Search results for: tactile sensor

Authors: Ünal Kızıl, Levent Genç, Sefa Aksu, Ahmet Tapınç

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The Figaro AM-1 sensor module which employs TGS 2600 model gas sensor in air quality assessment was used. The system was coupled with a microprocessor that enables sensor module to create warning message via telephone. This low cot sensor system’s performance was compared with a Diagnose II commercial electronic nose system. Both air quality sensor and electronic nose system employ metal oxide chemical gas sensors. In the study experimental setup, data acquisition methods for electronic nose system, and performance of the low cost air quality system were evaluated and explained.

Keywords: air quality, electronic nose, environmental quality, gas sensor

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Authors: Sungsik Jo, Hyeonwoo Kim, Iksu Choi, Hunmo Kim

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In the SHP, LVDT sensor is for detecting the length changes of the EHA output, and the thrust of the EHA is controlled by the pressure sensor. Sensor is possible to cause hardware fault by internal problem or external disturbance. The EHA of SHP is able to be uncontrollable due to control by feedback from uncertain information, on this paper; the sliding mode observer algorithm estimates the original sensor output information in permanent sensor fault. The proposed algorithm shows performance to recovery fault of disconnection and short circuit basically, also the algorithm detect various of sensor fault mode.

Keywords: smart hybrid powerpack (SHP), electro hydraulic actuator (EHA), permanent sensor fault tolerance, sliding mode observer (SMO), graphic user interface (GUI)

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Authors: Alfi Al Fahreizy

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By using LPG (Liquid Protelium Gas), it is very difficult to detect gas leak. Consequently, there is so many incident of gas leak that makes explosion which is occurred in many regions of Indonesia. In this paper, the researcher tries to overcome with it by adding gas sensor for LPG in a smartphone. The aim is to choose the best sensor and how to use it . The methode is to choose sensor by selecting from sensor data sheet qualitatively by giving grade from 1 to 5. Flow chart is shown to make best steps notification that possible to implemented in smartphone.

Keywords: energy conversion, gas leak, smartphone, explosion, LPG

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Authors: Gagandeep Singh

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The sensor field optimization is a serious issue in WSNs and has been ignored by many researchers. As in numerous real-time sensing fields the sensor nodes on the corners i.e. on the segment boundaries will become lifeless early because no extraordinary safety is presented for them. Accordingly, in this research work the central objective is on the segment based optimization by separating the sensor field between advance and normal segments. The inspiration at the back this sensor field optimization is to extend the time spam when the first sensor node dies. For the reason that in normal sensor nodes which were exist on the borders may become lifeless early because the space among them and the base station is more so they consume more power so at last will become lifeless soon.

Keywords: WSNs, ECRSEP, SEP, field optimization, energy

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Authors: H. Gorine, M. Ramadan Elmezughi

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In this paper, we investigate security issues and challenges facing researchers in wireless sensor networks and countermeasures to resolve them. The broadcast nature of wireless communication makes Wireless Sensor Networks prone to various attacks. Due to resources limitation constraint in terms of limited energy, computation power and memory, security in wireless sensor networks creates different challenges than wired network security. We will discuss several attempts at addressing the issues of security in wireless sensor networks in an attempt to encourage more research into this area.

Keywords: wireless sensor networks, network security, light weight encryption, threats

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Authors: Yang Xiong, Hua Cheng

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In this paper, for the basic problem of wireless sensor network topology control and deployment, the Roesser model in rectangular grid sensor networks is presented. In addition, a general constructive realization procedure will be proposed. The procedure enables a distributed implementation of linear systems on a sensor network. A non-trivial example is illustrated.

Keywords: grid sensor networks, Roesser model, state-space realization, multidimensional systems

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Authors: Dae Il Kim, Jungho Moon, Tae Yun Chung

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This paper presents a car parking monitoring system using a wireless sensor network. The presented sensor network has a line-shaped topology and adopts a TDMA-based protocol for allowing multi-hop communications. Sensor nodes are deployed in the ground of an outdoor parking lot in such a way that a sensor node monitors a parking space. Each sensor node detects the availability of the associated parking space and transmits the detection result to a sink node via intermediate sensor nodes existing between the source sensor node and the sink node. We evaluate the feasibility of the presented sensor network and the TDMA-based communication protocol through experiments using 11 sensor nodes deployed in a real parking lot. The result shows that the presented car parking monitoring system is robust to changes in the communication environments and efficient for monitoring parking spaces of outdoor parking lots.

Keywords: multi-hop communication, parking monitoring system, TDMA, wireless sensor network

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Authors: Soner Cubuk, Ozge Yilmaz, Ece Kok Yetimoglu, M. Vezir Kahraman

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In this work, a polymer based highly selective fluorescence sensor membrane was prepared by the photopolymerization technique for the determination Cd(II) ion. Sensor characteristics such as effects of pH, response time and foreign ions on the fluorescence intensity of the sensor were also studied. Under optimized conditions, the polymeric sensor shows a rapid, stable and linear response for 4.45x10-⁹ mol L-¹ - 4.45x10-⁸ mol L-¹ Cd(II) ion with the detection limit of 6.23x10-¹⁰ mol L-¹. In addition, sensor membrane was selective which is not affected by common foreign metal ions. The concentrations of the foreign ions such as Pb²+, Co²+, Ag+, Zn²+, Cu²+, Cr³+ are 1000-fold higher than Cd(II) ions. Moreover, the developed polymeric sensor was successfully applied to the determination of cadmium ions in food and water samples. This work was supported by Marmara University, Commission of Scientific Research Project.

Keywords: cadmium(II), fluorescence, photopolymerization, polymeric sensor

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Authors: Rohana Musa, Yuzman Yusoff, Chia Chieu Yin, Hanif Che Lah

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This paper presents the design and characterization of a low power Complementary Metal Oxide Semiconductor (CMOS) process sensor. The design is targeted for implementation using Silterra’s 180 nm CMOS process technology. The proposed process sensor employs a voltage threshold (V_th) extractor architecture for detection of variations in the fabrication process. The process sensor generates output voltages in the range of 401 mV (fast-fast corner) to 443 mV (slow-slow corner) at nominal condition. The power dissipation for this process sensor is 6.3 µW with a supply voltage of 1.8V with a silicon area of 190 µm X 60 µm. The preliminary result of this process sensor that was fabricated indicates a close resemblance between test and simulated results.

Keywords: CMOS process sensor, PVT sensor, threshold extractor circuit, Vth extractor circuit

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Authors: Sathapath Kilaso

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Nowadays, Today, wireless sensor networks are an important technology that works with Internet of Things. It is receiving various data from many sensor. Then sent to processing or storing. By wireless network or through the Internet. The devices around us are intelligent, can receiving/transmitting and processing data and communicating through the system. There are many applications of wireless sensor networks, such as smart city, smart farm, environmental management, weather. This article will explore the use of wireless sensor networks in Thailand and collect data from Thai Thesis database in 2012-2017. How to Implementing Wireless Sensor Network Technology. Advantage from this study To know the usage wireless technology in many fields. This will be beneficial for future research. In this study was found the most widely used wireless sensor network in agriculture field. Especially for smart farms. And the second is the adoption of the environment. Such as weather stations and water inspection.

Keywords: wireless sensor network, smart city, survey, Adhoc Network

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Authors: Maleh Yassine, Ezzati Abdellah

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Wireless Sensor Networks (WSNs) are currently used in different industrial and consumer applications, such as earth monitoring, health related applications, natural disaster prevention, and many other areas. Security is one of the major aspects of wireless sensor networks due to the resource limitations of sensor nodes. However, these networks are facing several threats that affect their functioning and their life. In this paper we present security attacks in wireless sensor networks, and we focus on a review and analysis of the recent Intrusion Detection schemes in WSNs.

Keywords: wireless sensor networks, security attack, denial of service, IDS, cluster-based model, signature based IDS, hybrid IDS

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Authors: M. Zyczkowski, P. Markowski, M. Karol

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The team from IOE MUT is developing fiber optic sensors for the security systems for 15 years. The conclusions of the work indicate that these sensors are complicated. Moreover, these sensors are expensive to produce and require sophisticated signal processing methods.We present the results of the investigations of three different applications of the modalmetric sensor: • Protection of museum collections and heritage buildings, • Protection of fiber optic transmission lines, • Protection of objects of critical infrastructure. Each of the presented applications involves different requirements for the system. The results indicate that it is possible to developed a fiber optic sensor based on a single fiber. Modification of optoelectronic parts with a change of the length of the sensor and the method of reflections of propagating light at the end of the sensor allows to adjust the system to the specific application.

Keywords: modalmetric fiber optic sensor, security sensor, optoelectronic parts, signal processing

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Authors: S. M. Hamidi, M. Afsharnia

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Gas sensors based on magneto-plasmonic (MP) structures have attracted much attention due to the high signal to noise ratio in these type of sensors. In these sensors, both the plasmonic and the MO properties of the resulting MP structure become interrelated because the surface Plasmon resonance (SPR) of the metallic medium. This interconnection can be modified the sensor responses and enhanced the signal to noise ratio. So far the sensor features of multilayered structures made of noble and ferromagnetic metals as Au/Co/Au MP multilayer with TiO2 sensor layer have been extensively studied, but their SPR assisted sensor response need to the krestchmann configuration. Here, we present a systematic study on the new MP structure based on one-dimensional nano-grating Au/ Co/ Au/ TiO2 multilayer to utilize as an inexpensive and easy to use gas sensor.

Keywords: Magneto-plasmonic structures, Gas sensor, nano-garting

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Authors: Jai Prakash Prasad, Suresh Chandra Mohan

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Modern wireless sensor networks (WSN) consist of small size, low cost devices which are networked through tight wireless communications. WSN fundamentally offers cooperation, coordination among sensor networks. Potential applications of wireless sensor networks are in healthcare, natural disaster prediction, data security, environmental monitoring, home appliances, entertainment etc. The design, development and deployment of WSN based on application requirements. The WSN design performance is optimized to improve network lifetime. The sensor node resources constrain such as energy and bandwidth imposes the limitation on efficient resource utilization and sensor node management. The proposed N-Tier GRID routing protocol focuses on the design of energy efficient large scale wireless sensor network for improved performance than the existing protocol.

Keywords: energy efficient, network lifetime, sensor networks, wireless communication

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Authors: Ch. Sandeep Kumar Subudhi, S. Sivanandam

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Our system is to monitor the human body temperature, blood pressure (BP), Pulse Rate and ECG and tracking the patient location. In our system the body temperature is detected by using LM35 temperature sensor, blood pressure is detected by the BP sensor, pulse rate is detected by the ear plug pulse sensor and the ECG is detected by the three lead ECG sensor in the working environment of the patient. The sensed information is sent to the PIC16F877 microcontroller through signal conditioning circuit. A desired amount of sensor value is set and if it is exceeded preliminary steps should be taken by indication by buzzer. The sensor information will be transmitted from the patient unit to the main controller unit with the help of Zigbee communication medium which is connected with the microcontrollers in the both units. The main controller unit will send those sensor data as well as the location of that patient by the help of GPS module to the observer/doctor. The observer/doctor can receive the SMS sent by GSM module and further decision can be taken. The message is sent to a cell phone using global system mobile (GSM) Modem. MAX232 acts as a driver between microcontroller and modem.

Keywords: LM35, heart beat sensor, ECG Sensor, BP Sensor, Zigbee module, GSM module, GPS module, PIC16F877A microcontroller

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Authors: Kirankumar B. Balavalad, Bhagyashree Mudhol, B. G. Sheeparamatti

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MEMS sensor have gained popularity in automotive, biomedical, and industrial applications. In this paper, the design and simulation of conventional, slotted, and perforated MEMS capacitive pressure sensor is proposed. Polysilicon material is used as diaphragm material that deflects due to applied pressure. Better sensitivity is the main advantage of conventional pressure sensor as compared with other two sensors and perforated pressure sensor achieves large operating pressure range. The proposed MEMS sensor demonstrated with diaphragm length 50um, gap depth 3um is being modelled. The simulation is carried out for different types of MEMS capacitive pressure sensor using COMSOL Multiphysics and Coventor ware.

Keywords: MEMS, conventional pressure sensor, slotted and perforated diaphragm, COMSOL multiphysics, coventor ware

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Authors: Baris Can Yalcin

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Motion sensors have been commonly used as a valuable component in mechatronic systems, however, many mechatronic designs and applications that need motion sensors cost enormous amount of money, especially high-tech systems. Design of a software for communication protocol between data acquisition card and motion sensor is another issue that has to be solved. This study presents how to design a low cost motion data acquisition setup consisting of MPU 6050 motion sensor (gyro and accelerometer in 3 axes) and Arduino Mega2560 microcontroller. Design parameters are calibration of the sensor, identification and communication between sensor and data acquisition card, interpretation of data collected by the sensor.

Keywords: design, mechatronics, motion sensor, data acquisition

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Authors: Ahmed A. Al-Mudhafar, Ali A. Abduljabar, Hayder Jawad Albattat

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This work suggests a new microwave resonator sensor (MRS) device for measuring the oil’s breakdown voltage of high voltage transformers. A precise high-sensitivity sensor is designed and manufactured based on a microstrip split ring resonator (SRR). To improve the sensor sensitivity, a RF amplifier of 30 dB gain is linked through a transmission line of 50Ω.The sensor operates at a microwave band (L) with a quality factor of 1.35x105 when it is loaded with an empty tube. In this work, the sensor has been tested with three samples of high voltage transformer oil of different ages (new, middle, and damaged) where the quality factor differs with each sample. A mathematical model was built to calculate the breakdown voltage of the transformer oils and the accuracy of the results was higher than 90%.

Keywords: active resonator sensor, oil breakdown voltage, transformers oils, quality factor

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Authors: Chia-Chi Chang

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Most battery-driven wireless sensor devices will enter in sleep mode as soon as possible to extend the overall lifetime of a sensor network. It is necessary to turn off unnecessary radio and peripheral functions, especially the radio unit always consumes more energy than other components during wireless communication. The microcontroller is the most important part of the wireless sensor device. It is responsible for the manipulation of sensing data and communication protocols. The microcontroller always has different sleep modes, each with a different level of energy usage. The deeper the sleep, the lower the energy consumption. Most wireless sensor devices can only enter the sleep mode: the external low-frequency oscillator is still running to wake up the sleeping microcontroller when the sleep timer expires. In this paper, our sensor device can enter the extended sleep mode: none of the oscillator is running and the wireless sensor device has the nanoampere consumption and self-awaking ability. Finally, these wireless sensor devices were deployed in a smart home security network.

Keywords: wireless sensor network, battery-driven, sleep mode, home security

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Authors: Si-Gwan Kim

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Small-size and low-power sensors with sensing, signal processing and wireless communication capabilities is suitable for the wireless sensor networks. Due to the limited resources and battery constraints, complex routing algorithms used for the ad-hoc networks cannot be employed in sensor networks. In this paper, we propose node-disjoint multi-path hexagon-based routing algorithms in wireless sensor networks. We suggest the details of the algorithm and compare it with other works. Simulation results show that the proposed scheme achieves better performance in terms of efficiency and message delivery ratio.

Keywords: clustering, multi-path, routing protocol, sensor network

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Authors: Seyed Mahdi Jameii

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Underwater wireless sensor networks have been attracting the interest of many ‎researchers lately, and the past three decades have beheld the rapid progress of ‎underwater acoustic communication. One of the major problems in underwater wireless ‎sensor networks is how to transfer data from the moving node to the base stations and ‎choose the optimized route for data transmission. Secure routing in underwater ‎wireless sensor network (UWCNs) is necessary for packet delivery. Some routing ‎protocols are proposed for underwater wireless sensor networks. However, a few ‎researches have been done on secure routing in underwater sensor networks. In this ‎article, a secure routing protocol is provided to resist against wormhole and sybil ‎attacks. The results indicated acceptable performance in terms of increasing the packet ‎delivery ratio with regards to the attacks, increasing network lifetime by creating ‎balance in the network energy consumption, high detection rates against the attacks, ‎and low-end to end delay.‎

Keywords: attacks, routing, security, underwater wireless sensor networks

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Authors: Sandeep Singh Waraich

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Wireless sensor network (WSN ) consists of a large number of sensor nodes. The disparity in their energy consumption usually lead to the loss of equilibrium in wireless sensor network which may further results in an energy hole problem in wireless network. In this paper, we have considered the inclusion of orphan nodes which usually remain unutilized as intermediate nodes in multi-hop routing. The Orphan Node Inclusion (ONI) Protocol lets the cluster member to bring the orphan nodes into their clusters, thereby saving important resources and increasing network lifetime in critical applications of WSN.

Keywords: wireless sensor network, orphan node, clustering, ONI protocol

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Authors: Lana Burmistrova

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Introduction: The influence of visual impairments on several cognitive processes used in the music learning process is an increasingly important area in special education and cognitive musicology. Many children have several visual impairments due to the refractive errors and irreversible inhibitors. However, based on the compensatory neuroplasticity and functional reorganization, congenitally blind (CB) and early blind (EB) individuals use several areas of the occipital lobe to perceive and process auditory and tactile information. CB individuals have greater memory capacity, memory reliability, and less false memory mechanisms are used while executing several tasks, they have better working memory (WM) and short-term memory (STM). Blind individuals use several strategies while executing tactile and working memory n-back tasks: verbalization strategy (mental recall), tactile strategy (tactile recall) and combined strategies. Methods and design: The aim of the pilot study was to substantiate similar tendencies while executing attention, memory and combined auditory tasks in blind and sighted individuals constructed for this study, and to investigate attention, memory and combined mechanisms used in the music learning process. For this study eight (n=8) blind and eight (n=8) sighted individuals aged 13-20 were chosen. All respondents had more than five years music performance and music learning experience. In the attention task, all respondents had to identify pitch changes in tonal and randomized melodic pairs. The memory task was based on the mismatch negativity (MMN) proportion theory: 80 percent standard (not changed) and 20 percent deviant (changed) stimuli (sequences). Every sequence was named (na-na, ra-ra, za-za) and several items (pencil, spoon, tealight) were assigned for each sequence. Respondents had to recall the sequences, to associate them with the item and to detect possible changes. While executing the combined task, all respondents had to focus attention on the pitch changes and had to detect and describe these during the recall. Results and conclusion: The results support specific features in CB and EB, and similarities between late blind (LB) and sighted individuals. While executing attention and memory tasks, it was possible to observe the tendency in CB and EB by using more precise execution tactics and usage of more advanced periodic memory, while focusing on auditory and tactile stimuli. While executing memory and combined tasks, CB and EB individuals used passive working memory to recall standard sequences, active working memory to recall deviant sequences and combined strategies. Based on the observation results, assessment of blind respondents and recording specifics, following attention and memory correlations were identified: reflective attention and STM, reflective attention and periodic memory, auditory attention and WM, tactile attention and WM, auditory tactile attention and STM. The results and the summary of findings highlight the attention and memory features used in the music learning process in the context of blindness, and the tendency of the several attention and memory types correlated based on the task, strategy and individual features.

Keywords: attention, blindness, memory, music learning, strategy

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Authors: Ace Mari S. Simbajon, Rhaella J. Ybañez, Mae G. Nadela, Cherry E. Sagun, Nera Mae A. Puyo

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This study determined the usability of the Philippine banknotes. An experimental design was used in the study involving twenty (n=20) randomly selected blind participants. The three aspects of usability were measured: effectiveness, efficiency, and satisfaction. It was found out that the effectiveness rate of the current Philippine Banknotes ranges from 20 percent to 35 percent which means it is not effective basing from Cauro’s threshold of average effectiveness rate which is 78 percent. Its efficiency rate is ranging from 18.06 to 26.22 seconds per denomination. The average satisfaction rate is 1.45 which means the blind are very dissatisfied. These results were used as a guide in making the proposed tactile codification using embossed dots or embossed lines. A round of simulation was conducted with the blind to assess the usability of the two proposals. Results were then statistically treated using t-test. Results show statistically significant difference between the usability of the current banknotes versus the proposed designs. Moreover, it was found out that the use of embossed dots is more effective, more efficient, and more satisfying than the embossed lines with an effectiveness rate ranging from 90 percent to 100 percent, efficiency rate ranging from 6.73 seconds to 12.99 seconds, and satisfaction rate of 3.4 which means the blind are very satisfied.

Keywords: blind, Philippine banknotes, tactile codification, usability

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Authors: Ti-An Tsai, Chun-Chih Wang, Hung-Wen Wang, I-Ling Chang, Lien-Wen Chen

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In this study, we demonstrate a high-resolution refractive index sensor based on a magnetic photonic crystal (MPC) composed of a triangular lattice array of air holes embedded in Si matrix. A microcavity is created by changing the radius of an air hole in the middle of the photonic crystal. The cavity filled with gyrotropic materials can serve as a refractive index sensor. The shift of the resonant frequency of the sensor is obtained numerically using finite difference time domain method under different ambient conditions having refractive index from n = 1.0 to n = 1.1. The numerical results show that a tiny change in refractive index of Δn = 0.0001 is distinguishable. In addition, the spectral response of the MPC sensor is studied while an external magnetic field is present. The results show that the MPC sensor exhibits a dramatic improvement in resolution.

Keywords: magnetic photonic crystal, refractive index sensor, sensitivity, high-resolution

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Authors: Subhra Prosun Paul, Shruti Aggarwal

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Now a days Routing Protocol in Wireless Sensor Network has become a promising technique in the different fields of the latest computer technology. Routing in Wireless Sensor Network is a demanding task due to the different design issues of all sensor nodes. Network architecture, no of nodes, traffic of routing, the capacity of each sensor node, network consistency, service value are the important factor for the design and analysis of Routing Protocol in Wireless Sensor Network. Additionally, internal energy, the distance between nodes, the load of sensor nodes play a significant role in the efficient routing protocol. In this paper, our intention is to analyze the research trends in different routing protocols of Wireless Sensor Network in terms of different parameters. In order to explain the research trends on Routing Protocol in Wireless Sensor Network, different data related to this research topic are analyzed with the help of Web of Science and Scopus databases. The data analysis is performed from global perspective-taking different parameters like author, source, document, country, organization, keyword, year, and a number of the publication. Different types of experiments are also performed, which help us to evaluate the recent research tendency in the Routing Protocol of Wireless Sensor Network. In order to do this, we have used Web of Science and Scopus databases separately for data analysis. We have observed that there has been a tremendous development of research on this topic in the last few years as it has become a very popular topic day by day.

Keywords: analysis, routing protocol, research trends, wireless sensor network

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Authors: Bilal Tebboub, AmelLabbani

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This article introduces a compact sensor based on high-transmission, high-sensitivity two-dimensional photonic crystals. The photonic crystal consists of a square network of silicon rods in the air. The sensor is composed of two waveguide couplers and a microcavity designed for monitoring the percentage of hydrogen in the air and identifying gas types. Through the Finite-Difference Time-Domain (FDTD) method, we demonstrate that the sensor's resonance wavelength is contingent upon changes in the gas refractive index. We analyze transmission spectra, quality factors, and sensor sensitivity. The sensor exhibits a notable quality factor and a sensitivity value of 1374 nm/RIU. Notably, the sensor's compact structure occupies an area of 74.5 μm2, rendering it suitable for integrated optical circuits.

Keywords: 2-D photonic crystal, sensitivity, F.D.T.D method, label-free biosensing

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Authors: Ishtiaq Wahid, Masood Ahmad, Nighat Ayub, Sajad Ali

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Lifetime of a wireless sensor network (WSN) is directly proportional to the energy consumption of its constituent nodes. Routing in wireless sensor network is very challenging due its inherit characteristics. In hierarchal routing the sensor filed is divided into clusters. The cluster-heads are selected from each cluster, which forms a hierarchy of nodes. The cluster-heads are used to transmit the data to the base station while other nodes perform the sensing task. In this way the lifetime of the network is increased. In this paper a comparative study of hierarchal routing protocols are conducted. The simulation is done in NS-2 for validation.

Keywords: WSN, cluster, routing, sensor networks

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Authors: Khavieya Anandhan, Soundarapandian Santhanakrishnan, Vijayaraghavan Laxmanan

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In general, measurement of surfaces is carried out by using traditional methods such as contact type stylus instruments. This prevalent approach is challenged by using non-contact instruments such as optical profiler, co-ordinate measuring machine, laser triangulation sensors, machine vision system, etc. Recently, confocal sensor is trying to be used in the surface metrology field. This sensor, such as a confocal sensor, is explored in this study to determine the surface roughness value for various turned surfaces. Turning is a crucial machining process to manufacture products such as grooves, tapered domes, threads, tapers, etc. The roughness value of turned surfaces are in the range of range 0.4-12.5 µm, were taken for analysis. Three instruments were used, namely, perthometer, optical profiler, and confocal sensor. Among these, in fact, a confocal sensor is least explored, despite its good resolution about 5 nm. Thus, such a high-precision sensor was used in this study to explore the possibility of measuring turned surfaces. Further, using this data, measurement uncertainty was also studied.

Keywords: confocal sensor, optical profiler, surface roughness, turned surfaces

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Authors: Yadollah Hezarjaribi, Mahdie Yari Esboi

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In this paper, a novel MEMS capacitive pressure sensor with small size and high sensitivity is presented. This sensor has the separated clamped square diaphragm and the movable plate. The diaphragm material is polysilicon. The movable and fixed plates and mechanical coupling are gold. The substrate and diaphragm are pyrex glass and polysilicon, respectively. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes with pressure for this reason with this design is improved the capacitance and sensitivity with small size. This sensor is designed for low pressure between 0-60 mmHg that is used for medical application such as treatment of an incurable disease called glaucoma. The size of this sensor is 350×350 µm2 and the thickness of the diaphragm is 2µm with 1μ air gap. This structure is designed by intellisuite software. In this MEMS capacitive pressure sensor the sensor sensitivity, diaphragm mechanical sensitivity for polysilicon diaphragm are 0.0469Pf/mmHg, 0.011 μm/mmHg, respectively. According to the simulating results for low pressure, the structure with polysilicon diaphragm has more change of the displacement and capacitance, this leads to high sensitivity than other diaphragms.

Keywords: glaucoma, MEMS capacitive pressure sensor, square clamped diaphragm, polysilicon

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