Search results for: Control Flow Graph

Authors: Ibrahim Mnafeg, Azgal Abichou, Lotfi Beji

Abstract:

Traditional mechanical control systems in thrust vectoring are efficient in rocket thrust guidance but their costs and their weights are excessive. The fluidic injection in the nozzle divergent constitutes an alternative procedure to achieve the goal. In this paper, we present a 3D analytical model for fluidic injection in a supersonic nozzle integrating an orifice. The fluidic vectoring uses a sonic secondary injection in the divergent. As a result, the flow and interaction between the main and secondary jet has built in order to express the pressure fields from which the forces and thrust vectoring are deduced. Under various separation criteria, the present analytical model results are compared with the existing numerical and experimental data from the literature.

Keywords: Flow separation, Fluidic thrust vectoring, Nozzle, Secondary jet, Shock wave.

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Authors: Mehdi Fuladipanah, Mehdi Jorabloo

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Water flow management is one of the most important parts of river engineering. Non-uniformity distribution of rainfall and various flow demand with unreasonable flow management will be caused destroyed of river ecosystem. Then, it is very serious to determine ecosystem flow requirement. In this paper, Flow duration curve indices method which has hydrological based was used to evaluate environmental flow in Gharasou River, Ardabil, Iran. Using flow duration curve, Q90 and Q95 for different return periods were calculated. Their magnitude were determined as 1-day, 3-day, 7-day and 30 day. According the second method, hydraulic alteration indices often had low and medium range. In order to maintain river at an acceptable ecological condition, minimum daily discharge of index Q95 is 0.7 m3.s-1.

Keywords: Ardabil, Environmental flow, Flow Duration Curve, Gharasou River.

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Authors: Syahanim Mohd Salleh, Zaihosnita Hood, Hairulliza Mohd Judi, Marini Abu Bakar

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CFlow is a flow chart software, it contains facilities to draw and evaluate a flow chart. A flow chart evaluation applies a simulation method to enable presentation of work flow in a flow chart solution. Flow chart simulation of CFlow is executed by manipulating the CFlow data file which is saved in a graphical vector format. These text-based data are organised by using a data classification technic based on a Library classification-scheme. This paper describes the file format for flow chart simulation software of CFlow.

Keywords: CFlow, flow chart, file format.

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Authors: S. Balaji, V. Swaminathan, K. Kannan

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The Minimum Weighted Vertex Cover (MWVC) problem is a classic graph optimization NP - complete problem. Given an undirected graph G = (V, E) and weighting function defined on the vertex set, the minimum weighted vertex cover problem is to find a vertex set S V whose total weight is minimum subject to every edge of G has at least one end point in S. In this paper an effective algorithm, called Support Ratio Algorithm (SRA), is designed to find the minimum weighted vertex cover of a graph. Computational experiments are designed and conducted to study the performance of our proposed algorithm. Extensive simulation results show that the SRA can yield better solutions than other existing algorithms found in the literature for solving the minimum vertex cover problem.

Keywords: Weighted vertex cover, vertex support, approximation algorithms, NP-complete problem.

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Authors: Irene Luque Ruiz, Manuel Urbano Cuadrado, Miguel Ángel Gómez-Nieto

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New graph similarity methods have been proposed in this work with the aim to refining the chemical information extracted from molecules matching. For this purpose, data fusion of the isomorphic and nonisomorphic subgraphs into a new similarity measure, the Approximate Similarity, was carried out by several approaches. The application of the proposed method to the development of quantitative structure-activity relationships (QSAR) has provided reliable tools for predicting several pharmacological parameters: binding of steroids to the globulin-corticosteroid receptor, the activity of benzodiazepine receptor compounds, and the blood brain barrier permeability. Acceptable results were obtained for the models presented here.

Keywords: Graph similarity, Nonisomorphic dissimilarity, Approximate similarity, Drug activity prediction.

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Authors: Sizhong Zhou, Bingyuan Pu

Abstract:

Let G be a graph of order n, and let a, b and m be positive integers with 1 ≤ a<b. An [a, b]-factor of G is defined as a spanning subgraph F of G such that a ≤ dF (x) ≤ b for each x ∈ V (G). In this paper, it is proved that if n ≥ (a+b−1+√(a+b+1)m−2)2−1 b and δ(G) > n + a + b − 2 √bn+ 1, then for any subgraph H of G with m edges, G has an [a, b]-factor F such that E(H)∩ E(F) = ∅. This result is an extension of thatof Egawa [2].

Keywords: graph, minimum degree, [a, b]-factor.

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Authors: Ali Emad

Abstract:

Enhancement of the performance of a reverse osmosis (RO) unit through periodic control is studied. The periodic control manipulates the feed pressure and flow rate of the RO unit. To ensure the periodic behavior of the inputs, the manipulated variables (MV) are transformed into the form of sinusoidal functions. In this case, the amplitude and period of the sinusoidal functions become the surrogate MV and are thus regulated via nonlinear model predictive control algorithm. The simulation results indicated that the control system can generate cyclic inputs necessary to enhance the closedloop performance in the sense of increasing the permeate production and lowering the salt concentration. The proposed control system can attain its objective with arbitrary set point for the controlled outputs. Successful results were also obtained in the presence of modeling errors.

Keywords: Reverse osmosis, water desalination, periodic control, model predictive control.

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Authors: Praveen Saraswat, Vipin Kumar Verma, Rudraman Singh

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The unsteady transient free convection flow of an incompressible dissipative viscous fluid between parallel plates at different distances have been investigated under porous medium. Due to presence of heat flux under the influence of uniform transverse magnetic field the velocity distribution and the temperature distribution, is shown graphically. Since exact solution is not possible so we find parametrical solution by perturbation technique. The result is shown in graph for different parameters. We notice that heat generation effects fluid velocity keeping in which of free convection which cools.

Keywords: Transient, Convection, MHD, Viscous, Porous.

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Authors: Jehad Al Dallal

Abstract:

Program slicing is the task of finding all statements in a program that directly or indirectly influence the value of a variable occurrence. The set of statements that can affect the value of a variable at some point in a program is called a program backward slice. In several software engineering applications, such as program debugging and measuring program cohesion and parallelism, several slices are computed at different program points. The existing algorithms for computing program slices are introduced to compute a slice at a program point. In these algorithms, the program, or the model that represents the program, is traversed completely or partially once. To compute more than one slice, the same algorithm is applied for every point of interest in the program. Thus, the same program, or program representation, is traversed several times. In this paper, an algorithm is introduced to compute all forward static slices of a computer program by traversing the program representation graph once. Therefore, the introduced algorithm is useful for software engineering applications that require computing program slices at different points of a program. The program representation graph used in this paper is called Program Dependence Graph (PDG).

Keywords: Program slicing, static slicing, forward slicing, program dependence graph (PDG).

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Authors: Ahmad Salehi

Abstract:

An acyclic coloring of a graph G is a coloring of its vertices such that:(i) no two neighbors in G are assigned the same color and (ii) no bicolored cycle can exist in G. The acyclic chromatic number of G is the least number of colors necessary to acyclically color G. Recently it has been proved that any graph of maximum degree 5 has an acyclic chromatic number at most 8. In this paper we present another proof for this result.

Keywords: Acyclic Coloring, Vertex coloring.

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Authors: Vikas Rastogi, Vipan Kumar, Loveleen Kumar Bhagi

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The present work deals with the structural analysis of turbine blades and modeling of turbine blades. A common failure mode for turbine machines is high cycle of fatigue of compressor and turbine blades due to high dynamic stresses caused by blade vibration and resonance within the operation range of the machinery. In this work, proper damping system will be analyzed to reduce the vibrating blade. The main focus of the work is the modeling of under platform damper to evaluate the dynamic analysis of turbine-blade vibrations. The system is analyzed using Bond graph technique. Bond graph is one of the most convenient ways to represent a system from the physical aspect in foreground. It has advantage of putting together multi-energy domains of a system in a single representation in a unified manner. The bond graph model of dry friction damper is simulated on SYMBOLS-shakti® software. In this work, the blades are modeled as Timoshenko beam. Blade Vibrations under different working conditions are being analyzed numerically.

Keywords: Turbine blade vibrations, Friction dampers, Timoshenko Beam, Bond graph modeling.

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Authors: Ya-Chi Yu, Pei-Syuan Ruan, Shao-Wen Chen, Yu-Hsien Chang, Jin-Der Lee, Jong-Rong Wang, Chunkuan Shih

Abstract:

This study analyzed the transient signals of central region void fraction of air-water two-phase flow in a 3x3 rod bundle. Experimental tests were carried out utilizing a vertical rod bundle test section along with a set of air-water supply/flow control system, and the transient signals of the central region void fraction were collected through the electrical conductivity sensors as well as visualized via high speed photography. By converting the electric signals, transient void fraction can be obtained through the voltage ratios. With a fixed superficial water velocity (J_f=0.094 m/s), two different superficial air velocities (J_g=0.094 m/s and 0.236 m/s) were tested and presented, which were corresponding to the flow conditions of bubbly flows and cap/slug flows, respectively. The time averaged central region void fraction was obtained as 0.109-0.122 with 0.028 standard deviation for the selected bubbly flow and 0.188-0.221with 0.101 standard deviation for the selected cap/slug flow, respectively. Through Fast Fourier Transform (FFT) analysis, no clear frequency peak was found in bubbly flow, while two dominant frequencies were identified around 1.6 Hz and 2.5 Hz in the present cap/slug flow.

Keywords: Central region, rod bundles, transient void fraction, two-phase flow.

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Authors: A. J. Nazari, S. Honma

Abstract:

This paper evaluates oil displacement by water in Hauterivian sandstone reservoir of Kashkari oil field in North of Afghanistan. The core samples of this oil field were taken out from well No-21^st, and the relative permeability and fractional flow are analyzed. Steady state flow laboratory experiments are performed to empirically obtain the fractional flow curves and relative permeability in different water saturation ratio. The relative permeability represents the simultaneous flow behavior in the reservoir. The fractional flow approach describes the individual phases as fractional of the total flow. The fractional flow curve interprets oil displacement by water, and from the tangent of fractional flow curve can find out the average saturation behind the water front flow saturation. Therefore, relative permeability and fractional flow curves are suitable for describing the displacement of oil by water in a petroleum reservoir. The effects of irreducible water saturation, residual oil saturation on the displaceable amount of oil are investigated through Buckley-Leveret analysis.

Keywords: Fractional flow, oil displacement, relative permeability, simultaneously flow.

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Authors: I. Abuiziah, A. Oulhaj, K. Sebari, D. Ouazar

Abstract:

Desurging tank with automatic air control “DTAAC” is a water hammer protection device, operates either an open or closed surge tank according to the water level inside the surge tank, with the volume of air trapped in the filling phase, this protection device has the advantages of its easy maintenance, and does not need to run any external energy source (air compressor). A computer program has been developed based on the characteristic method to simulate flow transient phenomena in pressurized water pipeline systems, it provides the influence of using the protection devices to control the adverse effects due to excessive and low pressure occurring in this phenomena. The developed model applied to a simple main water pipeline system: pump combined with DTAAC connected to a reservoir.  The results obtained provide that the model is an efficient tool for water hammer analysis. Moreover; using the DTAAC reduces the unfavorable effects of the transients.

Keywords: DTAAC, Flow transient, Numerical model, Pipeline system, Protection devices.

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Authors: Saeed Hosseini, Ali Reza Tahavvor

Abstract:

Sound processing is one the subjects that newly attracts a lot of researchers. It is efficient and usually less expensive than other methods. In this paper the flow generated sound is used to estimate the flow speed of free flows. Many sound samples are gathered. After analyzing the data, a parameter named wave power is chosen. For all samples the wave power is calculated and averaged for each flow speed. A curve is fitted to the averaged data and a correlation between the wave power and flow speed is found. Test data are used to validate the method and errors for all test data were under 10 percent. The speed of the flow can be estimated by calculating the wave power of the flow generated sound and using the proposed correlation.

Keywords: Flow generated sound, sound processing, speed, wave power.

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Authors: Qamar Saeed, Vali Uddin, Reza Katebi

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In this paper multivariable predictive PID controller has been implemented on a multi-inputs multi-outputs control problem i.e., quadruple tank system, in comparison with a simple multiloop PI controller. One of the salient feature of this system is an adjustable transmission zero which can be adjust to operate in both minimum and non-minimum phase configuration, through the flow distribution to upper and lower tanks in quadruple tank system. Stability and performance analysis has also been carried out for this highly interactive two input two output system, both in minimum and non-minimum phases. Simulations of control system revealed that better performance are obtained in predictive PID design.

Keywords: Proportional-integral-derivative Control, GeneralizedPredictive Control, Predictive PID Control, Multivariable Systems

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Authors: H. Y. Pourali, V. V. Joshi, B. N. Waphare.

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In this paper, we verify the diameter of zero divisor graphs with respect to direct product.

Keywords: Atomic lattice, complement of graph, diameter, direct product of lattices, 0-distributive lattice, girth, product of graphs, prime ideal, zero divisor graph.

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Authors: Samina Elyas Mubeen, R. K. Nema, Gayatri Agnihotri

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In this paper the performance of unified power flow controller is investigated in controlling the flow of po wer over the transmission line. Voltage sources model is utilized to study the behaviour of the UPFC in regulating the active, reactive power and voltage profile. This model is incorporated in Newton Raphson algorithm for load flow studies. Simultaneous method is employed in which equations of UPFC and the power balance equations of network are combined in to one set of non-linear algebraic equations. It is solved according to the Newton raphson algorithm. Case studies are carried on standard 5 bus network. Simulation is done in Matlab. The result of network with and without using UPFC are compared in terms of active and reactive power flows in the line and active and reactive power flows at the bus to analyze the performance of UPFC.

Keywords: Newton-Raphson algorithm, Load flow, Unified power flow controller, Voltage source model.

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Authors: Malika.D Kedir-Talha, Mohamed Mehenni

Abstract:

In order to be able to automatically differentiate between two modes of permanent flow of a liquid simulating blood, it was imperative to put together a data bank. Thus, the acquisition of the various amplitude spectra of the Doppler signal of this liquid in laminar flow and other spectra in turbulent flow enabled us to establish an automatic difference between the two modes. According to the number of parameters and their nature, a comparative study allowed us to choose the best classifier.

Keywords: Doppler spectrum, flow mode, pattern recognition, permanent flow.

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Authors: T.Sheela, Dr.J.Raja

Abstract:

Continuously growing needs for Internet applications that transmit massive amount of data have led to the emergence of high speed network. Data transfer must take place without any congestion and hence feedback parameters must be transferred from the receiver end to the sender end so as to restrict the sending rate in order to avoid congestion. Even though TCP tries to avoid congestion by restricting the sending rate and window size, it never announces the sender about the capacity of the data to be sent and also it reduces the window size by half at the time of congestion therefore resulting in the decrease of throughput, low utilization of the bandwidth and maximum delay. In this paper, XCP protocol is used and feedback parameters are calculated based on arrival rate, service rate, traffic rate and queue size and hence the receiver informs the sender about the throughput, capacity of the data to be sent and window size adjustment, resulting in no drastic decrease in window size, better increase in sending rate because of which there is a continuous flow of data without congestion. Therefore as a result of this, there is a maximum increase in throughput, high utilization of the bandwidth and minimum delay. The result of the proposed work is presented as a graph based on throughput, delay and window size. Thus in this paper, XCP protocol is well illustrated and the various parameters are thoroughly analyzed and adequately presented.

Keywords: Bandwidth-Delay Product, Congestion Control, Congestion Window, TCP/IP

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Authors: Jiajun Wang, Xiaoge Li

Abstract:

The purpose of the aspect-level sentiment analysis task is to identify the sentiment polarity of aspects in a sentence. Currently, most methods mainly focus on using neural networks and attention mechanisms to model the relationship between aspects and context, but they ignore the dependence of words in different ranges in the sentence, resulting in deviation when assigning relationship weight to other words other than aspect words. To solve these problems, we propose an aspect-level sentiment analysis model that combines a multi-channel convolutional network and graph convolutional network (GCN). Firstly, the context and the degree of association between words are characterized by Long Short-Term Memory (LSTM) and self-attention mechanism. Besides, a multi-channel convolutional network is used to extract the features of words in different ranges. Finally, a convolutional graph network is used to associate the node information of the dependency tree structure. We conduct experiments on four benchmark datasets. The experimental results are compared with those of other models, which shows that our model is better and more effective.

Keywords: Aspect-level sentiment analysis, attention, multi-channel convolution network, graph convolution network, dependency tree.

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Authors: S. Abouda, F. Nollet, A. Chaari, N. Essounbouli, Y. Koubaa

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In this paper we propose the study of a centrifugal pump control system driven by a three-phase induction motor, which is supplied by a PhotoVoltaic PV generator. The system includes solar panel, a DC / DC converter equipped with its MPPT control, a voltage inverter to three-phase Pulse Width Modulation - PWM and a centrifugal pump driven by a three phase induction motor. In order to control the flow of the centrifugal pump, a Direct Torque Control - DTC of the induction machine is used. To illustrate the performances of the control, simulation results are carried out using Matlab/Simulink.

Keywords: Photovoltaic generators, Maximum power point tracking (MPPT), DC/DC converters, Induction motor, Direct torque control (DTC).

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Authors: Khalid. M. O. Elmabrok, M. L. Burby, G. G. Nasr

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Flow instability during gas lift operation is caused by three major phenomena – the density wave oscillation, the casing heading pressure and the flow perturbation within the two-phase flow region. This paper focuses on the causes and the effect of flow instability during gas lift operation and suggests ways to control it in order to maximise productivity during gas lift operations. A laboratory-scale two-phase flow system to study the effects of flow perturbation was designed and built. The apparatus is comprised of a 2 m long by 66 mm ID transparent PVC pipe with air injection point situated at 0.1 m above the base of the pipe. This is the point where stabilised bubbles were visibly clear after injection. Air is injected into the water filled transparent pipe at different flow rates and pressures. The behavior of the different sizes of the bubbles generated within the two-phase region was captured using a digital camera and the images were analysed using the advanced image processing package. It was observed that the average maximum bubbles sizes increased with the increase in the length of the vertical pipe column from 29.72 to 47 mm. The increase in air injection pressure from 0.5 to 3 bars increased the bubble sizes from 29.72 mm to 44.17 mm and then decreasing when the pressure reaches 4 bars. It was observed that at higher bubble velocity of 6.7 m/s, larger diameter bubbles coalesce and burst due to high agitation and collision with each other. This collapse of the bubbles causes pressure drop and reverse flow within two phase flow and is the main cause of the flow instability phenomena.

Keywords: Gas lift instability, bubble forming, bubble collapsing, image processing.

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Authors: Oscar E. Ruiz, S. Arroyave, J. F. Cardona

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In the context of computer numerical control (CNC) and computer aided manufacturing (CAM), the capabilities of programming languages such as symbolic and intuitive programming, program portability and geometrical portfolio have special importance. They allow to save time and to avoid errors during part programming and permit code re-usage. Our updated literature review indicates that the current state of art presents voids in parametric programming, program portability and programming flexibility. In response to this situation, this article presents a compiler implementation for EGCL (Extended G-code Language), a new, enriched CNC programming language which allows the use of descriptive variable names, geometrical functions and flow-control statements (if-then-else, while). Our compiler produces low-level generic, elementary ISO-compliant Gcode, thus allowing for flexibility in the choice of the executing CNC machine and in portability. Our results show that readable variable names and flow control statements allow a simplified and intuitive part programming and permit re-usage of the programs. Future work includes allowing the programmer to define own functions in terms of EGCL, in contrast to the current status of having them as library built-in functions.

Keywords: CNC Programming, Compiler, G-code Language, Numerically Controlled Machine-Tools.

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Authors: Tanveer A. Khan, Xue Y. Deng, Yan K. Wang, Xu Si-Wen

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Experiments have been carried out at sub-critical Reynolds number to investigate free-to-roll motions induced by forebody and/or wings complex flow on a 30° swept back nonslender wings-slender body-model for static and dynamic (pitch-up) cases. For the dynamic (pitch-up) case it has been observed that roll amplitude decreases and lag increases with increase in pitching speed. Decrease in roll amplitude with increase in pitch rate is attributed to low disturbing rolling moment due to weaker interaction between forebody and wing flow components. Asymmetric forebody vortices dominate and control the roll motion of the model in dynamic case when non-dimensional pitch rate ≥ 1x10-2. Effectiveness of the active control scheme utilizing rotating nose with artificial tip perturbation is observed to be low in the angle of attack region where the complex flow over the wings has contributions from both forebody and wings.

Keywords: Artificial Tip Perturbation, ExperimentalInvestigations, Forebody Asymmetric Vortices, Non-slender Wings-Body Model, Wing Rock

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Authors: Tadashi Watanabe, Jinya Katsuyama, Akihiro Mano

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The estimation of leak flow rates through narrow cracks in structures is of importance for nuclear reactor safety, since the leak flow could be detected before occurrence of loss-of-coolant accidents. The two-phase critical leak flow rates are calculated using the system analysis code, and two representative non-homogeneous critical flow models, Henry-Fauske model and Ransom-Trapp model, are compared. The pressure decrease and vapor generation in the crack, and the leak flow rates are found to be larger for the Henry-Fauske model. It is shown that the leak flow rates are not affected by the structural temperature, but affected largely by the roughness of crack surface.

Keywords: Crack, critical flow, leak, roughness.

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Authors: Sungju Yun, Anjin Park, Keechul Jung

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Motion capture devices have been utilized in producing several contents, such as movies and video games. However, since motion capture devices are expensive and inconvenient to use, motions segmented from captured data was recycled and synthesized to utilize it in another contents, but the motions were generally segmented by contents producers in manual. Therefore, automatic motion segmentation is recently getting a lot of attentions. Previous approaches are divided into on-line and off-line, where on-line approaches segment motions based on similarities between neighboring frames and off-line approaches segment motions by capturing the global characteristics in feature space. In this paper, we propose a graph-based high-level motion segmentation method. Since high-level motions consist of several repeated frames within temporal distances, we consider all similarities among all frames within the temporal distance. This is achieved by constructing a graph, where each vertex represents a frame and the edges between the frames are weighted by their similarity. Then, normalized cuts algorithm is used to partition the constructed graph into several sub-graphs by globally finding minimum cuts. In the experiments, the results using the proposed method showed better performance than PCA-based method in on-line and GMM-based method in off-line, as the proposed method globally segment motions from the graph constructed based similarities between neighboring frames as well as similarities among all frames within temporal distances.

Keywords: Capture Devices, High-Level Motion, Motion Segmentation, Normalized Cuts

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Authors: Manisha Dubey, Gaurav Gupta, Anoop Arya

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The demand for power supply increases day by day in developing countries like India henceforth demand of reactive power support in the form of ancillary services provider also has been increased. The multi-line and multi-type Flexible alternating current transmission system (FACTS) controllers are playing a vital role to regulate power flow through the transmission line. Unified power flow controller and interline power flow controller can be utilized to control reactive power flow through the transmission line. In a restructured power system, the demand of such controller is being popular due to their inherent capability. The transmission pricing by using reactive power cost allocation through modified matrix methodology has been proposed. The FACTS technologies have quite costly assembly, so it is very useful to apportion the expenses throughout the restructured electricity industry. Therefore, in this work, after embedding the FACTS devices into load flow, the impact on the costs allocated to users in fraction to the transmission framework utilization has been analyzed. From the obtained results, it is clear that the total cost recovery is enhanced towards the Reactive Power flow through the different transmission line for 5 bus test system. The fair pricing policy towards reactive power can be achieved by the proposed method incorporating FACTS controller towards cost recovery of the transmission network.

Keywords: Inter line power flow controller, Transmission Pricing, Unified power flow controller, cost allocation.

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Authors: Aniruddha Bhattacharya, Pranab Kumar Chattopadhyay

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Optimal reactive power flow is an optimization problem with one or more objective of minimizing the active power losses for fixed generation schedule. The control variables are generator bus voltages, transformer tap settings and reactive power output of the compensating devices placed on different bus bars. Biogeography- Based Optimization (BBO) technique has been applied to solve different kinds of optimal reactive power flow problems subject to operational constraints like power balance constraint, line flow and bus voltages limits etc. BBO searches for the global optimum mainly through two steps: Migration and Mutation. In the present work, BBO has been applied to solve the optimal reactive power flow problems on IEEE 30-bus and standard IEEE 57-bus power systems for minimization of active power loss. The superiority of the proposed method has been demonstrated. Considering the quality of the solution obtained, the proposed method seems to be a promising one for solving these problems.

Keywords: Active Power Loss, Biogeography-Based Optimization, Migration, Mutation, Optimal Reactive Power Flow.

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Authors: Luc Conti, Dimitry Dumont-Fillon, Harald van Lintel, Eric Chappel

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Flow control valves comprise a silicon flexible membrane that deflects against a substrate, usually made of glass, containing pillars, an outlet hole, and anti-stiction features. However, there is a strong interest in using silicon instead of glass as substrate material, as it would simplify the process flow by allowing the use of well controlled anisotropic etching. Moreover, specific devices demanding a bending of the substrate would also benefit from the inherent outstanding mechanical strength of monocrystalline silicon. Unfortunately, direct Si-Si bonding is not easily achieved with highly structured wafers since residual stress may prevent the good adhesion between wafers. Using a thermoplastic polymer, such as parylene, as intermediate layer is not well adapted to this design as the wafer-to-wafer alignment is critical. An alternative anodic bonding method using an intermediate borosilicate layer has been successfully tested. This layer has been deposited onto the silicon substrate. The bonding recipe has been adapted to account for the presence of the SOI buried oxide and intermediate glass layer in order not to exceed the breakdown voltage. Flow control valves dedicated to infusion of viscous fluids at very high pressure have been made and characterized. The results are compared to previous data obtained using the standard anodic bonding method.

Keywords: Anodic bonding, evaporated glass, microfluidic valve, drug delivery.

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