Search results for: Test frequency

Authors: Gurmeet Kaur, Jyoti Pruthi

Abstract:

Agile Software development approaches and techniques are being considered as efficient, effective, and popular methods to the development of software. Agile software developments are useful for developing high-quality software that completes client requirements with zero defects, and in short delivery period. In agile software development methodology, quality is related to coding, which means quality, is managed through the use of approaches like refactoring, pair programming, test-driven development, behavior-driven development, acceptance test-driven development, and demand-driven development. The quality of software is measured using metrics like the number of defects during the development and improvement of the software. Usage of the above-mentioned methods or approaches reduces the possibilities of defects in developed software, and hence improves quality. This paper focuses on the study of agile-based quality methods or approaches for software development that ensures improved quality of software as well as reduced cost, and customer satisfaction.

Keywords: Agile software development, ASD, Acceptance test-driven development, ATDD, Behavior-driven development, BDD, Demand-driven development. DDD, Test-driven development, TDD.

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Authors: K. Matušínská, Z. Bednarčík, M. Klepek

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This paper examines international marketing in business practice of Czech exporting small and medium-sized enterprises (SMEs) with regard to the strategic perspectives. Research was focused on Czech exporting SMEs from Moravian- Silesia region and their behavior on international markets. For purpose of collecting data, a questionnaire was given to 262 SMEs involved in international business. Statistics utilized in this research included frequency, mean, percentage, and chi-square test. Data were analyzed by Statistical Package for the Social Sciences software. The research analysis disclosed that there is certain space for improvement in strategic marketing especially in a marketing research, perception of cultural and social differences, product adaptation and usage of marketing communication tools.

Keywords: International Marketing, Marketing Mix, Marketing Research, Small and Medium-sized Enterprises (SMEs), Strategic Marketing.

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Authors: A. Al-Rifaie, Z. W. Guan, S. W. Jones

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Beam to column connection can be considered as the most important structural part that affects the response of buildings to progressive collapse. However, many studies were conducted to investigate the beam to column connection under accidental loads such as fire, blast and impact load to investigate the connection response. The study is a part of a PhD plan to investigate different types of connections under lateral impact load. The conventional test setups, such as cruciform setup, were designed to apply shear forces and bending moment on the connection, whilst, in the lateral impact case, the connection is subjected to combined tension and moment. Hence, a review is presented to introduce the previous test setup that is used to investigate the connection behaviour. Then, the design and fabrication of the novel test setup is presented. Finally, some trial test results to investigate the efficiency of the proposed setup are discussed. The final results indicate that the setup was efficient in terms of the simplicity and strength.

Keywords: Connections, impact load, drop hammer, testing methods.

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Authors: Eleonora Tudora, Adriana Alexandru

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The radio frequency identification (RFID) is a technology for automatic identification of items, particularly in supply chain, but it is becoming increasingly important for industrial applications. Unlike barcode technology that detects the optical signals reflected from barcode labels, RFID uses radio waves to transmit the information from an RFID tag affixed to the physical object. In contrast to today most often use of this technology in warehouse inventory and supply chain, the focus of this paper is an overview of the structure of RFID systems used by RFID technology and it also presents a solution based on the application of RFID for brand authentication, traceability and tracking, by implementing a production management system and extending its use to traders.

Keywords: RFID, RFID Tag, Electronic Product Code (EPC), EPC network, Object Naming Service (ONS), Authentication, Traceability.

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Authors: H. Daoud Dammak, S. Bensalem, S. Zouari, M. Loulou

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This paper presents an optimized methodology to folded cascode operational transconductance amplifier (OTA) design. The design is done in different regions of operation, weak inversion, strong inversion and moderate inversion using the gm/ID methodology in order to optimize MOS transistor sizing. Using 0.35μm CMOS process, the designed folded cascode OTA achieves a DC gain of 77.5dB and a unity-gain frequency of 430MHz in strong inversion mode. In moderate inversion mode, it has a 92dB DC gain and provides a gain bandwidth product of around 69MHz. The OTA circuit has a DC gain of 75.5dB and unity-gain frequency limited to 19.14MHZ in weak inversion region.

Keywords: CMOS IC design, Folded Cascode OTA, gm/ID methodology, optimization.

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Authors: Olesya Bolkhovskaya, Alexander Maltsev

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In this work the characteristics of spatial signal detec¬tion from an antenna array in various sample cases are investigated. Cases for a various number of available prior information about the received signal and the background noise are considered. The spatial difference between a signal and noise is only used. The performance characteristics and detecting curves are presented. All test-statistics are obtained on the basis of the generalized likelihood ratio (GLR). The received results are correct for a short and long sample.

Keywords: GLR test-statistic, detection task, generalized likelihood ratio, antenna array, detection curves, performance characteristics.

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Authors: W. Sun, W. Wen, J. Lu, A. A. Becker

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In this work, methods for determining creep properties which can be used to represent the full life until failure from miniature specimen creep tests based on analytical solutions are presented. Examples used to demonstrate the application of the methods include a miniature rectangular thin beam specimen creep test under three-point bending and a miniature two-material tensile specimen creep test subjected to a steady load. Mathematical expressions for deflection and creep strain rate of the two specimens were presented for the Kachanov-Rabotnov creep damage model. On this basis, an inverse procedure was developed which has potential applications for deriving the full life creep damage constitutive properties from a very small volume of material, in particular, for various microstructure constitutive  regions, e.g. within heat-affected zones of power plant pipe weldments. Further work on validation and improvement of the method is addressed.

Keywords: Creep damage property, analytical solutions, inverse approach, miniature specimen test.

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Authors: J.V.R.Ravindra, M.B.Srinivas,

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Accurate modeling of high speed RLC interconnects has become a necessity to address signal integrity issues in current VLSI design. To accurately model a dispersive system of interconnects at higher frequencies; a full-wave analysis is required. However, conventional circuit simulation of interconnects with full wave models is extremely CPU expensive. We present an algorithm for reducing large VLSI circuits to much smaller ones with similar input-output behavior. A key feature of our method, called Frequency Shift Technique, is that it is capable of reducing linear time-varying systems. This enables it to capture frequency-translation and sampling behavior, important in communication subsystems such as mixers, RF components and switched-capacitor filters. Reduction is obtained by projecting the original system described by linear differential equations into a lower dimension. Experiments have been carried out using Cadence Design Simulator cwhich indicates that the proposed technique achieves more % reduction with less CPU time than the other model order reduction techniques existing in literature. We also present applications to RF circuit subsystems, obtaining size reductions and evaluation speedups of orders of magnitude with insignificant loss of accuracy.

Keywords: Model order Reduction, RLC, crosstalk

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Authors: Sun K. Yoo, Chung K. Lee

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Determination of attentional status is important because working performance and an unexpected accident is highly related with the attention. The autonomic nervous and the central nervous systems can reflect the changes in person’s attentional status. Reduced number of suitable pysiological parameters among autonomic and central nervous systems related signal parameters will be critical in optimum design of attentional devices. In this paper, we analyze the EEG (Electroencephalography) and HRV (Heart Rate Variability) signals to demonstrate the effective relation with brain signal and cardiovascular signal during event-related attention, which will be later used in selecting the minimum set of attentional parameters. Time and frequency domain parameters from HRV signal and frequency domain parameters from EEG signal are used as input to the optimum feature parameters selector.

Keywords: EEG, HRV, attentional status.

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Authors: N. Barka, P. Bocher, A. Chebak, J. Brousseau, D. S. Ramdenee

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This paper presents the study of induced currents and temperature distribution in gear heated by induction process using 2D finite element (FE) model. The model is developed by coupling Maxwell and heat transfer equations into a multi-physics model. The obtained results allow comparing the medium frequency (MF) and high frequency (HF) cases and the effect of machine parameters on the evolution of induced currents and temperature during heating. The sensitivity study of the temperature profile is conducted and the case hardness is predicted using the final temperature profile. These results are validated using tests and give a good understanding of phenomena during heating process.

Keywords: 2D model, induction heating, spur gear, induced currents, experimental validation

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Authors: A. M. Wahab, E. Rustighi

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Elastomeric dielectric material has recently become a new alternative for actuator technology. The characteristics of dielectric elastomers placed between two electrodes to withstand large strain when electrodes are charged has attracted the attention of many researcher to study this material for actuator technology. Thus, in the past few years Danfoss Ventures A/S has established their own dielectric electro-active polymer (DEAP), which was called PolyPower. The main objective of this work was to investigate the dynamic characteristics for vibration control of a PolyPower actuator folded in ‘pull’ configuration. A range of experiments was carried out on the folded actuator including passive (without electrical load) and active (with electrical load) testing. For both categories static and dynamic testing have been done to determine the behavior of folded DEAP actuator. Voltage-Strain experiments show that the DEAP folded actuator is a non-linear system. It is also shown that the voltage supplied has no effect on the natural frequency. Finally, varying AC voltage with different amplitude and frequency shows the parameters that influence the performance of DEAP folded actuator. As a result, the actuator performance dominated by the frequency dependence of the elastic response and was less influenced by dielectric properties.

Keywords: Dielectric Electro-active Polymer, Pull Actuator, Static, Dynamic, Electromechanical.

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Authors: R. Sadeghzadegan, S. A. Naeini, A. Mirzaii

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In this article, the results of a series of carefully conducted laboratory test program were represented to determine the small strain shear modulus of sand mixed with a range of kaolinite including zero to 30%. This was experimentally achieved using a triaxial cell equipped with bender element. Results indicate that small shear modulus tends to increase, while clay content decreases and effective confining pressure increases. The exponent of stress in the power model regression analysis was not sensitive to the amount of clay content for all sand clay mixtures, while coefficient A was directly affected by change in clay content.

Keywords: Small shear modulus, bender element test, plastic fines, sand.

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Authors: Peter A. Bibby

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Research has suggested that implicit learning tasks may rely on episodic processing to generate above chance performance on the standard classification tasks. The current research examines the invariant features task (McGeorge and Burton, 1990) and argues that such episodic processing is indeed important. The results of the experiment suggest that both rejection and similarity strategies are used by participants in this task to simultaneously reject unfamiliar items and to accept (falsely) familiar items. Primarily these decisions are based on the presence of low or high frequency goal based features of the stimuli presented in the incidental learning phase. It is proposed that a goal based analysis of the incidental learning task provides a simple step in understanding which features of the episodic processing are most important for explaining the match between incidental, implicit learning and test performance.

Keywords: Episodic processing, incidental learning, implicitlearning, invariant learning.

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Authors: Young-Il Kim, Bong-Jae Yi, Jae-Ju Song, Jin-Ho Shin, Jung-Il Lee

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Firstly, research and development on RFID focuses on manufacturing and retail sectors, because it can improve supply chain efficiency. But, now a variety of field is considered the next research area for Radio Frequency Identification (RFID). Although RFID is infancy, RFID technology has great potential in power industry to significantly reduce cost, and improve quality of power supply. To complement the limitation of RFID, we adopt the WSN (Wireless Sensor Network) technology. However, relevant experience is limited, the challenge will be to derive requirement from business practice and to determine whether it is possible or not. To explore this issue, we conduct a case study on implementing power facility management system using RFID/WSN in Korea Electric Power Corporation (KEPCO). In this paper we describe requirement from power industry. And we introduce design and implementation of the test bed.

Keywords: Power Facility Management, RFID/WSN, Transmission Tower, Underground Tunnel, ZigBee.

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Authors: S. A. Nta, M. J. Ayotamuno, I. J. Udom

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The work presents result of laboratory analysis of the effects of landfill leachate on engineering properties of test soil. The soil used for the present study was a sandy loam soil and acidic in nature. It was collected at a depth of 0.9 m. The landfill leachate used was collected from a hole dug some meters away from dumped solid waste and analyzed to identify the pollutants and its effect on engineering properties of the test soil. The test soil applied with landfill leachate was collected at 0.25 and 0.50 m radial distances at a depth of 0.15, 0.30, 0.45 and 0.60 m from the point of application of leachate after 50 days were the application of the leachate end and 80 days from the start of the experiment for laboratory analysis. Engineering properties such as particle size distribution, specific gravity, optimum moisture content, maximum dry density, unconfined compressive strength, liquid limit, plastic limit and shrinkage limit were considered. The concentration of various chemicals at 0.25 and 0.50 radial distances and 0.15, 0.30, 0.45 and 0.6 m depth from the point of application of leachate were different. This study founds the effect of landfill leachate on the engineering properties of soil. It can be concluded that, the type of soil, chemical composition of the leachate, infiltration rate, aquifers, ground water table etc., will have a major role on the area of influence zone of the pollutants in a landfill.

Keywords: Engineering properties of test soil, landfill leachate, Municipal solid waste.

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Authors: Roya Maqami, Kaveh Qaderi Bagajan, Mohammad Mahdi Yousefi, Saeed Moradi

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The purpose of this study is to investigate the efficacy of solution-focused group therapy on improving the depressed mothers of child abuser families. This study was carried out in the form of a semi-pilot, pre-test and post-test on two groups (experimental and control). Subjects include all mothers and their children that are the members of Shush and Naser Khosro child home. Beck Depression Inventory and Child Trauma Questionnaire were used to collect data. First, child abuse questionnaire was completed by children, Then Beck Depression Inventory was completed by their mothers that 22 of them were recognized as depressed and randomly divided in two groups of experimental and control. After applying pre-test for both of these groups, the intervention of solution- focused group therapy was performed in five sessions on experimental group. Finally, post-test was applied on both groups and subsequently in a month, follow-up test was performed. T-test, multivariate variance, and repeated measurement analysis of variance were used to analyze the data. According to the findings, it can be concluded that this therapy leads to the improvement of depressed mother's mood. As a result, the intervention of solution-focused group therapy is useful in order to improve the depressing mood of mothers of child abuser families.

Keywords: Child Abuse, Depressed Mothers, Child Abuser Families, Solution-focused Group Therapy.

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Authors: A. Goel, S.C. Gupta, S.K.Wasan

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Testable software has two inherent properties – observability and controllability. Observability facilitates observation of internal behavior of software to required degree of detail. Controllability allows creation of difficult-to-achieve states prior to execution of various tests. In this paper, we describe COTT, a Controllability and Observability Testing Tool, to create testable object-oriented software. COTT provides a framework that helps the user to instrument object-oriented software to build the required controllability and observability. During testing, the tool facilitates creation of difficult-to-achieve states required for testing of difficultto- test conditions and observation of internal details of execution at unit, integration and system levels. The execution observations are logged in a test log file, which are used for post analysis and to generate test coverage reports.

Keywords: Controllability, Observability, Test Coverage and Testing Tool.

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Authors: Foad Nazari, Seyed Mahmood Hosseini, Mohammad Hossein Abolbashari, Mohammad Hassan Abolbashari

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The present study is concerned with the optimal design of functionally graded plates using particle swarm optimization (PSO) algorithm. In this study, meshless local Petrov-Galerkin (MLPG) method is employed to obtain the functionally graded (FG) plate’s natural frequencies. Effects of two parameters including thickness to height ratio and volume fraction index on the natural frequencies and total mass of plate are studied by using the MLPG results. Then the first natural frequency of the plate, for different conditions where MLPG data are not available, is predicted by an artificial neural network (ANN) approach which is trained by back-error propagation (BEP) technique. The ANN results show that the predicted data are in good agreement with the actual one. To maximize the first natural frequency and minimize the mass of FG plate simultaneously, the weighted sum optimization approach and PSO algorithm are used. However, the proposed optimization process of this study can provide the designers of FG plates with useful data.

Keywords: Optimal design, natural frequency, FG plate, hybrid meshless method, MLPG method, ANN approach, particle swarm optimization.

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Authors: Dong Ming, Su Caihong

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The scenario of bypass transition is generally described as follows: the low-frequency disturbances in the free-stream may generate long stream-wise streaks in the boundary layer, which later may trigger secondary instability, leading to rapid increase of high-frequency disturbances. Then possibly turbulent spots emerge, and through their merging, lead to fully developed turbulence. This description, however, is insufficient in the sense that it does not provide the inherent mechanism of transition that during the transition, a large number of waves with different frequencies and wave numbers appear almost simultaneously, producing sufficiently large Reynolds stress, so the mean flow profile can change rapidly from laminar to turbulent. In this paper, such a mechanism will be figured out from analyzing DNS data of transition.

Keywords: boundary layer, breakdown, bypass transition, stability, streak.

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Authors: Mohammad Taghi Darvishi, Samad Kheybari

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In this article, we are dealing with a model consisting of a classical Van der Pol oscillator coupled gyroscopically to a linear oscillator. The major problem is analyzed. The regular dynamics of the system is considered using analytical methods. In this case, we provide an approximate solution for this system using parameter-expansion method. Also, we find approximate values for frequencies of the system. In parameter-expansion method the solution and unknown frequency of oscillation are expanded in a series by a bookkeeping parameter. By imposing the non-secularity condition at each order in the expansion the method provides different approximations to both the solution and the frequency of oscillation. One iteration step provides an approximate solution which is valid for the whole solution domain.

Keywords: Parameter-expansion method, classical Van der Pol oscillator.

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Authors: Hannachi Med Tahar, H. Djebaili, B. Daheche

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In this approach, we have tried to describe the flattening of welded tubes, and its experimental application. The test is carried out at the (National product processing company dishes and tubes production). Usually, the final products (tubes) undergo a series of non-destructive inspection online and offline welding, and obviously destructive mechanical testing (bending, flattening, flaring, etc.). For this and for the purpose of implementing the flattening test, which applies to the processing of round tubes in other forms, it took four sections of welded tubes draft (before stretching hot) and welded tubes finished (after drawing hot and annealing), it was also noted the report 'health' flattened tubes must not show or crack or tear. The test is considered poor if it reveals a lack of ductility of the metal.

Keywords: Flattening, destructive testing, tube drafts, finished tube, Castem 2001.

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Authors: Zainudin Arsad, Norul Baine Mat Johor

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Tourism industry is an important sector in Malaysia economy and this motivates the examination of long-run relationships between tourist arrivals from three selected European countries in Malaysia and four possible determinants; relative prices, exchange rates, transportation cost and relative prices of substitute destination. The study utilizes data from January 1999 to September 2008 and employs standard econometric techniques that include unit root test and cointegration test. The estimated demand model indicates that depreciation of local currency and increases in prices at substitute destination have positive impact on tourist arrivals while increase in transportation cost has negative impact on tourist arrivals. In addition, the model suggests that higher rate of increase in local prices relative to prices at tourist country of origin may not deter tourists from coming to Malaysia

Keywords: origin country, unit root test, cointegration test

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Authors: Bao Thach Nguyen, Abbas Mohajerani

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The California Bearing Ratio (CBR) has been acknowledged as an important parameter to characterize the bearing capacity of earth structures, such as earth dams, road embankments, airport runways, bridge abutments and pavements. Technically, the CBR test can be carried out in the laboratory or in the field. The CBR test is time-consuming and is infrequently performed due to the equipment needed and the fact that the field moisture content keeps changing over time. Over the years, many correlations have been developed for the prediction of CBR by various researchers, including the dynamic cone penetrometer, undrained shear strength and Clegg impact hammer. This paper reports and discusses some of the results from a study on the prediction of CBR. In the current study, the CBR test was performed in the laboratory on some finegrained subgrade soils collected from various locations in Victoria. Based on the test results, a satisfactory empirical correlation was found between the CBR and the physical properties of the experimental soils.

Keywords: California bearing ratio, fine-grained soils, pavement, soil physical properties.

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Authors: Khashayar Jafari, Mostafa Jafarian Abyaneh, Vahab Toufigh

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Polymer concrete (PC) is a distinct concrete with superior characteristics in comparison to ordinary cement concrete. It has become well-known for its applications in thin overlays, floors and precast components. In this investigation, the mechanical properties of PC with different epoxy resin contents, ordinary cement concrete (OCC) and lightweight concrete (LC) have been studied under uniaxial compression test. The study involves five types of concrete, with each type being tested four times. Their complete elastic-plastic behavior was compared with each other through the measurement of volumetric strain during the tests. According to the results, PC showed higher strength, ductility and energy absorption with respect to OCC and LC.

Keywords: Polymer concrete, ordinary cement concrete, lightweight concrete, uniaxial compression test, volumetric strain.

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Authors: M. O. Hamzah, M. R. M. Hasan

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Binder drainage test is widely used to set an upper limit to the design binder content of porous asphalt. However, the presence of high amount of fine particles in the drained binder may affect the accuracy of the test result. This paper presents a study to characterize the composition and particle size distribution of fine particles accumulated in the drained binder. Fine aggregates and filler in the drained binder were extracted using a suitable solvent. Then, wet and dry sieve analysis was carried out to identify the actual composition of the extracted fine aggregates and filler. From the results, almost half of the drained binder consisted of fine aggregates and this significantly affects the accuracy of the design binder content of porous asphalt mix. This simple finding highlights the importance of taking into account the presence of fine aggregates in the calculation of drained binder.

Keywords: Porous asphalt, Binder drainage test, Drained binder, Fine particle proportion

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Authors: Simin Sadeghi-Saeb

Abstract:

Metacognitive strategies consistently play important roles in reading comprehension. The metacognitive strategies involve the active monitoring and consequent regulation and orchestration of the cognitive processes in relation to the cognitive objects or data on which they bear. In this paper, the effect of instruction in using metacognitive strategies on reading academic materials, type of metacognitive strategies were mostly used by college university students before and after the instruction and the level they use those strategies before and after the instruction were studied. For these aims, 50 female college students were chosen. Then, they were divided randomly into two groups, experimental and control groups. At first session, students in both groups took the standard TOFEL exam. After the pre-test had been administered, the instruction began. After treatment, a post-test was taken. It is useful to state that after pre-test and post-test the same questionnaire was handed to the students of experimental group. The results of this research show that the instruction of metacognitive strategies has positive effect on the students' scores in reading comprehension tests. Furthermore, it showed that before and after the instruction, the students' usage of metacognitive strategies changed. Also, it demonstrated that the instruction affected the students' level of metacognitive strategies' usage.

Keywords: EFL students, English reading comprehension, instruction, metacognitive strategies.

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Authors: B. Tomczyk, R. Mania

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Thin linear-elastic cylindrical circular shells having a micro-periodic structure along two directions tangent to the shell midsurface (biperiodic shells) are object of considerations. The aim of this paper is twofold. First, we formulate an averaged nonasymptotic model for the analysis of parametric vibrations or dynamical stability of periodic shells under consideration, which has constant coefficients and takes into account the effect of a cell size on the overall shell behavior (a length-scale effect). This model is derived employing the tolerance modeling procedure. Second we apply the obtained model to derivation of frequency equation being a starting point in the analysis of parametric vibrations. The effect of the microstructure length oh this frequency equation is discussed.

Keywords: Micro-periodic shells, mathematical modeling, length-scale effect, parametric vibrations

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Authors: Andreas Theissler, Ian Dear

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In the automotive industry test drives are being conducted during the development of new vehicle models or as a part of quality assurance of series-production vehicles. The communication on the in-vehicle network, data from external sensors, or internal data from the electronic control units is recorded by automotive data loggers during the test drives. The recordings are used for fault analysis. Since the resulting data volume is tremendous, manually analysing each recording in great detail is not feasible. This paper proposes to use machine learning to support domainexperts by preventing them from contemplating irrelevant data and rather pointing them to the relevant parts in the recordings. The underlying idea is to learn the normal behaviour from available recordings, i.e. a training set, and then to autonomously detect unexpected deviations and report them as anomalies. The one-class support vector machine “support vector data description” is utilised to calculate distances of feature vectors. SVDDSUBSEQ is proposed as a novel approach, allowing to classify subsequences in multivariate time series data. The approach allows to detect unexpected faults without modelling effort as is shown with experimental results on recordings from test drives.

Keywords: Anomaly detection, fault detection, test drive analysis, machine learning.

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Authors: Mohamed Sanad, Noha Hassan

Abstract:

A multi-beam BTS (Base Transceiver Station) antenna has been developed using dual parabolic cylindrical reflectors. The ±45° polarization feeds are used in spatial diversity MIMO (Multi-Input Multi-Output). They can be replaced by single-port orthogonally polarized feeds. Then, with two sets of beams generated above each other, the ± 45° polarization ports of any conventional transceiver can be connected to two of these beam sets. Thus, with two-port transceivers, the system will be equivalent to 4x4 MIMO, instead of 2x2. Radio Frequency (RF) power combiners/splitters can also be used to combine the multiple beams into a single beam or any arbitrary number of beams/ports. The gain of the combined-beam will be more than 20-24 dBi instead of 17-18 dBi of conventional wide-beam antennas. Furthermore, the gain of the combined beam will be high over the whole beam angle. Moreover, the users will always be close to the peak gain value of the combined beam regardless of their location within the combined beam angle. The frequency bands of all the combined beams are adjusted such that they all have the same frequency band. Different configurations of RF power splitter/combiners can be used to provide any arbitrary number of beams/ports according to the requirements of any existing base station configuration.

Keywords: 5G mobile communications, BTS antennas, MIMO, orthogonally polarized antennas, multi-beam antennas.

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Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

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Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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