WASET
    N. Santatriniaina and  J. Deseure and  T.Q. Nguyen and  H. Fontaine and  C. Beitia and  L. Rakotomanana,  Mathematical Modeling of the AMCs  Cross-Contamination Removal in the FOUPs: Finite Element Formulation and Application in FOUP’s Decontamination.   journal   = {International Journal of Physical and Mathematical Sciences}, [online]. World Academy of Science, Engineering and Technology.
    April 2014, vol. 88(4). 676 - 681
    [viewed 26 April 2024]. Available from: https://publications.waset.org/pdf/9998099.