Search results for: Shallow water wave equation

Authors: Robert I. Nigmatulin, Raisa Kh. Bolotnova, Nailya K. Vakhitova, Andrey S. Topolnikov, Svetlana I. Konovalova, Nikolai A. Makhota

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The theoretical investigation is carried out to describe the effect of increase of pressure waves amplitude in clean and bubbly liquid. The goal of the work is to capture the regime of multiple magnification of acoustic and shock waves in the liquid, which enables to get appropriate conditions to enlarge collapses of micro-bubbles. The influence of boundary conditions and frequency of the governing acoustic field is studied for the case of the cylindrical acoustic resonator. It has been observed the formation of standing waves with large amplitude at resonant frequencies. The interaction of the compression wave with gas and vapor bubbles is investigated for the convergent channel. It is shown theoretically that the chemical reactions, which occur inside gas bubbles, provide additional impulse to the wave, that affect strongly on the collapses of the vapor bubbles

Keywords: acoustics, cavitation, detonation, shock waves

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Authors: Barbara A. Perry

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In 1996, the New Zealand government and the Ministry of Education announced that they were setting up a "world class system of inclusive education". As a parent of a son with high and complex needs, a teacher, school Principal and Disability studies Lecturer, this author will track the changes in the journey towards inclusive education over the last 20 years. Strategies for partnering with families to ensure educational success along with insights from one of those on the crest of the wave will be presented. Using a narrative methodology the author will illuminate how far New Zealand has come towards this world class system of inclusion promised and share from personal experience some of the highlights and risks in the system. This author has challenged the old structures and been part of the setting up of new structures particularly for providing parent voice and insight; this paper provides a unique view from an insider’s voice as well as a professional in the system.

Keywords: Disability studies, inclusive education, special education, working with families with children with disability.

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Authors: Sharief F. Babiker, Abdelkareem Bedri, Rania Naeem

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The implementation of single-electron tunneling (SET) simulators based on the master-equation (ME) formalism requires the efficient and accurate identification of an exhaustive list of active states and related tunnel events. Dynamic simulations also require the control of the emerging states and guarantee the safe elimination of decaying states. This paper describes algorithms for use in the stationary and dynamic control of the lists of active states and events. The paper presents results obtained using these algorithms with different SET structures.

Keywords: Active state, Coulomb blockade, Master Equation, Single electron devices

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Authors: Flavio Araujo, Paulo Scalize, Julio Lima, Natalia Vieira, Antonio Albuquerque, Isabela Santos

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From a concern regarding the environmental impacts caused by the disposal of residues generated in Water Treatment Plants (WTP's), alternatives ways have been studied to use these residues as raw material for manufacture of building materials, avoiding their discharge on water streams, disposal on sanitary landfills or incineration. This paper aims to present the results of a research work, which is using WTR for replacing the soil content in the manufacturing of soil-cement floor with proportions of 0, 5, 10 and 15%. The samples tests showed a reduction mechanical strength in so far as has increased the amount of waste. The water absorption was below the maximum of 6% required by the standard. The application of WTR contributes to the reduction of the environmental damage in the water treatment industry.

Keywords: Residue, soil-cement floor, sustainable, WTP.

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Authors: O. Ansari, H. Hafs, A. Bah, M. Asbik, M. Malha, M. Bakhouya

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Water is one of the most important and vulnerable natural resources due to human activities and climate change. Water-level continues declining year after year and it is primarily caused by sustained, extensive, and traditional usage methods. Improving water utilization becomes an urgent issue in order satisfy the increasing population needs. Desalination of seawater or brackish water could help in increasing water potential. However, a cost-effective desalination process is required. The most appropriate method for performing this desalination is solar-driven distillation, given its simplicity, low cost and especially the availability of the solar energy source. The main objective of this paper is to demonstrate the influence of coupling integrated basin plate by fins with preheating by solar collector on the performance of solar still. The energy balance equations for the various elements of the solar still are introduced. A numerical example is used to show the efficiency of the proposed solution.

Keywords: Active solar still, Brackisch water, desalination, fins, solar collector.

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Authors: W. Fethallah, L. Chraibi, N. Sefiani

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The present paper is concerned with a statistical approach involving latent and manifest variables applied in order to assess the organization's social responsibility performance. The main idea is to develop an assessment tool and a measurement of the Social Responsibility Performance, enabling the company to characterize her performance regarding to the ISO 26000 standard's seven core subjects. For this, we conceptualize a structural equation modeling (SEM) which describes various causal connections between the Social Responsibility’s components. The SEM’s resolution is based on the Partial Least squares (PLS) method and the implementation is running in the XLSTAT software.

Keywords: Corporate social responsibility, latent and manifest variable, partial least squares, structural equation model.

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Authors: M.Victoria Garcia-Camba, M.Isabel Garcia-Planas

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The use of brain stem auditory evoked potential (BAEP) is a common way to study the hearing function of people, a way to learn the functionality of a part of the brain neuronal groups that intervene in the learning process by studying the behaviour of wave VI. The latest advances in neuroscience have revealed the existence of different brain activity in the learning process that can be highlighted through the use of innocuous, low-cost and easy-access techniques such as, among others, the BAEP that can help us to detect early possible neurodevelopmental difficulties for their subsequent assessment and cure. To date and the authors best knowledge, only the latency data obtained, observing the first to V waves and mainly in the left ear, were taken into account. This work shows that it is essential to consider both ears; with these latest data, it has been possible to diagnose more precisely some cases than with the previous data had been diagnosed as “normal”despite showing signs of some alteration that motivated the new consultation to the specialist.

Keywords: Ear, neurodevelopment, auditory evoked potentials, intervals of normality, learning disabilities.

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Authors: A. Satour, F. Boubenider, R. Halimi, A. Badidibouda

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Sandwich plates are finding an increasing range of application in the aircraft industry. The inspection of honeycomb composite structure by conventional ultrasonic technique is complex and very time consuming. The present study demonstrates a technique using guided Lamb waves at low frequencies to predict de-bond defects in aluminum skin-honeycomb core sandwich structure used in aeronautics. The numerical method was investigated for drawing the dispersion and displacement curves of ultrasonic Lamb wave propagated in Aluminum plate. An experimental study was carried out to check the theoretical prediction. The detection of unsticking between the skin and the core was tested by the two first modes for a low frequency. It was found that A0 mode is more sensitive to delamination defect compared to S0 mode.

Keywords: Damage detection, delamination, guided waves, Sandwich structure.

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Authors: Tian Hai, Yang Shengsheng, Jr., Wang Yi

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Based on an analysis of the mechanism of degradation of optical characteristics of the ZnO-pigmented white paint by electron irradiation, a model of single molecular color centers is built. An equation that explains the relationship between the changes of variation of the ZnO-pigmented white paint-s spectrum absorptance and electron fluence is derived. The uncertain parameters in the equation can be calculated using the curve fitting by experimental data. The result indicates that the model can be applied to predict the degradation of optical characteristics of ZnO-pigmented white paint by electron radiation.

Keywords: ZnO-pigmented white pain, effects of electron radiation, optical characteristics degradation, prediction model.

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Authors: R. C. Ferreira, H. H. C. De Lima, A. A. Cândido, O. M. Couto Junior, P. A. Arroyo, K. Q De Carvalho, G. F. Gauze, M. A. S. D. Barros

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Removal of the widespread used drug paracetamol from water was investigated using activated carbon originated from dende coconut mesocarp and babassu coconut mesocarp. Kinetic and equilibrium data were obtained at different values of pH. Both activated carbons showed high efficiency when pH ≤ pHPZC as the carbonil group of paracetamol molecule are adsorbed due to positively charged carbon surface. Microporosity also played an important role in such process. Pseudo-second order model was better adjusted to the kinetic results. Equilibrium data may be represented by Langmuir equation.

Keywords: Adsorption, activated carbon, babassu, dende.

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Authors: S. A. Che Osmi, W. M. F. Wan Ishak, H. Kim, M. A. Azman, M. A. Ramli

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River is one of important water sources for many activities including industrial and domestic usage such as daily usage, transportation, power supply and recreational activities. However, increasing activities in a river has grown the sources of pollutant enters the water bodies, and degraded the water quality of the river. It becomes a challenge to develop an effective river management to ensure the water sources of the river are well managed and regulated. In Malaysia, several approaches for river management have been implemented such as Integrated River Basin Management (IRBM) program for coordinating the management of resources in a natural environment based on river basin to ensure their sustainability lead by Department of Drainage and Irrigation (DID), Malaysia. Nowadays, Total Maximum Daily Load (TMDL) is one of the best approaches for river management in Malaysia. TMDL implementation is regulated and implemented in the United States. A study on the development of TMDL in Malacca River has been carried out by doing water quality monitoring, the development of water quality model by using Environmental Fluid Dynamic Codes (EFDC), and TMDL implementation plan. The implementation of TMDL will help the stakeholders and regulators to control and improve the water quality of the river. It is one of the good approaches for river management in Malaysia.

Keywords: EFDC, river management, TMDL, water quality modelling.

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Authors: Nidal Hadadin

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This study investigated the effect of cross sectional geometry on sediment transport rate. The processes of sediment transport are generally associated to environmental management, such as pollution caused by the forming of suspended sediment in the channel network of a watershed and preserving physical habitats and native vegetations, and engineering applications, such as the influence of sediment transport on hydraulic structures and flood control design. Many equations have been proposed for computing the sediment transport, the influence of many variables on sediment transport has been understood; however, the effect of other variables still requires further research. For open channel flow, sediment transport capacity is recognized to be a function of friction slope, flow velocity, grain size, grain roughness and form roughness, the hydraulic radius of the bed section and the type and quantity of vegetation cover. The effect of cross sectional geometry of the channel on sediment transport is one of the variables that need additional investigation. The width-depth ratio (W/d) is a comparative indicator of the channel shape. The width is the total distance across the channel and the depth is the mean depth of the channel. The mean depth is best calculated as total cross-sectional area divided by the top width. Channels with high W/d ratios tend to be shallow and wide, while channels with low (W/d) ratios tend to be narrow and deep. In this study, the effects of the width-depth ratio on sediment transport was demonstrated theoretically by inserting the shape factor in sediment continuity equation and analytically by utilizing the field data sets for Yalobusha River. It was found by utilizing the two approaches as a width-depth ratio increases the sediment transport decreases.

Keywords: Sediment transport, shape factor, hydraulicgeometry, flow discharge, width depth ratio.

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Authors: Liang Zhang, Hai-Tao Zhang, W ei-Yong Ying, Ding-Ye Fang

Abstract:

Dehydration of methanol to dimethyl ether (DME) over a commercial Al2O3 catalyst was studied in an isothermal integral fixed bed reactor. The experiments were performed on the temperature interval 513-613 K, liquid hourly space velocity (LHSV) of 0.9-2.1h-1, pressures between 0.1 and 1.0 MPa. The effect of different operation conditions on the dehydration of methanol was investigated in a laboratory scale experiment. A new intrinsic kinetics equation based on the mechanism of Langmuir-Hinshelwood dissociation adsorption was developed for the dehydration reaction by fitting the expressions to the experimental data. An activation energy of 67.21 kJ/mol was obtained for the catalyst with the best performance. Statistic test showed that this new intrinsic kinetics equation was acceptable.

Keywords: catalyst, dimethyl ether, intrinsic kinetics, methanol

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Authors: A. Thabet, M. Boutayeb, M. N. Abdelkrim

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This paper investigates a method for the state estimation of nonlinear systems described by a class of differential-algebraic equation (DAE) models using the extended Kalman filter. The method involves the use of a transformation from a DAE to ordinary differential equation (ODE). A relevant dynamic power system model using decoupled techniques will be proposed. The estimation technique consists of a state estimator based on the EKF technique as well as the local stability analysis. High performances are illustrated through a simulation study applied on IEEE 13 buses test system.

Keywords: Power system, Dynamic decoupled model, Extended Kalman Filter, Convergence analysis, Time computing.

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Authors: Ahmed A. Hassan, Bassam Tawabini

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In this study, the physicochemical parameters of Dhahran tap water were assessed to determine its suitability for drinking purposes. A total of 45 water samples were collected from different locations. The results indicate temperature ranges of 19.76 to 22.86 °C, pH (6.5 to 8.23), dissolved oxygen (4.21 to 8.32 mg/L), conductivity (232 to 2586 uS/cm), turbidity (0.17 to 0.37 Nephelometric Turbidity unit (NTU)), total dissolved solids (93 to 1671 mg/L), total alkalinity (4.11 to 24.04 mg/L), calcium (0.02 to 164 mg/L), magnesium (0 .6 to 77.9 mg/L), chloride (32.7 to 568.7 mg/L), nitrate (0.02 to 3 mg/L), fluoride (0.001 to 0.591 mg/L), sodium (18.4 to 232 mg/L), potassium (0.5 to 26.4 mg/L), and sulphate (2.39 to 258 mg/L). The results were compared with the drinking water standards recommended by the World Health Organization (WHO) and the United States Environmental Protection Agency (USEPA). The study determined that though the levels of most of the physicochemical parameters comply with the standards, however, slight deviations exist. This is evident in the values of the physical parameters (conductivity and total dissolved solids), and the chemical parameters (sulphate, chloride, and sodium) recorded at a few sample sites.

Keywords: Physicochemical parameters, tap water, water quality, Dhahran.

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Authors: Khosrow Maleknejad, Asyieh Ebrahimzadeh

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In this paper, the numerical solution of optimal control problem (OCP) for systems governed by Volterra integro-differential (VID) equation is considered. The method is developed by means of the Legendre wavelet approximation and collocation method. The properties of Legendre wavelet together with Gaussian integration method are utilized to reduce the problem to the solution of nonlinear programming one. Some numerical examples are given to confirm the accuracy and ease of implementation of the method.

Keywords: Collocation method, Legendre wavelet, optimal control, Volterra integro-differential equation.

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Authors: Jung-in Yoon, Seung-taek Oh, Seung-moon Baek, Jun-hyuk Choi, Jong-yeong Byun, Seok-kwon Jeong, Choon-guen Moon

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In this study, we experiment on precise control outlet temperature of water from the water cooler with hot-gas bypass method based on PI control logic for machine tool. Recently, technical trend for machine tools is focused on enhancement of speed and accuracy. High speedy processing causes thermal and structural deformation of objects from the machine tools. Water cooler has to be applied to machine tools to reduce the thermal negative influence with accurate temperature controlling system. The goal of this study is to minimize temperature error in steady state. In addition, control period of an electronic expansion valve were considered to increment of lifetime of the machine tools and quality of product with a water cooler.

Keywords: Hot-gas bypass, Water cooler, PI control, Electronic Expansion Valve, Gain tuning

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Authors: J. Y. Heo, H. G. Sung

Abstract:

Numerical simulations have been performed for assessment of compressibility correction of two-equation turbulence models suitable for large scale separation flows perturbed by pintle strokes. In order to take into account pintle movement, a sliding mesh method was applied. The chamber pressure, mass flow rate, and thrust have been analyzed, and the response lag and sensitivity at the chamber and nozzle were estimated for a movable pintle. The nozzle performance for pintle reciprocating as its insertion and extraction processes, were analyzed to better understand the dynamic performance of the pintle nozzle.

Keywords: Pintle, sliding mesh, turbulent model, compressibility correction.

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Authors: Mpai Mokoena, Nsenda Lukumwena

Abstract:

South Africa is one of the driest countries in the world and is facing a water crisis. In addition to inadequate infrastructure and poor planning, the country is experiencing high rates of water wastage due to pipe leaks. This study outlines the level of water wastage and develops a smart solution to efficiently manage and reduce the effects of pipe leaks, while monitoring the situation before and after fixing the pipe leaks. To understand the issue in depth, a literature review of journal papers and government reports was conducted. A questionnaire was designed and distributed to the general public. Additionally, the municipality office was contacted from a managerial perspective. The analysis from the study indicated that the majority of the citizens are aware of the water crisis and are willing to participate positively to decrease the level of water wasted. Furthermore, the response from the municipality acknowledged that more practical solutions are needed to reduce water wastage, and resources to attend to pipe leaks swiftly. Therefore, this paper proposes a specific solution for municipalities, local plumbers and citizens to minimize the effects of pipe leaks. The solution provides web and mobile application platforms to report and manage leaks swiftly. The solution is beneficial to the country in achieving water security and would promote a culture of responsibility toward water usage.

Keywords: Urban Distribution Networks, leak management, mobile application, responsible citizens, water crisis, water security.

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Authors: Abhay Kumar Singh

Abstract:

Structural and UV/Visible optical properties can be useful to describe a material for the CIGS solar cell active layer, therefore, this work demonstrates the properties like surface morphology, X-ray Photoelectron Spectroscopy (XPS) bonding energy (EB) core level spectra, UV/Visible absorption spectra, refractive index (n), optical energy band (Eg), reflection spectra for the Cu25 (In16Ga9) Se40Te10 (CIGST-1) and Cu20 (In14Ga9) Se45Te12 (CIGST-2) chalcogenide compositions. Materials have been exhibited homogenous surface morphologies, broading /-or diffusion of bonding energy peaks relative elemental values and a high UV/Visible absorption tendency in the wave length range 400 nm- 850 nm range with the optical energy band gaps 1.37 and 1.42 respectively. Subsequently, UV/Visible reflectivity property in the wave length range 250 nm to 320 nm for these materials has also been discussed.

Keywords: Chalcogen, Optical energy band gap, UV/Visible spectra, XPS spectra.

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Authors: A. Benzian

Abstract:

The generalization of relativistic theory of gravity based essentially on the principle of equivalence stipulates that for all bodies, the grave mass is equal to the inert mass which leads us to believe that gravitation is not a property of the bodies themselves, but of space, and the conclusion that the gravitational field must curved space-time what allows the abandonment of Minkowski space (because Minkowski space-time being nonetheless null curvature) to adopt Riemannian geometry as a mathematical framework in order to determine the curvature. Therefore the work presented in this paper begins with the evolution of the concept of gravity then tensor field which manifests by Riemannian geometry to formulate the general equation of the gravitational field.

Keywords: Inertia, principle of equivalence, tensors, Riemannian geometry.

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Authors: Olusheye Akinfenwa

Abstract:

We consider the development of an eight order Adam-s type method, with A-stability property discussed by expressing them as a one-step method in higher dimension. This makes it suitable for solving variety of initial-value problems. The main method and additional methods are obtained from the same continuous scheme derived via interpolation and collocation procedures. The methods are then applied in block form as simultaneous numerical integrators over non-overlapping intervals. Numerical results obtained using the proposed block form reveals that it is highly competitive with existing methods in the literature.

Keywords: Block Adam's type Method; Periodic Ordinary Differential Equation; Stability.

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Authors: Z. Pavlík, J. Fořt, J. Žumár, M. Pavlíková, R. Černý

Abstract:

The cup method is applied for the measurement of water vapor transport properties of porous materials worldwide. However, in practical applications the experimental results are often used without taking into account some secondary effects which can play an important role under specific conditions. In this paper, the effect of temperature on water vapor transport properties of cellular concrete is studied, together with the influence of sample thickness. At first, the bulk density, matrix density, total open porosity and sorption and desorption isotherms are measured for material characterization purposes. Then, the steady state cup method is used for determination of water vapor transport properties, whereas the measurements are performed at several temperatures and for three different sample thicknesses.

Keywords: Water vapor transport, cellular concrete, cup method, temperature, sample thickness.

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Authors: Hirich A., Rami A., Laajaj K., Choukr-Allah R., Jacobsen S-E., El youssfi L., El Omari H.

Abstract:

Yield and Crop Water Productivity are crucial issues in sustainable agriculture, especially in high-demand resource crops such as sweet corn. This study was conducted to investigate agronomic responses such as plant growth, yield and soil parameters (EC and Nitrate accumulation) to several deficit irrigation treatments (100, 75, 50, 25 and 0% of ETm) applied during vegetative growth stage, rainfed treatment was also tested. The finding of this research indicates that under deficit irrigation during vegetative growth stage applying 75% of ETm lead to increasing of 19.4% in terms of fresh ear yield, 9.4% in terms of dry grain yield, 10.5% in terms of number of ears per plant, 11.5% for the 1000 grains weight and 19% in terms of crop water productivity compared with fully irrigated treatment. While those parameters in addition to root, shoot and plant height has been affected by deficit irrigation during vegetative growth stage when increasing water stress degree more than 50% of ETm.

Keywords: Leaf area, yield, crop water productivity, water saving

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Authors: Kariyappa B. S., Hariprasad S. A., R. Nagaraj

Abstract:

In this paper, a new method of controlling position of AC Servomotor using Field Programmable Gate Array (FPGA). FPGA controller is used to generate direction and the number of pulses required to rotate for a given angle. Pulses are sent as a square wave, the number of pulses determines the angle of rotation and frequency of square wave determines the speed of rotation. The proposed control scheme has been realized using XILINX FPGA SPARTAN XC3S400 and tested using MUMA012PIS model Alternating Current (AC) servomotor. Experimental results show that the position of the AC Servo motor can be controlled effectively. KeywordsAlternating Current (AC), Field Programmable Gate Array (FPGA), Liquid Crystal Display (LCD).

Keywords: Alternating Current (AC), Field Programmable Gate Array (FPGA), Liquid Crystal Display (LCD).

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Authors: Amir T. Payandeh Najafabadi

Abstract:

This article considers the problem of evaluating infinite-time (or finite-time) ruin probability under a given compound Poisson surplus process by approximating the claim size distribution by a finite mixture exponential, say Hyperexponential, distribution. It restates the infinite-time (or finite-time) ruin probability as a solvable ordinary differential equation (or a partial differential equation). Application of our findings has been given through a simulation study.

Keywords: Ruin probability, compound Poisson processes, mixture exponential (hyperexponential) distribution, heavy-tailed distributions.

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Authors: Nahlah Abbas, Saleh A. Wasimi, Nadhir Al-Ansari

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The Greater Zab and Lesser Zab are the major tributaries of Tigris River contributing the largest flow volumes into the river. The impacts of climate change on water resources in these basins have not been well addressed. To gain a better understanding of the effects of climate change on water resources of the study area in near future (2049-2069) as well as in distant future (2080-2099), Soil and Water Assessment Tool (SWAT) was applied. The model was first calibrated for the period from 1979 to 2004 to test its suitability in describing the hydrological processes in the basins. The SWAT model showed a good performance in simulating streamflow. The calibrated model was then used to evaluate the impacts of climate change on water resources. Six general circulation models (GCMs) from phase five of the Coupled Model Intercomparison Project (CMIP5) under three Representative Concentration Pathways (RCPs) RCP 2.6, RCP 4.5, and RCP 8.5 for periods of 2049-2069 and 2080-2099 were used to project the climate change impacts on these basins. The results demonstrated a significant decline in water resources availability in the future.

Keywords: Tigris River, climate change, water resources, SWAT.

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Authors: V. Tawiwat, T. Amornthep, P. Pnop

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Both the minimum energy consumption and smoothness, which is quantified as a function of jerk, are generally needed in many dynamic systems such as the automobile and the pick-and-place robot manipulator that handles fragile equipments. Nevertheless, many researchers come up with either solely concerning on the minimum energy consumption or minimum jerk trajectory. This research paper considers the indirect minimum Jerk method for higher order differential equation in dynamics optimization proposes a simple yet very interesting indirect jerks approaches in designing the time-dependent system yielding an alternative optimal solution. Extremal solutions for the cost functions of indirect jerks are found using the dynamic optimization methods together with the numerical approximation. This case considers the linear equation of a simple system, for instance, mass, spring and damping. The simple system uses two mass connected together by springs. The boundary initial is defined the fix end time and end point. The higher differential order is solved by Galerkin-s methods weight residual. As the result, the 6th higher differential order shows the faster solving time.

Keywords: Optimization, Dynamic, Linear Systems, Jerks.

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Authors: L. Parvizsedghy, I. Gkountis, A. Senouci, T. Zayed, M. Alsharqawi, H. El Chanati, M. El-Abbasy, F. Mosleh

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The aging and deterioration of water pipelines in cities worldwide result in more frequent water main breaks, water service disruptions, and flooding damage. Therefore, there is an urgent need for undertaking proper maintenance procedures to avoid breaks and disastrous failures. However, due to budget limitations, the maintenance of water pipeline networks needs to be prioritized through efficient deterioration assessment models. Previous studies focused on the development of structural or physical deterioration assessment models, which require expensive inspection data. But, this paper aims at developing deterioration assessment models for water pipelines using statistical techniques. Several deterioration models were developed based on pipeline size, material type, and soil type using linear regression analysis. The categorical nature of some variables affecting pipeline deterioration was considered through developing several categorical models. The developed models were validated with an average validity percentage greater than 95%. Moreover, sensitivity analysis was carried out against different classifications and it displayed higher importance of age of pipes compared to other factors. The developed models will be helpful for the water municipalities and asset managers to assess the condition of their pipes and prioritize them for maintenance and inspection purposes.

Keywords: Water pipelines, deterioration assessment models, regression analysis.

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Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

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Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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