Search results for: Sulfur recovery unit

Authors: Ehab N. Alkhanak, Salimah Mokhtar

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The main aim of this paper is to present the research findings on the solution of centralized Web-Services for students by adopting a framework and a prototype for Service Oriented Architecture (SOA) Web-Services. The current situation of students- Web-based application services has been identified and proposed an effective SOA to increase the operational efficiency of Web-Services for them it was necessary to identify the challenges in delivering a SOA technology to increase operational efficiency of Web-Services. Moreover, the SOA is an emerging concept, used for delivering efficient student SOA Web-Services. Therefore, service reusability from SOA Web-Services is provided and logically divided services into smaller services to increase reusability and modularity. In this case each service is a modular unit by itself and interoperability services.

Keywords: Services Oriented Architecture (SOA), Web-based Application services, and Web-Services.

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Authors: Özge Alptoğa, Nuray Uçar, Nilgün Karatepe Yavuz, Ayşen Önen

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Sulfur dioxide (SO₂) is a very toxic air pollutant gas and it causes the greenhouse effect, photochemical smog, and acid rain, which threaten human health severely. Thus, the capture of SO₂ gas is very important for the environment. Graphene which is two-dimensional material has excellent mechanical, chemical, thermal properties, and many application areas such as energy storage devices, gas adsorption, sensing devices, and optical electronics. Further, graphene oxide (GO) is examined as a good adsorbent because of its important features such as functional groups (epoxy, carboxyl and hydroxyl) on the surface and layered structure. The SO₂ adsorption properties of the fibers are usually investigated on carbon fibers. In this study, potential adsorption capacity of GO fibers was researched. GO dispersion was first obtained with Hummers’ method from graphite, and then GO fibers were obtained via wet spinning process. These fibers were converted into a disc shape, dried, and then subjected to SO₂ gas adsorption test. The SO₂ gas adsorption capacity of GO fiber discs was investigated in the fields of utilization of different coagulation baths and reduction by hydrazine hydrate. As coagulation baths, single and triple baths were used. In single bath, only ethanol and CaCl₂ (calcium chloride) salt were added. In triple bath, each bath has a different concentration of water/ethanol and CaCl₂ salt, and the disc obtained from triple bath has been called as reference disk. The fibers which were produced with single bath were flexible and rough, and the analyses show that they had higher SO₂ adsorption capacity than triple bath fibers (reference disk). However, the reduction process did not increase the adsorption capacity, because the SEM images showed that the layers and uniform structure in the fiber form were damaged, and reduction decreased the functional groups which SO₂ will be attached. Scanning Electron Microscopy (SEM), Fourier Transform Infrared Spectroscopy (FTIR), X-Ray Diffraction (XRD) analyzes were performed on the fibers and discs, and the effects on the results were interpreted. In the future applications of the study, it is aimed that subjects such as pH and additives will be examined.

Keywords: Coagulation bath, graphene oxide fiber, reduction, SO2 gas adsorption.

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Authors: Babak H. Tabrizi, Seyed Farid Ghaderi

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Concurrent planning of project scheduling and material ordering has been increasingly addressed within last decades as an approach to improve the project execution costs. Therefore, we have taken the problem into consideration in this paper, aiming to maximize schedules quality robustness, in addition to minimize the relevant costs. In this regard, a bi-objective mathematical model is developed to formulate the problem. Moreover, it is possible to utilize the all-unit discount for materials purchasing. The problem is then solved by the E-constraint method, and the Pareto front is obtained for a variety of robustness values. The applicability and efficiency of the proposed model is tested by different numerical instances, finally.

Keywords: E-constraint method, material ordering, project management, project scheduling.

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Authors: Nur Ilyani Ramli, Mansour Youseffi, Peter Widdop

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This paper presents a low cost design of heart beat monitoring device using reflectance mode PhotoPlethysmography (PPG). PPG is known for its simple construction, ease of use and cost effectiveness and can provide information about the changes in cardiac activity as well as aid in earlier non-invasive diagnostics. The proposed device is divided into three phases. First is the detection of pulses through the fingertip. The signal is then passed to the signal processing unit for the purpose of amplification, filtering and digitizing. Finally the heart rate is calculated and displayed on the computer using parallel port interface. The paper is concluded with prototyping of the device followed by verification procedure of the heartbeat signal obtained in laboratory setting.

Keywords: Reflectance mode PPG, Heart beat detection, Circuitdesign, PCB design

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Authors: Samia Boucherkha, Mohamed Benmohamed

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In this paper we investigate the watermarking authentication when applied to medical imagery field. We first give an overview of watermarking technology by paying attention to fragile watermarking since it is the usual scheme for authentication.We then analyze the requirements for image authentication and integrity in medical imagery, and we show finally that invertible schemes are the best suited for this particular field. A well known authentication method is studied. This technique is then adapted here for interleaving patient information and message authentication code with medical images in a reversible manner, that is using lossless compression. The resulting scheme enables on a side the exact recovery of the original image that can be unambiguously authenticated, and on the other side, the patient information to be saved or transmitted in a confidential way. To ensure greater security the patient information is encrypted before being embedded into images.

Keywords: Medical Imaging, Invertible Watermarking, Authentication, Integrity.

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Authors: M. J. Kao, S.F. Chang, C.C. Chen, C.G. Kuo

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This paper aims to fabricated high quality anodic aluminum oxide (AAO) film by anodization method. AAO pore size, pore density, and film thickness can be controlled in 10~500 nm, 108~1011 pore．cm-2, and 1~100 μm. AAO volume and surface area can be computed based on structural parameters such as thickness, pore size, pore density, and sample size. Base on the thetorical calculation, AAO has 100 μm thickness with 15 nm, 60 nm, and 500 nm pore diameters AAO surface areas are 1225.2 cm2, 3204.4 cm2, and 549.7 cm2, respectively. The large unit surface area which is useful for adsorption application. When AAO adsorbed pH indictor of bromphenol blue presented a sensitive pH detection of solution change. This testing method can further be used for the precise measurement of biotechnology, convenience measurement of industrial engineering.

Keywords: AAO, Pore, Surface area, Adsorption, Indicator

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Authors: A. Giwa, S. M. Jung, W. Fang, J. Kong, S. W. Hasan

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MnO₂ nanowires were developed as filtration media for wastewater treatment that uniquely combines several advantages. The resulting material demonstrated strong capability to remove the pollution of heavy metal ions and organic contents in water. In addition, the manufacture process of such material is practical and economical. In this work, MnO₂ nanowires were integrated with the state-of-art bio-electrochemical system for wastewater treatment, to overcome problems currently encountered with organic, inorganic, heavy metal, and microbe removal, and to minimize the unit footprint (land/space occupation) at low cost. Results showed that coupling the bio-electrochemical with MnO₂ resulted in very encouraging results with higher removal efficiencies of such pollutants.

Keywords: Bio-electrochemical, nanowires, wastewater, treatment.

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Authors: M. Castellano, G. Mastronardi, A. Aprile, G. Tarricone

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Text Mining is an important step of Knowledge Discovery process. It is used to extract hidden information from notstructured o semi-structured data. This aspect is fundamental because much of the Web information is semi-structured due to the nested structure of HTML code, much of the Web information is linked, much of the Web information is redundant. Web Text Mining helps whole knowledge mining process to mining, extraction and integration of useful data, information and knowledge from Web page contents. In this paper, we present a Web Text Mining process able to discover knowledge in a distributed and heterogeneous multiorganization environment. The Web Text Mining process is based on flexible architecture and is implemented by four steps able to examine web content and to extract useful hidden information through mining techniques. Our Web Text Mining prototype starts from the recovery of Web job offers in which, through a Text Mining process, useful information for fast classification of the same are drawn out, these information are, essentially, job offer place and skills.

Keywords: Web text mining, flexible architecture, knowledgediscovery.

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Authors: Ji Young Song, Soo Jung Hu, Hyunjin Joo, Joung Boon Hwang, Mi Ok Kim, Shin Jung Kang, Dae Hyun Cho

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Multi-residue analysis method for penicillins was developed and validated in bovine muscle, chicken, milk, and flatfish. Detection was based on liquid chromatography tandem mass spectrometry (LC/MS/MS). The developed method was validated for specificity, precision, recovery, and linearity. The analytes were extracted with 80% acetonitrile and clean-up by a single reversed-phase solid-phase extraction step. Six penicillins presented recoveries higher than 76% with the exception of Amoxicillin (59.7%). Relative standard deviations (RSDs) were not more than 10%. LOQs values ranged from 0.1 and to 4.5 ug/kg. The method was applied to 128 real samples. Benzylpenicillin was detected in 15 samples and Cloxacillin was detected in 7 samples. Oxacillin was detected in 2 samples. But the detected levels were under the MRL levels for penicillins in samples.

Keywords: Penicillins, livestock product, Multi-residue analysis, LC/MS/MS

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Authors: Vahid Rostami, Omid sojodishijani , Saeed Ebrahimijam, Ali MohsenizanjaniNejad

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This paper is described one of the intelligent control method in Autonomous systems, which is called fuzzy control to correct the three wheel omnidirectional robot movement while it make mistake to catch the target. Fuzzy logic is especially advantageous for problems that can not be easily represented by mathematical modeling because data is either unavailable, incomplete or the process is too complex. Such systems can be easily up grated by adding new rules to improve performance or add new features. In many cases , fuzzy control can be used to improve existing traditional controller systems by adding an extra layer of intelligence to the current control method. The fuzzy controller designed here is more accurate and flexible than the traditional controllers. The project is done at MRL middle size soccer robot team.

Keywords: Robocup , omnidirectional , fuzzy control, soccer robot , intelligent control.

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Authors: Y. Bentoutou

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On-board Error Detection and Correction (EDAC) devices aim to secure data transmitted between the central processing unit (CPU) of a satellite onboard computer and its local memory. This paper presents a comparison of the performance of four low complexity EDAC techniques for application in Random Access Memories (RAMs) on-board small satellites. The performance of a newly proposed EDAC architecture is measured and compared with three different EDAC strategies, using the same FPGA technology. A statistical analysis of single-event upset (SEU) and multiple-bit upset (MBU) activity in commercial memories onboard Alsat-1 is given for a period of 8 years

Keywords: Error Detection and Correction; On-board computer; small satellite missions

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Authors: Sima Sh. Alian, Abdul Aziz Omar, Ali F. Alta'ee, Irzie Hani

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In this work, the precipitation of asphaltene from a Malaysian light oil reservoir was studies. A series of experiments were designed and carried out to examine the effect of CO2 injection on asphaltene precipitation. Different pressures of injections were used in Dynamic flooding experiment in order to investigate the effect of pressure versus injection pore volume of CO2. These dynamic displacement tests simulate reservoir condition. Results show that by increasing the pore volume of injected gas asphaltene precipitation will increases, also rise in injection pressure causes less precipitation. Sandstone core plug was used to represent reservoir formation during displacement test; therefore it made it possible to study the effect of present of asphaltene on formation. It is found out that the precipitated asphaltene can reduce permeability and porosity which is not favorable during oil production.

Keywords: Asphaltene, asphaltene precipitation, enhanced oil recovery.

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Authors: Alò Roberta, Bottiglione Francesco, Mantriota Giacomo

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The efficiency of the actuation system of exoskeletons and active orthoses for lower limbs is a significant aspect of the design of such devices because it affects their efficacy. The F-IVT is an innovative actuation system to power artificial knee joint with energy recovery capabilities. Its key and non-conventional elements are a flywheel that acts as a mechanical energy storage system, and an Infinitely Variable Transmission (IVT). The design of the F-IVT can be optimized for a certain walking condition, resulting in a heavy reduction of both the electric energy consumption and of the electric peak power. In this work, by means of simulations of level ground walking at different speeds, it is demonstrated that the F-IVT is still an advantageous actuator which permits to save energy consumption and to downsize the electric motor even when it does not work in nominal conditions.

Keywords: Active orthoses, actuators, lower extremity exoskeletons, knee joint.

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Authors: Manu Krishnan, Phil Jacoby

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In this paper, we discuss the paradigm shift in bank capital from the “gone concern" to the “going concern" mindset. We then propose a methodology for pricing a product of this shift called Contingent Capital Notes (“CoCos"). The Merton Model can determine a price for credit risk by using the firm-s equity value as a call option on those assets. Our pricing methodology for CoCos also uses the credit spread implied by the Merton Model in a subsequent derivative form created by John Hull et al . Here, a market implied asset volatility is calculated by using observed market CDS spreads. This implied asset volatility is then used to estimate the probability of triggering a predetermined “contingency event" given the distanceto- trigger (DTT). The paper then investigates the effect of varying DTTs and recovery assumptions on the CoCo yield. We conclude with an investment rationale.

Keywords: CoCo, Contingent capital, Bank Capital, Tier1 Capital

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Authors: Muhammad Sheikh Sadi, D. G. Myers, Cesar Ortega Sanchez

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This paper proposes the use of metrics in design space exploration that highlight where in the structure of the model and at what point in the behaviour, prevention is needed against transient faults. Previous approaches to tackle transient faults focused on recovery after detection. Almost no research has been directed towards preventive measures. But in real-time systems, hard deadlines are performance requirements that absolutely must be met and a missed deadline constitutes an erroneous action and a possible system failure. This paper proposes the use of metrics to assess the system design to flag where transient faults may have significant impact. These tools then allow the design to be changed to minimize that impact, and they also flag where particular design techniques – such as coding of communications or memories – need to be applied in later stages of design.

Keywords: Criticality, Metrics, Real-Time Systems, Transient Faults.

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Authors: Dimitrios J. Dimitriou, Maria F. Sartzetaki

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Air Transport links markets and individuals, making regions more competitive and promoting social and economic development. The assessment of social contribution is the key objective of this paper, focusing on the definition of the components of social dimension and welfare metrics in the national scale. According to a top-down approach, the key dimensions that affect the social welfare are presented. Conventional wisdom is to provide estimations on added value to social issues caused by the air transport development and present the methodology framework for measuring the contribution of transport development in social value chain. Greece is the case study of this paper, providing results from the contribution of air transport infrastructures in national welfare. The application key findings are essential for managers and decision makers to support actions and plans towards economic recovery of an economy presenting strong seasonal characteristics (because of tourism) and suffering from recession.

Keywords: Air transport, social dimension, social coherence, resilient business development, socioeconomic impact.

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Authors: M. V. Sudhamani, C. R. Venugopal

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This paper deals with the application for contentbased image retrieval to extract color feature from natural images stored in the image database by segmenting the image through clustering. We employ a class of nonparametric techniques in which the data points are regarded as samples from an unknown probability density. Explicit computation of the density is avoided by using the mean shift procedure, a robust clustering technique, which does not require prior knowledge of the number of clusters, and does not constrain the shape of the clusters. A non-parametric technique for the recovery of significant image features is presented and segmentation module is developed using the mean shift algorithm to segment each image. In these algorithms, the only user set parameter is the resolution of the analysis and either gray level or color images are accepted as inputs. Extensive experimental results illustrate excellent performance.

Keywords: Segmentation, Clustering, Image Retrieval, Features.

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Authors: S.M. Al-Salem, P. Lettieri

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Thermo-chemical treatment (TCT) such as pyrolysis is getting recognized as a valid route for (i) materials and valuable products and petrochemicals recovery; (ii) waste recycling; and (iii) elemental characterization. Pyrolysis is also receiving renewed attention for its operational, economical and environmental advantages. In this study, samples of polyethylene terephthalate (PET) and polystyrene (PS) were pyrolysed in a microthermobalance reactor (using a thermogravimetric-TGA setup). Both polymers were prepared and conditioned prior to experimentation. The main objective was to determine the kinetic parameters of the depolymerization reactions that occur within the thermal degradation process. Overall kinetic rate constants (ko) and activation energies (Eo) were determined using the general kinetics theory (GKT) method previously used by a number of authors. Fitted correlations were found and validated using the GKT, errors were within ± 5%. This study represents a fundamental step to pave the way towards the development of scaling relationship for the investigation of larger scale reactors relevant to industry.

Keywords: Kinetics, PET, PS, Pyrolysis, Recycling, Petrochemicals.

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Authors: Wen-Bao Qiao, Jean-Charles Créput

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To accelerate the solution for large scale traveling salesman problems (TSP), a parallel 2-opt local search algorithm with simple implementation based on Graphics Processing Unit (GPU) is presented and tested in this paper. The parallel scheme is based on technique of data decomposition by dynamically assigning multiple K processors on the integral tour to treat K edges’ 2-opt local optimization simultaneously on independent sub-tours, where K can be user-defined or have a function relationship with input size N. We implement this algorithm with doubly linked list on GPU. The implementation only requires O(N) memory. We compare this parallel 2-opt local optimization against sequential exhaustive 2-opt search along integral tour on TSP instances from TSPLIB with more than 10000 cities.

Keywords: Doubly linked list, parallel 2-opt, tour division, GPU.

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Authors: Esam Jassim

Abstract:

Supersonic nozzles are commonly used to purify natural gas in gas processing technology. As an innovated technology, it is employed to overcome the deficit of the traditional method, related to gas dynamics, thermodynamics and fluid dynamics theory. An indoor test rig is built to study the dehumidification process of moisture fluid. Humid air was chosen for the study. The working fluid was circulating in an open loop, which had provision for filtering, metering, and humidifying. A stainless steel supersonic separator is constructed together with the C-D nozzle system. The result shows that dehumidification enhances as NPR increases. This is due to the high intensity in the turbulence caused by the shock formation in the divergent section. Such disturbance strengthens the centrifugal force, pushing more particles toward the near-wall region. In return return, the pressure recovery factor, defined as the ratio of the outlet static pressure of the fluid to its inlet value, decreases with NPR.

Keywords: Supersonic nozzle, dehumidification, particle separation, geometry.

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Authors: T. Messikh, S. Mekhilef, N. A. Rahim

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This paper presents an effective technique for harmonic current mitigation using an adaptive notch filter (ANF) to estimate current harmonics. The proposed filter consists of multiple units of ANF connected in parallel structure; each unit is governed by two ordinary differential equations. The frequency estimation is carried out based on the output of these units. The simulation and experimental results show the ability of the proposed tracking scheme to accurately estimate harmonics. The proposed filter was implemented digitally in TMS320F2808 and used in the control of hybrid active power filter (HAPF). The theoretical expectations are verified and demonstrated experimentally.

Keywords: Adaptive notch filter, Active power filter, harmonic filtering, Time varying frequency.

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Authors: Byron Malaela Sotiata Seiuli

Abstract:

Sexual violation is any form of sexual violence, including rape, child molestation, incest, and similar forms of non-consensual sexual contact. Much of these acts of violation are perpetuated, but not entirely, by men against women and children. Moetolo is a Samoan term that is used to describe a person who sexually violates another while they or their family are asleep. This paper presents and discusses sexual abuse from a Samoan viewpoint. Insights are drawn from the authors’ counseling engagement with a Samoan sex offender as part of his probation review process. Relevant literature is also engaged to inform and provide interpretation to the therapeutic work carried out. This article seeks to contribute new understanding to patterned responses of some Samoan people to sexual abuse behaviors, and steps to remedy arising concerns with perpetrators seeking reintegration back into their communities.

Keywords: Fa’asamoa, Samoan cultural identity, sexual abuse and recovery, Uputāua therapeutic approach.

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Authors: Hee-Guk Chae, Bo-Bae Song, Kyoung-Il Do, Jeong-Yun Seo, Yong-Seo Koo

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In this study, an improved Electrostatic Discharge (ESD) protection circuit with low trigger voltage and high holding voltage is proposed. ESD has become a serious problem in the semiconductor process because the semiconductor density has become very high these days. Therefore, much research has been done to prevent ESD. The proposed circuit is a stacked structure of the new unit structure combined by the Zener Triggering (SCR ZTSCR) and the High Holding Voltage SCR (HHVSCR). The simulation results show that the proposed circuit has low trigger voltage and high holding voltage. And the stack technology is applied to adjust the various operating voltage. As the results, the holding voltage is 7.7 V for 2-stack and 10.7 V for 3-stack.

Keywords: ESD, SCR, latch-up, power clamp, holding voltage.

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Authors: Garima Gupta, Daya Gupta

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Virtually all existing networked system management tools use a Manager/Agent paradigm. That is, distributed agents are deployed on managed devices to collect local information and report it back to some management unit. Even those that use standard protocols such as SNMP fall into this model. Using standard protocol has the advantage of interoperability among devices from different vendors. However, it may not be able to provide customized information that is of interest to satisfy specific management needs. In this dissertation work, different approaches are used to collect information regarding the devices attached to a Local Area Network. An SNMP aware application is being developed that will manage the discovery procedure and will be used as data collector.

Keywords: ICMP Scanner, Network Discovery, NetworkManagement, SNMP Scanner.

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Authors: Nice Vasconcelos Coimbra, Fábio dos Santos Gonçalves, Marisa Nascimento, Ellen Cristine Giese

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The development of chemical routes for the recovery and separation of rare earth elements (REE) is seen as a priority and strategic action by several countries demanding these elements. Among the possibilities of alternative routes, the biosorption process has been evaluated in our laboratory. In this theme, the present work attempts to assess and fit the solution equilibrium data in Langmuir, Freundlich and DKR isothermal models, based on the biosorption results of the lanthanum and samarium elements by Bacillus subtilis immobilized on calcium alginate gel. It was observed that the preference of adsorption of REE by the immobilized biomass followed the order Sm (III)> La (III). It can be concluded that among the studied isotherms models, the Langmuir model presented better mathematical results than the Freundlich and DKR models.

Keywords: Rare earth elements, biosorption, Bacillus subtilis, adsorption isotherm models.

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Authors: N. Bhalaji, A. R. Sivaramkrishnan, Sinchan Banerjee, V. Sundar, A. Shanmugam

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Nodes in mobile Ad Hoc Network (MANET) do not rely on a central infrastructure but relay packets originated by other nodes. Mobile ad hoc networks can work properly only if the participating nodes collaborate in routing and forwarding. For individual nodes it might be advantageous not to collaborate, though. In this conceptual paper we propose a new approach based on relationship among the nodes which makes them to cooperate in an Adhoc environment. The trust unit is used to calculate the trust values of each node in the network. The calculated trust values are being used by the relationship estimator to determine the relationship status of nodes. The proposed enhanced protocol was compared with the standard DSR protocol and the results are analyzed using the network simulator-2.

Keywords: Reliable Routing, DSR, Grudger, Adhoc network.

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Authors: Hyen Ki Kim

Abstract:

This paper describes the design and implementation of cyber video consultation systems(CVCS) using hybrid P2P for video consultation between remote sites. The proposed system is based on client-server and P2P(Peer to Peer) architecture, where client-server is used for communication with the MCU(Multipoint Control Unit) and P2P is used for the cyber video consultation. The developed video consultation system decreases server traffic, and cuts down network expenses, as the multimedia data decentralizes to the client by hybrid P2P architecture. Also the developed system is tested by the group-type video consultation system using communication protocol and application software through Ethernet networks.

Keywords: Consultation, Cyber, Hybrid, Peer-to-Peer

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Authors: Tarek Fatouh, Chehab Elbelehy, Alaa Abdelsalam, Eman Elakkad, Alaa Abdelshafie

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This paper aims to explore the possibility of time compression in Engineer to Order production networks. A case study research method is used in a Norwegian shipbuilding project by implementing a value stream mapping lean tool with total cycle time as a unit of analysis. The analysis resulted in demonstrating the time deviations for the planned tasks in one of the processes in the shipbuilding project. So, authors developed a future state map by removing time wastes from value stream process.

Keywords: Engineer to order, total cycle time, value stream mapping, shipbuilding.

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Authors: M. S. Kaiser

Abstract:

Ageing of 75% cold rolled Al-6Mg alloy with ternary 0.4 wt% scandium and quaternary zirconium and titanium has been carried out. Alloy samples are naturally, isochronally and isothermally aged for different time and temperatures. Hardness values of the differently processed alloys have been measured to understand the ageing behavior of Al-6Mg alloy with scandium and quaternary zirconium and titanium addition. Resistivity changes with annealing time and temperature were measured to understand the precipitation behavior and recovery of strain of the alloy. Attempts were also made to understand the grain refining effect of scandium in Al-6Mg alloy. It is observed that significant hardening takes place in the aged alloys due to the precipitation of scandium aluminides and the dendrites of the Al-6Mg alloy have been refined significantly due to addition of scandium.

Keywords: Al-Mg alloys, age hardening, resistivity, metastable phase.

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Authors: Romuald Synak, Wlodzimierz Lipinski, Marcin Pawelczak

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An area-integrating method that uses the technique of total integrated light scatter for evaluating the root mean square height of the surface Sq has been presented in the paper. It is based on the measurement of the scatter power using a flat photodiode integrator rather than an optical sphere or a hemisphere. By this means, one can obtain much less expensive and smaller instruments than traditional ones. Thanks to this, they could find their application for surface control purposes, particularly in small and medium size enterprises. A description of the functioning of the measuring unit as well as the impact caused by different factors on its properties is presented first. Next, results of measurements of the Sq values performed for optical, silicon and metal samples have been shown. It has been also proven that they are in a good agreement with the results obtained using the Ulbricht sphere instrument.

Keywords: ISO 25178 Standard, scatterometry, surface metrology, surface roughness

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