Search results for: Basic design

Authors: H. Katkhuda, B. Hanayneh, N. Shatarat

Abstract:

The main objective of this paper is to determine the isolated effect of silica fume on tensile, compressive and flexure strengths on high strength lightweight concrete. Many experiments were carried out by replacing cement with different percentages of silica fume at different constant water-binder ratio keeping other mix design variables constant. The silica fume was replaced by 0%, 5%, 10%, 15%, 20% and 25% for a water-binder ratios ranging from 0.26 to 0.42. For all mixes, split tensile, compressive and flexure strengths were determined at 28 days. The results showed that the tensile, compressive and flexure strengths increased with silica fume incorporation but the optimum replacement percentage is not constant because it depends on the water–cementitious material (w/cm) ratio of the mix. Based on the results, a relationship between split tensile, compressive and flexure strengths of silica fume concrete was developed using statistical methods.

Keywords: Silica fume, Lightweight, High strength concrete, and Strength.

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Authors: S. A. Naeini, A. Khalili

Abstract:

Nowadays, tunnels with different applications are developed, and most of them are related to subway tunnels. The excavation of shallow tunnels that pass under municipal utilities is very important, and the surface settlement control is an important factor in the design. The study sought to analyze the settlement and also to find an appropriate model in order to predict the behavior of the tunnel in Tehran subway line-3. The displacement in these sections is also determined by using numerical analyses and numerical modeling. In addition, the Adaptive Neuro-Fuzzy Inference System (ANFIS) method is utilized by Hybrid training algorithm. The database pertinent to the optimum network was obtained from 46 subway tunnels in Iran and Turkey which have been constructed by the new Austrian tunneling method (NATM) with similar parameters based on type of their soil. The surface settlement was measured, and the acquired results were compared to the predicted values. The results disclosed that computing intelligence is a good substitute for numerical modeling.

Keywords: Settlement, subway line, FLAC3D, ANFIS method.

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Authors: Eiad Yafi, Ahmed Sultan Al-Hegami, M. A. Alam, Ranjit Biswas

Abstract:

Association rules are an important problem in data mining. Massively increasing volume of data in real life databases has motivated researchers to design novel and incremental algorithms for association rules mining. In this paper, we propose an incremental association rules mining algorithm that integrates shocking interestingness criterion during the process of building the model. A new interesting measure called shocking measure is introduced. One of the main features of the proposed approach is to capture the user background knowledge, which is monotonically augmented. The incremental model that reflects the changing data and the user beliefs is attractive in order to make the over all KDD process more effective and efficient. We implemented the proposed approach and experiment it with some public datasets and found the results quite promising.

Keywords: Knowledge discovery in databases (KDD), Data mining, Incremental Association rules, Domain knowledge, Interestingness, Shocking rules (SHR).

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Authors: Efat Lali Dastjerdi, Hassan Sadeghi Naeini, Hadi Sanjari

Abstract:

One of the important steps in a safety and risk management system is the economical evaluation of occupational accident and diseases costs in order to decrease accidents from reoccurring in the workplace. This study proposed a plausible method for calculating occupational accident costs and illnesses in work place. This method design for cost estimation takes into account both the personnel, organizational level as well as the community level especially intended for an Iranian work place. The research indicates that a using systematic method for calculating costs which also provides risk evaluation can help managers to plan correctly the investment in health and safety measures. Using this method is that not only is it comprehensive, easy and practical and could be applied in practice by a manager within a short period of time but it also shows the importance of accident costs as well as calculates the real cost of an accident and illnesses.

Keywords: ost calculating model, Economics of health and Safety.

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Authors: Afrooz Moatari Kazerouni

Abstract:

In a competitive production environment, critical decision making are based on data resulted by random sampling of product units. Efficiency of these decisions depends on data quality and also their reliability scale. This point leads to the necessity of a reliable measurement system. Therefore, the conjecture process and analysing the errors contributes to a measurement system known as Measurement System Analysis (MSA). The aim of this research is on determining the necessity and assurance of extensive development in analysing measurement systems, particularly with the use of Repeatability and Reproducibility Gages (GR&R) to improve physical measurements. Nowadays in productive industries, repeatability and reproducibility gages released so well but they are not applicable as well as other measurement system analysis methods. To get familiar with this method and gain a feedback in improving measurement systems, this survey would be on “ANOVA" method as the most widespread way of calculating Repeatability and Reproducibility (R&R).

Keywords: Analysis of Variance (ANOVA), MeasurementSystem Analysis (MSA), Part-Operator interaction effect, Repeatability and Reproducibility.

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Authors: Lawrence N. Ngeh, John D. Orbell, Stephen W. Bigger, Kasup Munaweera, Peter Dann

Abstract:

This research is part of a broad program aimed at advancing the science and technology involved in the rescue and rehabilitation of oiled wildlife. One aspect of this research involves the use of oil-sequestering magnetic particles for the removal of contaminants from plumage – so-called “magnetic cleansing". This treatment offers a number of advantages over conventional detergent-based methods including portability - which offers the possibility of providing a “quick clean" to the animal upon first encounter in the field. This could be particularly advantageous when the contaminant is toxic and/or corrosive and/or where there is a delay in transporting the victim to a treatment centre. The method could also be useful as part of a stabilization protocol when large numbers of affected animals are awaiting treatment. This presentation describes the design, development and testing of a prototype field kit for providing a “quick clean" to contaminated wildlife in the field.

Keywords: Magnetic Particles, Oiled Wildlife, Quick Clean, Wildlife Rehabilitation.

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Authors: Jin-Wei Liang, Hung-Yi Chen, Lung Lin

Abstract:

In this paper feedforward controller is designed to eliminate nonlinear hysteresis behaviors of a piezoelectric stack actuator (PSA) driven system. The control design is based on inverse Prandtl-Ishlinskii (P-I) hysteresis model identified using particle swarm optimization (PSO) technique. Based on the identified P-I model, both the inverse P-I hysteresis model and feedforward controller can be determined. Experimental results obtained using the inverse P-I feedforward control are compared with their counterparts using hysteresis estimates obtained from the identified Bouc-Wen model. Effectiveness of the proposed feedforward control scheme is demonstrated. To improve control performance feedback compensation using traditional PID scheme is adopted to integrate with the feedforward controller. 

Keywords: The Bouc-Wen hysteresis model, Particle swarm optimization, Prandtl-Ishlinskii model.

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Authors: M. Volpini, D. Alves, A. Horta, M. Borges, P. Reis

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The gait pattern in people that present motor limitations foment the demand for auxiliary locomotion devices. These artifacts for movement assistance vary according to its shape, size and functional features, following the clinical applications desired. Among the ortheses of lower limbs, the ankle-foot orthesis aims to improve the ability to walk in people with different neuromuscular limitations, although they do not always answer patients' expectations for their aesthetic and functional characteristics. The purpose of this study is to explore the possibility of using new design in additive manufacturer to reproduce the shape and functional features of a ankle-foot orthesis in an efficient and modern way. Therefore, this work presents a study about the performance of the mechanical forces through the analysis of finite elements in an ankle-foot orthesis. It will be demonstrated a study of distribution of the stress on the orthopedic device in orthostatism and during the movement in the course of patient's walk.

Keywords: Additive manufacture, new designs, orthoses, finite elements.

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Authors: Raheleh Khademian, Roghayeh Aminian

Abstract:

For the study of salinity stress on Vicia villosa and calcium effect for modulation of that, an experiment was conducted under hydroponic condition, and some important morphological and physiological characteristics were evaluated. This experiment was conducted as a factorial based on randomized complete design with three replications. The treatments include salinity stress in three levels (0, 50, and 100 mM NaCl) and calcium in two levels (content in Hoagland solution and double content). The results showed that all morphological and physiological traits include root and shoot length, root and shoot wet and dry weight, leaf area, leaf chlorophyll content, RWC, CMS, and biological yield was significantly different from the control and is affected by the salinity stress severely. But, calcium effect on them was not significant despite of decreasing salinity effect.

Keywords: Vicia villossa, salinity stress, calcium, hydroponic.

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Authors: A. Bessam, M. T. Kimour

Abstract:

Real-time embedded systems should benefit from component-based software engineering to handle complexity and deal with dependability. In these systems, applications should not only be logically correct but also behave within time windows. However, in the current component based software engineering approaches, a few of component models handles time properties in a manner that allows efficient analysis and checking at the architectural level. In this paper, we present a meta-model for component-based software description that integrates timing issues. To achieve a complete functional model of software components, our meta-model focuses on four functional aspects: interface, static behavior, dynamic behavior, and interaction protocol. With each aspect we have explicitly associated a time model. Such a time model can be used to check a component-s design against certain properties and to compute the timing properties of component assemblies.

Keywords: Real-time systems, Software architecture, software component, dependability, time properties, ADL, metamodeling.

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Authors: Sylvain Devie, Pierre-Philippe Robet, Yannick Aoustin, Maxime Gautier

Abstract:

The aim of this paper is to show that the observation of the external effort and the sensor-less control of a system is limited by the mechanical system. First, the model of a one-joint robot with a prismatic joint is presented. Based on this model, two different procedures were performed in order to identify the mechanical parameters of the system and observe the external effort applied on it. Experiments have proven that the accuracy of the force observer, based on the DC motor current, is limited by the mechanics of the robot. The sensor-less control will be limited by the accuracy in estimation of the mechanical parameters and by the maximum static friction force, that is the minimum force which can be observed in this case. The consequence of this limitation is that industrial robots without specific design are not well adapted to perform sensor-less precision tasks. Finally, an efficient control law is presented for high effort applications.

Keywords: Control, Identification, Robot, Co-manipulation, Sensor-less.

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Authors: Antonis Constantinides, Christos Yiallouras, Christakis Damianou

Abstract:

The application of today's semiconductor transistors in high power UHF DVB-T linear amplifiers has evolved significantly by utilizing LDMOS technology. This fact provides engineers with the option to design a single transistor signal amplifier which enables output power and linearity that was unobtainable previously using bipolar junction transistors or later type first generation MOSFETS. The quiescent current stability in terms of thermal variations of the LDMOS guarantees a robust operation in any topology of DVB-T signal amplifiers. Otherwise, progressively uncontrolled heat dissipation enhancement on the LDMOS case can degrade the amplifier’s crucial parameters in regards to the gain, linearity and RF stability, resulting in dysfunctional operation or a total destruction of the unit. This paper presents one more sophisticated approach from the traditional biasing circuits used so far in LDMOS DVB-T amplifiers. It utilizes a microprocessor control technology, providing stability in topologies where IDQ must be perfectly accurate.

Keywords: Amplifier, DVB-T, LDMOS, MOSFETS.

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Authors: Kwok Tak Kit

Abstract:

With the growing trend of adoption of advanced technologies like, building information modeling, artificial intelligence, wireless network, the collaboration and integration of these technologies into digital twin become more prominent in architecture, engineering and construction (AEC) industry in view of the nature and scale of AEC industry which efficiently adopted the digital twin. Digital twin is provided to be effective for AEC professions for design and project management. The digital concept is continuously developing and it is vital for AEC professionals and other stakeholders to understand the digital twin concept and the adoption of various advanced building technologies related to the AEC industry. This paper is to review the application of digital twins application in project management in AEC industry and highlight the challenge of AEC partitioners faced by the revolution of technologies including digital twins and building information modelling (BIM) for further research and future study.

Keywords: Digital Twin, AEC, building information modeling, project management, internet of things.

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Authors: Hafizullah A. Hashim, Aniza. A

Abstract:

The Spiral development model has been used successfully in many commercial systems and in a good number of defense systems. This is due to the fact that cost-effective incremental commitment of funds, via an analogy of the spiral model to stud poker and also can be used to develop hardware or integrate software, hardware, and systems. To support adaptive, semantic collaboration between domain experts and knowledge engineers, a new knowledge engineering process, called Spiral_OWL is proposed. This model is based on the idea of iterative refinement, annotation and structuring of knowledge base. The Spiral_OWL model is generated base on spiral model and knowledge engineering methodology. A central paradigm for Spiral_OWL model is the concentration on risk-driven determination of knowledge engineering process. The collaboration aspect comes into play during knowledge acquisition and knowledge validation phase. Design rationales for the Spiral_OWL model are to be easy-to-implement, well-organized, and iterative development cycle as an expanding spiral.

Keywords: Domain Expert, Knowledge Base, Ontology, Software Process.

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Authors: M. Zerikat, S. Chekroun

Abstract:

This paper proposes an effective algorithm approach to hybrid control systems combining fuzzy logic and conventional control techniques of controlling the speed of induction motor assumed to operate in high-performance drives environment. The introducing of fuzzy logic in the control systems helps to achieve good dynamical response, disturbance rejection and low sensibility to parameter variations and external influences. Some fundamentals of the fuzzy logic control are preliminary illustrated. The developed control algorithm is robust, efficient and simple. It also assures precise trajectory tracking with the prescribed dynamics. Experimental results have shown excellent tracking performance of the proposed control system, and have convincingly demonstrated the validity and the usefulness of the hybrid fuzzy controller in high-performance drives with parameter and load uncertainties. Satisfactory performance was observed for most reference tracks.

Keywords: Fuzzy controller, high-performance, inductionmotor, intelligent control, robustness.

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Authors: Shogo Kato, Daisuke Okamoto, Satoko Tsuru, Yoshinori Iizuka, Ryoko Shimono

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Healthcare safety has been perceived important. It is essential to prevent troubles in healthcare processes for healthcare safety. Trouble prevention is based on trouble prediction using accumulated knowledge on processes, troubles, and countermeasures. However, information on troubles has not been accumulated in hospitals in the appropriate structure, and it has not been utilized effectively to prevent troubles. In the previous study, however a detailed knowledge acquisition process for trouble prediction was proposed, the knowledgebase for countermeasures was not involved. In this paper, we aim to propose the structure of the knowledgebase for countermeasures, in the knowledge acquisition process for trouble prediction in healthcare process. We first design the structure of countermeasures and propose the knowledge representation form on countermeasures. Then, we evaluate the validity of the proposal, by applying it into an actual hospital.

Keywords: Trouble prevention, knowledge structure, structured knowledge, reusable knowledge.

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Authors: Purnomo Yustianto, Robin Doss

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As a process of developing a service system, the term ‘service engineering’ evolves in scope and definition. To achieve an integrated understanding of the process, a general framework and an ontology are required. This paper extends a previously built service engineering framework by exploring metamodels for the framework artefacts based on a foundational ontology and a metamodel landscape. The first part of this paper presents a correlation map between the proposed framework with the ontology as a form of evaluation for the conceptual coverage of the framework. The mapping also serves to characterize the artefacts to be produced for each activity in the framework. The second part describes potential metamodels to be used, from the metamodel landscape, as alternative formats of the framework artefacts. The results suggest that the framework sufficiently covers the ontological concepts, both from general service context and software service context. The metamodel exploration enriches the suggested artefact format from the original eighteen formats to thirty metamodel alternatives.

Keywords: Artefact, framework, service, metamodel.

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Authors: St. Subaedah, A. Takdir, Netty, D. Hidrawati

Abstract:

Maize development at the rainfed lowland after rice is often confronted with the occurrence of drought stress at the time of entering the generative phase, which will cause be hampered crop production. Consequently, in the utilization of the rainfed lowland areas optimally, an effort that can be done using the varieties of early maturity to minimize crop failures due to its short rainy season. The aim of this research was evaluating the potential yield of genotypes of candidates of maize early maturity in the rainfed lowland areas. The study was conducted during May to August 2016 at South Sulawesi, Indonesia. The study used randomized block design to compare 12 treatments and consists of 8 genotypes namely CH1, CH2, CH3, CH4, CH5, CH6, CH7, CH8 and the use of four varieties, namely Bima 3, Bima 7, Lamuru and Gumarang. The results showed that genotype of CH2, CH3, CH5, CH 6, CH7 and CH8 harvesting has less than 90 days. There are two genotypes namely genotypes of CH7 and CH8 that have a fairly high production respectively of 7.16 tons / ha and 8.11 tons/ ha and significantly not different from the superior varieties Bima3.

Keywords: Evaluation, maize, early maturity, yield potential.

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Authors: J. Levodo, A. Ford, I. Chaer

Abstract:

Africa enjoys some of the best solar radiation levels in the world averaging between 4-6 kWh/m2/day for most of the year and the global economic and political conditions that tend to make African countries more dependent on their own energy resources have caused growing interest in renewable energy based technologies. However to-date, implementation of modern Energy Technologies in Africa is still very low especially the use of solar conversion technologies. This paper presents literature review and analysis relating to the techno-economic feasibility of solar photovoltaic power generation in Africa. The literature is basically classified into the following four main categories. Techno-economic feasibility of solar photovoltaic power generation, design methods, performance evaluations of various systems and policy of potential future of technological development of photovoltaic (PV) in Africa by exploring the impact of alternative policy instruments and technology cost reductions on the financial viability of investing solar photovoltaic in Africa.

Keywords: Africa Solar Potential, Policy, Photovoltaic, Technologies.

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Authors: Farid Vahedi

Abstract:

There is a great deal of interest in constructing Double Skin Facade (DSF) structures which are considered as modern movement in field of Energy Conservation, renewable energies, and Architecture design. This trend provides many conclusive alternatives which are frequently associated with sustainable building. In this paper a building with Double Skin Facade is considered in the semiarid climate of Tehran, Iran, in order to consider the DSF-s performance during hot seasons. Mathematical formulations calculate solar heat gain by the external skin. Moreover, Computational Fluid Dynamics (CFD) simulations were performed on the case study building to enhance effectiveness of the facade. The conclusion divulged difference of gained energy by the cavity and room with and without blind and louvers. Some solutions were introduced to surge the performance of natural ventilation by plunging the cooling loads in summer.

Keywords: Double Skin Façade Buildings, Energy Conservation, Renewable Energy, Natural Ventilation, Semi-arid Climate.

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Authors: Zahra Ahmed Al-Zadjali

Abstract:

The influence of Islam on arts can be found primarily in calligraphy, arabesque designs and architecture. Also, geometric designs were used quite extensively. Muslim craftsmen produced stunning designs based on simple geometric principles and traditional motifs which were used to decorate many surfaces. The idea of interlacing simple rectilinear lines to form the patterns impressed Arabs. Nomads of Persia, Turks and Mongols were equally impressed with the designs so they begin to use them in their homes in carpet weaving. Islamic designs, motifs and colours which were used became common place and served to influence people’s tastes. Modern life style and contemporary products have changed the style of people’s daily lives, however, people still long for the nomadic way of life. This is clearly reflected in people’s homes. In a great many Muslim homes, Islamic decorative motifs can be seen along with traditional ‘Bedouin’ style furnishing, especially in homes of the Arabian Peninsula.

Keywords: Cultural heritage, textile design, Islamic art, motifs.

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Authors: Suman Kumar Saha, Rajib Kar, Durbadal Mandal, S. P. Ghoshal

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This paper demonstrates the application of craziness based particle swarm optimization (CRPSO) technique for designing the 8th order low pass Infinite Impulse Response (IIR) filter. CRPSO, the much improved version of PSO, is a population based global heuristic search algorithm which finds near optimal solution in terms of a set of filter coefficients. Effectiveness of this algorithm is justified with a comparative study of some well established algorithms, namely, real coded genetic algorithm (RGA) and particle swarm optimization (PSO). Simulation results affirm that the proposed algorithm CRPSO, outperforms over its counterparts not only in terms of quality output i.e. sharpness at cut-off, pass band ripple, stop band ripple, and stop band attenuation but also in convergence speed with assured stability.

Keywords: IIR Filter, RGA, PSO, CRPSO, Evolutionary Optimization Techniques, Low Pass (LP) Filter, Magnitude Response, Pole-Zero Plot, Stability.

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Authors: M. Pushpalatha, Revathi Venkataraman, T. Ramarao

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Trust and Energy consumption is the most challenging issue in routing protocol design for Mobile ad hoc networks (MANETs), since mobile nodes are battery powered and nodes behaviour are unpredictable. Furthermore replacing and recharging batteries and making nodes co-operative is often impossible in critical environments like military applications. In this paper, we propose a trust based energy aware routing model in MANET. During route discovery, node with more trust and maximum energy capacity is selected as a router based on a parameter called 'Reliability'. Route request from the source is accepted by a node only if its reliability is high. Otherwise, the route request is discarded. This approach forms a reliable route from source to destination thus increasing network life time, improving energy utilization and decreasing number of packet loss during transmission.

Keywords: Mobile Ad Hoc Networks, Trust, Energy, Reliability, AODV, TEA-AODV.

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Authors: Alexander Sutor, David Demetz

Abstract:

We present methods for developing wireless and traceable sensors for photobioreactors or photoreactors in general. The main focus of application are reactors which are wirelessly powered. Due to the promising properties of the propagation of magnetic fields under water we implemented an inductive link with an on/off switched hartley-oscillator as transmitter and an LC-tank as receiver. For this inductive link we used a carrier frequency of 298 kHz. With this system we performed measurements to demonstrate the independence of the magnetic field from water or salty water. In contrast we showed the strongly reduced range of RF-transmitter-receiver systems at higher frequencies (433 MHz and 2.4 GHz) in water and in salty water. For implementing the traceability of the sensors, we performed measurements to show the well defined orientation of the magnetic field of a coil. This information will be used in future work for implementing an inductive link based traceability system for our sensors.

Keywords: Wireless sensors, traceable sensors, photoreactor, internal illumination, wireless power.

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Authors: Mohammad Reza Ghasemi, Amin Ghorbani

Abstract:

The main goal of the present work is to decrease the computational burden for optimum design of steel frames with frequency constraints using a new type of neural networks called Wavelet Neural Network. It is contested to train a suitable neural network for frequency approximation work as the analysis program. The combination of wavelet theory and Neural Networks (NN) has lead to the development of wavelet neural networks. Wavelet neural networks are feed-forward networks using wavelet as activation function. Wavelets are mathematical functions within suitable inner parameters, which help them to approximate arbitrary functions. WNN was used to predict the frequency of the structures. In WNN a RAtional function with Second order Poles (RASP) wavelet was used as a transfer function. It is shown that the convergence speed was faster than other neural networks. Also comparisons of WNN with the embedded Artificial Neural Network (ANN) and with approximate techniques and also with analytical solutions are available in the literature.

Keywords: Weight Minimization, Frequency Constraints, Steel Frames, ANN, WNN, RASP Function.

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Authors: Qian Wang, Sylvain Lassalle, Antony R. Mileham, Geraint W. Owen

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This paper mathematically analyses the varying magnitude of production loss, which may occur due to idle time (inprocess waiting time and traveling time) on a linear walking worker assembly line. Within this flexible and reconfigurable assembly system, each worker travels down the line carrying out each assembly task at each station; and each worker accomplishes the assembly of a unit from start to finish and then travels back to the first station to start the assembly of a new product. This strategy of system design attempts to combine the flexibility of the U-shaped moving worker assembly cell with the efficiency of the conventional fixed worker assembly line. The paper aims to evaluate the effect of idle time that may offset the labor efficiency of each walking worker providing an insight into the mechanism of such a flexible and reconfigurable assembly system.

Keywords: Production lines, manufacturing systems, assemblysystems, walking workers.

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Authors: Wang Zhanquan, Yang Zeping, Gu Chunhua, Zhu Fazhi, Guo Weibin

Abstract:

Recently, Massive Open Online Courses (MOOCs) are becoming the new trend of education. There are many problems under the environment of Database Principle curriculum teaching process in MOOCs, such as teaching ideas and theories which are out of touch with the reality, how to carry out the technical teaching and interactive practice in the MOOCs environment, thus the methods of database course under the environment of MOOCs are proposed. There are three processes to deal with problem solving in the research, which are problems proposed, problems solved, and inductive analysis. The present research includes the design of teaching contents, teaching methods in classroom, flipped classroom teaching mode under the environment of MOOCs, learning flow method and large practice homework. The database designing ability is systematically improved based on the researching methods.

Keywords: Problem solving-driven, MOOCs, teaching art, learning flow.

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Authors: Eakkasak Susakunphaisan, Pichai Namprakai, Withaya Puangsombut

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The objective of this paper was to designing a ventilation system to enhance the performance of roof solar collector (RSC) for reducing heat accumulation inside the house. The RSC has 1.8 m2 surface area made of CPAC monier roof tiles on the upper part and gypsum board on the lower part. The space between CPAC monier and gypsum board was fixed at 14 cm. Ventilation system of modified roof solar collector (modified RSC) consists of 9 tubes of 0.15m diameter and installed in the lower part of RSC. Experimental result showed that the temperature of the room, and attic temperature. The average temperature reduction of room of house used modified RSC is about 2oC. and the percentage of room temperature reduction varied between 0 to 10%. Therefore, modified RSC is an interesting option in the sense that it promotes solar energy and conserve energy.

Keywords: roof solar collector, heat accumulation

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Authors: Sheng-Ming Huang, Nan-Chyuan Tsai, Chih-Che Lin, Chun-Chi Lin

Abstract:

An innovative design for intelligent Chemical Mechanical Polishing (CMP) system is proposed and verified by experiments in this report. On-line measurement and real-time feedback are integrated to eliminate the shortcomings of traditional approaches, e.g., the batch-to-batch discrepancy of required polishing time, over consumption of chemical slurry, and non-uniformity across the wafer. The major advantage of the proposed method is that the finish of local surface roughness can be consistent, no matter where the inner-ring region or outer-ring region is concerned. Secondly, it is able to eliminate the Edge effect. Conventionally, the interfacial induced stress near the wafer edge is generally much higher than that near the wafer center. At last, by using the proposed intelligent chemical mechanical polishing strategy, the cost of the entire machining cycle can be much reduced while the quality of the finished goods certainly upgraded.

Keywords: Chemical Mechanical Polishing, Active Magnetic Actuator, On-Line Measurement.

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Authors: Mahdi Yaghobi, Mohammad Haeri

Abstract:

The current methods of predictive controllers are utilized for those processes in which the rate of output variations is not high. For such processes, therefore, stability can be achieved by implementing the constrained predictive controller or applying infinite prediction horizon. When the rate of the output growth is high (e.g. for unstable nonminimum phase process) the stabilization seems to be problematic. In order to avoid this, it is suggested to change the method in the way that: first, the prediction error growth should be decreased at the early stage of the prediction horizon, and second, the rate of the error variation should be penalized. The growth of the error is decreased through adjusting its weighting coefficients in the cost function. Reduction in the error variation is possible by adding the first order derivate of the error into the cost function. By studying different examples it is shown that using these two remedies together, the closed-loop stability of unstable nonminimum phase process can be achieved.

Keywords: GPC, Stability, Varying Weighting Coefficients.

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