Search results for: plantar pressure distributions

Authors: Hasan Jumaah Mrayeh, Fue-Sang Lien

Abstract:

ANSYS Fluent will be used to simulate Computational Fluid Dynamics (CFD) for an efficient lens and nozzle design which will be explained in this paper. We have designed and characterized an aerodynamic lens and a divergent nozzle for focusing flow that transmits sub 25 nm particles through the aerodynamic lens. The design of the lens and nozzle has been improved using CFD for particle trajectories. We obtained a case for calculating nanoparticles (25 nm) flowing through the aerodynamic lens and divergent nozzle. Nanoparticles are transported by air, which is pumped into the aerodynamic lens through the nozzle at 1 atmospheric pressure. We have also developed a computational methodology that can determine the exact focus characteristics of aerodynamic lens systems. Particle trajectories were traced using the Lagrange approach. The simulation shows the ability of the aerodynamic lens to focus on 25 nm particles after using a divergent nozzle.

Keywords: Aerodynamic lens AL, divergent nozzle DN, ANSYS Fluent, Lagrange approach.

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Authors: Chih-Chieh Chen, Chih-Hao Chen, Guan-Wei Wu, Sih-Li Chen

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A high thermal dissipation performance polyethylene terephthalate heat pipe has been fabricated and tested in this research. Polyethylene terephthalate (PET) is used as the container material instead of copper. Copper mesh and methanol are sealed in the middle of two PET films as the wick structure and working fluid. Although the thermal conductivity of PET (0.15-0.24 W/m·K) is much smaller than copper (401 W/m·K), the experiment results reveal that the PET heat pipe can reach a minimum thermal resistance of 0.146 (^oC/W) and maximum effective thermal conductivity of 18,310 (W/m·K) with 36.9 vol% at 26 W input power. However, when the input power is larger than 30 W, the laminated PET will debond due to the high vapor pressure of methanol.

Keywords: PET, heat pipe, thermal resistance, effective thermal conductivity.

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Authors: M. Jamuna Rani, K. Ramanathan

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A steam power plant is housed with various types of equipments like boiler, turbine, heat exchanger etc. These equipments are mainly connected with piping systems. Such a piping layout design depends mainly on stress analysis and flexibility. It will vary with respect to pipe geometrical properties, pressure, temperature, and supports. The present paper is to analyze the presence and effect of hangers and expansion joints in the piping layout/routing using CAESAR-II software. Main aim of piping stress analysis is to provide adequate flexibility for absorbing thermal expansion, code compliance for stresses and displacement incurred in piping system. The design is said to be safe if all these are in allowable range as per code. In this study, a sample problem is considered for analysis as per power piping ASME B31.1 code and the results thus obtained are compared.

Keywords: ASTM B31.1, hanger, expansion joint, CAESAR-II.

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Authors: Roshan Sharma, Bjørn Glemmestad

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In gas lifted oil fields, the lift gas should be distributed optimally among the wells which share gas from a common source to maximize total oil production. One of the objectives of the paper is to show that a linear MPC consisting of a control objective and an economic objective can be used both as an optimizer and a controller for gas lifted systems. The MPC is based on linearized model of the oil field developed from first principles modeling. Simulation results show that the total oil production is increased by 3.4%. Difficulties in accurately measuring the bottom hole pressure using sensors in harsh operating conditions can be resolved by using an Unscented Kalman Filter (UKF) for estimation. In oil fields where input disturbance (total supply of gas) is not measured, UKF can also be used for disturbance estimation. Increased total oil production due to optimization leads to increased profit.

Keywords: gas lift, MPC, oil production, optimization, Unscented Kalman filter.

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Authors: Kayoko Yamamoto

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The purpose of this study is to review representative cases of green space development in order to compare the Garden City concept and Green Belt concept as applied and to examine its direction in major Asian and Oceanic cities. The results of previous studies and this study show that there are two major directions in such green-oriented city planning. One direction is toward Multi-Regional Development, and the other focuses on an Environmentally Symbiotic City based on the Garden City concept. In large cities and the suburbs where extremely strong pressure to urbanize makes it impossible to keep Green Belts, it is essential to strictly control land use and adopt the Garden City concept to conserve the urban environment.

Keywords: Garden City, Green Belt, Green City, Green SpaceDevelopment, Major Asian and Oceanic Cities

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Authors: Stella A. Arnaouti, Demos C. Angelides, Theodoros N. Chatzigogos, Witold M. Pytel

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The Želazny Most tailing pond is one of the largest facilities worldwide for waste disposal from the copper mines located in South-West Poland. A potential failure of the dam would allow more than 10 million cubic meters of contaminated slurry to flow to the valley, causing immense environmental problems to the surrounding area. Thus, the determination of the strength properties of the dam's soils and their variability is of utmost importance. An extensive site investigation consisting of more than 480 cone penetration tests (CPTs) with or without pore water pressure measurements were conducted within a period of 13 years to study the mechanical properties of the tailings body. The present work investigates the point variability of the soil strength parameters (effective friction angle

Keywords: Soil strength variability, friction angle spatial variability, Želazny Most tailing dam.

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Authors: Wenjing Ding, Weiwei Shan, Zijuan, Wang, Chao He

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Liquid spray heat exchanger is the critical equipment of temperature regulating system by gaseous nitrogen which realizes the environment temperature in the range of -180 ℃~+180 ℃. Liquid nitrogen is atomized into smaller liquid drops through liquid nitrogen sprayer and then contacts with gaseous nitrogen to be cooled. By adjusting the pressure of liquid nitrogen and gaseous nitrogen, the flowrate of liquid nitrogen is changed to realize the required outlet temperature of heat exchanger. The temperature accuracy of shrouds is ±1 ℃. Liquid nitrogen spray heat exchanger is simulated by CATIA, and the numerical simulation is performed by FLUENT. The comparison between the tests and numerical simulation is conducted. Moreover, the results help to improve the design of liquid nitrogen spray heat exchanger.

Keywords: Liquid nitrogen spray, temperature regulating system, heat exchanger, numerical simulation.

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Authors: Weeraya Samnuknit, Apichat Boontawan

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A vacuum fractionation technique was introduced to remove ethanol from fermentation broth. The effect of initial glucose and ethanol concentrations were investigated for specific productivity. The inhibitory ethanol concentration was observed at 100 g/L. In order to increase the fermentation performance, the ethanol product was removed as soon as it is produced. The broth was boiled at 35^oC by reducing the pressure to 65 mBar. The ethanol/water vapor was fractionated for up to 90 wt% before leaving the column. Ethanol concentration in the broth was kept lower than 25 g/L, thus minimized the product inhibition effect to the yeast cells. For batch extractive fermentation, a high substrate utilization rate was obtained at 26.6 g/L.h and most of glucose was consumed within 21 h. For repeated-batch extractive fermentation, addition of glucose was carried out up to 9 times and ethanol was produced more than 8-fold higher than batch fermentation.

Keywords: Ethanol, Extractive fermentation, Product inhibition, Vacuum fractionation.

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Authors: Waluyo, Ngapuli I. Sinisuka, Suwarno, Maman A. Djauhari

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This paper presents the experimental results of comparison between leakage currents and discharge currents. The leakage currents were obtained on polluted porcelain insulator. Whereas, the discharge currents were obtained on lightly artificial polluted porcelain specimen. The conducted measurements were leakage current or discharge current and applied voltage. The insulator or specimen was in a hermetically sealed chamber, and the current waveforms were analyzed using FFT. The result indicated that the leakage current (LC) on low RH condition the fifth harmonic would be visible, and followed by the seventh harmonic. The insulator had capacitive property. Otherwise, on 99% relative humidity, the fifth harmonic would also be visible, and the phase angle reached up to 12.2 degree. Whereas, on discharge current, the third harmonic would be visible, and followed by fifth harmonic. The third harmonic would increase as pressure reduced. On this condition, the specimen had a non-linear characteristics

Keywords: leakage current, discharge current, third harmonic, fifth harmonic, porcelain.

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Authors: Karina Natali, Wei-Hwa Chiang

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This study examines the stack ventilation performance of an office building located in Taipei, Taiwan. Atriums in this building act as stacks that facilitate buoyancy-driven ventilation. Computational Fluid Dynamic (CFD) simulations are used to identify interior airflow patterns, and then used these patterns to assess the building’s heat expulsion efficiency. Ambient temperatures of 20°C were adopted as the typical seasonal spring temperature range in Taipei. Further, “zero-wind” conditions are established to ensure simulation results reflected only the buoyancy effect. After checking results against neutral pressure level (NPL) level, airflow, air velocity, and indoor temperature stratification, the lower stack is modified to reduce the NPL in order to remove heat accumulated on the top floor.

Keywords: Natural ventilation, side outlet, stack effect, thermal comfort.

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Authors: D. Laiadi, A. Hasseine, A. Merzougui

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In this work, Experimental tie-line results and solubility (binodal) curves were obtained for the ternary systems (water + acetic acid + methyl isobutyl ketone (MIBK)), (water + lactic acid+ methyl isobutyl ketone) at T = 294.15K and atmospheric pressure. The consistency of the values of the experimental tie-lines was determined through the Othmer-Tobias and Hands correlations. For the extraction effectiveness of solvents, the distribution and selectivity curves were plotted. In addition, these experimental tieline data were also correlated with NRTL model. The interaction parameters for the NRTL model were retrieved from the obtained experimental results by means of a combination of the homotopy method and the genetic algorithms.

Keywords: Liquid-liquid equilibria, homotopy methods, carboxylic acid, NRTL.

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Authors: Somayeh Tourani, Alireza Behvandi

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The peng-Robinson (PR), a cubic equation of state (EoS), is extended to polymers by using a single set of energy (A1, A2, A3) and co-volume (b) parameters per polymer fitted to experimental volume data. Excellent results for the volumetric behavior of the 11 polymer up to 2000 bar pressure are obtained. The EoS is applied to the correlation and prediction of Henry constants in polymer solutions comprising three polymer and many nonpolar and polar solvents, including supercritical gases. The correlation achieved with two adjustable parameter is satisfactory compared with the experimental data. As a result, the present work provides a simple and useful model for the prediction of Henry's constant for polymer containing systems including those containing polar, nonpolar and supercritical fluids.

Keywords: Equation of state, Henry's constant, Peng-Robinson, polymer solution.

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Authors: A. Chaudhuri, C. Guha, T. K. Dutta

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Pressure driven microscale gas flow-separation has been investigated by solving the compressible Navier-Stokes (NS) system of equations. A two dimensional explicit finite volume (FV) compressible flow solver has been developed using modified advection upwind splitting methods (AUSM+) with no-slip/first order Maxwell-s velocity slip conditions to predict the flowseparation behavior in microdimensions. The effects of scale-factor of the flow geometry and gas species on the microscale gas flowseparation have been studied in this work. The intensity of flowseparation gets reduced with the decrease in scale of the flow geometry. In reduced dimension, flow-separation may not at all be present under similar flow conditions compared to the larger flow geometry. The flow-separation patterns greatly depend on the properties of the medium under similar flow conditions.

Keywords: AUSM+, FVM, Flow-separation, Microflow.

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Authors: Hilmi Kuscu, Ahmet Cihan, Kamil Kahveci, Ugur Akyol

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In this study, a software has been developed to predict the optimum conditions for drying of cotton based yarn bobbins in a hot air dryer. For this purpose, firstly, a suitable drying model has been specified using experimental drying behavior for different values of drying parameters. Drying parameters in the experiments were drying temperature, drying pressure, and volumetric flow rate of drying air. After obtaining a suitable drying model, additional curve fittings have been performed to obtain equations for drying time and energy consumption taking into account the effects of drying parameters. Then, a software has been developed using Visual Basic programming language to predict the optimum drying conditions for drying time and energy consumption.

Keywords: Drying, bobbin, cotton, PLC control, Visual Basic.

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Authors: Zita Šereš, Dragana Šoronja Simović, Ljubica Dokić, Lidietta Giorno, Biljana Pajin, Cecilia Hodur, Nikola Maravić

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Membrane technology is convenient for separation of suspended solids, colloids and high molecular weight materials that are present. The idea is that the waste stream from edible oil industry, after the separation of oil by using skimmers is subjected to microfiltration and the obtained permeate can be used again in the production process. The wastewater from edible oil industry was used for the microfiltration. For the microfiltration of this effluent a tubular membrane was used with a pore size of 200 nm at transmembrane pressure in range up to 3 bar and in range of flow rate up to 300 L/h. Box–Behnken design was selected for the experimental work and the responses considered were permeate flux and chemical oxygen demand (COD) reduction. The reduction of the permeate COD was in the range 40-60% according to the feed. The highest permeate flux achieved during the process of microfiltration was 160 L/m²h.

Keywords: Ceramic membrane, edible oil, microfiltration, wastewater.

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Authors: Aymen Laadhari, Gábor Székely

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In this work, the hemodynamics in the sinuses of Valsalva after Transcatheter Aortic Valve Implantation is numerically examined. We focus on the physical results in the two-dimensional case. We use a finite element methodology based on a Lagrange multiplier technique that enables to couple the dynamics of blood flow and the leaflets’ movement. A massively parallel implementation of a monolithic and fully implicit solver allows more accuracy and significant computational savings. The elastic properties of the aortic valve are disregarded, and the numerical computations are performed under physiologically correct pressure loads. Computational results depict that blood flow may be subject to stagnation in the lower domain of the sinuses of Valsalva after Transcatheter Aortic Valve Implantation.

Keywords: Hemodynamics, Transcatheter Aortic Valve Implantation, blood flow stagnation, numerical simulations.

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Authors: Punit Kumar, Niraj Kumar

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The influence of transverse surface roughness on EHL characteristics has been investigated numerically using an extensive set of full EHL line contact simulations for shear-thinning lubricants under pure sliding condition. The shear-thinning behavior of lubricant is modeled using Carreau viscosity equation along with Doolittle-Tait equation for lubricant compressibility. The surface roughness is assumed to be sinusoidal and it is present on the stationary surface. It is found that surface roughness causes sharp pressure peaks along with reduction in central and minimum film thickness. With increasing amplitude of surface roughness, the minimum film thickness decreases much more rapidly as compared to the central film thickness.

Keywords: EHL, Carreau, Shear-thinning, Surface Roughness, Amplitude, Wavelength.

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Authors: Mohamed Akbi

Abstract:

The present work aims to throw light on the effects of arcing in air on the surface state of contact pastilles made of silvernickel Ag-Ni (60/40). Also, the photoelectric emission from these electrical contacts has been investigated in the spectral range of 196- 256 nm. In order to study the effects of arcing on the EWF, the metallic samples were subjected to electrical arcs in air, at atmospheric pressure and room temperature, after that, they have been introduced into the vacuum chamber of an experimental UHV set-up for EWF measurements. Both Fowler method of isothermal curves and linearized Fowler plots were used for the measurement of the EWF by the photoelectric effect. It has been found that the EWF varies with the number of applied arcs. Thus, after 500 arcs in air, the observed EWF increasing is probably due to progressive inclusion of oxide on alloy surface. Microscopic examination is necessary to get better understandings on EWF of silver alloys, for both virgin and arced electrical contacts.

Keywords: Ag-Ni contact materials, arcing effects, electron work function, Fowler methods, photoemission.

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Authors: Dogan Ciloglu, Abdurrahim Bolukbasi, Kemal Comakli

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In this study, the effect of nanofluids on the pool film boiling was experimentally investigated at saturated condition under atmospheric pressure. For this purpose, four different water-based nanofluids (Al2O3, SiO2, TiO2 and CuO) with 0.1% particle volume fraction were prepared. To investigate the boiling heat transfer, a cylindrical rod with high temperature was used. The rod heated up to high temperatures was immersed into nanofluids. The center temperature of rod during the cooling process was recorded by using a K-type thermocouple. The quenching curves showed that the pool boiling heat transfer was strongly dependent on the nanoparticle materials. During the repetitive quenching tests, the cooling time decreased and thus, the film boiling vanished. Consequently, the primary reason of this was the change of the surface characteristics due to the nanoparticles deposition on the rod-s surface.

Keywords: Heat transfer, nanofluid, nanoparticles, pool film boiling

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Authors: Aman Agarwal, Georg Klepp

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Impinging jets are used in various industrial areas as a cooling and drying technique. The current research is concerned with the means of improving the heat transfer for configurations with a minimum distance of the nozzle to the impingement surface. The impingement heat transfer is described using numerical methods over a wide range of parameters for an array of planar jets. These parameters include varying jet flow speed, width of nozzle, distance of nozzle, angle of the jet flow, velocity and geometry of the impingement surface. Normal pressure and shear stress are computed as additional parameters. Using dimensionless characteristic numbers the parameters and the results are correlated to gain generalized equations. The results demonstrate the effect of the investigated parameters on the flow.

Keywords: Heat Transfer Coefficient, Minimum distance jet impingement, Numerical simulation, Dimensionless coefficients.

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Authors: K. Khanafer

Abstract:

The aim of this investigation was to validate the fluid-structure interaction (FSI) model of type B aortic dissection with our experimental results from a bench-top-model. Another objective was to study the relationship between the size of a septectomy that increases the outflow of the false lumen and its effect on the values of the differential of pressure between true lumen and false lumen. FSI analysis based on Galerkin’s formulation was used in this investigation to study flow pattern and hemodynamics within a flexible type B aortic dissection model using boundary conditions from our experimental data. The numerical results of our model were verified against the experimental data for various tear size and location. Thus, CFD tools have a potential role in evaluating different scenarios and aortic dissection configurations.

Keywords: Aortic dissection, fluid-structure interaction, in vitro model, numerical.

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Authors: R. Alageswaran, S. Selvakumar, P. Neelamegam

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Wireless Sensor Networks (WSN) are emerging because of the developments in wireless communication technology and miniaturization of the hardware. WSN consists of a large number of low-cost, low-power, multifunctional sensor nodes to monitor physical conditions, such as temperature, sound, vibration, pressure, motion, etc. The MAC protocol to be used in the sensor networks must be energy efficient and this should aim at conserving the energy during its operation. In this paper, with the focus of analyzing the MAC protocols used in wireless Adhoc networks to WSN, simulation experiments were conducted in Global Mobile Simulator (GloMoSim) software. Number of packets sent by regular nodes, and received by sink node in different deployment strategies, total energy spent, and the network life time have been chosen as the metric for comparison. From the results of simulation, it is evident that the IEEE 802.11 protocol performs better compared to CSMA and MACA protocols.

Keywords: CSMA, DCF, MACA, TelosB

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Authors: S. A. Naeini, M. Ghorbani Tochaee

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The aim of this study is to assess the influence of plastic fines content on sand-clay mixtures on maximum shear modulus and liquefaction resistance using a series of resonant column tests. A high plasticity clay called bentonite was added to 161 Firoozkooh sand at the percentages of 10, 15, 20, 25, 30 and 35 by dry weight. The resonant column tests were performed on the remolded specimens at constant confining pressure of 100 KPa and then the values of G_max and liquefaction resistance were investigated. The maximum shear modulus and cyclic resistance ratio (CRR) are examined in terms of fines content. Based on the results, the maximum shear modulus and liquefaction resistance tend to decrease within the increment of fine contents.

Keywords: Gmax, liquefaction, plastic fines, resonant column, sand-clay mixtures, bentonite.

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Authors: Dmitry V. Fomichev, Vladimir I. Solonin

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This paper presents the findings from a numerical simulation of the flow in 37-rod fuel assembly models spaced by a double-wire trapezoidal wrapping as applied to the BREST-OD-300 experimental nuclear reactor. Data on a high static pressure distribution within the models, and equations for determining the fuel bundle flow friction factors have been obtained. Recommendations are provided on using the closing turbulence models available in the ANSYS Fluent. A comparative analysis has been performed against the existing empirical equations for determining the flow friction factors. The calculated and experimental data fit has been shown.

An analysis into the experimental data and results of the numerical simulation of the BREST-OD-300 fuel rod assembly hydrodynamic performance are presented.

Keywords: BREST-OD-300, ware-spaces, fuel assembly, computation fluid dynamics.

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Authors: Eleni Ioannou, Pascal Nucara, Keith Pullen

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The subject of this paper is the investigation of the best efficiency design of a compressor diffuser applied in new lightweight, ultra efficient micro-gas turbine engines for vehicles. The Computational Fluid Dynamics (CFD) results are obtained utilizing steady state simulations for a wedge and an ”oval” type pipe diffuser in an effort to identify the beneficial effects of the pipe diffuser design. The basic flow features are presented with particular focus on the optimization of the pipe diffuser leading to higher efficiencies for the compressor stage. The optimised pipe diffuser is designed to exploit the 3D freedom enabled by Selective Laser Melting, hence purposely involves an investigation of geometric characteristics that do not follow the traditional diffuser concept.

Keywords: CFD, centrifugal compressor, micro-gas turbine, pipe diffuser, SLM, wedge diffuser.

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Authors: A.A.Sharizli, N.A.Abu Osman, A.A.Saifizul

Abstract:

An Automated Rapid Maxillary Expander (ARME) is a specially designed microcontroller-based orthodontic appliance to overcome the shortcomings imposed by the traditional maxillary expansion appliances. This new device is operates by automatically widening the maxilla (upper jaw) by expanding the midpalatal suture [1]. The ARME appliance that has been developed is a combination of modified butterfly expander appliance, micro gear, micro motor, and microcontroller to automatically produce light and continuous pressure to expand the maxilla. For this study, the functionality of the system is verified through laboratory tests by measure the forced applied to the teeth each time the maxilla expands. The laboratory test results show that the developed appliance meets the desired performance specifications consistently.

Keywords: Maxillary Expansion, Microcontroller, Automated, Orthodontist, Force Analysis.

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Authors: Minh Tuan Nguyen, Sang-Wook Lee

Abstract:

In this study, numerical simulations on laminar flow in sinusoidal wavy shaped tubes were conducted for mean Reynolds number of 250, which is in the range of physiological flow-rate and investigated flow structures, pressure distribution and particle trajectories both in steady and periodic inflow conditions. For extensive comparisons, various wave lengths and amplitudes of sine function for geometry of tube models were employed. The results showed that small amplitude secondary curvature has significant influence on the nature of flow patterns and particle mixing mechanism. This implies that characterizing accurate geometry is essential in accurate predicting of in vivo hemodynamics and may motivate further study on any possibility of reflection of secondary flow on vascular remodeling and pathophysiology.

Keywords: Secondary curvature, Sinusoidal wavy tubes, Mixing Characteristics, Pulsatile flow, Hemodynamics.

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Authors: Malee Santikunaporn, Neera Wongtyanuwat, Channarong Asavatesanupap

Abstract:

Pyrolysis of waste oil is an effective process to produce high quality liquid fuels. In this work, pyrolysis experiments of waste oil over Y zeolite were carried out in a semi-batch reactor under a flow of nitrogen at atmospheric pressure and at different reaction temperatures (350-450 ^oC). The products were gas, liquid fuel, and residue. Only liquid fuel was further characterized for its composition and properties by using gas chromatography, thermogravimetric analyzer, and bomb calorimeter. Experimental results indicated that the pyrolysis reaction temperature significantly affected both yield and composition distribution of pyrolysis oil. An increase in reaction temperature resulted in increased fuel yield, especially gasoline fraction. To obtain high amount of fuel, the optimal reaction temperature should be higher than 350 ^oC. A presence of Y zeolite in the system enhanced the cracking activity. In addition, the pyrolysis oil yield is proportional to the catalyst quantity.

Keywords: Waste oil, pyrolysis oil, Y zeolite, gasoline, diesel.

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Authors: Abhishek Priyam, Prabha Chand

Abstract:

Channel depth is an important design parameter to be fixed in designing a solar air heater. In this paper, a mathematical model has been developed to study the influence of channel duct on the thermal performance of solar air heaters. The channel depth has been varied from 1.5 cm to 3.5 cm for the mass flow range 0.01 to 0.11 kg/s. Based on first law of thermodynamics, the channel depth of 1.5 cm shows better thermal performance for all the mass flow range. Also, better thermohydraulic performance has been found up to 0.05 kg/s, and beyond this, thermohydraulic efficiency starts decreasing. It has been seen that, with the increase in the mass flow rate, the difference between thermal and thermohydraulic efficiency increases because of the increase in pressure drop. At lower mass flow rate, 0.01 kg/s, the thermal and thermohydraulic efficiencies for respective channel depth remain the same.

Keywords: Channel depth, thermal efficiency, wavy fin, thermohydraulic efficiency.

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Authors: K. Abbas, R. Ahmad, I. A. Khan, S. Saleem, U. Ikhlaq

Abstract:

Nitriding of p-type Si samples by pulsed DC glow discharge is carried out for different Ar concentrations (30% to 90%) in nitrogen-argon plasma whereas the other parameters like pressure (2 mbar), treatment time (4 hr) and power (175 W) are kept constant. The phase identification, crystal structure, crystallinity, chemical composition, surface morphology and topography of the nitrided layer are studied using X-ray diffraction (XRD), Fourier transform infra-red spectroscopy (FTIR), optical microscopy (OM), scanning electron microscopy (SEM) and atomic force microscopy (AFM) respectively. The XRD patterns reveal the development of different diffraction planes of Si₃N₄ confirming the formation of polycrystalline layer. FTIR spectrum confirms the formation of bond between Si and N. Results reveal that addition of Ar into N₂ plasma plays an important role to enhance the production of active species which facilitate the nitrogen diffusion.

Keywords: Crystallinity, glow discharge, nitriding, sputtering.

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