Search results for: avoid target-point

Authors: Elmira Davasaz Tabrizi, Mushteba Sevil, Ercan Arican

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Directly or indirectly, the human microbiome, or the population of bacteria and other microorganisms living in the human body, has been linked with human health. Various research has examined the connection with both illness status and the composition of the human microbiome, even though current studies indicate that the gut microbiome influences the mucosa and immune system. A significant amount of effort is being put into understanding the human microbiome's natural history in terms of health outcomes while also expanding our comprehension of the molecular connections between the microbiome and the host. To maintain health and avoid disease, these efforts ultimately seek to find efficient methods for recovering human microbial communities. This review article describes how the human microbiome leads to chronic diseases and discusses evidence for an important significant disorder that is related to the microbiome and linked to prostate cancer: chronic prostatitis (CP).

Keywords: urobiome, chronic prostatitis, metagenomic, urinary microbiome

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Authors: Sunil Verma

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In today’s world non-renewable sources are depleting quickly, so there is a need to produce efficient and unconventional engines to minimize the use of fuel. Also, there are many fatal accidents happening every year during extraction, distillation, transportation and storage of fuel. Reason for explosions of gaseous fuel is unwanted autoignition. Autoignition characterstics of fuel are mandatory to study to build efficient engines and to avoid accidents. This report is concerned with study of autoignition delay characteristics of iso-octane by using rapid compression machine. The paper clearly explains the dependence of ignition delay characteristics on variation of equivalence ratios from lean to rich mixtures. The equivalence ratio is varied from 0.3 to 1.2.

Keywords: autoignition, iso-octane, combustion, rapid compression machine, equivalence ratio, ignition delay

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Authors: F. Debbat, F. T. Bendimerad

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The efficient frequency assignment for radio communications becomes more and more crucial when developing new information technologies and their applications. It is consists in defining an assignment of frequencies to radio links, to be established between base stations and mobile transmitters. Separation of the frequencies assigned is necessary to avoid interference. However, unnecessary separation causes an excess requirement for spectrum, the cost of which may be very high. This problem is NP-hard problem which cannot be solved by conventional optimization algorithms. It is therefore necessary to use metaheuristic methods to solve it. This paper proposes Hybrid approach based on simulated annealing (SA) and Tabu Search (TS) methods to solve this problem. Computational results, obtained on a number of standard problem instances, testify the effectiveness of the proposed approach.

Keywords: cellular mobile communication, frequency assignment problem, optimization, tabu search, simulated annealing

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Authors: Gauravi Agarkar, Mahendra Rai

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Fungi are closely associated with the plants in various types of interactions such as mycorrhizal, parasitic or endophytic. Some of these interactions are beneficial and a few are harmful to the host plants. It has been suggested that these plant-associated fungi are able to change their lifestyle abd this means endophyte may become parasite or vice versa. This phenomenon may have profound effect on plant-fungal interactions and various ecological niches. Therefore, it is necessary to identify the factors that trigger the change in fungal lifestyle and understand whether these different lifestyles are interconnected at some points either by physiological, biochemical or molecular routes. This review summarizes the factors affecting plant fungal interactions and discusses the possible mechanisms for lifestyles switching of fungi based on available experimental evidences. Research should be boosted in this direction to fetch more advantages in future and to avoid the severe consequences in agriculture and other related fields.

Keywords: endophytic, lifestyle switching, mycorrhizal, parasitic, plant-fungal interactions

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Authors: Amine Beloufa, Mohamed Amirat

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In the electric vehicle, high power leads to high current; automotive power connector should resist to this high current in order to avoid a serious damage caused by the increase of contact temperature. The purpose of this paper is to analyze experimentally and numerically the effect of the cable diameter variation on the decrease of contact temperature. For this reason, a finite element model was developed to calculate the numerical contact temperature for several cable diameters and several electrical high currents. Also, experimental tests were established in order to validate this numerical model. Results show that the influence of cable diameter on the contact temperature is never neglected.

Keywords: contact temperature, experimental test, finite element, power automotive connector

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Authors: Jiahe Liu, Hongyang Yu, Feng Qian, Miao Luo, Linhang Zhu

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This study proposed a 3D human body reconstruction method, which integrates multi-view joint information into a set of joints and processes it with a parametric human body template. Firstly, we obtained human body image information captured from multiple perspectives. The multi-view information can avoid self-occlusion and occlusion problems during the reconstruction process. Then, we used the MvP algorithm to integrate multi-view joint information into a set of joints. Next, we used the parametric human body template SMPL-X to obtain more accurate three-dimensional human body reconstruction results. Compared with the traditional single-view parametric human body template reconstruction, this method significantly improved the accuracy and stability of the reconstruction.

Keywords: parametric human body templates, reconstruction of the human body, multi-view, joint

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Authors: Chang Ting, Wu Chun Kuan

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Wireless sensing technology is increasingly developed, in order to avoid caregiver neglect children in poor physiological condition, so there are more and more products into the wireless sensor-related technologies, in order to reduce the risk of infants. In view of this, the study will focus on Somatosensory detection wristbands Applied Research of Baby, and to explore through observation and literature, to find design criteria which conform baby products, as well as the advantages and disadvantages of existing products. This study will focus on 0-2 years of infant research and product design, to provide 2-3 new design concepts and products to identify weaknesses through the use of the actual product, further provide future baby wristbands design reference.

Keywords: infants, observation, design criteria, wireless sensing

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Authors: Aishah Tamby Omar, Zolkifle Ahmad

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The aim of this research was to explore academician perception of toxic leadership in higher education organizations. The data consisted of 17 semi-structured interviews with academicians’ grade 45 above. According to them, toxicity in higher education organizations can be categorized as dysfunctional command, employee anti-social, less trust and commitment, abusive supervision, tyranny, unethical, hierarchical structures, and permissive environment. While they believed that culture, climate, and situational factors may form a toxic development and have the greatest influence on toxicity determination in higher education organizations. Respondents acknowledged that the future studies should involve the person who had held positions to get their opinions. These results emphasized the need for the leaders to learn about leadership in order to avoid a negative performance of the higher education organizations in the near future.

Keywords: academician perception, higher education organizations, leadership, toxic leadership

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Authors: P. R. Maiti, S. K. Bhattacharyya

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Sloshing is a physical phenomenon characterized by the oscillation of unrestrained free surface of liquid in a partially liquid filled container subjected to external excitation. Determination of sloshing frequency in container is important to avoid resonance condition of the system. The complex behavior of the free surface movement and its combined mode of vibration make difficulty for exact analysis of sloshing. In the present study, numerical analysis is carried out for a partially liquid filled tank under external forces. Boundary element approach is used to formulate the sloshing problem in two -dimensional prismatic container with potential flow. Effort has been made to find slosh response for two dimensional problems in partially liquid filled prismatic container.

Keywords: sloshing, boundary element method, prismatic container, oscillation

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Authors: Lokeswara Rao P., Naga Venkata Rakesh N., V. Anantha Subramanian

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It is important to estimate, predict, and avoid the dynamic instability of high speed planing crafts. It is known that design parameters like relative location of center of gravity with respect to the dynamic lift centre and length to beam ratio of the craft have influence on the tendency to porpoise. This paper analyzes the hydrodynamic performance on the basis of the semi-empirical Savitsky method and also estimates the same by numerical simulations based on Reynolds Averaged Navier Stokes (RANS) equations using a commercial code namely, STAR- CCM+. The paper examines through the same numerical simulation considering dynamic equilibrium, the changing running trim, which results in porpoising. Some interesting results emerge from the study and this leads to early detection of the instability.

Keywords: CFD, planing hull, porpoising, Savitsky method

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Authors: Ekele Alih, Enejo Jalija

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Female Genital Mutilation (FGM) is made up of three types namely: Clitoridectomy, Excision and Infibulation. In this study, we examine the factors responsible for FGM in order to identify the causality variables in a logistic regression approach. From the result of the survey conducted by the Public Health Division, Nigeria Institute of Medical Research, Yaba, Lagos State, the tau statistic, τ was used to screen 9 factors that causes FGM in order to select few of the predictors before multiple regression equation is obtained. The need for this may be that the sample size may not be able to sustain having a regression with all the predictors or to avoid multi-collinearity. A total of 300 respondents, comprising 150 adult males and 150 adult females were selected for the household survey based on the multi-stage sampling procedure. The tau statistic,

Keywords: female genital mutilation, logistic regression, tau statistic, African society

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Authors: Marine Regnier, Pascal Bost, Matthieu Horgnies

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Some of the problems to be solved for the concrete industry are linked to the use of low-reactivity cement, the hardening of concrete under cold-weather and the manufacture of pre-casted concrete without costly heating step. The development of these applications needs to accelerate the hydration kinetics, in order to decrease the setting time and to obtain significant compressive strengths as soon as possible. The mechanisms enhancing the hydration kinetics of alite or Portland cement (e.g. the creation of nucleation sites) were already studied in literature (e.g. by using distinct additions such as titanium dioxide nanoparticles, calcium carbonate fillers, water-soluble polymers, C-S-H, etc.). However, the goal of this study was to establish a clear ranking of the efficiency of several types of additions by using a robust and reproducible methodology based on isothermal calorimetry (performed at 20°C). The cement was a CEM I 52.5N PM-ES (Blaine fineness of 455 m²/kg). To ensure the reproducibility of the experiments and avoid any decrease of the reactivity before use, the cement was stored in waterproof and sealed bags to avoid any contact with moisture and carbon dioxide. The experiments were performed on Portland cement pastes by using a water-to-cement ratio of 0.45, and incorporating different compounds (industrially available or laboratory-synthesized) that were selected according to their main composition and their specific surface area (SSA, calculated using the Brunauer-Emmett-Teller (BET) model and nitrogen adsorption isotherms performed at 77K). The intrinsic effects of (i) dry powders (e.g. fumed silica, activated charcoal, nano-precipitates of calcium carbonate, afwillite germs, nanoparticles of iron and iron oxides , etc.), and (ii) aqueous solutions (e.g. containing calcium chloride, hydrated Portland cement or Master X-SEED 100, etc.) were investigated. The influence of the amount of addition, calculated relatively to the dry extract of each addition compared to cement (and by conserving the same water-to-cement ratio) was also studied. The results demonstrated that the X-SEED®, the hydrated calcium nitrate, the calcium chloride (and, at a minor level, a solution of hydrated Portland cement) were able to accelerate the hydration kinetics of Portland cement, even at low concentration (e.g. 1%wt. of dry extract compared to cement). By using higher rates of additions, the fumed silica, the precipitated calcium carbonate and the titanium dioxide can also accelerate the hydration. In the case of the nano-precipitates of calcium carbonate, a correlation was established between the SSA and the accelerating effect. On the contrary, the nanoparticles of iron or iron oxides, the activated charcoal and the dried crystallised hydrates did not show any accelerating effect. Future experiments will be scheduled to establish the ranking of these additions, in terms of accelerating effect, by using low-reactivity cements and other water to cement ratios.

Keywords: acceleration, hydration kinetics, isothermal calorimetry, Portland cement

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Authors: Amogh Katti, J. Sai Asritha, D. Nivedh, M. Kalyan Srinivas, B. Somnath Chakravarthi

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Today's modern education system uses Learning Management System (LMS) portals for the scoring and grading of student performances, to maintain student records, and teachers are instructed to accept assignments through online submissions of .pdf,.doc,.ppt, etc. There is a risk of data tampering in the traditional portals; we will apply the Blockchain model instead of this traditional model to avoid data tampering and also provide a decentralized mechanism for overall fairness. Blockchain technology is a better and also recommended model because of the following features: consensus mechanism, decentralized system, cryptographic encryption, smart contracts, Ethereum blockchain. The proposed system ensures data integrity and tamper-proof assignment submission and grading, which will be helpful for both students and also educators.

Keywords: education technology, learning management system, decentralized applications, blockchain

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Authors: Mircea Ivanescu, Nirvana Popescu, Decebal Popescu, Dorin Popescu

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This paper addresses the control problem of a class of hyper-redundant arms. In order to avoid discrepancy between the mathematical model and the actual dynamics, the dynamic model with uncertain parameters of this class of manipulators is inferred. A procedure to design a feedback controller which stabilizes the uncertain system has been proposed. A PD boundary control algorithm is used in order to control the desired position of the manipulator. This controller is easy to implement from the point of view of measuring techniques and actuation. Numerical simulations verify the effectiveness of the presented methods. In order to verify the suitability of the control algorithm, a platform with a 3D flexible manipulator has been employed for testing. Experimental tests on this platform illustrate the applications of the techniques developed in the paper.

Keywords: distributed model, flexible manipulator, observer, robot control

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Authors: K. R. Balabiyev, A. O. Kaipbayeva

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The article discusses the legal framework of the government’s environmental function and analyzes the role of the national policy in protection of wetlands. The problem is of interest for it deals with the most important branch of economy–utilization of Kazakhstan’s natural resources, protection of health and environmental well being of the population. Development of a long-term environmental program addressing the protection of wetlands represents the final stage of the government’s environmental policy, and is a relatively new function for the public administration system. It appeared due to the environmental measures that require immediate decisions to be taken. It is an integral part of the effort in the field of management of state-owned natural resource, as well as of the measures aimed at efficient management of natural resources to avoid their early depletion or contamination.

Keywords: environmental focus, government’s environmental function, protection of wetlands, Kazakhstan

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Authors: Ahmed BenSaïda

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This paper investigates the association between financial technology (FinTech) growth and bank performance in the Gulf Cooperation Council (GCC) region. Application is conducted on a panel dataset containing the annual observations of banks covering the period from 2012 to 2021. FinTech growth is set as an explanatory variable on three proxies of bank performance. These proxies are the return on assets (ROA), return on equity (ROE), and net interest margin (NIM). Moreover, several control variables are added to the model, including bank-specific and macroeconomic variables. The results are significant as all the proxies of the bank performance are negatively affected by the growth of FinTech startups. Consequently, banks are urged to proactively invest in FinTech startups and engage in partnerships to avoid the risk of disruption.

Keywords: financial technology, bank performance, GCC countries, panel regression

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Authors: Rbiha Salsabil Ketitni

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The entire company is a series of information among themselves so that each information serves several events and activities, and the latter is nothing but a large set of data or huge data. The enormity of information leads to the possibility of losing it sometimes, and this possibility must be avoided in the institution, especially the information that has a significant impact on it. In most cases, to avoid the loss of this information and to be relatively correct, information systems are used. At present, it is impossible to have a company that does not have information systems, as the latter works to organize the information as well as to preserve it and even saves time for its owner and this is the result of the speed of its mission. This study aims to provide an idea of an accounting information system that opens a forward-looking study for its manufacture and development by researchers, scientists, and professionals. This is the result of most individuals seeing a great contradiction between the work of an information system for moral capital and does not provide real values when measured, and its disclosure in financial reports is not distinguished by transparency.

Keywords: accounting, intellectual capital, intellectual capital accounting, information system

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Authors: Quy Dang Nguyen, Reza Nakhaie Jazar

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The paper investigates vibration dynamics of tire-road separation for a quarter-car model; this separation model is developed to be close to the real situation considering the tire is able to separate from the ground plane. A set of piecewise linear mathematical models is developed and matches the in-contact and no-contact states to be considered as mother models for further investigations. The bound dynamics are numerically simulated in the time response and phase portraits. The separation analysis may determine which values of suspension parameters can delay and avoid the no-contact phenomenon, which results in improving ride comfort and eliminating the potentially dangerous oscillation. Finally, model verification is carried out in the MSC-ADAMS environment.

Keywords: quarter-car vibrations, tire-road separation, separation analysis, separation dynamics, ride comfort, ADAMS validation

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Authors: A. V. Alabut, V. D. Sikilinda, N. J. Nelasov, O. L. Eroshenko, M. N. Morgunov, I. V. Koroleva

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We have analyzed the results of treatment of 204 patients with knee prosthetic arthroplasty. For the purpose of active delineation of vascular pathology triplex sonography of arterial and venous vessels of low extremities was performed in all cases in the preoperative period. When it was necessary, reconstructive vascular surgery was implemented to improve peripheral circulation and reduce the hazard of thrombosis after knee replacement. The combination of specific and nonspecific methods of thromboprophylaxis was used in perioperative period. On 7-10 day and 2.5-3 month after prosthetic arthroplasty, all patients iteratively underwent triple sonography. In case of detection of floating thrombus, urgent venous ligation was performed. Active diagnostics of venous thrombosis gave the opportunity to avoid fatal pulmonary embolism.

Keywords: knee replacement, venous thrombosis, pulmonary embolism, vascular surgery

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Authors: Iman Abu-Rub

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This research paper examines if Artificial Intelligence is, in fact, racist or not. Different studies from all around the world, and covering different communities were analyzed to further understand AI’s true implications over different communities. The black community, Asian community, and Muslim community were all analyzed and discussed in the paper to figure out if AI is biased or unbiased towards these specific communities. It was found that the biggest problem AI faces is the biased distribution of data collection. Most of the data inserted and coded into AI are of a white male, which significantly affects the other communities in terms of reliable cultural, political, or medical research. Nonetheless, there are various research was done that help increase awareness of this issue, but also solve it completely if done correctly. Governments and big corporations are able to implement different strategies into their AI inventions to avoid any racist results, which could cause hatred culturally but also unreliable data, medically, for example. Overall, Artificial Intelligence is not racist per se, but the data implementation and current racist culture online manipulate AI to become racist.

Keywords: social media, artificial intelligence, racism, discrimination

Procedia PDF Downloads 76

Authors: Tiancheng Lan

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E10A is a kind of replication-defective adenovirus which carries the human endostatin gene to inhibit the growth of tumors. Kringle 5(K5) has almost the same function as angiostatin to also inhibit the growth of tumors since they are all the byproduct of the proteolytic cleavage of plasminogen. Tumor size increasing can be suppressed because both of the endostatin and K5 can restrain the angiogenesis process. Therefore, in order to improve the treatment effect on tumor, 2A peptide is used to construct a fusion gene carrying both E10A and K5. Using 2A peptide is an ideal strategy when a fusion gene is expressed because it can avoid many problems during the expression of more than one kind of protein. The overlap extension PCR is also used to connect 2A peptide with E10A and K5. The final construction of fusion gene E10A-2A-K5 can provide a possible new method of the anti-angiogenesis treatment with a better expression performance.

Keywords: E10A, Kringle 5, 2A peptide, overlap extension PCR

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Authors: Sarah Majid Ansari, Serjosha Wulf, Matthias Goerke

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In times of global warming and the increasing shortage of resources, sustainable production is becoming more and more inevitable. Companies cannot only heighten their competitiveness but also contribute positively to environmental protection through efficient energy and resource consumption. Regarding this, technical solutions are often preferred during production, although organizational and process-related approaches also offer great potential. This project focuses on reducing resource usage, with a special emphasis on the human factor. It is the aspiration to develop a methodology that systematically implements and embeds suitable and individual measures and methods regarding resource efficiency throughout the entire production. The measures and methods established help employees handle resources and energy more sensitively. With this in mind, this paper also deals with the difficulties that can occur during the sensitization of employees and the implementation of these measures and methods. In addition, recommendations are given on how to avoid such difficulties.

Keywords: implementation, human factors, production plants, resource efficiency

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Authors: Zeeshan Muzammal, Usama Latif, Fouzia Younas, Syed Muhammad Hassan, Samia Razaq

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Unexpected rainfall has always been an issue in the lifetime of crops and brings destruction for the farmers who harvest them. Unfortunately, Pakistan is one of the countries in which untimely rain impacts badly on crops like wash out of seeds and pesticides etc. Pakistan’s GDP is related to agriculture, especially in rural areas farmers sometimes quit farming because leverage of huge loss to their crops. Through our surveys and research, we came to know that farmers in the rural areas of Pakistan need rain information to avoid damages to their crops from rain. We developed a prototype using ICTs to inform the farmers about rain one week in advance. Our proposed solution has two ways of informing the farmers. In first we send daily messages about weekly prediction and also designed a helpline where they can call us to ask about possibility of rain.

Keywords: ICTD, farmers, mobile based, Pakistan, rural areas, weather prediction

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Authors: Sheetal Kumar Parwar, J. Deb Barma, A. Majumder

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Submerged arc welding is a very complex process. It is a very efficient and high performance welding process. In this present study an attempt have been done to reduce the welding distortion by increased amount of oxide flux through TiO2 in submerged arc welding process. Care has been taken to avoid the excessiveness of the adding agent for attainment of significant results. Data Envelopment Analysis (DEA) based BAT algorithm is used for the parametric optimization purpose in which DEA Data Envelopment Analysis is used to convert multi response parameters into a single response parameter. The present study also helps to know the effectiveness of the addition of TiO2 in active flux during submerged arc welding process.

Keywords: BAT algorithm, design of experiment, optimization, submerged arc welding

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Authors: M. Ben Slimene, M.-S. Ouali

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Asset management of urban infrastructures faces a multitude of challenges that need to be overcome to obtain a reliable measurement of performances. Predicting the performance of slowly aging systems is one of those challenges, which helps the asset manager to investigate specific failure modes and to undertake the appropriate maintenance and rehabilitation interventions to avoid catastrophic failures as well as to optimize the maintenance costs. This article presents a methodology for modeling the deterioration of slowly degrading assets based on an operating history. It consists of extracting degradation profiles by grouping together assets that exhibit similar degradation sequences using an unsupervised classification technique derived from artificial intelligence. The obtained clusters are used to build the performance prediction models. This methodology is applied to a sample of a stormwater drainage culvert dataset.

Keywords: artificial Intelligence, clustering, culvert, regression model, slow degradation

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Authors: Nisar Ahmed Memon

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A new medical image watermarking scheme delivering high embedding capacity is presented in this paper. Integer Wavelet Transform (IWT), Companding technique and adaptive thresholding are used in this scheme. The proposed scheme implants, recovers the hidden information and restores the input image to its pristine state at the receiving end. Magnetic Resonance Imaging (MRI) images are used for experimental purposes. The scheme first segment the MRI medical image into non-overlapping blocks and then inserts watermark into wavelet coefficients having a high frequency of each block. The scheme uses block-based watermarking adopting iterative optimization of threshold for companding in order to avoid the histogram pre and post processing. Results show that proposed scheme performs better than other reversible medical image watermarking schemes available in literature for MRI medical images.

Keywords: adaptive thresholding, companding technique, data authentication, reversible watermarking

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Authors: Wei-Hsuan Hsu, Yi-Xuan Huang

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Nanoimprint lithography (NIL) possesses the advantages of sub-10-nm feature and low cost. NIL patterns the resist with physical deformation using a mold, which can easily reproduce the required nano-scale pattern. However, the variation of process parameters and environmental conditions seriously affect reproduction quality. How to ensure the quality of imprinted pattern is essential for industry. In this study, the authors used the electrowetting technology to assist mold filling in the NIL process. A special mold structure was designed to cause electrowetting. During the imprinting process, when a voltage was applied between the mold and substrate, the hydrophilicity/hydrophobicity of the surface of the mold can be converted. Both simulation and experiment confirmed that the electrowetting technology can assist mold filling and avoid incomplete filling rate. The proposed method can also reduce the crack formation during the de-molding process. Therefore, electrowetting technology can improve the process quality of NIL.

Keywords: electrowetting, mold filling, nano-imprint, surface modification

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Authors: Sumay Bhojwani, Ashutosh Chandra, Mamita Devaburman, Akriti Bhogal

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This article uses the Material flow analysis for estimating e-wastes in the Delhi/NCR region. The Material flow analysis is based on sales data obtained from various sources. Much of the data available for the sales is unreliable because of the existence of a huge informal sector. The informal sector in India accounts for more than 90%. Therefore, the scope of this study is only limited to the formal one. Also, for projection of the sales data till 2030, we have used regression (linear) to avoid complexity. The actual sales in the years following 2015 may vary non-linearly but we have assumed a basic linear relation. The purpose of this study was to know an approximate quantity of desktop e-wastes that we will have by the year 2030 so that we start preparing ourselves for the ineluctable investment in the treatment of these ever-rising e-wastes. The results of this study can be used to install a treatment plant for e-wastes in Delhi.

Keywords: e-wastes, Delhi, desktops, estimation

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Authors: Nasir A. Al-Geelani, Zulkurnain Abdul-Malek, M. Afendi M. Piah

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This research paper investigation is carried out in the laboratory on single units of transmission line glass insulator characterized by different thermal images, which aimed to find out the age of the insulators. The tests were carried out on virgin and aged insulators using the thermography scan. Various samples having different periods of aging 20, 15, and 5 years from a 132 kV transmission line which have exhibited a different degree of corrosion. The second group of insulator samples was relatively mild aged insulators, while the third group was lightly aged; finally, the fourth group was the brand new insulators. The results revealed a strong correlation between the aging and the thermal images captured by the infrared camera. This technique can be used to monitor the aging of high voltage insulators as a precaution to avoid disaster.

Keywords: glass insulator, infrared camera, corona diacharge, transmission lines, thermograpy, surface discharge

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Authors: Byungsik Moon

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Electron beam inspection (EBI) has played an important role in detecting defects during the Fab process. The study focused on capturing buried Cu metal voids for 5nm technology nodes in Qualcomm Snapdragon mass production. This paper illustrates a case study where Cu metal voids can be detected without side effects with optimized EBI scanning conditions. The voids were buried in the VIA and not detected effectively by bright field inspection. EBI showed higher detectability, about 10 times that of bright fields, and a lower landing energy of EBI can avoid film damage. A comparison of detectability between EBI and bright field inspection was performed, and TEM confirmed voids that were detected by EBI. Therefore, a much higher detectability of buried Cu metal voids can be achieved without causing film damage.

Keywords: electron beam inspection, EBI, landing energy, Cu metal voids, bright field inspection

Procedia PDF Downloads 47