Search results for: Integrated circuit

Authors: N. Santatriniaina, J. Deseure, T.Q. Nguyen, H. Fontaine, C. Beitia, L. Rakotomanana

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Nowadays, with the increasing of the wafer's size and the decreasing of critical size of integrated circuit manufacturing in modern high-tech, microelectronics industry needs a maximum attention to challenge the contamination control. The move to 300 [mm] is accompanied by the use of Front Opening Unified Pods for wafer and his storage. In these pods an airborne cross contamination may occur between wafers and the pods. A predictive approach using modeling and computational methods is very powerful method to understand and qualify the AMCs cross contamination processes. This work investigates the required numerical tools which are employed in order to study the AMCs cross-contamination transfer phenomena between wafers and FOUPs. Numerical optimization and finite element formulation in transient analysis were established. Analytical solution of one dimensional problem was developed and the calibration process of physical constants was performed. The least square distance between the model (analytical 1D solution) and the experimental data are minimized. The behavior of the AMCs intransient analysis was determined. The model framework preserves the classical forms of the diffusion and convection-diffusion equations and yields to consistent form of the Fick's law. The adsorption process and the surface roughness effect were also traduced as a boundary condition using the switch condition Dirichlet to Neumann and the interface condition. The methodology is applied, first using the optimization methods with analytical solution to define physical constants, and second using finite element method including adsorption kinetic and the switch of Dirichlet to Neumann condition.

Keywords: AMCs, FOUP, cross-contamination, adsorption, diffusion, numerical analysis, wafers, Dirichlet to Neumann, finite elements methods, Fick’s law, optimization.

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Authors: Dalibor Biolek, Viera Biolková, Zden─øk Kolka

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A universal current-mode biquad is described which represents an economical variant of well-known KHN (Kerwin, Huelsman, Newcomb) voltage-mode filter. The circuit consists of two multiple-output OTAs and of two grounded capacitors. Utilizing simple splitter of the input current and a pair of jumpers, all the basic 2nd-order transfer functions can be implemented. The principle is verified by Spice simulation on the level of a CMOS structure of OTAs.

Keywords: Biquad, current mode, OTA.

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Authors: Viet-Hung Nguyen, Luh-Maan Chang

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Design should be viewed concurrently by three ways as transformation, flow and value generation. An innovative approach to solve design – related problems is described as the integrated product - process design. As a foundation for a formal framework consisting of organizing principles and techniques, Work Structuring has been developed to guide efforts in the integration that enhances the development of operation and process design in alignment with product design. Vietnam construction projects are facing many delays, and cost overruns caused mostly by design related problems. A better design management that integrates product and process design could resolve these problems. A questionnaire survey and in – depth interviews were used to investigate the feasibility of applying Work Structuring to construction projects in Vietnam. The purpose of this paper is to present the research results and to illustrate the possible problems and potential solutions when Work Structuring is implemented to construction projects in Vietnam.

Keywords: integrated product – process design, Work Structuring, construction projects, Vietnam

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Authors: A. K. Abdel-Fattah, A. B. El-Tawil, N. A. Harraz

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This paper focuses on the operational and strategic planning decisions related to the quayside of container terminals. We introduce an integrated operational research (OR) and system dynamics (SD) approach to solve the Berth Allocation Problem (BAP) and the Quay Crane Assignment Problem (QCAP). A BAP-QCAP optimization modeling approach which considers practical aspects not studied before in the integration of BAP and QCAP is discussed. A conceptual SD model is developed to determine the long-term effect of optimization on the system behavior factors like resource utilization, attractiveness to port, number of incoming vessels to port and port profits. The framework can be used for improving the operational efficiency of container terminals and providing a strategic view after applying optimization.

Keywords: Operational research, system dynamics, container terminal, quayside operational problems, strategic planning decisions.

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Authors: Cecília Reis, J. A. Tenreiro Machado, J. Boaventura Cunha

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This paper analyses the performance of a genetic algorithm using a new concept, namely a fractional-order dynamic fitness function, for the synthesis of combinational logic circuits. The experiments reveal superior results in terms of speed and convergence to achieve a solution.

Keywords: Circuit design, fractional-order systems, genetic algorithms, logic circuits

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Authors: Muhammad Yasir Wadood, Fatemeh Babaeian

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By developing ultra-wideband (UWB) systems, there is a high demand for UWB filters with low insertion loss, wide bandwidth, and having a planar structure which is compatible with other components of the UWB system. A microstrip interdigital filter is a great option for designing UWB filters. However, the presence of via holes in this structure creates difficulties in the fabrication procedure of the filter. Especially in the higher frequency band, any misalignment of the drilled via hole with the Microstrip stubs causes large errors in the measurement results compared to the desired results. Moreover, in this case (high-frequency designs), the line width of the stubs are very narrow, so highly precise small via holes are required to be implemented, which increases the cost of fabrication significantly. Also, in this case, there is a risk of having fabrication errors. To combat this issue, in this paper, a via-less UWB microstrip filter is proposed which is designed based on a modification of a conventional inter-digital bandpass filter. The novel approaches in this filter design are 1) replacement of each via hole with a quarter-wavelength open circuit stub to avoid the complexity of manufacturing, 2) using a bend structure to reduce the unwanted coupling effects and 3) minimising the size. Using the proposed structure, a UWB filter operating in the frequency band of 3.9-6.6 GHz (1-dB bandwidth) is designed and fabricated. The promising results of the simulation and measurement are presented in this paper. The selected substrate for these designs was Rogers RO4003 with a thickness of 20 mils. This is a common substrate in most of the industrial projects. The compact size of the proposed filter is highly beneficial for applications which require a very miniature size of hardware.

Keywords: Band-pass filters, inter-digital filter, microstrip, via-less.

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Authors: Maria Cecilia G. Cantos, Lorena W. Rabago, Bartolome T. Tanguilig III

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This paper describes a conducive and structured information exchange environment for the students of the College of Computer Studies in Manuel S. Enverga University Foundation in. The system was developed to help the students to check their academic result, manage profile, make self-enlistment and assist the students to manage their academic status that can be viewed also in mobile phones. Developing class schedules in a traditional way is a long process that involves making many numbers of choices. With Hill Climbing Algorithm, however, the process of class scheduling, particularly with regards to courses to be taken by the student aligned with the curriculum, can perform these processes and end up with an optimum solution. The proponent used Rapid Application Development (RAD) for the system development method. The proponent also used the PHP as the programming language and MySQL as the database.

Keywords: Hill climbing algorithm, integrated system, mobile web-based, student information system.

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Authors: M. R. Abbasifard, M. Rahgozar, A. Bayati, P. Pournemati

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One important problem in today organizations is the existence of non-integrated information systems, inconsistency and lack of suitable correlations between legacy and modern systems. One main solution is to transfer the local databases into a global one. In this regards we need to extract the data structures from the legacy systems and integrate them with the new technology systems. In legacy systems, huge amounts of a data are stored in legacy databases. They require particular attention since they need more efforts to be normalized, reformatted and moved to the modern database environments. Designing the new integrated (global) database architecture and applying the reverse engineering requires data normalization. This paper proposes the use of database reverse engineering in order to integrate legacy and modern databases in organizations. The suggested approach consists of methods and techniques for generating data transformation rules needed for the data structure normalization.

Keywords: Reverse Engineering, Database Integration, System Integration, Data Structure Normalization

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Authors: Sheng-Ming Huang, Nan-Chyuan Tsai, Chih-Che Lin, Chun-Chi Lin

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An innovative design for intelligent Chemical Mechanical Polishing (CMP) system is proposed and verified by experiments in this report. On-line measurement and real-time feedback are integrated to eliminate the shortcomings of traditional approaches, e.g., the batch-to-batch discrepancy of required polishing time, over consumption of chemical slurry, and non-uniformity across the wafer. The major advantage of the proposed method is that the finish of local surface roughness can be consistent, no matter where the inner-ring region or outer-ring region is concerned. Secondly, it is able to eliminate the Edge effect. Conventionally, the interfacial induced stress near the wafer edge is generally much higher than that near the wafer center. At last, by using the proposed intelligent chemical mechanical polishing strategy, the cost of the entire machining cycle can be much reduced while the quality of the finished goods certainly upgraded.

Keywords: Chemical Mechanical Polishing, Active Magnetic Actuator, On-Line Measurement.

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Authors: Niyati Parameswaran, Bharathi Muthu, Madiajagan Muthaiyan

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This paper presents Qmulus- a Cloud Based GPS Model. Qmulus is designed to compute the best possible route which would lead the driver to the specified destination in the shortest time while taking into account real-time constraints. Intelligence incorporated to Qmulus-s design makes it capable of generating and assigning priorities to a list of optimal routes through customizable dynamic updates. The goal of this design is to minimize travel and cost overheads, maintain reliability and consistency, and implement scalability and flexibility. The model proposed focuses on reducing the bridge between a Client Application and a Cloud service so as to render seamless operations. Qmulus-s system model is closely integrated and its concept has the potential to be extended into several other integrated applications making it capable of adapting to different media and resources.

Keywords: Cloud Services, GPS, Real-Time Constraints, Shortest Path, System Management and Traffic Routing

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Authors: R. Sahraian, A. Karampour Haghighi, E. Ghasemi

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Process planning and production scheduling play important roles in manufacturing systems. In this paper a multiobjective mixed integer linear programming model is presented for the integrated planning and scheduling of multi-product. The aim is to find a set of high-quality trade-off solutions. This is a combinatorial optimization problem with substantially large solution space, suggesting that it is highly difficult to find the best solutions with the exact search method. To account for it, a PSO-based algorithm is proposed by fully utilizing the capability of the exploration search and fast convergence. To fit the continuous PSO in the discrete modeled problem, a solution representation is used in the algorithm. The numerical experiments have been performed to demonstrate the effectiveness of the proposed algorithm.

Keywords: Integrated process planning and scheduling, multi objective, MILP, Particle swarm optimization

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Authors: Muhammad Tahir Qadri, M. Irfan Anis, M. Nawaz Irshad Khan

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This paper discusses the approach of real-time controlling of the energy management system using the data acquisition tool of LabVIEW. The main idea of this inspiration was to interface the Station (PC) with the system and publish the data on internet using LabVIEW. In this venture, controlling and switching of 3 phase AC loads are effectively and efficiently done. The phases are also sensed through devices. In case of any failure the attached generator starts functioning automatically. The computer sends command to the system and system respond to the request. The modern feature is to access and control the system world-wide using world wide web (internet). This controlling can be done at any time from anywhere to effectively use the energy especially in developing countries where energy management is a big problem. In this system totally integrated devices are used to operate via remote location.

Keywords: VI-server, Remote Access, Telemetry, Data Acquisition, web server.

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Authors: Sui Xin, Li Chunsheng, Tian Di

Abstract:

Short message integrated distributed monitoring systems (SM-DMS) are growing rapidly in wireless communication applications in various areas, such as electromagnetic field (EMF) management, wastewater monitoring, and air pollution supervision, etc. However, delay in short messages often makes the data embedded in SM-DMS transmit unreliably. Moreover, there are few regulations dealing with this problem in SMS transmission protocols. In this study, based on the analysis of the command and data requirements in the SM-DMS, we developed a processing model for the control center to solve the delay problem in data transmission. Three components of the model: the data transmission protocol, the receiving buffer pool method, and the timer mechanism were described in detail. Discussions on adjusting the threshold parameter in the timer mechanism were presented for the adaptive performance during the runtime of the SM-DMS. This model optimized the data transmission reliability in SM-DMS, and provided a supplement to the data transmission reliability protocols at the application level.

Keywords: Delay, SMS, reliability, distributed monitoringsystem (DMS), wireless communication.

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Authors: Aijaz A. Shaikh, Richard Glavee-Geo, Heikki Karjaluoto

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Adoption of Information Systems (IS) is receiving increasing attention such that its implications have been closely monitored and studied by the IS management community, industry and professional gatekeepers. Building on previous research regarding the adoption of technology, this paper develops and validates an integrated model of the adoption of mobile banking. The model originates from the Technology Acceptance Model (TAM) and the Theory of Planned Behaviour (TPB). This paper intends to offer a preliminary scrutiny of the antecedents of the adoption of mobile banking services in the context of a developing country. Data was collected from Pakistan. The findings showed that an integrated TAM and TPB model greatly explains the adoption intention of mobile banking; and perceived behavioural control and its antecedents play a significant role in predicting adoption Theoretical and managerial implications of findings are presented and discussed.

Keywords: Developing country, mobile banking service adoption, technology acceptance model, theory of planned behaviour.

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Authors: Karama M. AL-Tamimi, Munir A. Al-Absi

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A new OTA-based logarithmic-control variable gain current amplifier (LCCA) is presented. It consists of two Operational Transconductance Amplifier (OTA) and two PMOS transistors biased in weak inversion region. The circuit operates from 0.6V DC power supply and consumes 0.6 μW. The linear-dB controllable output range is 43 dB with maximum error less than 0.5dB. The functionality of the proposed design was confirmed using HSPICE in 0.35μm CMOS process technology.

Keywords: LCCA, OTA, Logarithmic, VGA, Weak inversion, Current-mode

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Authors: Elizabeth B. Varghese, M. Wilscy

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A face recognition system is a computer application for automatically identifying or verifying a person from a digital image or a video frame. A lot of algorithms have been proposed for face recognition. Vector Quantization (VQ) based face recognition is a novel approach for face recognition. Here a new codebook generation for VQ based face recognition using Integrated Adaptive Fuzzy Clustering (IAFC) is proposed. IAFC is a fuzzy neural network which incorporates a fuzzy learning rule into a competitive neural network. The performance of proposed algorithm is demonstrated by using publicly available AT&T database, Yale database, Indian Face database and a small face database, DCSKU database created in our lab. In all the databases the proposed approach got a higher recognition rate than most of the existing methods. In terms of Equal Error Rate (ERR) also the proposed codebook is better than the existing methods.

Keywords: Face Recognition, Vector Quantization, Integrated Adaptive Fuzzy Clustering, Self Organization Map.

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Authors: ER. Yashpaul Singh, A. Swarup

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This research paper evaluates and compares the performance of equal cost adaptive multi-path routing algorithms taking the transport protocols TCP (Transmission Control Protocol) and UDP (User Datagram Protocol) using network simulator ns2 and concludes which one is better.

Keywords: Multi-path routing algorithm, Datagram, Virtual Circuit, Throughput, Network services.

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Authors: Rahmad Wisnu Wardana, Eakachai Warinsiriruk, Sutep Joy-A-Ka

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Selecting the most suitable welding process usually depends on experiences or common application in similar companies. However, this approach generally ignores many criteria that can be affecting the suitable welding process selection. Therefore, knowledge automation through knowledge-based systems will significantly improve the decision-making process. The aims of this research propose integrated data envelopment analysis (DEA) and fuzzy credibility constrained programming approach for identifying the best welding process for stainless steel storage tank in the food and beverage industry. The proposed approach uses fuzzy concept and credibility measure to deal with uncertain data from experts' judgment. Furthermore, 12 parameters are used to determine the most appropriate welding processes among six competitive welding processes.

Keywords: Welding process selection, data envelopment analysis, fuzzy credibility constrained programming, storage tank.

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Authors: Chia-Feng Lu, Yuh-Jen Wang, Yu-Te Wu, Sui-Hing Yan

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This study aimed at investigating whether the functional brain networks constructed using the initial EEG (obtained when patients first visited hospital) can be correlated with the progression of cognitive decline calculated as the changes of mini-mental state examination (MMSE) scores between the latest and initial examinations. We integrated the time–frequency cross mutual information (TFCMI) method to estimate the EEG functional connectivity between cortical regions, and the network analysis based on graph theory to investigate the organization of functional networks in aMCI. Our finding suggested that higher integrated functional network with sufficient connection strengths, dense connection between local regions, and high network efficiency in processing information at the initial stage may result in a better prognosis of the subsequent cognitive functions for aMCI. In conclusion, the functional connectivity can be a useful biomarker to assist in prediction of cognitive declines in aMCI.

Keywords: Cognitive decline, functional connectivity, MCI, MMSE.

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Authors: K. Sivasubramanian, K. B. Jayanthi

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Floorplanning plays a vital role in the physical design process of Very Large Scale Integrated (VLSI) chips. It is an essential design step to estimate the chip area prior to the optimized placement of digital blocks and their interconnections. Since VLSI floorplanning is an NP-hard problem, many optimization techniques were adopted in the literature. In this work, a music-inspired Harmony Search (HS) algorithm is used for the fixed die outline constrained floorplanning, with the aim of reducing the total chip area. HS draws inspiration from the musical improvisation process of searching for a perfect state of harmony. Initially, B*-tree is used to generate the primary floorplan for the given rectangular hard modules and then HS algorithm is applied to obtain an optimal solution for the efficient floorplan. The experimental results of the HS algorithm are obtained for the MCNC benchmark circuits.

Keywords: Floor planning, harmony search, non-slicing floorplan, very large scale integrated circuits.

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Authors: Bita Mashayekhi, Azadeh Maddahi, Arash Tahriri

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The purpose of this paper is developing a model for audit quality, with regard to the contextual and environmental attributes of the audit profession in Iran. For this purpose, using an exploratory approach, and because of the special attributes of the auditing profession in Iran in terms of the legal environment, regulatory and supervisory mechanisms, audit firms size, and etc., we used grounded theory approach as a qualitative research method. Therefore, we got the opinions of the experts in the auditing and capital market areas through unstructured interviews. As a result, the authors revealed the determinants of audit quality, and by using these determinants, developed an Integrated Audit Quality Model, including causal conditions, intervening conditions, context, as well as action strategies related to AQ and their consequences. In this research, audit quality is studied using a systemic approach. According to this approach, the quality of inputs, processes, and outputs of auditing determines the quality of auditing, therefore, the quality of all different parts of this system is considered.

Keywords: Audit quality, integrated audit quality model, audit supply, demand for audit service, grounded theory.

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Authors: Kevin Fong-Rey Liu, Cheng-Wu Chen, Ken Yeh, Han-Hsi Liang

Abstract:

Environmental impact assessment (EIA) is a procedure tool of environmental management for identifying, predicting, evaluating and mitigating the adverse effects of development proposals. EIA reports usually analyze how the amounts or concentrations of pollutants obey the relevant standards. Actually, many analytical tools can deepen the analysis of environmental impacts in EIA reports, such as life cycle assessment (LCA) and environmental risk assessment (ERA). Life cycle impact assessment (LCIA) is one of steps in LCA to introduce the causal relationships among environmental hazards and damage. Incorporating the LCIA concept into ERA as an integrated tool for EIA can extend the focus of the regulatory compliance of environmental impacts to determine of the significance of environmental impacts. Sometimes, when using integrated tools, it is necessary to consider fuzzy situations due to insufficient information; therefore, ERA should be generalized to fuzzy risk assessment (FRA). Finally, the use of the proposed methodology is demonstrated through the study case of the expansion plan of the world-s largest plastics processing factory.

Keywords: Fuzzy risk analysis, life cycle impact assessment, fuzzy logic, environmental impact assessment

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Authors: Hoi-Lam Ma, Sai-Ho Chung

Abstract:

In traditional integrated berth allocation with quay crane assignment models, time dimension is usually assumed in hourly based. However, nowadays, transshipment becomes the main business to many container terminals, especially in Southeast Asia (e.g. Hong Kong and Singapore). In these terminals, vessel arrivals are usually very frequent with small handling volume and very short staying time. Therefore, the traditional hourly-based modeling approach may cause significant berth and quay crane idling, and consequently cannot meet their practical needs. In this connection, a 15-minute-based modeling approach is requested by industrial practitioners. Accordingly, a Three-level Genetic Algorithm (3LGA) with Quay Crane (QC) shifting heuristics is designed to fulfill the research gap. The objective function here is to minimize the total service time. Preliminary numerical results show that the proposed 15-minute-based approach can reduce the berth and QC idling significantly.

Keywords: Transshipment, integrated berth allocation, variable-in-time quay crane assignment, quay crane assignment.

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Authors: Valentina Ndou, Laura Schina, Giuseppina Passiante, Pasquale Del Vecchio, Marco De Maggio

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The aim of this paper is to propose a dynamic integrated approach, based on modularity concept and on the business ecosystem approach, that exploit different eBusiness services for SMEs under an open business network platform. The adoption of this approach enables firms to collaborate locally for delivering the best product/service to the customers as well as globally by accessing international markets, interrelate directly with the customers, create relationships and collaborate with worldwide actors. The paper will be structured as following: We will start by offering an overview of the state of the art of eBusiness platforms among SME of food and tourism firms and then we discuss the main drawbacks that characterize them. The digital business ecosystem approach and the modularity concept will be described as the theoretical ground in which our proposed integrated model is rooted. Finally, the proposed model along with a discussion of the main value creation potentialities it might create for SMEs will be presented.

Keywords: component, Complexity; Digital Business Ecosystem, e Business Platforms, Modularity, Networks.

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Authors: Davide Pierattoni, Ivan Macor, Pier Luca Montessoro

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In the recent years multimedia traffic and in particular VoIP services are growing dramatically. We present a new algorithm to control the resource utilization and to optimize the voice codec selection during SIP call setup on behalf of the traffic condition estimated on the network path. The most suitable methodologies and the tools that perform realtime evaluation of the available bandwidth on a network path have been integrated with our proposed algorithm: this selects the best codec for a VoIP call in function of the instantaneous available bandwidth on the path. The algorithm does not require any explicit feedback from the network, and this makes it easily deployable over the Internet. We have also performed intensive tests on real network scenarios with a software prototype, verifying the algorithm efficiency with different network topologies and traffic patterns between two SIP PBXs. The promising results obtained during the experimental validation of the algorithm are now the basis for the extension towards a larger set of multimedia services and the integration of our methodology with existing PBX appliances.

Keywords: Integrated voice-data communication, computernetwork performance, resource optimization.

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Authors: T. Abdelkrim, K. Ben seddik, B. Bezza, K. Benamrane, Aeh. Benkhelifa

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This paper proposes an implementation of boost converter for a resistive load using photovoltaic energy as a source. The model of photovoltaic cell and operating principle of boost converter are presented. A PIC microcontroller is used in the close loop control to generate pulses for controlling the converter circuit. To performance evaluation of boost converter, a variation of output voltage of PV panel is done by shading one and two cells.

Keywords: Boost converter, Microcontroller, Photovoltaic power generation, Shading cells.

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Authors: Bao Jinsong, Hu Xiaofeng, Wang Wei, Yu Dili, Jin Ye

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The paper researched and presented a virtual simulation system based on a full-digital lunar terrain, integrated with kinematics and dynamics module as well as autonomous navigation simulation module. The system simulation models are established. Enabling technologies such as digital lunar surface module, kinematics and dynamics simulation, Autonomous navigation are investigated. A prototype system for lunar rover locomotion simulation is developed based on these technologies. Autonomous navigation is a key echnology in lunar rover system, but rarely involved in virtual simulation system. An autonomous navigation simulation module have been integrated in this prototype system, which was proved by the simulation results that the synthetic simulation and visualizing analysis system are established in the system, and the system can provide efficient support for research on the autonomous navigation of lunar rover.

Keywords: Lunar rover, virtual simulation, autonomous navigation, full-digital lunar terrain

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Authors: M. M. Pawade, S. S. Banwait

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Electrical Discharge Machine (EDM) is especially used for the manufacturing of 3-D complex geometry and hard material parts that are extremely difficult-to-machine by conventional machining processes. In this paper authors review the research work carried out in the development of die-sinking EDM within the past decades for the improvement of machining characteristics such as Material Removal Rate, Surface Roughness and Tool Wear Ratio. In this review various techniques reported by EDM researchers for improving the machining characteristics have been categorized as process parameters optimization, multi spark technique, powder mixed EDM, servo control system and pulse discriminating. At the end, flexible machine controller is suggested for Die Sinking EDM to enhance the machining characteristics and to achieve high-level automation. Thus, die sinking EDM can be integrated with Computer Integrated Manufacturing environment as a need of agile manufacturing systems.

Keywords: Electrical Discharge Machine, Flexible Machine Controller, Material Removal Rate, Tool Wear Ratio.

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Authors: Nasser Ghassembaglou, Armin Rahmatfam, Faramarz Ranjbar

Abstract:

Using cold EGR method with variable venturi and turbocharger has a very significant effect on reduction of NOX and grime simultaneously. EGR cooler is one of the most important parts in the cold EGR circuit. In this paper optimum design of cooler for working in different percentages of EGR and for determining optimum temperature of exhausted gases, growth of efficiency, reduction of weight, dimension, expenditures, sediment and also optimum performance by using gasoil which has significant amounts of brimstone are investigated and optimized.

Keywords: Cold EGR, NOX, Cooler.

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Authors: M. Lenzhofer, D. Holzmann, A. Tortschanoff

Abstract:

In this paper we present a new multichannel high voltage driver box to connect up to six MOEMS mirror devices to it that have resonant and also quasistatically driven actuating electrodes. It is possible to drive all resonant axes synchronously while the amplitude of them can individually be controlled by separate microcontrollers that also operate the quasistatic axes. Circuit simulations are compared with the measurements done on the real system and also show the robust driving performance of a MOEMS mirror.

Keywords: MOEMS, scanner mirror, electrostatic driver.

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