Search results for: Phase equilibria.

Authors: N. Z. Azlan, H. Yamaura

Abstract:

This paper presents the Function Approximation Technique (FAT) based adaptive impedance control for a robotic finger. The force based impedance control is developed so that the robotic finger tracks the desired force while following the reference position trajectory, under unknown environment position and uncertainties in finger parameters. The control strategy is divided into two phases, which are the free and contact phases. Force error feedback is utilized in updating the uncertain environment position during contact phase. Computer simulations results are presented to demonstrate the effectiveness of the proposed technique.

Keywords: Adaptive impedance control, force based impedance control, force control, Function Approximation Technique (FAT), unknown environment position.

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Authors: Muhammad Ridhuan Tony Lim Abdullah, Saedah Siraj

Abstract:

The learning society has currently transformed from 'wired society' to become 'mobile society' which is facilitated by wireless network. To suit to this new paradigm, m-learning was given birth and rapidly building its prospect to be included in the future curriculum. Research and studies on m-learning spruced up in numerous aspects but there is still scarcity in studies on curriculum design of m-learning. This study is a part of an ongoing bigger study probing into the m-learning curriculum for secondary schools. The paper reports on the first phase of the study which aims to probe into the needs of curriculum design for m-learning at the secondary school level and the researcher adopted the needs analysis method. Data accrued from responses on survey questionnaires based on Lickert-point scale were analyzed statistically. The findings from this preliminary study serve as a basis for m-learning curriculum development for secondary schools.

Keywords: curriculum design, e-learning, future curriculum, m-learning

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Authors: Bernd Kiefer, Abraham Gebru Tesfay, Dietrich Klakow

Abstract:

The motivation of our work is to detect different terrain types traversed by a robot based on acoustic data from the robot-terrain interaction. Different acoustic features and classifiers were investigated, such as Mel-frequency cepstral coefficient and Gamma-tone frequency cepstral coefficient for the feature extraction, and Gaussian mixture model and Feed forward neural network for the classification. We analyze the system’s performance by comparing our proposed techniques with some other features surveyed from distinct related works. We achieve precision and recall values between 87% and 100% per class, and an average accuracy at 95.2%. We also study the effect of varying audio chunk size in the application phase of the models and find only a mild impact on performance.

Keywords: Terrain classification, acoustic features, autonomous robots, feature extraction.

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Authors: Joabe Silva, Ginalber Serra

Abstract:

This paper proposes the analysis and design of robust fuzzy control to Stochastic Parametrics Uncertaint Linear systems. This system type to be controlled is partitioned into several linear sub-models, in terms of transfer function, forming a convex polytope, similar to LPV (Linear Parameters Varying) system. Once defined the linear sub-models of the plant, these are organized into fuzzy Takagi- Sugeno (TS) structure. From the Parallel Distributed Compensation (PDC) strategy, a mathematical formulation is defined in the frequency domain, based on the gain and phase margins specifications, to obtain robust PI sub-controllers in accordance to the Takagi- Sugeno fuzzy model of the plant. The main results of the paper are based on the robust stability conditions with the proposal of one Axiom and two Theorems.

Keywords: Fuzzy Systems; Robust Stability, Stochastic Control, Stochastic Process

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Authors: Wendong Yang, Changhai Wang, Valeria Arrighi

Abstract:

Low ink sintering temperature is desired for flexible electronics, as it would widen the application of the ink on temperature-sensitive substrates where the selection of silver precursor is very critical. In this paper, four types of organic silver precursors, silver carbonate, silver oxalate, silver tartrate and silver itaconate, were synthesized using an ion exchange method, firstly. Various characterization methods were employed to investigate their physical phase, chemical composition, morphologies and thermal decomposition behavior. It was found that silver oxalate had the ideal thermal property and showed the lowest decomposition temperature. An ink was then formulated by complexing the as-prepared silver oxalate with ethylenediamine in organic solvents. Results show that a favorable conductive film with a uniform surface structure consisting of silver nanoparticles and few voids could be produced from the ink at a sintering temperature of 150 °C.

Keywords: Conductive ink, electrical property, film, organic silver.

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Authors: O. Castellanos Díaz, F. Schoeggl, H. W. Yarranton, M. A. Satyro, T. M. Lovestead, T. J. Bruno

Abstract:

The composition, vapour pressure, and heat capacity of nine biodiesel fuels from different sources were measured. The vapour pressure of the biodiesel fuels is modeled assuming an ideal liquid phase of the fatty acid methyl esters constituting the fuel. New methodologies to calculate the vapour pressure and ideal gas and liquid heat capacities of the biodiesel fuel constituents are proposed. Two alternative optimization scenarios are evaluated: 1) vapour pressure only; 2) vapour pressure constrained with liquid heat capacity. Without physical constraints, significant errors in liquid heat capacity predictions were found whereas the constrained correlation accurately fit both vapour pressure and liquid heat capacity.

Keywords: Biodiesel fuels, Fatty acid methyl ester, Heat capacity, Modeling, Vapour pressure

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Authors: S. Rajabi, M. ArdebiliPoor, M. Shahabadi

Abstract:

In this paper we propose a method for modeling the correlation between the received signals by two or more antennas operating in a multipath environment. Considering the maximum excess delay in the channel being modeled, an elliptical region surrounding both transmitter and receiver antennas is produced. A number of scatterers are randomly distributed in this region and scatter the incoming waves. The amplitude and phase of incoming waves are computed and used to obtain statistical properties of the received signals. This model has the distinguishable advantage of being applicable for any configuration of antennas. Furthermore the common PDF (Probability Distribution Function) of received wave amplitudes for any pair of antennas can be calculated and used to produce statistical parameters of received signals.

Keywords: MIMO (Multiple Input Multiple Output), SIMO (Single Input Multiple Output), GBSBEM (Geometrically Based Single Bounce Elliptical Model).

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Authors: S. Selvaperumal, M. S. Sivagamasundari

Abstract:

In this paper, selective harmonic elimination pulse width modulation technique is employed to eliminate lower order harmonics like third by determination of solving non-linear equations. The cascaded H-bridge five level inverter is driven by the Peripheral Interface Controlled (PIC) Microcontroller 16F877A. The performance of single phase cascaded H-bridge five level inverter with relevant to harmonics and a variety of switches with solar cell as its input source is simulated by employing MATLAB/Simulink. A hardware model is developed to verify the performance of the developed system.

Keywords: Multilevel inverter, cascaded H-Bridge multilevel inverter, total harmonic distortion, selective harmonic elimination pulse width modulation, MATLAB.

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Authors: Dursun M., Koc F., Ozbay H.

Abstract:

In this study, a double-sided linear switched reluctance motor (LSRM) drive was investigated as an alternative actuator for vertical linear transportation applications such as a linear elevator door, hospital and subway doors which move linearly and where accurate position control and rapid response is requested. A prototype sliding elevator door that is focused on a home elevator with LSRMs is designed. The motor has 6/4 poles, 3 phases, 8A, 24V, 250 W and 250 N pull forces. Air gap between rotor and translator poles of the designed motor and phase coil-s ideal inductance profile are obtained in compliance with the geometric dimensions. Operation and switching sections as motor and generator has been determined from the inductance profile.

Keywords: Linear switched reluctance motor, sliding door, elevator door, linear motor design.

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Authors: Peng Lu, Branimir Radisavljevic, Martin Seeger, Daniel Over, Torsten Votteler, Bernardo Galletti

Abstract:

CO₂-based gas mixtures exhibit huge potential as the interruption medium for replacing SF₆ in high voltage switchgears. In this paper, the recovery characteristics of dielectric strength of CO₂-O₂ mixture in the post arc phase after the current zero are presented. As representative examples, the dielectric recovery curves under conditions of different gas filling pressures and short-circuit current amplitudes are presented. A series of dielectric recovery measurements suggests that the dielectric recovery rate is proportional to the mass flux of the blowing gas, and the dielectric strength recovers faster in the case of lower short circuit currents.

Keywords: CO2 mixture, high voltage circuit breakers, dielectric recovery rate, short-circuit current, mass flux.

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Authors: J. Kellner, A. Bumbová, D. Pluskal, A. Langerová, Z. Večeřa, P. Mikuška

Abstract:

The paper deals with the development of portable aerosol concentrator and its application for the determination of nitrites and nitrates. The device enables the continuous trapping of pollutants in the air. An extensive literature search has been elaborated which aims at the development of samplers and the possibilities of their application in the continuous determination of volatile organic compounds. The practical part of the paper is focused on the development of the portable aerosol concentrator. The device using the Aerosol Enrichment Unit has been experimentally verified and subsequently realized. It operates on the principle of equilibrium accumulation of pollutants from the gaseous phase using absorption liquid polydisperse aerosol. The device has been applied for monitoring nitrites and nitrates in the air. The chemiluminescence detector was used for detection; the achieved detection limit for nitrites was 28 ng/m3 and for nitrates 78 ng/m3.

Keywords: aerosol enrichment unit, air pollution, NO2, portableaerosol concentrator

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Authors: Nurazean Maarop, Noorjan Mohd Mustapha, Rasimah Yusoff, Roslina Ibrahim, Norziha Megat Mohd Zainuddin

Abstract:

The goal of this study is to identify success factors that could influence the ISMS self-implementation in government sector from qualitative perspective. This study is based on a case study in one of the Malaysian government agency. Semi-structured interviews involving five key informants were conducted to examine factors addressed in the conceptual framework. Subsequently, thematic analysis was executed to describe the influence of each factor on the success implementation of ISMS. The result of this study indicates that management commitment, implementer commitment and implementer competency are part of the success factors for ISMS self-implementation in Malaysian Government Sector.

Keywords: ISMS Success Factors, IT Project Management, IS Success, Information Security.

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Authors: Z.A. Jaffery, Vinay Kumar Chandna, Sunil Kumar Chaudhary

Abstract:

This paper present a MATLAB-SIMULINK model of a single phase 2.5 KVA, 240V RMS controlled PV VSI (Photovoltaic Voltage Source Inverter) inverter using IGBTs (Insulated Gate Bipolar Transistor). The behavior of output voltage, output current, and the total harmonic distortion (THD), with the variation in input dc blocking capacitor (Cdc), for linear and non-linear load has been analyzed. The values of Cdc as suggested by the other authors in their papers are not clearly defined and it poses difficulty in selecting the proper value. As the dc power stored in Cdc, (generally placed parallel with battery) is used as input to the VSI inverter. The simulation results shows the variation in the output voltage and current with different values of Cdc for linear and non-linear load connected at the output side of PV VSI inverter and suggest the selection of suitable value of Cdc.

Keywords: DC Blocking capacitor, IGBTs, PV VSI, THD.

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Authors: B. Tiseo, V. Quaranta, G. Bruno, R. Gardi, T. Watts, S. Dussy

Abstract:

This paper describes the qualification test campaign performed on the Demise Observation Capsule DOC-EQM as part of the Future Launch Preparatory Program FLPP3. The mechanical environment experienced during launch ascent and separation phase was first identified and then replicated in terms of sine, random and shock vibration. The loads identification is derived by selecting the worst possible case. Vibration and shock qualification test performed at CIRA Space Qualification laboratory is herein described. Mechanical fixtures’ design and validation, carried out by means of FEM, is also addressed due to its fundamental role in the vibrational test campaign. The Demise Observation Capsule (DOC) successfully passed the qualification test campaign. Functional test and resonance search have not been point any fault and damages of the capsule.

Keywords: Capsule, demise, DOC, launch environment, Re-Entry, qualification.

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Authors: Waluyo, Ngapuli I. Sinisuka, Suwarno, Maman A. Djauhari

Abstract:

This paper presents the experimental results of comparison between leakage currents and discharge currents. The leakage currents were obtained on polluted porcelain insulator. Whereas, the discharge currents were obtained on lightly artificial polluted porcelain specimen. The conducted measurements were leakage current or discharge current and applied voltage. The insulator or specimen was in a hermetically sealed chamber, and the current waveforms were analyzed using FFT. The result indicated that the leakage current (LC) on low RH condition the fifth harmonic would be visible, and followed by the seventh harmonic. The insulator had capacitive property. Otherwise, on 99% relative humidity, the fifth harmonic would also be visible, and the phase angle reached up to 12.2 degree. Whereas, on discharge current, the third harmonic would be visible, and followed by fifth harmonic. The third harmonic would increase as pressure reduced. On this condition, the specimen had a non-linear characteristics

Keywords: leakage current, discharge current, third harmonic, fifth harmonic, porcelain.

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Authors: S. Meikandasivam, D. Vijayakumar, Rajesh Kumar Nema, Shailendra Kumar Jain

Abstract:

This paper investigates the performance of the single TCSC and proposed split TCSC on transmission system where India’s first TCSC project is installed in Kanpur - Ballabhgarh (KB) line to ensure the fine tuning of line reactance by proposed split TCSC in place of existing KB TCSC. A three phase KB transmission system is developed in MATLAB/Simulink (SimPowerSystems) for

1. without any compensation,
2. with fixed capacitor (FC),
3. with FC + existing KB TCSC and
4. with FC + proposed split TCSC

The KB system is analyzed for a step variation of load and performance of the system is investigated with a closed loop reactance control method.

Keywords: Single TCSC, Split TCSC, TCSC Reactance characteristic curve, Power flow analysis, Sensitivity analysis.

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Authors: A. M. El-Zonkoly

Abstract:

In this paper, based on steady-state models of Flexible AC Transmission System (FACTS) devices, the sizing of static synchronous series compensator (SSSC) controllers in transmission network is formed as an optimization problem. The objective of this problem is to reduce the transmission losses in the network. The optimization problem is solved using particle swarm optimization (PSO) technique. The Newton-Raphson load flow algorithm is modified to consider the insertion of the SSSC devices in the network. A numerical example, illustrating the effectiveness of the proposed algorithm, is introduced. In addition, a novel model of a 3- phase voltage source converter (VSC) that is suitable for series connected FACTS a controller is introduced. The model is verified by simulation using Power System Blockset (PSB) and Simulink software.

Keywords: FACTS, Modeling, PSO, SSSC, Transmission lossreduction.

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Authors: Sánchez Acuña, Juan Camilo, Granados Gómez, Mildred Magaly, Navarrete Rodríguez, Luisa Fernanda

Abstract:

Nowadays, the main biofuels source production as bioethanol is food crops. This means a high competition between foods and energy production. For this reason, it is necessary to take into account the use of new raw materials friendly to the environment. The main objective of this paper is to evaluate the potential of the agro-industrial banana crop residues in the production of bioethanol. A factorial design of 2⁴ was used, the design has variables such as pH, time and concentration of hydrolysis, another variable is the time of fermentation that is of 7 or 15 days. In the hydrolysis phase, the pH is acidic (H₂SO₄) or basic (NaOH), the time is 30 or 15 minutes and the concentration is 0.1 or 0.5 M. It was observed that basic media, low concentrations, fermentation, and higher pretreatment times produced better performance in terms of biofuel obtained.

Keywords: Bioethanol, biofuels, banana waste, hydrolysis.

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Authors: Horng-Yuan Wu, Chin-Yuan Hsu, Tsair-Fwu Lee

Abstract:

A novel three-phase active power filter (APF) circuit with photovoltaic (PV) system to improve the quality of service and to reduce the capacity of energy storage capacitor is presented. The energy balance concept and sampling technique were used to simplify the calculation algorithm for the required utility source current and to control the voltage of the energy storage capacitor. The feasibility was verified by using the Pspice simulations and experiments. When the APF mode was used during non-operational period, not only the utilization rate, power factor and power quality could be improved, but also the capacity of energy storage capacitor could sparing. As the results, the advantages of the APF circuit are simplicity of control circuits, low cost, and good transient response.

Keywords: active power filter, sampling, energy-storagecapacitor, harmonic current, energy balance.

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Authors: M. Kalamani, S. Valarmathy, M. Krishnamoorthi

Abstract:

In this paper, Fuzzy C-Means clustering with Expectation Maximization-Gaussian Mixture Model based hybrid modeling algorithm is proposed for Continuous Tamil Speech Recognition. The speech sentences from various speakers are used for training and testing phase and objective measures are between the proposed and existing Continuous Speech Recognition algorithms. From the simulated results, it is observed that the proposed algorithm improves the recognition accuracy and F-measure up to 3% as compared to that of the existing algorithms for the speech signal from various speakers. In addition, it reduces the Word Error Rate, Error Rate and Error up to 4% as compared to that of the existing algorithms. In all aspects, the proposed hybrid modeling for Tamil speech recognition provides the significant improvements for speechto- text conversion in various applications.

Keywords: Speech Segmentation, Feature Extraction, Clustering, HMM, EM-GMM, CSR.

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Authors: M. El-Alej, D. Mba, T. Yan, M. Elforgani

Abstract:

This paper presents an experimental investigation using Acoustic Emission (AE) technology to monitor sand transportation in multiphase flow. The investigations were undertaken on three-phase (air-water-sand) flow in a horizontal pipe where the superficial gas velocity (VSG) had a range of between 0.2msˉ¹ to 2.0msˉ¹ and superficial liquid velocity (VSL) had a range of between 0.2msˉ¹ to 1.0msˉ¹. The experimental findings clearly show a correlation exists between AE energy levels, sand concentration, superficial gas velocity (VSG), and superficial liquid velocity (VSL).

Keywords: Acoustic Emission (AE), multiphase flow, sand monitoring, sand minimum transport condition (MTC), condition monitoring.

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Authors: Nina Robson, Kenneth John Faller II, Vishalkumar Ahir, Arthur Ricardo Deps Miguel Ferreira, John Buchanan, Amarnath Banerjee

Abstract:

This paper describes the development of a virtual-reality system ARWED, which will be used in physical rehabilitation of patients with reduced upper extremity mobility to increase limb Active Range of Motion (AROM). The ARWED system performs a symmetric reflection and real-time mapping of the patient’s healthy limb on to their most affected limb, tapping into the mirror neuron system and facilitating the initial learning phase. Using the ARWED, future experiments will test the extension of the action-observation priming effect linked to the mirror-neuron system on healthy subjects and then stroke patients.

Keywords: Physical rehabilitation, mirror neuron, virtual reality, stroke therapy.

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Authors: M. N. Moschakis, V. V. Dafopoulos, I. G. Andritsos, E. S. Karapidakis, J. M. Prousalidis

Abstract:

This paper deals with the effect of a power transformer’s vector group on the basic voltage sag characteristics during unbalanced faults at a meshed or radial power network. Specifically, the propagation of voltage sags through a power transformer is studied with advanced short-circuit analysis. A smart method to incorporate this effect on analytical mathematical expressions is proposed. Based on this methodology, the positive effect of transformers of certain vector groups on the mitigation of the expected number of voltage sags per year (sag frequency) at the terminals of critical industrial customers can be estimated.

Keywords: Balanced and unbalanced faults, industrial design, phase shift, power quality, power systems, voltage sags (or dips).

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Authors: M. Nazmunnahar, J. J. Del Val, A. Vimmrova, J. González

Abstract:

We report the microstructural and magnetic properties of Ni50Mn39Sn11 and Ni50Mn36Sn14 ribbon Heusler alloys. Experimental results were obtained by differential scanning calorymetry, X-ray diffraction and vibrating sample magnetometry techniques. The Ni-Mn-Sn system undergoes a martensitic structural transformation in a wide temperature range. For example, for Ni50Mn39Sn11 the start and finish temperatures of the martensitic and austenite phase transformation for ribbon alloy were Ms=336K, Mf=328K, As=335K and Af=343K whereas no structural transformation is observed for Ni50Mn36Sn14 alloys. Magnetic measurements show the typical ferromagnetic behavior with Curie temperature 207 K at low applied field of 50 Oe. The complex behavior exhibited by these Heusler alloys should be ascribed to the strong coupling between magnetism and structure, being their magnetic behavior determined by the distance between Mn atoms.

Keywords: Structural transformation, as-cast ribbon, Heusler alloys, Magnetic properties.

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Authors: Christopher Deekia Nwimae, Nigel Simms, Liyun Lao

Abstract:

Erosion in a pipe bends caused by particles is a major concern in the oil and gas fields and might cause breakdown to production equipment. This work investigates the effect of sand particle transport in an elbow using computational fluid dynamics (CFD) approach. Two-way coupled Euler-Lagrange and discrete phase model is employed to calculate the air/solid particle flow in the elbow. Generic erosion model in Ansys fluent and three particle rebound models are used to predict the erosion rate on the 90° elbows. The model result is compared with experimental data from the open literature validating the CFD-based predictions which reveals that due to the sand particles impinging on the wall of the elbow at high velocity, a point on the pipe elbow were observed to have started turning red due to velocity increase and the maximum erosion locations occur at 48°.

Keywords: Erosion, prediction, elbow, computational fluid dynamics, CFD.

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Authors: Şebnem Ertaş

Abstract:

“Architecture” is one component of sustainable cultural tourism. The sustainability of architecture is possible through preservation and restoration activities. In Turkey, which has an important place in the world’s cultural heritage, several studies focused on the sustainability of the cultural heritage were done in terms of the principles of “preserve-use-sustain”. Within the scope of this study, a methodology will be proposed in order to obtain the development of different scenarios supporting sustainable tourism. Sille is an ancient village located on the Spice Road and Silk Road dating back to the Ottoman and Seljuk eras. However, in recent years it is protected as an archeological site. In the “Alternative Project Phase”, the streets and buildings which bring dynamism to trade are determined; among these, 10 major buildings in Hacı Ali Ağa Street are studied.

Keywords: Tourism, cultural tourism, sustainability of architecture, interior design, Sille.

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Authors: Quy Dang Nguyen, Reza Nakhaie Jazar

Abstract:

The paper investigates vibration dynamics of tire-road separation for a quarter-car model; this separation model is developed to be close to the real situation considering the tire is able to separate from the ground plane. A set of piecewise linear mathematical models is developed and matches the in-contact and no-contact states to be considered as mother models for further investigations. The bound dynamics are numerically simulated in the time response and phase portraits. The separation analysis may determine which values of suspension parameters can delay and avoid the no-contact phenomenon, which results in improving ride comfort and eliminating the potentially dangerous oscillation. Finally, model verification is carried out in the MSC-ADAMS environment.

Keywords: Quarter-car vibrations, tire-road separation, separation analysis, separation dynamics, ride comfort, ADAMS validation.

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Authors: H. Wakily, M. Mehrali, H. S. C. Metselaar

Abstract:

Homogeneous composites of alumina and zirconia with a small amount of MgO (<1 wt %) were prepared by colloidal filtration. The object of using ZrO2 (15wt %) was to provide zirconia toughened alumina (ZTA). Suspensions of alumina and Zirconia with various solid loadings and various concentrations of Dolapix CE64 as surfactant were studied. The stability of these suspensions was investigated using rheological measurements. The optimum amount of using Dolapix was 0.8wt% for ZTA containing MgO suspension which gave low apparent viscosity in basic area (100 mPa s at shear rate of 50 s-1). The satisfactory mixtures were made into sample pallets using colloidal filtration. The process was completed with pressureless sintering in suitable temperature. Phase, grain size and qualitative compositional analysis were done using X-ray diffraction (XRD) and scanning electron microscopy (SEM) images. ZTA containing 0.05 wt% MgO shows the lowest grain size for alumina around 0.5 μm. Densification studies show that near full densities (>99%) were obtained for ZTA ceramic containing 0.05 wt% MgO in 1500 °C.

Keywords: Colloidal filtration, Dolapix, MgO, Zirconiatoughened alumina.

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Authors: Nan Jiang, Jian Wang

Abstract:

Random Oracle Model (ROM) is an effective method for measuring the practical security of cryptograph. In this paper, we try to use it into information hiding system (IHS). Because IHS has its own properties, the ROM must be modified if it is used into IHS. Firstly, we fully discuss why and how to modify each part of ROM respectively. The main changes include: 1) Divide the attacks that IHS may be suffered into two phases and divide the attacks of each phase into several kinds. 2) Distinguish Oracles and Black-boxes clearly. 3) Define Oracle and four Black-boxes that IHS used. 4) Propose the formalized adversary model. And 5) Give the definition of judge. Secondly, based on ROM of IHS, the security against known original cover attack (KOCA-KOCA-security) is defined. Then, we give an actual information hiding scheme and prove that it is KOCA-KOCA-secure. Finally, we conclude the paper and propose the open problems of further research.

Keywords: Attack, Information Hiding, Provable Security, Random Oracle Model.

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Authors: K. Abbas, R. Ahmad, I. A. Khan, S. Saleem, U. Ikhlaq

Abstract:

Nitriding of p-type Si samples by pulsed DC glow discharge is carried out for different Ar concentrations (30% to 90%) in nitrogen-argon plasma whereas the other parameters like pressure (2 mbar), treatment time (4 hr) and power (175 W) are kept constant. The phase identification, crystal structure, crystallinity, chemical composition, surface morphology and topography of the nitrided layer are studied using X-ray diffraction (XRD), Fourier transform infra-red spectroscopy (FTIR), optical microscopy (OM), scanning electron microscopy (SEM) and atomic force microscopy (AFM) respectively. The XRD patterns reveal the development of different diffraction planes of Si₃N₄ confirming the formation of polycrystalline layer. FTIR spectrum confirms the formation of bond between Si and N. Results reveal that addition of Ar into N₂ plasma plays an important role to enhance the production of active species which facilitate the nitrogen diffusion.

Keywords: Crystallinity, glow discharge, nitriding, sputtering.

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