Search results for: Standard deviation
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 1848

Search results for: Standard deviation

1038 Fuzzy Based Environmental System Approach for Impact Assessment - Case Studies

Authors: Marius Pislaru, Alexandru F. Trandabat

Abstract:

Environmental studies have expanded dramatically all over the world in the past few years. Nowadays businesses interact with society and the environment in ways that put their mark on both sides. Efforts improving human standard living, through the control of nature and the development of new products, have also resulted in contamination of the environment. Consequently companies play an important role in environmental sustainability of a region or country. Therefore we can say that a company's sustainable development is strictly dependent on the environment. This article presents a fuzzy model to evaluate a company's environmental impact. Article illustrates an example of the automotive industry in order to prove the usefulness of using such a model.

Keywords: fuzzy approach, environmental impact assessment, sustainability

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1037 Generalized Stokes’ Problems for an Incompressible Couple Stress Fluid

Authors: M.Devakar, T.K.V.Iyengar

Abstract:

In this paper, we investigate the generalized Stokes’ problems for an incompressible couple stress fluid. Analytical solution of the governing equations is obtained in Laplace transform domain for each problem. A standard numerical inversion technique is used to invert the Laplace transform of the velocity in each case. The effect of various material parameters on velocity is discussed and the results are presented through graphs. It is observed that, the results are in tune with the observation of V.K.Stokes in connection with the variation of velocity in the flow between two parallel plates when the top one is moving with constant velocity and the bottom one is at rest.

Keywords: Couple stress fluid, Generalized Stokes’ problems, Laplace transform, Numerical inversion

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1036 Packaging and Interconnection Technologies of Power Devices, Challenges and Future Trends

Authors: Raed A. Amro

Abstract:

Standard packaging and interconnection technologies of power devices have difficulties meeting the increasing thermal demands of new application fields of power electronics devices. Main restrictions are the decreasing reliability of bond-wires and solder layers with increasing junction temperature. In the last few years intensive efforts have been invested in developing new packaging and interconnection solutions which may open a path to future application of power devices. In this paper, the main failure mechanisms of power devices are described and principle of new packaging and interconnection concepts and their power cycling reliability are presented.

Keywords: Power electronics devices, Reliability, Power Cycling, Low-temperature joining technique (LTJT)

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1035 Delay-Distribution-Dependent Stability Criteria for BAM Neural Networks with Time-Varying Delays

Authors: J.H. Park, S. Lakshmanan, H.Y. Jung, S.M. Lee

Abstract:

This paper is concerned with the delay-distributiondependent stability criteria for bidirectional associative memory (BAM) neural networks with time-varying delays. Based on the Lyapunov-Krasovskii functional and stochastic analysis approach, a delay-probability-distribution-dependent sufficient condition is derived to achieve the globally asymptotically mean square stable of the considered BAM neural networks. The criteria are formulated in terms of a set of linear matrix inequalities (LMIs), which can be checked efficiently by use of some standard numerical packages. Finally, a numerical example and its simulation is given to demonstrate the usefulness and effectiveness of the proposed results.

Keywords: BAM neural networks, Probabilistic time-varying delays, Stability criteria.

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1034 Embedded Singly Diagonally Implicit Runge-Kutta –Nystrom Method Order 5(4) for the Integration of Special Second Order ODEs

Authors: Fudziah Ismail

Abstract:

In this paper a new embedded Singly Diagonally Implicit Runge-Kutta Nystrom fourth order in fifth order method for solving special second order initial value problems is derived. A standard set of test problems are tested upon and comparisons on the numerical results are made when the same set of test problems are reduced to first order systems and solved using the existing embedded diagonally implicit Runge-Kutta method. The results suggests the superiority of the new method.

Keywords: Runge-Kutta Nystrom, Special second orderproblems.

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1033 Development of a Quantitative Material Wastage Management Plan for Effective Waste Reduction in the Building Construction Industry

Authors: Kwok Tak Kit

Abstract:

Combating climate change is becoming a hot topic in various sectors. Building construction and infrastructure sectors contributed a significant proportion of waste and greenhouse gas (GHG) emissions in the environment of different countries and cities. However, there is little research on the micro-level of waste management, “building construction material wastage management,” and fewer reviews about regulatory control in the building construction sector. This paper focuses on the potentialities and importance of material wastage management and reviews the deficiencies of the current standard to take into account the reduction of material wastage in a systematic and quantitative approach.

Keywords: Quantitative measurement, material wastage management plan, waste management, uncalculated waste, circular economy.

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1032 Some Computational Results on MPI Parallel Implementation of Dense Simplex Method

Authors: El-Said Badr, Mahmoud Moussa, Konstantinos Paparrizos, Nikolaos Samaras, Angelo Sifaleras

Abstract:

There are two major variants of the Simplex Algorithm: the revised method and the standard, or tableau method. Today, all serious implementations are based on the revised method because it is more efficient for sparse linear programming problems. Moreover, there are a number of applications that lead to dense linear problems so our aim in this paper is to present some computational results on parallel implementation of dense Simplex Method. Our implementation is implemented on a SMP cluster using C programming language and the Message Passing Interface MPI. Preliminary computational results on randomly generated dense linear programs support our results.

Keywords: Linear Programming, MPI, Parallel Implementation, Simplex Algorithm.

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1031 Simulation of Surge Protection for a Direct Current Circuit

Authors: Pedro Luis Ferrer Penalver, Edmundo da Silva Braga

Abstract:

In this paper, the performance of a simple surge protection for a direct current circuit was simulated. The protection circuit was developed from modified electric macro models of a gas discharge tube and a transient voltage suppressor diode. Moreover, a combination wave generator circuit was used as source of energy surges. The simulations showed that the circuit presented ensures immunity corresponding with test level IV of the IEC 61000-4-5:2014 international standard. The developed circuit can be modified to meet the requirements of any other equipment to be protected. Similarly, the parameters of the combination wave generator can be changed to provide different surge amplitudes.

Keywords: Combination wave generator, IEC 61000-4-5, Pspice simulation, surge protection.

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1030 MP-SMC-I Method for Slip Suppression of Electric Vehicles under Braking

Authors: Tohru Kawabe

Abstract:

In this paper, a new SMC (Sliding Mode Control) method with MP (Model Predictive Control) integral action for the slip suppression of EV (Electric Vehicle) under braking is proposed. The proposed method introduce the integral term with standard SMC gain , where the integral gain is optimized for each control period by the MPC algorithms. The aim of this method is to improve the safety and the stability of EVs under braking by controlling the wheel slip ratio. There also include numerical simulation results to demonstrate the effectiveness of the method.

Keywords: Sliding Mode Control, Model Predictive Control, Integral Action, Electric Vehicle, Slip suppression.

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1029 Interrelationships between Physicochemical Water Pollution Indicators: A Case Study of River Pandu

Authors: Sunita Verma , Divya Tiwari, Ajay Verma

Abstract:

Water samples were collected from river Pandu at six stations where human and animal activities were high. Composite samples were analyzed for dissolved oxygen (DO), biochemical oxygen demand (BOD), chemical oxygen demand (COD) , pH values during dry and wet seasons as well as the harmattan period. The total data points were used to establish relationships between the parameters and data were also subjected to statistical analysis and expressed as mean ± standard error of mean (SEM) at a level of significance of p<0.05. Regression analysis was carried out to establish relationships if any between studied parameters and relationships in form of scatter plots were obtained between DO/BOD, COD/DO, BOD/COD, COD/pH, BOD/pH and DO/pH. The high to moderate correlation coefficient observed, R2 ranged from 0.68 to 0.15 between these parameters.

Keywords: BOD, DO, COD, pH, Regression analysis.

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1028 The Necessity of Optimized Management on Surface Water Sources of Zayanderood Basin

Authors: A. Gandomkar, K. Fouladi

Abstract:

One of the efficient factors in comprehensive development of an area is to provide water sources and on the other hand the appropriate management of them. Population growth and nourishment security for such a population necessitate the achievement of constant development besides the reforming of traditional management in order to increase the profit of sources; In this case, the constant exploitation of sources for the next generations will be considered in this program. The achievement of this development without the consideration and possibility of water development will be too difficult. Zayanderood basin with 41500 areas in square kilometers contains 7 sub-basins and 20 units of hydrologic. In this basin area, from the entire environment descending, just a small part will enter into the river currents and the rest will be out of efficient usage by various ways. The most important surface current of this basin is Zayanderood River with 403 kilometers length which is originated from east slopes of Zagros mount and after draining of this basin area it will enter into Gaavkhooni pond. The existence of various sources and consumptions of water in Zayanderood basin, water transfer of the other basin areas into this basin, of course the contradiction between the upper and lower beneficiaries, the existence of worthwhile natural ecosystems such as Gaavkhooni swamp in this basin area and finally, the drought condition and lack of water in this area all necessitate the existence of comprehensive management of water sources in this central basin area of Iran as this method is a kind of management which considers the development and the management of water sources as an equilibrant way to increase the economical and social benefits. In this study, it is tried to survey the network of surface water sources of basin in upper and lower sections; at the most, according to the difficulties and deficiencies of an efficient management of water sources in this basin area, besides the difficulties of water draining and the destructive phenomenon of flood-water, the appropriate guidelines according to the region conditions are presented in order to prevent the deviation of water in upper sections and development of regions in lower sections of Zayanderood dam.

Keywords: Zayanderood Basin, Efficient Management, Hydrology Climate.

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1027 Effect of Isfahan Refinery, Power Plant and Petrochemical on Borkhar District Soil

Authors: A. Gandomkar

Abstract:

This study aimed to evaluate regional soil Borkhar of the metals Lead has been made. In this field study fires visits to the regions. The limit of this study located in the East refineries, petrochemical and power plant to 20 km was selected. The 41 soil samples from depths of 0 to 10 cm in area and were randomized. Soil samples were transported to the laboratory and by air was dry and passed through 2-mil thickness sieve. In the laboratory of physical and chemical characteristics and concentrations of total absorption was measured. The results showed that the amount of lead in soil in many parts of the range higher than the standard limit. Survey maps show that the lead spatial distribution of the region does not special pattern.

Keywords: Soil Pollution, Heavy Metals, Borkhar District, Soil Sampling.

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1026 Reducing Power in Error Correcting Code using Genetic Algorithm

Authors: Heesung Lee, Joonkyung Sung, Euntai Kim

Abstract:

This paper proposes a method which reduces power consumption in single-error correcting, double error-detecting checker circuits that perform memory error correction code. Power is minimized with little or no impact on area and delay, using the degrees of freedom in selecting the parity check matrix of the error correcting codes. The genetic algorithm is employed to solve the non linear power optimization problem. The method is applied to two commonly used SEC-DED codes: standard Hamming and odd column weight Hsiao codes. Experiments were performed to show the performance of the proposed method.

Keywords: Error correcting codes, genetic algorithm, non-linearpower optimization, Hamming code, Hsiao code.

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1025 Position Vector of a Partially Null Curve Derived from a Vector Differential Equation

Authors: Süha Yılmaz, Emin Özyılmaz, Melih Turgut, Şuur Nizamoğlu

Abstract:

In this paper, position vector of a partially null unit speed curve with respect to standard frame of Minkowski space-time is studied. First, it is proven that position vector of every partially null unit speed curve satisfies a vector differential equation of fourth order. In terms of solution of the differential equation, position vector of a partially null unit speed curve is expressed.

Keywords: Frenet Equations, Partially Null Curves, Minkowski Space-time, Vector Differential Equation.

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1024 iPAD as a Communication Tool for Disabled Seniors: A Case Study

Authors: Vojtěch Gybas, Libor Klubal, Kateřina Kostolányová

Abstract:

This case study responds to the current trends in ICT. Mobile Touch iPads can provide very good assistance to disabled seniors. The intuitive tablet environment, the possibility of the formation environment and its portability, has a very positive effect on the use of particular communication. For comparison, using a conventional PC/notebook, word processor, keyboard and computer mouse compared to the iPad and selected applications. The results of this case study show that the use of mobile touch devices iPad for seniors with mental retardation is a great benefit. These devices do not require high demands on graphomotorics like a standard PC devices.

Keywords: ICT, iPad, handicapped seniors, communication, computer, notebook, applications, text editor.

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1023 Problems of Innovative Economy: Forming of«Innovative Society» And Innovative Receptivity

Authors: Zhanna Mingaleva, Kseniy Balkova

Abstract:

Today many countries have the ambitious purposes of long-term and continuous development: constant growth of competitiveness, maintenance of a high standard of living of the population, leadership in the world market. One of the best possible ways of achievement of these purposes is a transition of the countries to innovative economy. The paper presents the analyses of problems of forming of innovative receptivity to innovations and creation of «innovative society». Creation of an innovative culture in a society and increase of the level of prestige of innovative activity are the best ways of developing of innovative processes. The base of the analysis is a comparing of Russia and different developed countries according to the level of some indictors of innovative activity.1

Keywords: innovative activity, innovative development ofeconomy, innovative receptivity, «innovative society»

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1022 Optimization of Acid Treatments by Assessing Diversion Strategies in Carbonate and Sandstone Formations

Authors: Ragi Poyyara, Vijaya Patnana, Mohammed Alam

Abstract:

When acid is pumped into damaged reservoirs for damage removal/stimulation, distorted inflow of acid into the formation occurs caused by acid preferentially traveling into highly permeable regions over low permeable regions, or (in general) into the path of least resistance. This can lead to poor zonal coverage and hence warrants diversion to carry out an effective placement of acid. Diversion is desirably a reversible technique of temporarily reducing the permeability of high perm zones, thereby forcing the acid into lower perm zones. The uniqueness of each reservoir can pose several challenges to engineers attempting to devise optimum and effective diversion strategies. Diversion techniques include mechanical placement and/or chemical diversion of treatment fluids, further sub-classified into ball sealers, bridge plugs, packers, particulate diverters, viscous gels, crosslinked gels, relative permeability modifiers (RPMs), foams, and/or the use of placement techniques, such as coiled tubing (CT) and the maximum pressure difference and injection rate (MAPDIR) methodology. It is not always realized that the effectiveness of diverters greatly depends on reservoir properties, such as formation type, temperature, reservoir permeability, heterogeneity, and physical well characteristics (e.g., completion type, well deviation, length of treatment interval, multiple intervals, etc.). This paper reviews the mechanisms by which each variety of diverter functions and discusses the effect of various reservoir properties on the efficiency of diversion techniques. Guidelines are recommended to help enhance productivity from zones of interest by choosing the best methods of diversion while pumping an optimized amount of treatment fluid. The success of an overall acid treatment often depends on the effectiveness of the diverting agents.

Keywords: Acid treatment, carbonate, diversion, sandstone.

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1021 A Numerical Study on Rear-spoiler of Passenger Vehicle

Authors: Xu-xia Hu, Eric T. T. Wong

Abstract:

The simulation of external aerodynamics is one of the most challenging and important automotive CFD applications. With the rapid developments of digital computers, CFD is used as a practical tool in modern fluid dynamics research. It integrates fluid mechanics disciplines, mathematics and computer science. In this study, two different types of simulations were made, one for the flow around a simplified high speed passenger car with a rear-spoiler and the other for the flow without a rear-spoiler. The standard k-ε model is selected to numerically simulate the external flow field of the simplified Camry model with or without a rear-spoiler. Through an analysis of the simulation results, a new rear spoiler is designed and it shows a mild reduction of the vehicle aerodynamics drag. This leads to less vehicle fuel consumption on the road.

Keywords: CFD, vehicle rear-spoiler design.

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1020 Delay and Energy Consumption Analysis of Conventional SRAM

Authors: Arash Azizi-Mazreah, Mohammad T. Manzuri Shalmani, Hamid Barati, Ali Barati

Abstract:

The energy consumption and delay in read/write operation of conventional SRAM is investigated analytically as well as by simulation. Explicit analytical expressions for the energy consumption and delay in read and write operation as a function of device parameters and supply voltage are derived. The expressions are useful in predicting the effect of parameter changes on the energy consumption and speed as well as in optimizing the design of conventional SRAM. HSPICE simulation in standard 0.25μm CMOS technology confirms precision of analytical expressions derived from this paper.

Keywords: Read energy consumption, write energy consumption, read delay, write delay.

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1019 Study on Applying Fuzzy AHP and GRA in Selection of Agent Construction Enterprise

Authors: Shirong Li, Huan Yan

Abstract:

To help the client to select a competent agent construction enterprise (ACE), this study aims to investigate the selection standards by using the Fuzzy Analytic Hierarchy Process (FAHP) and build an evaluation mathematical model with Grey Relational Analysis (GRA). According to the outputs of literature review, four orderly levels are established within the model, taking the consideration of various agent construction models in practice. Then, the process of applying FAHP and GRA is discussed in detailed. Finally, through a case study, this paper illustrates how to apply these methods in getting the weights of each standard and the final assessment result.

Keywords: agent construction enterprise, agent constructionmodel, fuzzy analytic hierarchy process, grey relational analysis

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1018 SPH Method used for Flow Predictions at a Turgo Impulse Turbine: Comparison with Fluent

Authors: Phoevos K. Koukouvinis, John S. Anagnostopoulos, Dimitris E. Papantonis

Abstract:

This work is an attempt to use the standard Smoothed Particle Hydrodynamics methodology for the simulation of the complex unsteady, free-surface flow in a rotating Turgo impulse water turbine. A comparison of two different geometries was conducted. The SPH method due to its mesh-less nature is capable of capturing the flow features appearing in the turbine, without diffusion at the water/air interface. Furthermore results are compared with a commercial CFD package (Fluent®) and the SPH algorithm proves to be capable of providing similar results, in much less time than the mesh based CFD program. A parametric study was also performed regarding the turbine inlet angle.

Keywords: Smoothed Particle Hydrodynamics, Mesh-lessmethods, Impulse turbines, Turgo turbine.

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1017 Overhead Estimation over Capacity of Mobile WiMAX

Authors: Saeed AL-Rashdy, Qing Guo

Abstract:

The IEEE802.16 standard which has emerged as Broadband Wireless Access (BWA) technology, promises to deliver high data rate over large areas to a large number of subscribers in the near future. This paper analyze the effect of overheads over capacity of downlink (DL) of orthogonal frequency division multiple access (OFDMA)–based on the IEEE802.16e mobile WiMAX system with and without overheads. The analysis focuses in particular on the impact of Adaptive Modulation and Coding (AMC) as well as deriving an algorithm to determine the maximum numbers of subscribers that each specific WiMAX sector may support. An analytical study of the WiMAX propagation channel by using Cost- 231 Hata Model is presented. Numerical results and discussion estimated by using Matlab to simulate the algorithm for different multi-users parameters.

Keywords: BWA, mobile WiMAX, capacity, AMC , overheads.

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1016 Low Computational Image Compression Scheme based on Absolute Moment Block Truncation Coding

Authors: K.Somasundaram, I.Kaspar Raj

Abstract:

In this paper we have proposed three and two stage still gray scale image compressor based on BTC. In our schemes, we have employed a combination of four techniques to reduce the bit rate. They are quad tree segmentation, bit plane omission, bit plane coding using 32 visual patterns and interpolative bit plane coding. The experimental results show that the proposed schemes achieve an average bit rate of 0.46 bits per pixel (bpp) for standard gray scale images with an average PSNR value of 30.25, which is better than the results from the exiting similar methods based on BTC.

Keywords: Bit plane, Block Truncation Coding, Image compression, lossy compression, quad tree segmentation

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1015 Using Data Mining Techniques for Estimating Minimum, Maximum and Average Daily Temperature Values

Authors: S. Kotsiantis, A. Kostoulas, S. Lykoudis, A. Argiriou, K. Menagias

Abstract:

Estimates of temperature values at a specific time of day, from daytime and daily profiles, are needed for a number of environmental, ecological, agricultural and technical applications, ranging from natural hazards assessments, crop growth forecasting to design of solar energy systems. The scope of this research is to investigate the efficiency of data mining techniques in estimating minimum, maximum and mean temperature values. For this reason, a number of experiments have been conducted with well-known regression algorithms using temperature data from the city of Patras in Greece. The performance of these algorithms has been evaluated using standard statistical indicators, such as Correlation Coefficient, Root Mean Squared Error, etc.

Keywords: regression algorithms, supervised machine learning.

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1014 A Real-Time Signal Processing Technique for MIDI Generation

Authors: Farshad Arvin, Shyamala Doraisamy

Abstract:

This paper presents a new hardware interface using a microcontroller which processes audio music signals to standard MIDI data. A technique for processing music signals by extracting note parameters from music signals is described. An algorithm to convert the voice samples for real-time processing without complex calculations is proposed. A high frequency microcontroller as the main processor is deployed to execute the outlined algorithm. The MIDI data generated is transmitted using the EIA-232 protocol. The analyses of data generated show the feasibility of using microcontrollers for real-time MIDI generation hardware interface.

Keywords: Signal processing, MIDI, Microcontroller, EIA-232.

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1013 Trust Enhanced Dynamic Source Routing Protocol for Adhoc Networks

Authors: N. Bhalaji, A. R. Sivaramkrishnan, Sinchan Banerjee, V. Sundar, A. Shanmugam

Abstract:

Nodes in mobile Ad Hoc Network (MANET) do not rely on a central infrastructure but relay packets originated by other nodes. Mobile ad hoc networks can work properly only if the participating nodes collaborate in routing and forwarding. For individual nodes it might be advantageous not to collaborate, though. In this conceptual paper we propose a new approach based on relationship among the nodes which makes them to cooperate in an Adhoc environment. The trust unit is used to calculate the trust values of each node in the network. The calculated trust values are being used by the relationship estimator to determine the relationship status of nodes. The proposed enhanced protocol was compared with the standard DSR protocol and the results are analyzed using the network simulator-2.

Keywords: Reliable Routing, DSR, Grudger, Adhoc network.

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1012 A 3.125Gb/s Clock and Data Recovery Circuit Using 1/4-Rate Technique

Authors: Il-Do Jeong, Hang-Geun Jeong

Abstract:

This paper describes the design and fabrication of a clock and data recovery circuit (CDR). We propose a new clock and data recovery which is based on a 1/4-rate frequency detector (QRFD). The proposed frequency detector helps reduce the VCO frequency and is thus advantageous for high speed application. The proposed frequency detector can achieve low jitter operation and extend the pull-in range without using the reference clock. The proposed CDR was implemented using a 1/4-rate bang-bang type phase detector (PD) and a ring voltage controlled oscillator (VCO). The CDR circuit has been fabricated in a standard 0.18 CMOS technology. It occupies an active area of 1 x 1 and consumes 90 mW from a single 1.8V supply.

Keywords: Clock and data recovery, 1/4-rate frequency detector, 1/4-rate phase detector.

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1011 Wave Vortex Parameters as an Indicator of Breaking Intensity

Authors: B. Robertson, K. Hall

Abstract:

The study of the geometric shape of the plunging wave enclosed vortices as a possible indicator for the breaking intensity of ocean waves has been ongoing for almost 50 years with limited success. This paper investigates the validity of using the vortex ratio and vortex angle as methods of predicting breaking intensity. Previously published works on vortex parameters, based on regular wave flume results or solitary wave theory, present contradictory results and conclusions. Through the first complete analysis of field collected irregular wave breaking vortex parameters it is illustrated that the vortex ratio and vortex angle cannot be accurately predicted using standard breaking wave characteristics and hence are not suggested as a possible indicator for breaking intensity.

Keywords: Breaking Wave Measurement, Wave Vortex Parameters, Analytical Techniques, Ocean Remote Sensing.

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1010 Forecasting the Volatility of Geophysical Time Series with Stochastic Volatility Models

Authors: Maria C. Mariani, Md Al Masum Bhuiyan, Osei K. Tweneboah, Hector G. Huizar

Abstract:

This work is devoted to the study of modeling geophysical time series. A stochastic technique with time-varying parameters is used to forecast the volatility of data arising in geophysics. In this study, the volatility is defined as a logarithmic first-order autoregressive process. We observe that the inclusion of log-volatility into the time-varying parameter estimation significantly improves forecasting which is facilitated via maximum likelihood estimation. This allows us to conclude that the estimation algorithm for the corresponding one-step-ahead suggested volatility (with ±2 standard prediction errors) is very feasible since it possesses good convergence properties.

Keywords: Augmented Dickey Fuller Test, geophysical time series, maximum likelihood estimation, stochastic volatility model.

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1009 A Novel Method for Areal Surface Roughness Measurement

Authors: Romuald Synak, Wlodzimierz Lipinski, Marcin Pawelczak

Abstract:

An area-integrating method that uses the technique of total integrated light scatter for evaluating the root mean square height of the surface Sq has been presented in the paper. It is based on the measurement of the scatter power using a flat photodiode integrator rather than an optical sphere or a hemisphere. By this means, one can obtain much less expensive and smaller instruments than traditional ones. Thanks to this, they could find their application for surface control purposes, particularly in small and medium size enterprises. A description of the functioning of the measuring unit as well as the impact caused by different factors on its properties is presented first. Next, results of measurements of the Sq values performed for optical, silicon and metal samples have been shown. It has been also proven that they are in a good agreement with the results obtained using the Ulbricht sphere instrument.

Keywords: ISO 25178 Standard, scatterometry, surface metrology, surface roughness

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