexible than the existing ones, like the adaptive matched filter or the minimum power distortionless response beamformer, and prove to be superior with respect to that measure in certain settings. Simulations of a real-time scenario confirm the advantage of these filters as well as the usefulness of the performance measure.

Keywords: Adaptive matched filter, minimum variance distortionless response, beam forming, Capon beam former, linear filters, performance measure.

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Authors: S. Saisundar, Shan Jiang, Kevin T. C. Chai, David Nuttman, Minkyu Je

Abstract:

Keywords: Analog to digital converter, cyclic, gain-boosting, pipelined.

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Authors: Xinyue Zhao, Yutaka Satoh, Hidenori Takauji, Shun'ichi Kaneko

Abstract:

A hybrid feature based adaptive particle filter algorithm is presented for object tracking in real scenarios with static camera. The hybrid feature is combined by two effective features: the Grayscale Arranging Pairs (GAP) feature and the color histogram feature. The GAP feature has high discriminative ability even under conditions of severe illumination variation and dynamic background elements, while the color histogram feature has high reliability to identify the detected objects. The combination of two features covers the shortage of single feature. Furthermore, we adopt an updating target model so that some external problems such as visual angles can be overcame well. An automatic initialization algorithm is introduced which provides precise initial positions of objects. The experimental results show the good performance of the proposed method.

Keywords: Hybrid feature, adaptive Particle Filter, robust Object Tracking, Grayscale Arranging Pairs (GAP) feature.

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Authors: Zongqing Lu

Abstract:

It has proved that nonlinear diffusion and bilateral filtering (BF) have a closed connection. Early effort and contribution are to find a generalized representation to link them by using adaptive filtering. In this paper a new further relationship between nonlinear diffusion and bilateral filtering is explored which pays more attention to numerical calculus. We give a fresh idea that bilateral filtering can be accelerated by multigrid (MG) scheme which likes the nonlinear diffusion, and show that a bilateral filtering process with large kernel size can be approximated by a nonlinear diffusion process based on full multigrid (FMG) scheme.

Keywords: Bilateral filter, multigrid

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Authors: Marita Canina, Carmen Bruno

Abstract:

Digital Do It Yourself (DIY) is a contemporary socio-technological phenomenon, enabled by technological tools. The nature and potential long-term effects of this phenomenon have been widely studied within the framework of the EU funded project ‘Digital Do It Yourself’, in which the authors have created and experimented a specific Digital Do It Yourself (DiDIY) co-design process. The phenomenon was first studied through a literature research to understand its multiple dimensions and complexity. Therefore, co-design workshops were used to investigate the phenomenon by involving people to achieve a complete understanding of the DiDIY practices and its enabling factors. These analyses allowed the definition of the DiDIY fundamental factors that were then translated into a design tool. The objective of the tool is to shape design concepts by transferring these factors into different environments to achieve innovation. The aim of this paper is to present the ‘DiDIY Factor Stimuli’ tool, describing the research path and the findings behind it.

Keywords: Co-design process, digital DIY, innovation, toolkit.

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Authors: D.Gnanadurai, V.Sadasivam

Abstract:

This frame work describes a computationally more efficient and adaptive threshold estimation method for image denoising in the wavelet domain based on Generalized Gaussian Distribution (GGD) modeling of subband coefficients. In this proposed method, the choice of the threshold estimation is carried out by analysing the statistical parameters of the wavelet subband coefficients like standard deviation, arithmetic mean and geometrical mean. The noisy image is first decomposed into many levels to obtain different frequency bands. Then soft thresholding method is used to remove the noisy coefficients, by fixing the optimum thresholding value by the proposed method. Experimental results on several test images by using this method show that this method yields significantly superior image quality and better Peak Signal to Noise Ratio (PSNR). Here, to prove the efficiency of this method in image denoising, we have compared this with various denoising methods like wiener filter, Average filter, VisuShrink and BayesShrink.

Keywords: Wavelet Transform, Gaussian Noise, ImageDenoising, Filter Banks and Thresholding.

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Authors: H. M. Côrtes, J. I. Da Silva Filho, M. F. Blos, B. S. Zanon

Abstract:

In a modern society the factor corresponding to the increase in the level of quality in industrial production demand new techniques of control and machinery automation. In this context, this work presents the implementation of a Paraconsistent-Fuzzy Digital PID controller. The controller is based on the treatment of inconsistencies both in the Paraconsistent Logic and in the Fuzzy Logic. Paraconsistent analysis is performed on the signals applied to the system inputs using concepts from the Paraconsistent Annotated Logic with annotation of two values (PAL2v). The signals resulting from the paraconsistent analysis are two values defined as Dc - Degree of Certainty and Dct - Degree of Contradiction, which receive a treatment according to the Fuzzy Logic theory, and the resulting output of the logic actions is a single value called the crisp value, which is used to control dynamic system. Through an example, it was demonstrated the application of the proposed model. Initially, the Paraconsistent-Fuzzy Digital PID controller was built and tested in an isolated MATLAB environment and then compared to the equivalent Digital PID function of this software for standard step excitation. After this step, a level control plant was modeled to execute the controller function on a physical model, making the tests closer to the actual. For this, the control parameters (proportional, integral and derivative) were determined for the configuration of the conventional Digital PID controller and of the Paraconsistent-Fuzzy Digital PID, and the control meshes in MATLAB were assembled with the respective transfer function of the plant. Finally, the results of the comparison of the level control process between the Paraconsistent-Fuzzy Digital PID controller and the conventional Digital PID controller were presented.

Keywords: Fuzzy logic, paraconsistent annotated logic, level control, digital PID.

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Authors: J. Chelladurai, G. Saravana Ilango, C. Nagamani, S. Senthil Kumar

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Pulse width modulation (PWM) techniques have been the subject of intensive research for different industrial and power sector applications. A large variety of methods, different in concept and performance, have been newly developed and described. This paper analyzes the comparative merits of Sinusoidal Pulse Width Modulation (SPWM) and Space Vector Pulse Width Modulation (SVPWM) techniques and the suitability of these techniques in a Shunt Active Filter (SAF). The objective is to select the scheme that offers effective utilization of DC bus voltage and also harmonic reduction at the input side. The effectiveness of the PWM techniques is tested in the SAF configuration with a non linear load. The performance of the SAF with the SPWM and (SVPWM) techniques are compared with respect to the THD in source current. The study reveals that in the context of closed loop SAF control with the SVPWM technique there is only a minor improvement in THD. The utilization of the DC bus with SVPWM is also not significant compared to that with SPWM because of the non sinusoidal modulating signal from the controller in SAF configuration.

Keywords: Voltage source inverter, Shunt active filter, SPWM, SVPWM, Matlab/SIMULINK.

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Authors: Dahi Ghareab Abdelsalam Ibrahim

Abstract:

Axial and lateral measurements of a step depth standard are presented. The axial measurement is performed based on the ISO 5436 profile analysis. The lateral measurement is performed based on the Hamming window band-pass filter method. The method is applied to calibrate a groove structure of a step depth standard of 60 nm. For the axial measurement, the computed results show that the depth of the groove structure is 59.7 ± 0.6 nm. For the lateral measurement, the computed results show that the difference between the two line edges of the groove structure is 151.7 ± 2.5 nm. The method can be applied to any step height/depth regardless of the sharpness of the line edges.

Keywords: Hamming window, band-pass filter, metrology, interferometry.

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