Search results for: variable speed variable pitch wind turbine

Authors: Joon Ho Kim, Tae Kwon Ha

Abstract:

Effect of aging treatment on microstructural aspects of interfacial layers of the Cu/Al clad sheet produced by differential speed rolling (DSR) process were studied by electron back scattered diffraction (EBSD). Clad sheet of Al/Cu has been fabricated by using DSR, which caused severe shear deformation between Al and Cu plate to easily bond to each other. Rolling was carried out at 100^oC with speed ratio of 2, in which the total thickness reduction was 45%. Interface layers of clad sheet were analyzed by EBSD after subsequent annealing at 400^oC for 30 to 120min. With increasing annealing time, thickness of interface layer and fraction of high angle grain boundary were increased and average grain size was decreased.

Keywords: Aluminum/Copper clad sheet, differential speed rolling, interface layer, microstructure, annealing, electron back scattered diffraction.

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Authors: R. Behmanesh, I. Rahimi

Abstract:

recurrent neural network (RNN) is an efficient tool for modeling production control process as well as modeling services. In this paper one RNN was combined with regression model and were employed in order to be checked whether the obtained data by the model in comparison with actual data, are valid for variable process control chart. Therefore, one maintenance process in workshop of Esfahan Oil Refining Co. (EORC) was taken for illustration of models. First, the regression was made for predicting the response time of process based upon determined factors, and then the error between actual and predicted response time as output and also the same factors as input were used in RNN. Finally, according to predicted data from combined model, it is scrutinized for test values in statistical process control whether forecasting efficiency is acceptable. Meanwhile, in training process of RNN, design of experiments was set so as to optimize the RNN.

Keywords: RNN, DOE, regression, control chart.

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Authors: S. S. Ngu, L. C. Kho, T. P. Tan, M. S. Osman

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This work deals with the design of the robotic assembly system for the roller clamps. The task is characterized by high speed, high yield and safety engagement. This paper describes the design of different parts of an automated high speed machine to assemble the parts of roller clamps. The roller clamp robotic assembly system performs various processes in the assembly line which include clamp body and roller feeding, inserting the roller into the clamp body, and dividing the rejected clamp and successfully assembled clamp into their own tray. The electrical/electronics design of the machine is discussed. The target is to design a cost effective, minimum maintenance and high speed machine for the industry applications.

Keywords: Machine design, assembly machine, roller clamp, industry applications.

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Authors: Jie Cai, David C. Levy

Abstract:

Electronic nose (array of chemical sensors) are widely used in food industry and pollution control. Also it could be used to locate or detect the direction of the source of emission odors. Usually this task is performed by electronic nose (ENose) cooperated with mobile vehicles, but when a source is instantaneous or surrounding is hard for vehicles to reach, problem occurs. Thus a method for stationary ENose to detect the direction of the source and locate the source will be required. A novel method which uses the ratio between the responses of different sensors as a discriminant to determine the direction of source in natural wind surroundings is presented in this paper. The result shows that the method is accurate and easily to be implemented. This method could be also used in movably, as an optimized algorithm for robot tracking source location.

Keywords: Electronic nose, Nature wind situation, Source direction detection.

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Authors: Tanuj Kanchan, Anadi Gupta, Kewal Krishan

Abstract:

Human skull is shown to exhibit numerous sexually dimorphic traits. Estimation of sex is a challenging task especially when a part of skull is brought for medicolegal investigation. The present research was planned to evaluate the sexing potential of the dimensions of foramen magnum in forensic identification by craniometric analysis. Length and breadth of the foramen magnum was measured using Vernier calipers and the area of foramen magnum was calculated. The length, breadth, and area of foramen magnum were found to be larger in males than females. Sexual dimorphism index was calculated to estimate the sexing potential of each variable. The study observations are suggestive of the limited utility of the craniometric analysis of foramen magnum during the examination of skull and its parts in estimation of sex.

Keywords: Forensic Anthropology, Skeletal remains, Identification, Sex estimation, Foramen magnum.

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Authors: Malika Yaici, Kamel Hariche, Tim Clarke

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The relationship between eigenstructure (eigenvalues and eigenvectors) and latent structure (latent roots and latent vectors) is established. In control theory eigenstructure is associated with the state space description of a dynamic multi-variable system and a latent structure is associated with its matrix fraction description. Beginning with block controller and block observer state space forms and moving on to any general state space form, we develop the identities that relate eigenvectors and latent vectors in either direction. Numerical examples illustrate this result. A brief discussion of the potential of these identities in linear control system design follows. Additionally, we present a consequent result: a quick and easy method to solve the polynomial eigenvalue problem for regular matrix polynomials.

Keywords: Eigenvalues/Eigenvectors, Latent values/vectors, Matrix fraction description, State space description.

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Authors: M. Sadeghi, A.H. Jafari, S.M.P. Firoozabadi

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Deep Brain Stimulation or DBS is the second solution for Parkinson's Disease. Its three parameters are: frequency, pulse width and voltage. They must be optimized to achieve successful treatment. Nowadays it is done clinically by neurologists and there is not certain numerical method to detect them. The aim of this research is to introduce simulation and modeling of Parkinson's Disease treatment as a computational procedure to select optimum voltage. We recorded finger tremor signals of some Parkinsonian patients under DBS treatment at constant frequency and pulse width but variable voltages; then, we adapted a new model to fit these data. The optimum voltages obtained by data fitting results were the same as neurologists- commented voltages, which means modeling can be used as an engineering method to select optimum stimulation voltages.

Keywords: modeling, Deep Brain Stimulation, Parkinson'sdisease, tremor.

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Authors: S. Saadi, S. Benissaad, S. Poncet, Y. Kabar

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In photovoltaic (PV) cells, most of the absorbed solar radiation cannot be converted into electricity. A large amount of solar radiation is converted to heat, which should be dissipated by any cooling techniques. In the present study, the cooling is achieved by inserting triangular ribs in the duct. A comprehensive two-dimensional thermo-fluid model for the effective cooling of PV cells has been developed. It has been first carefully validated against experimental and numerical results available in the literature. A parametric analysis was then carried out about the influence of the number and size of the ribs, wind speed, solar irradiance and inlet fluid velocity on the average solar cell and outlet air temperatures as well as the thermal and electrical efficiencies of the module. Results indicated that the use of triangular ribbed channels is a very effective cooling technique, which significantly reduces the average temperature of the PV cell, especially when increasing the number of ribs.

Keywords: Effective cooling, numerical modeling, photovoltaic cell, triangular ribs.

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Authors: Raisa Kh. Bolotnova, Marat N. Galimzianov, Andrey S. Topolnikov, Uliana O. Agisheva, Valeria A. Buzina

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The paper presents the results of theoretical and numerical modeling of propagation of shock waves in bubbly liquids related to nonlinear effects (realistic equation of state, chemical reactions, two-dimensional effects). On the basis on the Rankine- Hugoniot equations the problem of determination of parameters of passing and reflected shock waves in gas-liquid medium for isothermal, adiabatic and shock compression of the gas component is solved by using the wide-range equation of state of water in the analitic form. The phenomenon of shock wave intensification is investigated in the channel of variable cross section for the propagation of a shock wave in the liquid filled with bubbles containing chemically active gases. The results of modeling of the wave impulse impact on the solid wall covered with bubble layer are presented.

Keywords: bubbly liquid, cavitation, equation of state, shock wave

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Authors: A.Venkadesan, S.Himavathi, A.Muthuramalingam

Abstract:

Rotor Flux based Model Reference Adaptive System (RF-MRAS) is the most popularly used conventional speed estimation scheme for sensor-less IM drives. In this scheme, the voltage model equations are used for the reference model. This encounters major drawbacks at low frequencies/speed which leads to the poor performance of RF-MRAS. Replacing the reference model using Neural Network (NN) based flux estimator provides an alternate solution and addresses such drawbacks. This paper identifies an NN based flux estimator using Single Neuron Cascaded (SNC) Architecture. The proposed SNC-NN model replaces the conventional voltage model in RF-MRAS to form a novel MRAS scheme named as SNC-NN-MRAS. Through simulation the proposed SNC-NN-MRAS is shown to be promising in terms of all major issues and robustness to parameter variation. The suitability of the proposed SNC-NN-MRAS based speed estimator and its advantages over RF-MRAS for sensor-less induction motor drives is comprehensively presented through extensive simulations.

Keywords: Sensor-less operation, vector-controlled IM drives, SNC-NN-MRAS, single neuron cascaded architecture, RF-MRAS, artificial neural network

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Authors: Labiba Gilani, Asifullah Khan, Anwar M. Mirza

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This paper introduces a technique of distortion estimation in image watermarking using Genetic Programming (GP). The distortion is estimated by considering the problem of obtaining a distorted watermarked signal from the original watermarked signal as a function regression problem. This function regression problem is solved using GP, where the original watermarked signal is considered as an independent variable. GP-based distortion estimation scheme is checked for Gaussian attack and Jpeg compression attack. We have used Gaussian attacks of different strengths by changing the standard deviation. JPEG compression attack is also varied by adding various distortions. Experimental results demonstrate that the proposed technique is able to detect the watermark even in the case of strong distortions and is more robust against attacks.

Keywords: Blind Watermarking, Genetic Programming (GP), Fitness Function, Discrete Cosine Transform (DCT).

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Authors: Ephraim Gower, Thato Tsalaile, Monageng Kgwadi, Malcolm Hawksford.

Abstract:

This paper introduces a new point estimation algorithm, with particular focus on coherent noise suppression, given several measurements of the device under test where it is assumed that 1) the noise is first-order stationery and 2) the device under test is linear and time-invariant. The algorithm exploits the robustness of the Pitman estimator of the Cauchy location parameter through the initial scaling of the test signal by a centred Gaussian variable of predetermined variance. It is illustrated through mathematical derivations and simulation results that the proposed algorithm is more accurate and consistently robust to outliers for different tailed density functions than the conventional methods of sample mean (coherent averaging technique) and sample median search.

Keywords: Central limit theorem, Fisher-Cramer Rao, gamma function, Pitman estimator.

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Authors: Peristera A. Baziana

Abstract:

The idea of the asynchronous transmission in wavelength division multiplexing (WDM) ring MANs is studied in this paper. Especially, we present an efficient access technique to coordinate the collisions-free transmission of the variable sizes of IP traffic in WDM ring core networks. Each node is equipped with a tunable transmitter and a tunable receiver. In this way, all the wavelengths are exploited for both transmission and reception. In order to evaluate the performance measures of average throughput, queuing delay and packet dropping probability at the buffers, a simulation model that assumes symmetric access rights among the nodes is developed based on Poisson statistics. Extensive numerical results show that the proposed protocol achieves apart from high bandwidth exploitation for a wide range of offered load, fairness of queuing delay and dropping events among the different packets size categories.

Keywords: Asynchronous transmission, collision avoidance, wavelength division multiplexing.

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Authors: Syed Manzoor Qasim, Shuja Abbasi, Saleh Alshebeili, Bandar Almashary, Ateeq Ahmad Khan

Abstract:

Higher-order Statistics (HOS), also known as cumulants, cross moments and their frequency domain counterparts, known as poly spectra have emerged as a powerful signal processing tool for the synthesis and analysis of signals and systems. Algorithms used for the computation of cross moments are computationally intensive and require high computational speed for real-time applications. For efficiency and high speed, it is often advantageous to realize computation intensive algorithms in hardware. A promising solution that combines high flexibility together with the speed of a traditional hardware is Field Programmable Gate Array (FPGA). In this paper, we present FPGA-based parallel architecture for the computation of third-order cross moments. The proposed design is coded in Very High Speed Integrated Circuit (VHSIC) Hardware Description Language (VHDL) and functionally verified by implementing it on Xilinx Spartan-3 XC3S2000FG900-4 FPGA. Implementation results are presented and it shows that the proposed design can operate at a maximum frequency of 86.618 MHz.

Keywords: Cross moments, Cumulants, FPGA, Hardware Implementation.

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Authors: Worachat Wannawong, Chaiwat Ekkawatpanit, Sanit Wongsa

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Both prognostic and diagnostic modes of a 3D baroclinic model in hydrodynamic and sediment transport models of the Princeton Ocean Model (POM) were conducted to separate prognose and diagnose effects of different hydrodynamic factors on transport of suspended sediment discharged from the rivers to the Gulf of Thailand (GoT). Both transport modes of suspended sediment distribution in the GoT were numerically simulated. It could be concluded that the suspended sediment discharged from the rivers around the GoT. Most of sediments in estuaries and coastal areas are deposited outside the GoT under the condition of wind-driven current, and very small amount of the sediments of them are transported faraway. On the basis of wind forcing, sediments from the lower GoT to the upper GoT are mainly transported south-northwestward and also continuously moved north-southwestward. An obvious 3D characteristic of suspended sediment transport is produced in the wind-driven current residual circulation condition. In this study, the transport patterns at the third layer are generally consistent with the typhoon-induced strong currents in two case studies of Typhoon Linda 1997. The case studies presented the prognostic and diagnostic modes during 00UTC28OCT1997 to 12UTC06NOV1997 in a short period with the current condition for pre-operation of the suspended sediment transport model in estuaries and coastal areas.

Keywords: prognostic, diagnostic, baroclinic, sediment transport, estuaries.

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Authors: Wei-Lun Hsu, Mon-Jyh Lin, Jyh-Ping Hsu

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The dissolution of spherical particles in liquids is analyzed dynamically. Here, we consider the case the dissolution of solute yields a solute-free solid phase in the outer portion of a particle. As dissolution proceeds, the interface between the undissolved solid phase and the solute-free solid phase moves towards the center of the particle. We assume that there exist two resistances for the diffusion of solute molecules: the resistance due to the solute-free portion of the particle and that due to a surface layer near solid-liquid interface. In general, the equation governing the dynamic behavior of dissolution needs to be solved numerically. However, analytical expressions for the temporal variation of the size of the undissoved portion of a particle and the variation of dissolution time can be obtained in some special cases. The present analysis takes the effect of variable bulk solute concentration on dissolution into account.

Keywords: dissolution of particles, surface layer, shrinking core model, dissolution time.

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Authors: X. Mamaqi, J.Miguel, P. Olave

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The aim of this paper is to provide an empirical evidence about the effects that the management of continuous training have on employability (or employment stability) in the Spanish labour market. With this purpose a binary logit model with interaction effect is been used. The dependent variable includes two situations of the active workers: continuous and discontinuous employability. To distinguish between them an Employability Index Stability (ESI) was calculated taking into account two factors: time worked and job security. Various aspects of the continuous training and personal workers data are used as independent variables. The data obtained from a survey of a sample of 918 employed have revealed a relationship between the likelihood of continuous employability and continuous training received. The empirical results support the positive and significant relationship between various aspects of the training provided by firms and employability likelihood of the workers, postulate alike from a theoretical point of view.

Keywords: training management, employability/employmentstability, binary logit model, interaction effect, Spanish marketlabour.

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Authors: S. S. Deswal, Ratna Dahiya, D. K. Jain

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Process control and energy conservation are the two primary reasons for using an adjustable speed drive. However, voltage sags are the most important power quality problems facing many commercial and industrial customers. The development of boost converters has raised much excitement and speculation throughout the electric industry. Now utilities are looking to these devices for performance improvement and reliability in a variety of areas. Examples of these include sags, spikes, or transients in supply voltage as well as unbalanced voltages, poor electrical system grounding, and harmonics. In this paper, simulations results are presented for the verification of the proposed boost converter topology. Boost converter provides ride through capability during sag and swell. Further, input currents are near sinusoidal. This eliminates the need of braking resistor also.

Keywords: Adjustable speed drive, power quality, boost converter, ride through capabilities.

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Authors: Narendra Singh Yadav, R.P.Yadav

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Mobile ad hoc network is a collection of mobile nodes communicating through wireless channels without any existing network infrastructure or centralized administration. Because of the limited transmission range of wireless network interfaces, multiple "hops" may be needed to exchange data across the network. Consequently, many routing algorithms have come into existence to satisfy the needs of communications in such networks. Researchers have conducted many simulations comparing the performance of these routing protocols under various conditions and constraints. One question that arises is whether speed of nodes affects the relative performance of routing protocols being studied. This paper addresses the question by simulating two routing protocols AODV and DSDV. Protocols were simulated using the ns-2 and were compared in terms of packet delivery fraction, normalized routing load and average delay, while varying number of nodes, and speed.

Keywords: AODV, DSDV, MANET, relative performance

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Authors: M. M. Islam, Rajib K. Saha, Abdullah A. Amin, M. Z. Haq

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The autonomous mobile robot was designed and implemented which was capable of navigating in the industrial environments and did a job of picking objects from variable height and delivering it to another location following a predefined trajectory. In developing country like Bangladesh industrial robotics is not very prevalent yet, due to the high installation cost. The objective of this project was to develop an autonomous mobile robot for industrial application using the available resources in the local market at lower manufacturing cost. The mechanical system of the robot was comprised of locomotion, gripping and elevation system. Grippers were designed to grip objects of a predefined shape. Cartesian elevation system was designed for vertical movement of the gripper. PIC18F452 microcontroller was the brain of the control system. The prototype autonomous robot was fabricated for relatively lower load than the industry and the performance was tested in a virtual industrial environment created within the laboratory to realize the effectiveness.

Keywords: Industrial application, autonomous mobile robot, appropriate technology.

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Authors: V. J. Pillewan, D. N. Raut, K. N. Patil, D. K. Shinde

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Forging, milling, turning, grinding and shaping etc. are the various industrial manufacturing processes which generate the metal waste. Grinding is extensively used in the finishing operation. The waste generated contains significant impurities apart from the metal particles. Due to these significant impurities, it becomes difficult to process and gets usually dumped in the landfills which create environmental problems. Therefore, it becomes essential to reuse metal waste to create value added products. Powder injection molding process is used for producing the porous metal matrix framework. This paper discusses the presented design of the porous framework to be used for the liquid filter application. Different parameters are optimized to obtain the better strength framework with variable porosity. Carbon nanotubes are used as reinforcing materials to enhance the strength of the metal matrix framework.

Keywords: Grinding waste, powder injection molding, carbon nanotubes, metal matrix composites.

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Authors: Ksenija Dumičić, Anita Čeh Časni, Irena Palić

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This paper examines economic and Information and Communication Technology (ICT) development influence on recently increasing Internet purchases by individuals for European Union member states. After a growing trend for Internet purchases in EU27 was noticed, all possible regression analysis was applied using nine independent variables in 2011. Finally, two linear regression models were studied in detail. Conducted simple linear regression analysis confirmed the research hypothesis that the Internet purchases in analyzed EU countries is positively correlated with statistically significant variable Gross Domestic Product per capita (GDPpc). Also, analyzed multiple linear regression model with four regressors, showing ICT development level, indicates that ICT development is crucial for explaining the Internet purchases by individuals, confirming the research hypothesis.

Keywords: European Union, Internet purchases, multiple linear regression model, outlier

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Authors: Felipe V. Díaz, Claudio A. Mammana, Armando P. M. Guidobono, Raúl E. Bolmaro

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Through a proper analysis of residual strain and stress distributions obtained at the surface of high speed milled specimens of AA 6082–T6 aluminium alloy, the performance of an improved indentation method is evaluated. This method integrates a special device of indentation to a universal measuring machine. The mentioned device allows introducing elongated indents allowing to diminish the absolute error of measurement. It must be noted that the present method offers the great advantage of avoiding both the specific equipment and highly qualified personnel, and their inherent high costs. In this work, the cutting tool geometry and high speed parameters are selected to introduce reduced plastic damage. Through the variation of the depth of cut, the stability of the shapes adopted by the residual strain and stress distributions is evaluated. The results show that the strain and stress distributions remain unchanged, compressive and small. Moreover, these distributions reveal a similar asymmetry when the gradients corresponding to conventional and climb cutting zones are compared.

Keywords: Residual strain, residual stress, high speed milling, indentation methods, aluminium alloys.

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Authors: Se Ho Choi, Jong Pil Yun, Boyeul Seo, YoungSu Park, Sang Woo Kim

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This paper presents a real-time defect detection algorithm for high-speed steel bar in coil. Because the target speed is very high, proposed algorithm should process quickly the large volumes of image for real-time processing. Therefore, defect detection algorithm should satisfy two conflicting requirements of reducing the processing time and improving the efficiency of defect detection. To enhance performance of detection, edge preserving method is suggested for noise reduction of target image. Finally, experiment results show that the proposed algorithm guarantees the condition of the real-time processing and accuracy of detection.

Keywords: Defect detection, edge preserving filter, real-time image processing, surface inspection.

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Authors: Salvatore Marra, Francesco C. Morabito

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In this paper we present an efficient approach for the prediction of two sunspot-related time series, namely the Yearly Sunspot Number and the IR5 Index, that are commonly used for monitoring solar activity. The method is based on exploiting partially recurrent Elman networks and it can be divided into three main steps: the first one consists in a “de-rectification" of the time series under study in order to obtain a new time series whose appearance, similar to a sum of sinusoids, can be modelled by our neural networks much better than the original dataset. After that, we normalize the derectified data so that they have zero mean and unity standard deviation and, finally, train an Elman network with only one input, a recurrent hidden layer and one output using a back-propagation algorithm with variable learning rate and momentum. The achieved results have shown the efficiency of this approach that, although very simple, can perform better than most of the existing solar activity forecasting methods.

Keywords: Elman neural networks, sunspot, solar activity, time series prediction.

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Authors: Bernd Scholz-Reiter, Christian Toonen, Jan Topi Tervo, Dennis Lappe

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Time series analysis often requires data that represents the evolution of an observed variable in equidistant time steps. In order to collect this data sampling is applied. While continuous signals may be sampled, analyzed and reconstructed applying Shannon-s sampling theorem, time-discrete signals have to be dealt with differently. In this article we consider the discrete-event simulation (DES) of job-shop-systems and study the effects of different sampling rates on data quality regarding completeness and accuracy of reconstructed inventory evolutions. At this we discuss deterministic as well as non-deterministic behavior of system variables. Error curves are deployed to illustrate and discuss the sampling rate-s impact and to derive recommendations for its wellfounded choice.

Keywords: discrete-event simulation, job-shop-system, sampling rate.

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Authors: Abdallah F. Abd El-Mohsen, Ahmed A. Abdelsamee, Nouby M. Ghazaly

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Engine exhaust noise is considered one of the largest sources of vehicle exterior noise. Further reduction of noise from the vehicle exhaust system will be required, as the vehicle exterior noise regulations become stricter. Therefore, the present study has been carried out to illustrate the role of engine operating parameters and exhaust system construction factors on exhaust noise emitted. The measurements carried out using different exhaust systems, which are mainly used in today’s vehicle. The effect of engine speed on the spectra level of exhaust noise is recorded at engine speeds of 900 rpm, 1800 rpm, 2700, rpm 3600 rpm and 4500 rpm. The results indicate that the increase of engine speed causes a significant increase in the spectrum level of exhaust noise. The increase in the number of the outlet of the expansion chamber also reduces the overall level of exhaust noise.

Keywords: Exhaust system, engine speed, expansion chamber.

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Authors: H. Golchoobian, M. H. Taheri, S. Saedodin, A. Sarafraz

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This paper investigates the possibility of using three systems of organic Rankine auxiliary power generation, ejector refrigeration and absorption to recover energy from a diesel car. The analysis is done for both urban and suburban driving modes that vary from 60 to 120 km/h. Various refrigerants have also been used for organic Rankine and Ejector refrigeration cycles. The capacity was evaluated by Organic Rankine Cycle (ORC) system in both urban and suburban conditions for cyclopentane and ammonia as refrigerants. Also, for these two driving plans, produced cooling by absorption refrigeration system under variable ambient temperature conditions and in ejector refrigeration system for R123, R134a and R141b refrigerants were investigated.

Keywords: Absorption system, diesel engine, ejector refrigeration, energy recovery, organic Rankine cycle.

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Authors: Jorge A. Ruiz-Vanoye, Ocotlán Díaz-Parra, Alejandro Fuentes-Penna, Daniel Vélez-Díaz, Edith Olaco García

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In this paper, we present the use of the discriminant analysis to select evolutionary algorithms that better solve instances of the vehicle routing problem with time windows. We use indicators as independent variables to obtain the classification criteria, and the best algorithm from the generic genetic algorithm (GA), random search (RS), steady-state genetic algorithm (SSGA), and sexual genetic algorithm (SXGA) as the dependent variable for the classification. The discriminant classification was trained with classic instances of the vehicle routing problem with time windows obtained from the Solomon benchmark. We obtained a classification of the discriminant analysis of 66.7%.

Keywords: Intelligent transportation systems, data-mining techniques, evolutionary algorithms, discriminant analysis, machine learning.

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Authors: Jooho Hwang, Chang-Kyu Song, Chun-Hong Park

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This paper describes a method to measure and compensate a 4 axes ultra-precision machine tool that generates micro patterns on the large surfaces. The grooving machine is usually used for making a micro mold for many electrical parts such as a light guide plate for LCD and fuel cells. The ultra precision machine tool has three linear axes and one rotational table. Shaping is usually used to generate micro patterns. In the case of 50 μm pitch and 25 μm height pyramid pattern machining with a 90° wedge angle bite, one of linear axis is used for long stroke motion for high cutting speed and other linear axis are used for feeding. The triangular patterns can be generated with many times of long stroke of one axis. Then 90° rotation of work piece is needed to make pyramid patterns with superposition of machined two triangular patterns. To make a two dimensional positioning error, straightness of two axes in out of plane, squareness between the each axis are important. Positioning errors, straightness and squarness were measured by laser interferometer system. Those were compensated and confirmed by ISO230-6. One of difficult problem to measure the error motions is squareness or parallelism of axis between the rotational table and linear axis. It was investigated by simultaneous moving of rotary table and XY axes. This compensation method is introduced in this paper.

Keywords: Ultra-precision machine tool, muti-axis errors, squraness, positioning errors.

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