Search results for: Seyed Hamid Mirmohammad Sadeghi
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 306

Search results for: Seyed Hamid Mirmohammad Sadeghi

276 Design and Fabrication of a Column-Climber Robot (Koala Robot)

Authors: Maziar Sadeghi, Amir Moradi

Abstract:

This paper proposes a robot able to climb Columns. This robot is not dependent on the diameter and material of the columns. Some climbing robots have been designed up to now but Koala robot was designed and fabricated for climbing columns exclusively. Simple kinematics of climbing in the nature inspired us to design this robot. We used two linear mechanisms to grip the column. The gripper consists of a DC motor and a power screw mechanism with a linear bushing as a guide. This mechanism provides enough force to grip the column. In addition we needed an actuator for climbing the column; hence, two pneumatic jacks were used. All the mechanical parts were designed according to the exerted forces and operational condition. The prototype can be simply installed and controlled on the column by an inexperienced operator. This robot is intended for inspection and surveillance of pipes in oil industries and power poles in electric industries.

Keywords: Robot, Column-climber, Gripping mechanism, Koala.

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275 Rarefactive and Compressive Solitons in Warm Dusty Plasma with Electrons and Nonthermal Ions

Authors: Hamid Reza Pakzad

Abstract:

Dust acoustic solitary waves are studied in warm dusty plasma containing negatively charged dusts, nonthermal ions and Boltzmann distributed electrons. Sagdeev pseudopotential method is used in order to investigate solitary wave solutions in the plasmas. The existence of compressive and rarefractive solitons is studied.

Keywords: Nonthermal, Soliton, Dust, Sagdeev potential

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274 Design a Biodegradable Hydrogel for Drug Delivery System

Authors: Mohammad Sadeghi, Behrouz Heidari, Korush Montazeri

Abstract:

In this article, we synthesize a novel chitosan -based superabsorbent hydrogel via graft copolymerization of mixtures acrylic acid (AA) and N-vinyl pyrollidon onto chitosan backbones. The polymerization reaction was carried out in an aqueous medium and in the presence of ammonium persulfate (APS) as an initiator and N,N'-methylene bisacrylamide (MBA) as a crosslinker.The hydrogel structures were confirmed by FTIR spectroscopy. The swelling behavior of these absorbent polymers was also investigated in various salt solutions. Results indicated that the swelling capacity decreased with an increase in the ionic strength of the swelling medium. Furthermore, the swelling of superabsorbing hydrogels was examined in solutions with pH values ranging between 1.0 and 13.0. It showed a reversible pH-responsive behavior at pHs 2.0 and 8.0. This on-off switching behavior makes the synthesized hydrogels as an excellent candidate for controlled delivery of bioactive agents.

Keywords: chitosan, acrylic acid, N-vinyl pyrollidon, hydrogel, Ibuprofen's drug delivery

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273 Rarefactive and Compressive Solitary Waves in Warm Plasma with Positrons and Nonthermal Electrons

Authors: Hamid Reza Pakzad

Abstract:

Ion-acoustic solitary waves in a plasma with nonthermal electrons, thermal positrons and warm ions are investigated using Sagdeev-s pseudopotential technique. We study the effects of non-thermal electrons and ion temperature on solitons and show both negative and positive potential waves are possible.

Keywords: Ion acoustic waves, Solitons, Nonlinear phenomena, Sagdeev potential

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272 Comparative Study of Sustainable Architecture in Stairway-like Ushtobin Village, Iran

Authors: Ahadollah Azami, Alireza Sadeghi, Zargham OstadiAsl, Hamed Pirjani, Milad Babaei

Abstract:

Stairway Ushtobin Village is one of the five villages with original and sustainable architecture in Northwest of Iran along the border of Armenia, which has been able to maintain its environment and sustainable ecosystem. Studying circulation, function and scale (grand, medium and minor) of space, ratio of full and empty spaces, number and height of stairs, ratio of compound volume to luxury spaces, openings, type of local masonry (stone, mud, wood) and form of covering elements have been carried out in four houses of this village comparatively as some samples in this article, and furthermore, this article analyzes that the architectural shapes and organic texture of the village meet the needs of cold and dry climate. Finally, some efficient plans are offered suiting the present needs of the village to have a sustainable architecture.

Keywords: Sustainable Architecture, Local Materials, Village Texture, Form, Skeleton

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271 Seismic Behavior of Steel Structure with Buckling- Restrained Braces

Authors: M. Reza Bagerzadeh Karimi, M. Ali Lotfollahi Yaghin, R. Mehdi Nezhad, V. Sadeghi, M. Aghabalaie

Abstract:

One of the main purposes of designing bucklingrestrained braces is the fact that the entire lateral load is wasted by the braces, the entire gravitational load is moved to the foundation through the beams, and the columns can be moved to the foundation. In other words, braces are designed for bearing lateral load. In the implementation of the structure, it should be noted that the implementation of various parts of the structure must be conducted in such a way that the buckling-restrained braces would not bear the gravitational load. Moreover, this type of brace has been investigated under impact loading, and the design goals of designing method (direct motion) are controlled under impact loading. The results of dynamic analysis are shown as the relocation charts of the floors and switch between the floors. Finally, the results are compared with each other.

Keywords: Buckling-Restrained Braced Frame (BRBF), energydissipating, ABAQUS, SAP2000, impact load.

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270 Contribution to Improving the DFIG Control Using a Multi-Level Inverter

Authors: Imane El Karaoui, Mohammed Maaroufi, Hamid Chaikhy

Abstract:

Doubly Fed Induction Generator (DFIG) is one of the most reliable wind generator. Major problem in wind power generation is to generate Sinusoidal signal with very low THD on variable speed caused by inverter two levels used. This paper presents a multi-level inverter whose objective is to reduce the THD and the dimensions of the output filter. This work proposes a three-level NPC-type inverter, the results simulation are presented demonstrating the efficiency of the proposed inverter.

Keywords: DFIG, multilevel inverter, NPC inverter , THD, Induction machine.

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269 Optimizing Voltage Parameter of Deep Brain Stimulation for Parkinsonian Patients by Modeling

Authors: M. Sadeghi, A.H. Jafari, S.M.P. Firoozabadi

Abstract:

Deep Brain Stimulation or DBS is the second solution for Parkinson's Disease. Its three parameters are: frequency, pulse width and voltage. They must be optimized to achieve successful treatment. Nowadays it is done clinically by neurologists and there is not certain numerical method to detect them. The aim of this research is to introduce simulation and modeling of Parkinson's Disease treatment as a computational procedure to select optimum voltage. We recorded finger tremor signals of some Parkinsonian patients under DBS treatment at constant frequency and pulse width but variable voltages; then, we adapted a new model to fit these data. The optimum voltages obtained by data fitting results were the same as neurologists- commented voltages, which means modeling can be used as an engineering method to select optimum stimulation voltages.

Keywords: modeling, Deep Brain Stimulation, Parkinson'sdisease, tremor.

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268 Grey Prediction Based Handoff Algorithm

Authors: Seyed Saeed Changiz Rezaei, Babak Hossein Khalaj

Abstract:

As the demand for higher capacity in a cellular environment increases, the cell size decreases. This fact makes the role of suitable handoff algorithms to reduce both number of handoffs and handoff delay more important. In this paper we show that applying the grey prediction technique for handoff leads to considerable decrease in handoff delay with using a small number of handoffs, compared with traditional hystersis based handoff algorithms.

Keywords: Cellular network, Grey prediction, Handoff.

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267 Assessment of the Energy Balance Method in the Case of Masonry Domes

Authors: M. M. Sadeghi, S. Vahdani

Abstract:

Masonry dome structures had been widely used for covering large spans in the past. The seismic assessment of these historical structures is very complicated due to the nonlinear behavior of the material, their rigidness, and special stability configuration. The assessment method based on energy balance concept, as well as the standard pushover analysis, is used to evaluate the effectiveness of these methods in the case of masonry dome structures. The Soltanieh dome building is used as an example to which two methods are applied. The performance points are given from superimposing the capacity, and demand curves in Acceleration Displacement Response Spectra (ADRS) and energy coordination are compared with the nonlinear time history analysis as the exact result. The results show a good agreement between the dynamic analysis and the energy balance method, but standard pushover method does not provide an acceptable estimation.

Keywords: Energy balance method, pushover analysis, time history analysis, masonry dome.

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266 A Novel FFT-Based Frequency Offset Estimator for OFDM Systems

Authors: Mahdi Masoumi, Mehrdad Ardebilipoor, Seyed Aidin Bassam

Abstract:

This paper proposes a novel frequency offset (FO) estimator for orthogonal frequency division multiplexing. Simplicity is most significant feature of this algorithm and can be repeated to achieve acceptable accuracy. Also fractional and integer part of FO is estimated jointly with use of the same algorithm. To do so, instead of using conventional algorithms that usually use correlation function, we use DFT of received signal. Therefore, complexity will be reduced and we can do synchronization procedure by the same hardware that is used to demodulate OFDM symbol. Finally, computer simulation shows that the accuracy of this method is better than other conventional methods.

Keywords: DFT, Estimator, Frequency Offset, IEEE802.11a, OFDM.

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265 Next Generation Networks and Their Relation with Ad-hoc Networks

Authors: Hamid Barati, Ali Movaghar, Ali Barati, Arash Azizi Mazreah , Ehsan Shahsavari Gogheri, Faranak Mohsenzadeh

Abstract:

The communication networks development and advancement during two last decades has been toward a single goal and that is gradual change from circuit-switched networks to packed switched ones. Today a lot of networks operates are trying to transform the public telephone networks to multipurpose packed switch. This new achievement is generally called "next generation networks". In fact, the next generation networks enable the operators to transfer every kind of services (sound, data and video) on a network. First, in this report the definition, characteristics and next generation networks services and then ad-hoc networks role in the next generation networks are studied.

Keywords: NGNs services, Ad-hoc Networks, NGN.

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264 The Economic Cost of Health and Safety in Work Places: An Approach on the Costs Calculating Model

Authors: Efat Lali Dastjerdi, Hassan Sadeghi Naeini, Hadi Sanjari

Abstract:

One of the important steps in a safety and risk management system is the economical evaluation of occupational accident and diseases costs in order to decrease accidents from reoccurring in the workplace. This study proposed a plausible method for calculating occupational accident costs and illnesses in work place. This method design for cost estimation takes into account both the personnel, organizational level as well as the community level especially intended for an Iranian work place. The research indicates that a using systematic method for calculating costs which also provides risk evaluation can help managers to plan correctly the investment in health and safety measures. Using this method is that not only is it comprehensive, easy and practical and could be applied in practice by a manager within a short period of time but it also shows the importance of accident costs as well as calculates the real cost of an accident and illnesses.

Keywords: ost calculating model, Economics of health and Safety.

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263 The Effects of RCA Clean Variables on Particle Removal Efficiency

Authors: Siti Kudnie Sahari, Jane Chai Hai Sing, Khairuddin Ab. Hamid

Abstract:

Shrunken patterning for integrated device manufacturing requires surface cleanliness and surface smoothness in wet chemical processing [1]. It is necessary to control all process parameters perfectly especially for the common cleaning technique RCA clean (SC-1 and SC-2) [2]. In this paper the characteristic and effect of surface preparation parameters are discussed. The properties of RCA wet chemical processing in silicon technology is based on processing time, temperature, concentration and megasonic power of SC-1 and QDR. An improvement of wafer surface preparation by the enhanced variables of the wet cleaning chemical process is proposed.

Keywords: RCA, SC-1, SC-2, QDR

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262 Extended Cubic B-spline Interpolation Method Applied to Linear Two-Point Boundary Value Problems

Authors: Nur Nadiah Abd Hamid, Ahmad Abd. Majid, Ahmad Izani Md. Ismail

Abstract:

Linear two-point boundary value problem of order two is solved using extended cubic B-spline interpolation method. There is one free parameters, λ, that control the tension of the solution curve. For some λ, this method produced better results than cubic B-spline interpolation method.

Keywords: two-point boundary value problem, B-spline, extendedcubic B-spline.

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261 pH-Responsiveness Properties of a Biodigradable Hydrogels Based on Carrageenan-g-poly(NaAA-co-NIPAM)

Authors: Mohammad Sadeghi, Behrouz Heidari, Korush Montazeri

Abstract:

A novel thermo-sensitive superabsorbent hydrogel with salt- and pH-responsiveness properties was obtained by grafting of mixtures of acrylic acid (AA) and N-isopropylacrylamide (NIPAM) monomers onto kappa-carrageenan, kC, using ammonium persulfate (APS) as a free radical initiator in the presence of methylene bisacrylamide (MBA) as a crosslinker. Infrared spectroscopy was carried out to confirm the chemical structure of the hydrogel. Moreover, morphology of the samples was examined by scanning electron microscopy (SEM). The effect of MBA concentration and AA/NIPAM weight ratio on the water absorbency capacity has been investigated. The swelling variations of hydrogels were explained according to swelling theory based on the hydrogel chemical structure. The hydrogels exhibited salt-sensitivity and cation exchange properties. The temperature- and pH-reversibility properties of the hydrogels make the intelligent polymers as good candidates for considering as potential carriers for bioactive agents, e.g. drugs.

Keywords: superabsorbent, carrageenan, acrylic acid, Nisopropylacrylamide, hydrogel, swelling

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260 Fuzzy Gauge Capability (Cg and Cgk) through Buckley Approach

Authors: Seyed Habib A. Rahmati, Mohsen Sadegh Amalnick

Abstract:

Different terms of the Statistical Process Control (SPC) has sketch in the fuzzy environment. However, Measurement System Analysis (MSA), as a main branch of the SPC, is rarely investigated in fuzzy area. This procedure assesses the suitability of the data to be used in later stages or decisions of the SPC. Therefore, this research focuses on some important measures of MSA and through a new method introduces the measures in fuzzy environment. In this method, which works based on Buckley approach, imprecision and vagueness nature of the real world measurement are considered simultaneously. To do so, fuzzy version of the gauge capability (Cg and Cgk) are introduced. The method is also explained through example clearly.

Keywords: SPC, MSA, gauge capability, Cg, Cgk.

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259 The Analysis of Photoconductive Semiconductor Switch Operation in the Frequency of 10 GHz

Authors: Morteza Fathipour, Seyed Nasrolah Anousheh, Kaveh Ghiafeh Davoudi, Vala Fathipour

Abstract:

A device analysis of the photoconductive semiconductor switch is carried out to investigate distribution of electric field and carrier concentrations as well as the current density distribution. The operation of this device was then investigated as a switch operating in X band. It is shown that despite the presence of symmetry geometry, switch current density of the on-state steady state mode is distributed asymmetrically throughout the device.

Keywords: Band X, Gallium-Arsenide, Mixed mode, PCSS, Photoconductivity.

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258 A Group Based Fuzzy MCDM for Selecting Knowledge Portal System

Authors: Amir Sanayei, Seyed Farid Mousavi, Catherine Asadi Shahmirzadi

Abstract:

Despite of many scholars and practitioners recognize the knowledge management implementation in an organizations but insufficient attention has been paid by researchers to select suitable knowledge portal system (KPS) selection. This study develops a Multi Criteria Decision making model based on the fuzzy VIKOR approach to help organizations in selecting KPS. The suitable portal is the critical influential factors on the success of knowledge management (KM) implementation in an organization.

Keywords: Knowledge management, Knowledge portal system, Fuzzy VIKOR.

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257 Synthesis of Analogue to Camptothecine

Authors: Abdulkareem Hamid, Adam Daïch

Abstract:

Camptothecin (CPT) is a cytotoxic quinoline alkaloid, which inhibits the DNA enzyme topoisomerase I (topo I). It was discovered in 1966 by M. E. Wall and M. C. Wani in systematic screening of natural products for anticancer drugs. It was isolated from the bark and stem of Camptotheca acuminata (Camptotheca, Happy tree), a tree native in China. CPT showed remarkable anticancer activity in preliminary clinical trials but also low solubility and (high) adverse drug reaction. Because of these disadvantages synthetic and medicinal chemists have developed numerous syntheses of Camptothecine [1][2][3] and various derivatives to increase the benefits of the chemical, with good results. In our method CPT analogues has be six steps starting from available material DL Malic acid.

Keywords: Camptothecine, synthesis, analogue.

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256 Genetic Content-Based MP3 Audio Watermarking in MDCT Domain

Authors: N. Moghadam, H. Sadeghi

Abstract:

In this paper a novel scheme for watermarking digital audio during its compression to MPEG-1 Layer III format is proposed. For this purpose we slightly modify some of the selected MDCT coefficients, which are used during MPEG audio compression procedure. Due to the possibility of modifying different MDCT coefficients, there will be different choices for embedding the watermark into audio data, considering robustness and transparency factors. Our proposed method uses a genetic algorithm to select the best coefficients to embed the watermark. This genetic selection is done according to the parameters that are extracted from the perceptual content of the audio to optimize the robustness and transparency of the watermark. On the other hand the watermark security is increased due to the random nature of the genetic selection. The information of the selected MDCT coefficients that carry the watermark bits, are saves in a database for future extraction of the watermark. The proposed method is suitable for online MP3 stores to pursue illegal copies of musical artworks. Experimental results show that the detection ratio of the watermarks at the bitrate of 128kbps remains above 90% while the inaudibility of the watermark is preserved.

Keywords: Content-Based Audio Watermarking, Genetic AudioWatermarking.

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255 Unconfined Strength of Nano Reactive Silica Sand Powder Concrete

Authors: Hossein Kabir, Mojtaba Sadeghi

Abstract:

Nowadays, high-strength concrete is an integral element of a variety of high-rise buildings. On the other hand, finding a suitable aggregate size distribution is a great concern; hence, the concrete mix proportion is presented that has no coarse aggregate, which still withstands enough desirable strength. Nano Reactive Silica sand powder concrete (NRSSPC) is a type of concrete with no coarse material in its own composition. In this concrete, the only aggregate found in the mix design is silica sand powder with a size less than 150 mm that is infinitesimally small regarding the normal concrete. The research aim is to find the compressive strength of this particular concrete under the applied different conditions of curing and consolidation to compare the approaches. In this study, the young concrete specimens were compacted with a pressing or vibrating process. It is worthwhile to mention that in order to show the influence of temperature in the curing process, the concrete specimen was cured either in 20 ⁰C lime water or autoclaved in 90 ⁰C oven.

Keywords: Nano reactive silica sand powder concrete, consolidation, compressive strength, normal curing, thermal accelerated curing.

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254 Backplane Serial Signaling and Protocol for Telecom Systems

Authors: Ali Poureslami, Hossein Borhanifar, Seyed Ali Alavian

Abstract:

In this paper, we implement a modern serial backplane platform for telecommunication inter-rack systems. For combination high reliability and low cost protocol property, we applied high level data link control (HDLC) protocol with low voltage differential signaling (LVDS) bus for card to card communicated over backplane. HDLC protocol is a high performance with several operation modes and is famous in telecommunication systems. LVDS bus is a high reliability with high immunity against electromagnetic interference (EMI) and noise.

Keywords: Backplane, BLVDS, HDLC, EMI, I2C, LCT, OSC, SFP, SNMP.

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253 The Relationship between Value-Added and Energy Consumption in Iran’s Industry Sector

Authors: Morteza Raei Dehaghi, Mojtaba Molaahmadi, Seyed Mohammad Mirhashemi

Abstract:

This study aimed to explore the relationship between energy consumption and value-added in Iran’s industry sector during the time period 1973-2011. Annual data related to energy consumption and value added in the industry sector were used. The results of the study revealed a positive relationship between energy consumption and value-added of the industry sector. Similarly, the results showed that there is one-way causality between energy consumption and value-added in the industry sector.

Keywords: Energy consumption, economic growth, industry sector.

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252 Using Metacognitive Strategies in Reading Comprehension by EFL Students

Authors: Simin Sadeghi-Saeb

Abstract:

Metacognitive strategies consistently play important roles in reading comprehension. The metacognitive strategies involve the active monitoring and consequent regulation and orchestration of the cognitive processes in relation to the cognitive objects or data on which they bear. In this paper, the effect of instruction in using metacognitive strategies on reading academic materials, type of metacognitive strategies were mostly used by college university students before and after the instruction and the level they use those strategies before and after the instruction were studied. For these aims, 50 female college students were chosen. Then, they were divided randomly into two groups, experimental and control groups. At first session, students in both groups took the standard TOFEL exam. After the pre-test had been administered, the instruction began. After treatment, a post-test was taken. It is useful to state that after pre-test and post-test the same questionnaire was handed to the students of experimental group. The results of this research show that the instruction of metacognitive strategies has positive effect on the students' scores in reading comprehension tests. Furthermore, it showed that before and after the instruction, the students' usage of metacognitive strategies changed. Also, it demonstrated that the instruction affected the students' level of metacognitive strategies' usage.

Keywords: EFL students, English reading comprehension, instruction, metacognitive strategies.

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251 A Chaotic Study on Tremor Behavior of Parkinsonian Patients under Deep Brain Stimulation

Authors: M. Sadeghi, A.H. Jafari, S.M.P. Firoozabadi

Abstract:

Deep Brain Stimulation or DBS is a surgical treatment for Parkinson-s Disease with three stimulation parameters: frequency, pulse width, and voltage. The parameters should be selected appropriately to achieve effective treatment. This selection now, performs clinically. The aim of this research is to study chaotic behavior of recorded tremor of patients under DBS in order to present a computational method to recognize stimulation optimum voltage. We obtained some chaotic features of tremor signal, and discovered embedding space of it has an attractor, and its largest Lyapunov exponent is positive, which show tremor signal has chaotic behavior, also we found out, in optimal voltage, entropy and embedding space variance of tremor signal have minimum values in comparison with other voltages. These differences can help neurologists recognize optimal voltage numerically, which leads to reduce patients' role and discomfort in optimizing stimulation parameters and to do treatment with high accuracy.

Keywords: Chaos, Deep Brain Stimulation, Parkinson's Disease, Stimulation Parameters, tremor.

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250 Distribution Centers Reliability Cost in Capacitated Facility Location Problem

Authors: Mehdi Seifbarghy, Sajjad Jalali, Seyed Habib A. Rahmati

Abstract:

Recently studies in area of supply chain network (SCN) have focused on the disruption issues in distribution systems. Also this paper extends the previous literature by providing a new biobjective model for cost minimization of designing a three echelon SCN across normal and failure scenarios with considering multi capacity option for manufacturers and distribution centers. Moreover, in order to solve the problem by means of LINGO software, novel model will be reformulated through a branch of LP-Metric method called Min-Max approach.

Keywords: Scenario programming, Distribution, Multi-echelon supply chain design, Reliable facility

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249 Induction of Expressive Rules using the Binary Coding Method

Authors: Seyed R Mousavi

Abstract:

In most rule-induction algorithms, the only operator used against nominal attributes is the equality operator =. In this paper, we first propose the use of the inequality operator, , in addition to the equality operator, to increase the expressiveness of induced rules. Then, we present a new method, Binary Coding, which can be used along with an arbitrary rule-induction algorithm to make use of the inequality operator without any need to change the algorithm. Experimental results suggest that the Binary Coding method is promising enough for further investigation, especially in cases where the minimum number of rules is desirable.

Keywords: Data mining, Inequality operator, Number of rules, Rule-induction.

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248 Using FEM for Prediction of Thermal Post-Buckling Behavior of Thin Plates During Welding Process

Authors: Amin Esmaeilzadeh, Mohammad Sadeghi, Farhad Kolahan

Abstract:

Arc welding is an important joining process widely used in many industrial applications including production of automobile, ships structures and metal tanks. In welding process, the moving electrode causes highly non-uniform temperature distribution that leads to residual stresses and different deviations, especially buckling distortions in thin plates. In order to control the deviations and increase the quality of welded plates, a fixture can be used as a practical and low cost method with high efficiency. In this study, a coupled thermo-mechanical finite element model is coded in the software ANSYS to simulate the behavior of thin plates located by a 3-2-1 positioning system during the welding process. Computational results are compared with recent similar works to validate the finite element models. The agreement between the result of proposed model and other reported data proves that finite element modeling can accurately predict the behavior of welded thin plates.

Keywords: Welding, thin plate, buckling distortion, fixture locators, finite element modelling.

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247 The Buffer Gas Influence Rate on Absolute Cu Atoms Density with regard to Deposition

Authors: S. Sobhanian, H. Naghshara, N. Sadeghi, S. Khorram

Abstract:

The absolute Cu atoms density in Cu(2S1/2ÔåÉ2P1/2) ground state has been measured by Resonance Optical Absorption (ROA) technique in a DC magnetron sputtering deposition with argon. We measured these densities under variety of operation conditions: pressure from 0.6 μbar to 14 μbar, input power from 10W to 200W and N2 mixture from 0% to 100%. For measuring the gas temperature, we used the simulation of N2 rotational spectra with a special computer code. The absolute number density of Cu atoms decreases with increasing the N2 percentage of buffer gas at any conditions of this work. But the deposition rate, is not decreased with the same manner. The deposition rate variation is very small and in the limit of quartz balance measuring equipment accuracy. So we conclude that decrease in the absolute number density of Cu atoms in magnetron plasma has not a big effect on deposition rate, because the diffusion of Cu atoms to the chamber volume and deviation of Cu atoms from direct path (towards the substrate) decreases with increasing of N2 percentage of buffer gas. This is because of the lower mass of N2 atoms compared to the argon ones.

Keywords: Deposition rate, Resonance Optical Absorption, Sputtering.

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