S. Sobhanian and H. Naghshara and N. Sadeghi and S. Khorram, The Buffer Gas Influence Rate on Absolute Cu Atoms Density with regard to Deposition. journal = {International Journal of Physical and Mathematical Sciences}, [online]. World Academy of Science, Engineering and Technology. February 2011, vol. 50(2). 104 - 106 [viewed 20 September 2024]. Available from: https://publications.waset.org/pdf/13895.