Search results for: Comprehensive language input
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 2602

Search results for: Comprehensive language input

1552 Optimal Control of Piezo-Thermo-Elastic Beams

Authors: Marwan Abukhaled, Ibrahim Sadek

Abstract:

This paper presents the vibrations suppression of a thermoelastic beam subject to sudden heat input by a distributed piezoelectric actuators. An optimization problem is formulated as the minimization of a quadratic functional in terms of displacement and velocity at a given time and with the least control effort. The solution method is based on a combination of modal expansion and variational approaches. The modal expansion approach is used to convert the optimal control of distributed parameter system into the optimal control of lumped parameter system. By utilizing the variational approach, an explicit optimal control law is derived and the determination of the corresponding displacement and velocity is reduced to solving a set of ordinary differential equations.

Keywords: Optimal control, Thermoelastic beam, variational approach, modal expansion approach

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1551 Development of Circulating Support Environment of Multilingual Medical Communication using Parallel Texts for Foreign Patients

Authors: Mai Miyabe, Taku Fukushima, Takashi Yoshino, Aguri Shigeno

Abstract:

The need for multilingual communication in Japan has increased due to an increase in the number of foreigners in the country. When people communicate in their nonnative language, the differences in language prevent mutual understanding among the communicating individuals. In the medical field, communication between the hospital staff and patients is a serious problem. Currently, medical translators accompany patients to medical care facilities, and the demand for medical translators is increasing. However, medical translators cannot necessarily provide support, especially in cases in which round-the-clock support is required or in case of emergencies. The medical field has high expectations from information technology. Hence, a system that supports accurate multilingual communication is required. Despite recent advances in machine translation technology, it is very difficult to obtain highly accurate translations. We have developed a support system called M3 for multilingual medical reception. M3 provides support functions that aid foreign patients in the following respects: conversation, questionnaires, reception procedures, and hospital navigation; it also has a Q&A function. Users can operate M3 using a touch screen and receive text-based support. In addition, M3 uses accurate translation tools called parallel texts to facilitate reliable communication through conversations between the hospital staff and the patients. However, if there is no parallel text that expresses what users want to communicate, the users cannot communicate. In this study, we have developed a circulating support environment for multilingual medical communication using parallel texts. The proposed environment can circulate necessary parallel texts through the following procedure: (1) a user provides feedback about the necessary parallel texts, following which (2) these parallel texts are created and evaluated.

Keywords: multilingual medical communication, parallel texts.

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1550 How Can We Carry Out Green Incentives Most Efficiently?

Authors: Peter Yang

Abstract:

Green incentives are included in the “American Recovery and Reinvestment Act of 2009" (ARRA). It is, however, unclear how these government incentives can be carried out most effectively according to market-based principles and if they can serve as a catalyst for an accelerated green transformation and an ultimate solution to the current U.S. and global economic and financial crisis. The article will compare the existing U.S. green economic policies with those in Germany, identify problems, and suggest improvements to allow the green stimulus incentives to achieve the best results in the process of an accelerated green transformation. The author argues that the current U.S. green stimulus incentives can only be most successful if they are carried out as part of a visionary, comprehensive, long-term, and consistent strategy of the green economic transformation.

Keywords: Green incentives, financial crisis, green economy, renewable energy sources, energy efficiency.

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1549 Project Management and Software Development Processes: Integrating PMBOK and OPEN

Authors: Maurício Covolan Rosito, Daniel Antonio Callegari, Ricardo Melo Bastos

Abstract:

Software organizations are constantly looking for better solutions when designing and using well-defined software processes for the development of their products and services. However, while the technical aspects are virtually easier to arrange, many software development processes lack more support on project management issues. When adopting such processes, an organization needs to apply good project management skills along with technical views provided by those models. This research proposes the definition of a new model that integrates the concepts of PMBOK and those available on the OPEN metamodel, helping not only process integration but also building the steps towards a more comprehensive and automatable model.

Keywords: OPEN metamodel, PMBOK metamodel, Project Management, Software Process

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1548 Security Strengths and Weaknesses of Blockchain Smart Contract System: A Survey

Authors: Malaw Ndiaye, Karim Konate

Abstract:

Smart contracts are computer protocols that facilitate, verify, and execute the negotiation or execution of a contract, or that render a contractual term unnecessary. Blockchain and smart contracts can be used to facilitate almost any financial transaction. Thanks to these smart contracts, the settlement of dividends and coupons could be automated. Smart contracts have become lucrative and profitable targets for attackers because they can hold a great amount of money. Smart contracts, although widely used in blockchain technology, are far from perfect due to security concerns. Although a series of attacks are listed, there is a lack of discussions and proposals on improving security. This survey takes stock of smart contract security from a more comprehensive perspective by correlating the level of vulnerability and systematic review of security levels in smart contracts.

Keywords: Blockchain, bitcoin, smart Contract, criminal smart contract, security.

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1547 A New Current-mode Multifunction Filter with High Impedance Outputs Using Minimum Number of Passive Elements

Authors: Mehmet Sagbas, Kemal Fidanboylu, Mehmet C. Bayram

Abstract:

A new current-mode multifunction filter using minimum number of passive elements is proposed. The proposed filter has single-input and four high-impedance outputs. It uses four passive elements (two capacitors and two resistors) and four dual output second generation current conveyors. Each output provides a different filter response, namely, low-pass, high-pass, band-pass and band-reject. The sensitivity analysis is also carried out on both ideal and non-ideal filter configurations. The validity of the proposed filter is verified through PSPICE simulations.

Keywords: Active filter, Universal filter, Currentconveyors.

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1546 Measuring Science and Technology Innovation Capacity in Developing Countries: From a National Innovation System

Authors: Haeng A. Seo, Changseok Oh, Seung Jun Yoo

Abstract:

This study attempts to examine the disparities in S&T innovation capacity from 14 developing countries to discuss how to support specific features in national innovation systems. It includes East-Asian, Middle-Asian, Central American and African countries. Here, we particularly focus on five dimensions- resources, activities, network, environment and performance- with 37 indicators. They were derived as structuring components of the relevant diagnostic model, which encompasses the whole process of S&T innovation from the input of resources to the output of economically valuable results. For many developing nations, economic industries remain weaker than actual S&T capabilities, and relevant regulatory authorities may not exist. This paper will be helpful to provide basic evidence and to set directions for better national S&T Innovation capacities and toward national competitiveness.

Keywords: Developing countries, measurement, NIS, S&T innovation capacity.

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1545 A Fuzzy Nonlinear Regression Model for Interval Type-2 Fuzzy Sets

Authors: O. Poleshchuk, E.Komarov

Abstract:

This paper presents a regression model for interval type-2 fuzzy sets based on the least squares estimation technique. Unknown coefficients are assumed to be triangular fuzzy numbers. The basic idea is to determine aggregation intervals for type-1 fuzzy sets, membership functions of whose are low membership function and upper membership function of interval type-2 fuzzy set. These aggregation intervals were called weighted intervals. Low and upper membership functions of input and output interval type-2 fuzzy sets for developed regression models are considered as piecewise linear functions.

Keywords: Interval type-2 fuzzy sets, fuzzy regression, weighted interval.

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1544 Performance Evaluation of Distributed and Co-Located MIMO LTE Physical Layer Using Wireless Open-Access Research Platform

Authors: Ishak Suleiman, Ahmad Kamsani Samingan, Yeoh Chun Yeow, Abdul Aziz Bin Abdul Rahman

Abstract:

In this paper, we evaluate the benefits of distributed 4x4 MIMO LTE downlink systems compared to that of the co-located 4x4 MIMO LTE downlink system. The performance evaluation was carried out experimentally by using Wireless Open-Access Research Platform (WARP), where the comparison between the 4x4 MIMO LTE transmission downlink system in distributed and co-located techniques was examined. The measured Error Vector Magnitude (EVM) results showed that the distributed technique achieved better system performance compared to the co-located arrangement.

Keywords: Multiple-input-multiple-output, MIMO, distributed MIMO, co-located MIMO, LTE.

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1543 An Empirical Analysis of Earnings Management in Australia

Authors: Lan Sun, Subhrendu Rath

Abstract:

This is a comprehensive large-sample study of Australian earnings management. Using a sample of 4,844 firm-year observations across nine Australia industries from 2000 to 2006, we find substantial corporate earnings management activity across several Australian industries. We document strong evidence of size and return on assets being primary determinants of earnings management in Australia. The effects of size and return on assets are also found to be dominant in both income-increasing and incomedecreasing earnings manipulation. We also document that that periphery sector firms are more likely to involve larger magnitude of earnings management than firms in the core sector.

Keywords: Earnings management, discretionary accruals, income-increasing/decreasing manipulation, dual economy sector

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1542 Changes in EEG and HRV during Event-Related Attention

Authors: Sun K. Yoo, Chung K. Lee

Abstract:

Determination of attentional status is important because working performance and an unexpected accident is highly related with the attention. The autonomic nervous and the central nervous systems can reflect the changes in person’s attentional status. Reduced number of suitable pysiological parameters among autonomic and central nervous systems related signal parameters will be critical in optimum design of attentional devices. In this paper, we analyze the EEG (Electroencephalography) and HRV (Heart Rate Variability) signals to demonstrate the effective relation with brain signal and cardiovascular signal during event-related attention, which will be later used in selecting the minimum set of attentional parameters. Time and frequency domain parameters from HRV signal and frequency domain parameters from EEG signal are used as input to the optimum feature parameters selector.

Keywords: EEG, HRV, attentional status.

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1541 Semi-Automatic Trend Detection in Scholarly Repository Using Semantic Approach

Authors: Fereshteh Mahdavi, Maizatul Akmar Ismail, Noorhidawati Abdullah

Abstract:

Currently WWW is the first solution for scholars in finding information. But, analyzing and interpreting this volume of information will lead to researchers overload in pursuing their research. Trend detection in scientific publication retrieval systems helps scholars to find relevant, new and popular special areas by visualizing the trend of input topic. However, there are few researches on trend detection in scientific corpora while their proposed models do not appear to be suitable. Previous works lack of an appropriate representation scheme for research topics. This paper describes a method that combines Semantic Web and ontology to support advance search functions such as trend detection in the context of scholarly Semantic Web system (SSWeb).

Keywords: Trend, Semi-Automatic Trend Detection, Ontology, Semantic Trend Detection.

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1540 Edge Segmentation of Satellite Image using Phase Congruency Model

Authors: Ahmed Zaafouri, Mounir Sayadi, Farhat Fnaiech

Abstract:

In this paper, we present a method for edge segmentation of satellite images based on 2-D Phase Congruency (PC) model. The proposed approach is composed by two steps: The contextual non linear smoothing algorithm (CNLS) is used to smooth the input images. Then, the 2D stretched Gabor filter (S-G filter) based on proposed angular variation is developed in order to avoid the multiple responses in the previous work. An assessment of our proposed method performance is provided in terms of accuracy of satellite image edge segmentation. The proposed method is compared with others known approaches.

Keywords: Edge segmentation, Phase congruency model, Satellite images, Stretched Gabor filter

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1539 A Novel Metric for Performance Evaluation of Image Fusion Algorithms

Authors: Nedeljko Cvejic, Artur Łoza, David Bull, Nishan Canagarajah

Abstract:

In this paper, we present a novel objective nonreference performance assessment algorithm for image fusion. It takes into account local measurements to estimate how well the important information in the source images is represented by the fused image. The metric is based on the Universal Image Quality Index and uses the similarity between blocks of pixels in the input images and the fused image as the weighting factors for the metrics. Experimental results confirm that the values of the proposed metrics correlate well with the subjective quality of the fused images, giving a significant improvement over standard measures based on mean squared error and mutual information.

Keywords: Fusion performance measures, image fusion, non-reference quality measures, objective quality measures.

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1538 Identifying the Objectives of Outsourcing Logistics Services as a Basis for Measuring Its Financial and Operational Performance

Authors: Carlos Sanchís-Pedregosa, María del Mar González-Zamora, José A. D. Machuca

Abstract:

Logistics outsourcing is a growing trend and measuring its performance, a challenge. It must be consistent with the objectives set for logistics outsourcing, but we have found no objective-based performance measurement system. We have conducted a comprehensive review of the specialist literature to cover this gap, which has led us to identify and define these objectives. The outcome is that we have obtained a list of the most relevant objectives and their descriptions. This will enable us to analyse in a future study whether the indicators used for measuring logistics outsourcing performance are consistent with the objectives pursued with the outsourcing. If this is not the case, a proposal will be made for a set of financial and operational indicators to measure performance in logistics outsourcing that take the goals being pursued into account.

Keywords: Outsourcing, Performance measurement, Logistics, Objectives, Indicators

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1537 Fuzzy Multi-Component DEA with Shared and Undesirable Fuzzy Resources

Authors: Jolly Puri, Shiv Prasad Yadav

Abstract:

Multi-component data envelopment analysis (MC-DEA) is a popular technique for measuring aggregate performance of the decision making units (DMUs) along with their components. However, the conventional MC-DEA is limited to crisp input and output data which may not always be available in exact form. In real life problems, data may be imprecise or fuzzy. Therefore, in this paper, we propose (i) a fuzzy MC-DEA (FMC-DEA) model in which shared and undesirable fuzzy resources are incorporated, (ii) the proposed FMC-DEA model is transformed into a pair of crisp models using α cut approach, (iii) fuzzy aggregate performance of a DMU and fuzzy efficiencies of components are defined to be fuzzy numbers, and (iv) a numerical example is illustrated to validate the proposed approach.

Keywords: Multi-component DEA, fuzzy multi-component DEA, fuzzy resources.

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1536 Effect of Trataka on Anxiety among Adolescents

Authors: Pushp Lata Rajpoot, Pushpa Vaishnav

Abstract:

Anxiety is a common psychological problem and also implicated as a contributor to many chronic diseases which decreased quality of life even with pharmacological treatment. At the present time several yogic practices- meditation, pranayama, and mantra, etcetera are playing important role in treating physiological and psychological problems. Hence, the present investigation is aimed to see the effect of Trataka on the level of anxiety among adolescents. For the present study, a sample of 30 adolescents belonging to the age range 20-30 years was selected from Devsanskriti Vishwa Vidyalaya Haridwar through random sampling. In this investigation, Sinha’s Comprehensive anxiety test has been used to measure the level of anxiety. Statistical analysis has been done by using t-test. Findings of this study reveal that Trataka significantly decreases the level of anxiety among adolescents.

Keywords: Adolescents, Anxiety, Trataka.

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1535 Virtual Gesture Screen System Based on 3D Visual Information and Multi-Layer Perceptron

Authors: Yang-Keun Ahn, Min-Wook Kim, Young-Choong Park, Kwang-Soon Choi, Woo-Chool Park, Hae-Moon Seo, Kwang-Mo Jung

Abstract:

Active research is underway on virtual touch screens that complement the physical limitations of conventional touch screens. This paper discusses a virtual touch screen that uses a multi-layer perceptron to recognize and control three-dimensional (3D) depth information from a time of flight (TOF) camera. This system extracts an object-s area from the image input and compares it with the trajectory of the object, which is learned in advance, to recognize gestures. The system enables the maneuvering of content in virtual space by utilizing human actions.

Keywords: Gesture Recognition, Depth Sensor, Virtual Touch Screen

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1534 A New Method for Detection of Artificial Objects and Materials from Long Distance Environmental Images

Authors: H. Dujmic, V. Papic, H. Turic

Abstract:

The article presents a new method for detection of artificial objects and materials from images of the environmental (non-urban) terrain. Our approach uses the hue and saturation (or Cb and Cr) components of the image as the input to the segmentation module that uses the mean shift method. The clusters obtained as the output of this stage have been processed by the decision-making module in order to find the regions of the image with the significant possibility of representing human. Although this method will detect various non-natural objects, it is primarily intended and optimized for detection of humans; i.e. for search and rescue purposes in non-urban terrain where, in normal circumstances, non-natural objects shouldn-t be present. Real world images are used for the evaluation of the method.

Keywords: Landscape surveillance, mean shift algorithm, image segmentation, target detection.

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1533 Transmission Loss Allocation via Loss Function Decomposition and Current Projection Concept

Authors: M.R. Ebrahimi, Z. Ghofrani, M. Ehsan

Abstract:

One of the major problems in liberalized power markets is loss allocation. In this paper, a different method for allocating transmission losses to pool market participants is proposed. The proposed method is fundamentally based on decomposition of loss function and current projection concept. The method has been implemented and tested on several networks and one sample summarized in the paper. The results show that the method is comprehensive and fair to allocating the energy losses of a power market to its participants.

Keywords: Transmission loss, loss allocation, current projectionconcept, loss function decomposition.

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1532 An Improved Cooperative Communication Scheme for IoT System

Authors: Eui-Hak Lee, Jae-Hyun Ro, Hyoung-Kyu Song

Abstract:

In internet of things (IoT) system, the communication scheme with reliability and low power is required to connect a terminal. Cooperative communication can achieve reliability and lower power than multiple-input multiple-output (MIMO) system. Cooperative communication increases the reliability with low power, but decreases a throughput. It has a weak point that the communication throughput is decreased. In this paper, a novel scheme is proposed to increase the communication throughput. The novel scheme is a transmission structure that increases transmission rate. A decoding scheme according to the novel transmission structure is proposed. Simulation results show that the proposed scheme increases the throughput without bit error rate (BER) performance degradation.

Keywords: Cooperative communication, IoT, STBC, Transmission rate.

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1531 ZVZCT PWM Boost DC-DC Converter

Authors: İsmail Aksoy, Hacı Bodur, Nihan Altıntas

Abstract:

This paper introduces a boost converter with a new active snubber cell. In this circuit, all of the semiconductor components in the converter softly turns on and turns off with the help of the active snubber cell. Compared to the other converters, the proposed converter has advantages of size, number of components and cost. The main feature of proposed converter is that the extra voltage stresses do not occur on the main switches and main diodes. Also, the current stress on the main switch is acceptable level. Moreover, the proposed converter can operates under light load conditions and wide input line voltage. In this study, the operating principle of the proposed converter is presented and its operation is verified with the Proteus simulation software for a 1 kW and 100 kHz model.

Keywords: Active snubber cell, boost converter, zero current switching, zero voltage switching.

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1530 Prediction of Location of High Energy Shower Cores using Artificial Neural Networks

Authors: Gitanjali Devi, Kandarpa Kumar Sarma, Pranayee Datta, Anjana Kakoti Mahanta

Abstract:

Artificial Neural Network (ANN)s can be modeled for High Energy Particle analysis with special emphasis on shower core location. The work describes the use of an ANN based system which has been configured to predict locations of cores of showers in the range 1010.5 to 1020.5 eV. The system receives density values as inputs and generates coordinates of shower events recorded for values captured by 20 core positions and 80 detectors in an area of 100 meters. Twenty ANNs are trained for the purpose and the positions of shower events optimized by using cooperative ANN learning. The results derived with variations of input upto 50% show success rates in the range of 90s.

Keywords: EAS, Shower, Core, ANN, Location.

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1529 The Analysis of Different Classes of Weighted Fuzzy Petri Nets and Their Features

Authors: Yurii Bloshko, Oksana Olar

Abstract:

This paper presents the analysis of six different classes of Petri nets: fuzzy Petri nets (FPN), generalized fuzzy Petri nets (GFPN), parameterized fuzzy Petri nets (PFPN), T2GFPN, flexible generalized fuzzy Petri nets (FGFPN), binary Petri nets (BPN). These classes were simulated in the special software PNeS® for the analysis of its pros and cons on the example of models which are dedicated to the decision-making process of passenger transport logistics. The paper includes the analysis of two approaches: when input values are filled with the experts’ knowledge; when fuzzy expectations represented by output values are added to the point. These approaches fulfill the possibilities of triples of functions which are replaced with different combinations of t-/s-norms.

Keywords: Fuzzy petri net, intelligent computational techniques, knowledge representation, triangular norms.

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1528 Role of GIS in Distribution Power Systems

Authors: N. Rezaee, M Nayeripour, A. Roosta, T. Niknam

Abstract:

With the prevalence of computer and development of information technology, Geographic Information Systems (GIS) have long used for a variety of applications in electrical engineering. GIS are designed to support the analysis, management, manipulation and mapping of spatial data. This paper presents several usages of GIS in power utilities such as automated route selection for the construction of new power lines which uses a dynamic programming model for route optimization, load forecasting and optimizing planning of substation-s location and capacity with comprehensive algorithm which involves an accurate small-area electric load forecasting procedure and simulates the different cost functions of substations.

Keywords: Geographic information systems (GIS), optimallocation and capacity, power distribution planning, route selection, spatial load forecasting.

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1527 Moving towards Positive Security Model for Web Application Firewall

Authors: Asrul H. Yaacob, Nazrul M. Ahmad, Nurul N. Ahmad, Mardeni Roslee

Abstract:

The proliferation of web application and the pervasiveness of mobile technology make web-based attacks even more attractive and even easier to launch. Web Application Firewall (WAF) is an intermediate tool between web server and users that provides comprehensive protection for web application. WAF is a negative security model where the detection and prevention mechanisms are based on predefined or user-defined attack signatures and patterns. However, WAF alone is not adequate to offer best defensive system against web vulnerabilities that are increasing in number and complexity daily. This paper presents a methodology to automatically design a positive security based model which identifies and allows only legitimate web queries. The paper shows a true positive rate of more than 90% can be achieved.

Keywords: Intrusion Detection System, Positive Security Model, Web application Firewall

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1526 Rail-To-Rail Output Op-Amp Design with Negative Miller Capacitance Compensation

Authors: Muhaned Zaidi, Ian Grout, Abu Khari bin A’ain

Abstract:

In this paper, a two-stage op-amp design is considered using both Miller and negative Miller compensation techniques. The first op-amp design uses Miller compensation around the second amplification stage, whilst the second op-amp design uses negative Miller compensation around the first stage and Miller compensation around the second amplification stage. The aims of this work were to compare the gain and phase margins obtained using the different compensation techniques and identify the ability to choose either compensation technique based on a particular set of design requirements. The two op-amp designs created are based on the same two-stage rail-to-rail output CMOS op-amp architecture where the first stage of the op-amp consists of differential input and cascode circuits, and the second stage is a class AB amplifier. The op-amps have been designed using a 0.35mm CMOS fabrication process.

Keywords: Op-amp, rail-to-rail output, Miller compensation, negative Miller capacitance.

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1525 Revisiting Domestication and Foreignisation Methods: Translating the Quran by the Hybrid Approach

Authors: Aladdin Al-Tarawneh

Abstract:

The Quran, as it is the sacred book of Islam and considered the literal word of God (Allah) in Arabic, is highly translated into many languages; however, the foreignising or the literal approach excessively stains the quality and discredits the final product in the eyes of its receptors. Such an approach fails to capture the intended meaning of the Quran and to communicate it in any language. Therefore, this study is conducted to propose a different approach that seeks involving other ones according to a hybrid model. Indeed, this study challenges the binary adherence that is highly used in Translation Studies (TS) in general and in the translation of the Quran in particular. Drawing on the genuine fact that the Quran can be communicated in any language in terms of meaning, and the translation is not sacred; this paper approaches the translation of the Quran by blending different methods like domestication or foreignisation in a systematic way, avoiding the binary choice made by many translators. To reach this aim, the paper has a conceptual part that seeks to elucidate and clarify the main methods employed in TS, and criticise and modify them to propose the new hybrid approach (the hybrid model) for translating the Quran – that is, the deductive method. To support and validate the outcome of the previous part, a comparative model is employed in order to highlight the differences between the suggested translation and other widely used ones – that is, the inductive method. By applying this methodology, the paper proves that there is a deficiency of communicating the original meaning of the Quran in light of the foreignising approach. In conclusion, the paper suggests producing a Quran translation has to take into account the adoption of many techniques to express the meaning of the Quran as understood in the original, and to offer this understanding in English in the most native-like manner to serve the intended target readers.

Keywords: Quran translation, hybrid approach, domestication, foreignisation, hybrid model.

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1524 A Simplified Solid Mechanical and Acoustic Model for Human Middle Ear

Authors: Adarsh Venkataraman Ganesan, Sundaram Swaminathan, Rama Jayaraj

Abstract:

Human middle-ear is the key component of the auditory system. Its function is to transfer the sound waves through the ear canal to provide sufficient stimulus to the fluids of the inner ear. Degradation of the ossicles that transmit these sound waves from the eardrum to the inner ear leads to hearing loss. This problem can be overcome by replacing one or more of these ossicles by middleear prosthesis. Designing such prosthesis requires a comprehensive knowledge of the biomechanics of the middle-ear. There are many finite element modeling approaches developed to understand the biomechanics of the middle ear. The available models in the literature, involve high computation time. In this paper, we propose a simplified model which provides a reasonably accurate result with much less computational time. Simulation results indicate a maximum sound pressure gain of 10 dB at 5500 Hz.

Keywords: Ear, Ossicles, COMSOL, Stapes.

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1523 Energetic Considerations for Sputter Deposition Processes

Authors: Dirk Hegemann, Martin Amberg

Abstract:

Sputter deposition processes, especially for sputtering from metal targets, are well investigated. For practical reasons, i.e. for industrial processes, energetic considerations for sputter deposition are useful in order to optimize the sputtering process. In particular, for substrates at floating conditions it is required to obtain energetic conditions during film growth that enables sufficient dense metal films of good quality. The influence of ion energies, energy density and momentum transfer is thus examined both for sputtering at the target as well as during film growth. Different regimes dominated by ion energy, energy density and momentum transfer were identified by using different plasma sources and by varying power input, pressure and bias voltage.

Keywords: Energy density, film growth, momentum transfer, sputtering.

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