Search results for: performance measurement system

Authors: Mihails Kulikovs, Ernests Petersons

Abstract:

Network management techniques have long been of interest to the networking research community. The queue size plays a critical role for the network performance. The adequate size of the queue maintains Quality of Service (QoS) requirements within limited network capacity for as many users as possible. The appropriate estimation of the queuing model parameters is crucial for both initial size estimation and during the process of resource allocation. The accurate resource allocation model for the management system increases the network utilization. The present paper demonstrates the results of empirical observation of memory allocation for packet-based services.

Keywords: Queuing System, Packet Loss Probability, Measurement-Based Admission Control (MBAC), Performanceevaluation, Quality of Service (QoS).

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Authors: Sherif K. El Dyasti, Esam A. Hagras, Adel E. El-Hennawy

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This paper addresses the performance of antenna array beamforming on Chip-Interleaved Code Division Multiple Access (CI_CDMA) system based on Minimum Mean Square Error (MMSE) detector in aeronautical mobile radio channel. Multipath fading, Doppler shifts caused by the speed of the aircraft, and Multiple Access Interference (MAI) are the most important reasons that affect and reduce the performance of aeronautical system. In this paper we suggested the CI-CDMA with antenna array to combat this fading and improve the bit error rate (BER) performance. We further evaluate the performance of the proposed system in the four standard scenarios in aeronautical mobile radio channel.

Keywords: Aeronautical Channel, CI-CDMA, Beamforming.

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Authors: Bit-Na Kwon, Dong-Hyun Ha, Hyoung-Kyu Song

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In wireless communication, space-time block code (STBC), cyclic delay diversity (CDD) and space-time cyclic delay diversity (STCDD)are used as the spatial diversity schemes and have been widely studied for the reliablecommunication. If these schemes are used, the communication system can obtain the improved performance. However,the quality of the system is degraded when the distance between a source and a destination is distant in wireless communication system. In this paper, the cooperative transmission scheme using two sources is proposed and improves the performance of the wireless communication system.

Keywords: OFDM, Cooperative communication, CDD, STBC, STCDD.

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Authors: S. Forughi, A. De Zoysa, S. Bhati

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The present study focuses on the environmental performance of the companies in the electricity-producing sector and its relationship with their financial performance. We will review the major studies that examined the relationship between the environmental and financial performance of firms in various industries. While the classical economic debates consider the environmental friendly activities costly and harmful to a firm’s profitability, it is claimed that firms will be rewarded with higher profitability in long run through the investments in environmental friendly activities. In this context, prior studies have examined the relationship between the environmental and financial performance of firms operating in different industry sectors. Our study will employ an environmental indicator to increase the accuracy of the results and be employed as an independent variable in our developed econometric model to evaluate the impact of the financial performance of the firms on their environmental friendly activities in the context of companies operating in the Australian electricity-producing sector. As a result, we expect our methodology to contribute to the literature and the findings of the study will help us to provide recommendations and policy implications to the electricity producers.

Keywords: Australian electricity sector, efficiency measurement, environmental-financial performance interaction, environmental index.

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Authors: Jui-Pui Hung, Yu-Sheng Lai, Tzuo-Liang Luo, Kung-Da Wu, Yun-Ji Zhan

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This study presented the investigation of the influence of the tool holder interface stiffness on the dynamic characteristics of a spindle tool system. The interface stiffness was produced by drawbar force on the tool holder, which tends to affect the spindle dynamics. In order to assess the influence of interface stiffness on the vibration characteristic of spindle unit, we first created a three dimensional finite element model of a high speed spindle system integrated with tool holder. The key point for the creation of FEM model is the modeling of the rolling interface within the angular contact bearings and the tool holder interface. The former can be simulated by a introducing a series of spring elements between inner and outer rings. The contact stiffness was calculated according to Hertz contact theory and the preload applied on the bearings. The interface stiffness of the tool holder was identified through the experimental measurement and finite element modal analysis. Current results show that the dynamic stiffness was greatly influenced by the tool holder system. In addition, variations of modal damping, static stiffness and dynamic stiffness of the spindle tool system were greatly determined by the interface stiffness of the tool holder which was in turn dependent on the draw bar force applied on the tool holder. Overall, this study demonstrates that identification of the interface characteristics of spindle tool holder is of very importance for the refinement of the spindle tooling system to achieve the optimum machining performance.

Keywords: Dynamic stiffness, Drawbar force, Interface stiffness, Spindle-tool holder.

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Authors: A. Umemuro, M. Sato, M. Narita, S. Hori, S. Sakurai, T. Nakayama, A. Nakazawa, T. Ogura

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Mammography requires the detection of very small calcifications, and physicians search for microcalcifications by magnifying the images as they read them. The mouse is necessary to zoom in on the images, but this can be tiring and distracting when many images are read in a single day. Therefore, an image magnification system combining an eye-detector and a simple electroencephalograph (EEG) scanner was devised, and its operability was evaluated. Two experiments were conducted in this study: the measurement of eye-detection error using an eye-detector and the measurement of the time required for image magnification using a simple EEG scanner. Eye-detector validation showed that the mean distance of eye-detection error ranged from 0.64 cm to 2.17 cm, with an overall mean of 1.24 ± 0.81 cm for the observers. The results showed that the eye detection error was small enough for the magnified area of the mammographic image. The average time required for point magnification in the verification of the simple EEG scanner ranged from 5.85 to 16.73 seconds, and individual differences were observed. The reason for this may be that the size of the simple EEG scanner used was not adjustable, so it did not fit well for some subjects. The use of a simple EEG scanner with size adjustment would solve this problem. Therefore, the image magnification system using the eye-detector and the simple EEG scanner is useful.

Keywords: EEG scanner, eye-detector, mammography, observers.

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Authors: M. Kulkarni, R. K. Sinha, D. R. Bhaskar

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In this paper, we have compared the performance of a Turbo and Trellis coded optical code division multiple access (OCDMA) system. The comparison of the two codes has been accomplished by employing optical orthogonal codes (OOCs). The Bit Error Rate (BER) performances have been compared by varying the code weights of address codes employed by the system. We have considered the effects of optical multiple access interference (OMAI), thermal noise and avalanche photodiode (APD) detector noise. Analysis has been carried out for the system with and without double optical hard limiter (DHL). From the simulation results it is observed that a better and distinct comparison can be drawn between the performance of Trellis and Turbo coded systems, at lower code weights of optical orthogonal codes for a fixed number of users. The BER performance of the Turbo coded system is found to be better than the Trellis coded system for all code weights that have been considered for the simulation. Nevertheless, the Trellis coded OCDMA system is found to be better than the uncoded OCDMA system. Trellis coded OCDMA can be used in systems where decoding time has to be kept low, bandwidth is limited and high reliability is not a crucial factor as in local area networks. Also the system hardware is less complex in comparison to the Turbo coded system. Trellis coded OCDMA system can be used without significant modification of the existing chipsets. Turbo-coded OCDMA can however be employed in systems where high reliability is needed and bandwidth is not a limiting factor.

Keywords: avalanche photodiode, optical code division multipleaccess, optical multiple access interference, Trellis codedmodulation, Turbo code

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Authors: A.K.Balirsingh, S.C.Swain, S. Panda

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Recently, Genetic Algorithms (GA) and Differential Evolution (DE) algorithm technique have attracted considerable attention among various modern heuristic optimization techniques. Since the two approaches are supposed to find a solution to a given objective function but employ different strategies and computational effort, it is appropriate to compare their performance. This paper presents the application and performance comparison of DE and GA optimization techniques, for flexible ac transmission system (FACTS)-based controller design. The design objective is to enhance the power system stability. The design problem of the FACTS-based controller is formulated as an optimization problem and both the PSO and GA optimization techniques are employed to search for optimal controller parameters. The performance of both optimization techniques has been compared. Further, the optimized controllers are tested on a weekly connected power system subjected to different disturbances, and their performance is compared with the conventional power system stabilizer (CPSS). The eigenvalue analysis and non-linear simulation results are presented and compared to show the effectiveness of both the techniques in designing a FACTS-based controller, to enhance power system stability.

Keywords: Differential Evolution, Flexible AC TransmissionSystems (FACTS), Genetic Algorithm, Low Frequency Oscillations, Single-machine Infinite Bus Power System.

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Authors: M. Tsebia, H. Bentarzi

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In the inter-connected power systems, a phenomenon called inter-area oscillation may be caused by several defects. In this paper, a study of the Maghreb countries inter-area power networks oscillation has been investigated. The inter-area oscillation monitoring can be enhanced by integrating Phasor Measurement Unit (PMU) technology installed in different places. The data provided by PMU and recorded by PDC will be used for the monitoring, analysis, and control purposes. The proposed approach has been validated by simulation using MATLAB/Simulink.

Keywords: Inter-area oscillation, Maghrebian power system, Simulink, PMU.

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Authors: Saptiadi Nugroho, A. Nur Muhamad Afif

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Understanding factors that influence employee performance is very important. By finding the significant factors, organization could intervene to improve the employee performance that simultaneously will affect organization itself. In this research, four aspects consist of PCCD training, education level, corrective action, and work location were tested to identify their influence on employee performance. By using correlation analysis and T-Test, it was found that employee performance significantly influenced by PCCD training, work location, and corrective action. Meanwhile the education level did not influence employee performance.

Keywords: Training, employee development, performance management system.

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Authors: K. Vidya, V.Rhymend Uthariaraj

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Traffic Engineering (TE) is the process of controlling how traffic flows through a network in order to facilitate efficient and reliable network operations while simultaneously optimizing network resource utilization and traffic performance. TE improves the management of data traffic within a network and provides the better utilization of network resources. Many research works considers intra and inter Traffic Engineering separately. But in reality one influences the other. Hence the effective network performances of both inter and intra Autonomous Systems (AS) are not optimized properly. To achieve a better Joint Optimization of both Intra and Inter AS TE, we propose a joint Optimization technique by considering intra-AS features during inter – AS TE and vice versa. This work considers the important criterion say latency within an AS and between ASes. and proposes a Bi-Criteria Latency optimization model. Hence an overall network performance can be improved by considering this jointoptimization technique in terms of Latency.

Keywords: Inter-Domain Routing , Measurement, OptimizationPerformance, Traffic Engineering.

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Authors: T. Wuttipornpun, U. Wangrakdiskul, W. Songserm

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This paper aims to develop an algorithm of finite capacity material requirement planning (FCMRP) system for a multistage assembly flow shop. The developed FCMRP system has two main stages. The first stage is to allocate operations to the first and second priority work centers and also determine the sequence of the operations on each work center. The second stage is to determine the optimal start time of each operation by using a linear programming model. Real data from a factory is used to analyze and evaluate the effectiveness of the proposed FCMRP system and also to guarantee a practical solution to the user. There are five performance measures, namely, the total tardiness, the number of tardy orders, the total earliness, the number of early orders, and the average flow-time. The proposed FCMRP system offers an adjustable solution which is a compromised solution among the conflicting performance measures. The user can adjust the weight of each performance measure to obtain the desired performance. The result shows that the combination of FCMRP NP3 and EDD outperforms other combinations in term of overall performance index. The calculation time for the proposed FCMRP system is about 10 minutes which is practical for the planners of the factory.

Keywords: Material requirement planning, Finite capacity, Linear programming, Permutation, Application in industry.

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Authors: Pushkar Tripathi, Abhishek Sharma, G. N. Pillai, Indira Gupta

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This paper presents a new approach for the protection of Thyristor-Controlled Series Compensator (TCSC) line using Support Vector Machine (SVM). One SVM is trained for fault classification and another for section identification. This method use three phase current measurement that results in better speed and accuracy than other SVM based methods which used single phase current measurement. This makes it suitable for real-time protection. The method was tested on 10,000 data instances with a very wide variation in system conditions such as compensation level, source impedance, location of fault, fault inception angle, load angle at source bus and fault resistance. The proposed method requires only local current measurement.

Keywords: Fault Classification, Section Identification, Feature Selection, Support Vector Machine (SVM), Thyristor-Controlled Series Compensator (TCSC)

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Authors: Suwardo, Madzlan B. Napiah, Ibrahim B. Kamaruddin

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Stage bus operated in the mixed traffic might always meet many problems about low quality and reliability of services. The low quality and reliability of bus service can make the system not attractive and directly reduce the interest of using bus service. This paper presents the result of field investigation and analysis of on-time performance and service regularity of stage bus in mixed traffic. Data for analysis was collected from the field by on-board observation along the Ipoh-Lumut corridor in Perak, Malaysia. From analysis and discussion, it can be concluded that on-time performance and service regularity varies depend on station, typical day, time period, operation characteristics of bus and characteristics of traffic. The on-time performance and service regularity of stage bus in mixed traffic can be derived by using data collected by onboard survey. It is clear that on-time performance and service regularity of the existing stage bus system was low.

Keywords: mixed traffic, on-time performance, service regularity, stage bus

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Authors: Sidhartha Panda, N. P. Padhy

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The application of a Static Synchronous Series Compensator (SSSC) controller to improve the transient stability performance of a power system is thoroughly investigated in this paper. The design problem of SSSC controller is formulated as an optimization problem and Particle Swarm Optimization (PSO) Technique is employed to search for optimal controller parameters. By minimizing the time-domain based objective function, in which the deviation in the oscillatory rotor angle of the generator is involved; transient stability performance of the system is improved. The proposed controller is tested on a weakly connected power system subjected to different severe disturbances. The non-linear simulation results are presented to show the effectiveness of the proposed controller and its ability to provide efficient damping of low frequency oscillations. It is also observed that the proposed SSSC controller improves greatly the voltage profile of the system under severe disturbances.

Keywords: Particle swarm optimization, transient stability, power system oscillations, SSSC.

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Authors: Ghassan A. Abed, Mahamod Ismail, Kasmiran Jumari

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Long Term Evolution (LTE) is a 4G wireless broadband technology developed by the Third Generation Partnership Project (3GPP) release 8, and it's represent the competitiveness of Universal Mobile Telecommunications System (UMTS) for the next 10 years and beyond. The concepts for LTE systems have been introduced in 3GPP release 8, with objective of high-data-rate, low-latency and packet-optimized radio access technology. In this paper, performance of different TCP variants during LTE network investigated. The performance of TCP over LTE is affected mostly by the links of the wired network and total bandwidth available at the serving base station. This paper describes an NS-2 based simulation analysis of TCP-Vegas, TCP-Tahoe, TCPReno, TCP-Newreno, TCP-SACK, and TCP-FACK, with full modeling of all traffics of LTE system. The Evaluation of the network performance with all TCP variants is mainly based on throughput, average delay and lost packet. The analysis of TCP performance over LTE ensures that all TCP's have a similar throughput and the best performance return to TCP-Vegas than other variants.

Keywords: LTE; EUTRAN; 3GPPP, SAE; TCP Variants; NS-2

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Authors: Choulseung Hyun, Hunki Kwon, Jaeho Kim, Eujoon Byun, Jongmoo Choi, Donghee Lee, Sam H. Noh

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Most file systems overwrite modified file data and metadata in their original locations, while the Log-structured File System (LFS) dynamically relocates them to other locations. We design and implement the Evergreen file system that can select between overwriting or relocation for each block of a file or metadata. Therefore, the Evergreen file system can achieve superior write performance by sequentializing write requests (similar to LFS-style relocation) when space utilization is low and overwriting when utilization is high. Another challenging issue is identifying performance benefits of LFS-style relocation over overwriting on a newly introduced SSD (Solid State Drive) which has only Flash-memory chips and control circuits without mechanical parts. Our experimental results measured on a SSD show that relocation outperforms overwriting when space utilization is below 80% and vice versa.

Keywords: Evergreen File System, Overwrite, Relocation, Solid State Drive.

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Authors: Shabnam Ladan, M. S. Abrishamian

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In this paper we have developed a FDTD simulation code which can treat wave propagation of a monopole antenna in a metallic case which covers with PML, and performed a series of three dimensional FDTD simulations of electromagnetic wave propagation in this space .We also provide a measurement set up in antenna lab and fortunately the simulations and measurements show good agreement. According to simulation and measurement results, we confirmed that the computer program which had been written in FORTRAN, works correctly.

Keywords: FDTD, EMC, monopole antenna.

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Authors: El-Sadek H. Nour El-deen, K. Harby

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Energy saving and environment friendly applications are turning out to be one of the most important topics nowadays. In this work, a simulation analysis using TRNSYS software has been carried out to study the benefit of employing a solar adsorption cooling system under the climatic conditions of Al-Minya city, Egypt. A theoretical model was carried out on a two bed adsorption cooling system employing granular activated carbon-HFC-404A as working pair. Temporal and averaged history of solar collector, adsorbent beds, evaporator and condenser has been shown. System performance in terms of daily average cooling capacity and average coefficient of performance around the year has been investigated. The results showed that maximum yearly average coefficient of performance (COP) and cooling capacity are about 0.26 and 8 kW respectively. The maximum value of the both average cooling capacity and COP cyclic is directly proportional to the maximum solar radiation. The system performance was found to be increased with the average ambient temperature. Finally, the proposed solar powered adsorption cooling systems can be used effectively under Al-Minya climatic conditions.

Keywords: Adsorption, solar energy, environment, cooling, Egypt.

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Authors: L. Fridrichova, R. Knížek, V. Bajzík

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Drape is one of the important visual characteristics of the fabric. This paper is introducing an innovative method of measurement and evaluation of the drape shape of the fabric. The measuring principle is based on the possibility of multiple vertical strain of the fabric. This method more accurately simulates the real behavior of the fabric in the process of draping. The method is fully automated, so the sample can be measured by using any number of cycles in any time horizon. Using the present method of measurement, we are able to describe the viscoelastic behavior of the fabric.

Keywords: Drape, drape shape, automated drape meter.

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Authors: J. Becker, R. Arnold

Abstract:

The design of distribution logistics has a decisive impact on a company's logistics costs and performance. Hence, such solutions make an essential contribution to corporate success. This article describes a decision support system for analyzing the potential of distribution logistics in terms of logistics costs and performance. In contrast to previous procedures of business process re-engineering (BPR), this method maps distribution logistics holistically under variable distribution structures. Combined with qualitative measures the decision support system will contribute to a more efficient design of distribution logistics.

Keywords: Decision support system distribution logistics, potential analyses, supply chain management.

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Authors: Breda M. Kiernan, Stephen Beirne, Cormac Fay, Dermot Diamond

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An autonomous environmental monitoring system (Smart Landfill) has been constructed for the quantitative measurement of the components of landfill gas found at borehole wells at the perimeter of landfill sites. The main components of landfill gas are the greenhouse gases, methane and carbon dioxide and have been monitored in the range 0-5 % volume. This monitoring system has not only been tested in the laboratory but has been deployed in multiple field trials and the data collected successfully compared with on-site monitors. This success shows the potential of this system for application in environments where reliable gas monitoring is crucial.

Keywords: Environmental monitoring, greenhouse gas, landfill gas, sensor deployment

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Authors: Hossein Khademolhosseini, Mehdi Hosseinzadeh

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The residue number system (RNS), due to its properties, is used in applications in which high performance computation is needed. The carry free nature, which makes the arithmetic, carry bounded as well as the paralleling facility is the reason of its capability of high speed rendering. Since carry is not propagated between the moduli in this system, the performance is only restricted by the speed of the operations in each modulus. In this paper a novel method of number representation by use of redundancy is suggested in which {rn- 2,rn-1,rn} is the reference moduli set where r=2k+1 and k =1, 2,3,.. This method achieves fast computations and conversions and makes the circuits of them much simpler.

Keywords: Binary to RNS converter, Carry save adder, Computer arithmetic, Residue number system.

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Authors: M. B. Kime

Abstract:

Mass flow measurement is the basis of most technoeconomic formulations in the chemical industry. This calls for reliable and accurate detection of mass flow. Flow measurement laboratory experiments were conducted using various instruments. These consisted of orifice plates, various sized rotameters, wet gas meter and soap bubble meter. This work was aimed at evaluating appropriate operating conditions and accuracy of the aforementioned devices. The experimental data collected were compared to theoretical predictions from Bernoulli’s equation and calibration curves supplied by the instrument’s manufacturers. The results obtained showed that rotameters were more reliable for measuring high and low flow rates; while soap-bubble meters and wet-gas meters were found to be suitable for measuring low flow rates. The laboratory procedures and findings of the actual work can assist engineering students and professionals in conducting their flow measurement laboratory test work.

Keywords: Flow measurement, orifice plates, rotameters, wet gas meter, soap bubble meter.

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Authors: Fu E. Tang, Vun J. Ngu

Abstract:

The pollutant removal efficiency of the Intermittently Decanted Extended Aeration (IDEA) wastewater treatment system at Curtin University Sarawak Campus, and conventional activated sludge wastewater treatment system at a local resort, Resort A, is monitored. The influent and effluent characteristics are tested during wet and dry weather conditions, and peak and off peak periods. For the wastewater treatment systems at Curtin Sarawak and Resort A, during dry weather and peak season, it was found that the BOD5 concentration in the influent is 121.7mg/L and 80.0mg/L respectively, and in the effluent, 18.7mg/L and and 18.0mg/L respectively. Analysis of the performance of the IDEA treatment system showed that the operational costs can be minimized by 3%, by decreasing the number of operating cycles. As for the treatment system in Resort A, by utilizing a smaller capacity air blower, a saving of 12% could be made in the operational costs.

Keywords: Conventional Activated Sludge, IDEA, Performance Monitoring, Wastewater Treatment

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Authors: Summiya Moheuddin, Afzel Noore, Muhammad Choudhry

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This paper proposes a novel solution for optimizing the size and communication overhead of a distributed multiagent system without compromising the performance. The proposed approach addresses the challenges of scalability especially when the multiagent system is large. A modified spectral clustering technique is used to partition a large network into logically related clusters. Agents are assigned to monitor dedicated clusters rather than monitor each device or node. The proposed scalable multiagent system is implemented using JADE (Java Agent Development Environment) for a large power system. The performance of the proposed topologyindependent decentralized multiagent system and the scalable multiagent system is compared by comprehensively simulating different fault scenarios. The time taken for reconfiguration, the overall computational complexity, and the communication overhead incurred are computed. The results of these simulations show that the proposed scalable multiagent system uses fewer agents efficiently, makes faster decisions to reconfigure when a fault occurs, and incurs significantly less communication overhead.

Keywords: Multiagent system, scalable design, spectral clustering, reconfiguration.

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Authors: Sameh Frikha, Mohamed Salah Abid

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We investigate the performance of an integrated cascade (IC) refrigeration system which uses environment friendly zeotropic mixtures. Computational calculation has been carried out by varying pressure level at the evaporator and the condenser of the system. Effects of mass flow rate of the refrigerant on the coefficient of performance (COP) are presented. We show that the integrated cascade system produces ultra-low temperatures in the evaporator by using environment friendly zeotropic mixture.

Keywords: Coefficient of Performance, Environment friendly zeotropic mixture, Integrated cascade, Ultra low temperature, Vapor compression refrigeration cycles.

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Authors: Reza Sedaghati

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The use of Flexible AC Transmission System (FACTS) devices in a power system can potentially overcome limitations of the present mechanically controlled transmission system. Also, the advance of technology makes possible to include new energy storage devices in the electrical power system. The integration of Superconducting Magnetic Energy Storage (SMES) into Static Synchronous Compensator (STATCOM) can lead to increase their flexibility in improvement of power system dynamic behaviour by exchanging both active and reactive powers with power grids. This paper describes structure and behaviour of SMES, specifications and performance principles of the STATCOM/SMES compensator. Moreover, the benefits and effectiveness of integrated SMES with STATCOM in power systems is presented. Also, the performance of the STATCOM/SMES compensator is evaluated using an IEEE 3-bus system through the dynamic simulation by PSCAD/EMTDC software.

Keywords: STATCOM/SMES compensator, chopper, converter, energy storage system, power systems.

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Authors: Tlotlollo Sidwell Hlalele, Shengzhi Du

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High-voltage power transmission lines are the back bone of electrical power utilities. The stability and continuous monitoring of this critical infrastructure is pivotal. Nine-Sigma representing Eskom Holding SOC limited, South Africa has a major problem on proactive detection of fallen power lines and real time sagging measurement together with slipping of such conductors. The main objective of this research is to innovate RFID technology to solve this challenge. Various options and technologies such as GPS, PLC, image processing, MR sensors and etc., have been reviewed and draw backs were made. The potential of RFID to give precision measurement will be observed and presented. The future research will look at magnetic and electrical interference as well as corona effect on the technology.

Keywords: Precision Measurement, RFID and Sag.

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Authors: Sheng-Ming Huang, Nan-Chyuan Tsai, Chih-Che Lin, Chun-Chi Lin

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An innovative design for intelligent Chemical Mechanical Polishing (CMP) system is proposed and verified by experiments in this report. On-line measurement and real-time feedback are integrated to eliminate the shortcomings of traditional approaches, e.g., the batch-to-batch discrepancy of required polishing time, over consumption of chemical slurry, and non-uniformity across the wafer. The major advantage of the proposed method is that the finish of local surface roughness can be consistent, no matter where the inner-ring region or outer-ring region is concerned. Secondly, it is able to eliminate the Edge effect. Conventionally, the interfacial induced stress near the wafer edge is generally much higher than that near the wafer center. At last, by using the proposed intelligent chemical mechanical polishing strategy, the cost of the entire machining cycle can be much reduced while the quality of the finished goods certainly upgraded.

Keywords: Chemical Mechanical Polishing, Active Magnetic Actuator, On-Line Measurement.

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