Search results for: Moon Fai Chan

Authors: Jung-Ho Moon, Tae Kwon Ha

Abstract:

The effect of Yttrium addition on the microstructure and mechanical properties of Sn-Zn eutectic alloy, which has been attracting intensive focus as a Pb-free solder material, was investigated in this study. Phase equilibrium has been calculated by using FactSage® to evaluate the composition and fraction of equilibrium intermetallic compounds and construct a phase diagram. In the case of Sn-8.8 Zn eutectic alloy, the as-cast microstructure was typical lamellar. With addition of 0.25 wt. %Y, a large amount of pro-eutectic phases have been observed and various YZnx intermetallic compounds were expected to successively form during cooling. Hardness of Sn-8.8 Zn alloy was not affected by Y-addition and both alloys could be rolled by 90% at room temperature.

Keywords: Sn-Zn eutectic alloy, yttrium, FactSage®, microstructure, mechanical properties

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Authors: Kwan Hee Han, Jun Woo Lee, Sung Moon Bae, Twae Kyung Park

Abstract:

ECA (Event-Condition-Action) languages are largely adopted for event processing since they are an intuitive and powerful paradigm for programming reactive systems. However, there are some limitations about ECA rules for processing of complex events such as coupling of event producer and consumer. The objective of this paper is to propose an ECA rule pattern to improve the current limitations of ECA rule, and to develop a prototype system. In this paper, conventional ECA rule is separated into 3 parts and each part is extended to meet the requirements of CEP. Finally, event processing logic is established by combining the relevant elements of 3 parts. The usability of proposed extended ECA rule is validated by a test scenario in this study.

Keywords: complex event processing, ECA rule, Event processing system, event-driven architecture, internet of things

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Authors: Seung Ho Park, Young Su Moon, Nam Ik Cho

Abstract:

We propose a convolution neural network (CNN) for quality adaptive compression artifact reduction named QCARNet. The proposed method is different from the existing discriminative models that learn a specific model at a certain quality level. The method is composed of a quality estimation CNN (QECNN) and a compression artifact reduction CNN (CARCNN), which are two functionally separate CNNs. By connecting the QECNN and CARCNN, each CARCNN layer is able to adaptively reduce compression artifacts and preserve details depending on the estimated quality level map generated by the QECNN. We experimentally demonstrate that the proposed method achieves better performance compared to other state-of-the-art blind compression artifact reduction methods.

Keywords: compression artifact reduction, deblocking, image denoising, image restoration

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Authors: Ji Chan Kim, Seok Hong Min, Tae Kwon Ha

Abstract:

The effect of Yttrium addition on the microstructure and mechanical properties of Sn-Zn eutectic alloy, which has been attracting intensive focus as a Pb-free solder material, was investigated in this study. Phase equilibrium has been calculated by using FactSage® to evaluate the composition and fraction of equilibrium intermetallic compounds and construct a phase diagram. In the case of Sn-8.8 Zn eutectic alloy, the as-cast microstructure was typical lamellar. With addition of 0.25 wt. %Y, a large amount of pro-eutectic phases have been observed and various YZnx intermetallic compounds were expected to successively form during cooling. Hardness of Sn-8.8 Zn alloy was not affected by Y-addition and both alloys could be rolled by 90% at room temperature.

Keywords: lead-free solder, zn-al-sn alloy, phase equilibrium, rolling, microstructure, hardness

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Authors: Jae Moon Lee

Abstract:

In general, algorithms to find continuous k-nearest neighbors have been researched on the location based services, monitoring periodically the moving objects such as vehicles and mobile phone. Those researches assume the environment that the number of query points is much less than that of moving objects and the query points are not moved but fixed. In gaming environments, this problem is when computing the next movement considering the neighbors such as flocking, crowd and robot simulations. In this case, every moving object becomes a query point so that the number of query point is same to that of moving objects and the query points are also moving. In this paper, we analyze the performance of the existing algorithms focused on location based services how they operate under gaming environments.

Keywords: flocking behavior, heterogeneous agents, similarity, simulation

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Authors: Zhengyi Kong, Seung-Eock Kim

Abstract:

Single angle connections, which are bolted to the beam web and the column flange, are studied to investigate moment-rotation behavior. Elastic–perfectly plastic material behavior is assumed. ABAQUS software is used to analyze the nonlinear behavior of a single angle connection. The same geometric and material conditions with Yanglin Gong’s test are used for verifying finite element models. Since Kishi and Chen’s Power model and Lee and Moon’s Log model are accurate only for a limited range, simpler and more accurate hyperbolic function models are proposed. The equation for calculating rotation at ultimate moment is first proposed.

Keywords: finite element method, moment and rotation, rotation at ultimate moment, single-web angle connections

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Authors: SangWon Han, MuWook Pyeon, Sujung Moon, DaeKyo Seo

Abstract:

Recently, technologies based on three-dimensional (3D) space information are being developed and quality of life is improving as a result. Research on real-time digital map (RDM) is being conducted now to provide 3D space information. RDM is a service that creates and supplies 3D space information in real time based on location/shape detection. Research subjects on RDM include the construction of 3D space information with matching image data, complementing the weaknesses of image acquisition using multi-source data, and data collection methods using big data. Using RDM will be effective for space analysis using 3D space information in a U-City and for other space information utilization technologies.

Keywords: RDM, multi-source data, big data, U-City

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Authors: Hyunwon Moon

Abstract:

It is necessary to realize new biomedical wireless communication systems which send the signals collected from various bio sensors located at human body in order to monitor our health. Also, it should seamlessly connect to the existing wireless communication systems. A 5.8 GHz ISM band low power RF front-end receiver for a biomedical wireless communication system is implemented using a 0.5 µm SiGe BiCMOS process. To achieve low power RF front-end, the current optimization technique for selecting device size is utilized. The implemented low noise amplifier (LNA) shows a power gain of 9.8 dB, a noise figure (NF) of below 1.75 dB, and an IIP3 of higher than 7.5 dBm while current consumption is only 6 mA at supply voltage of 2.5 V. Also, the performance of a down-conversion mixer is measured as a conversion gain of 11 dB and SSB NF of 10 dB.

Keywords: biomedical, LNA, mixer, receiver, RF front-end, SiGe

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Authors: Jung-Ho Moon, Tae Kwon Ha

Abstract:

Abstract—High temperature deformation behavior of cast Fe-20Cr-5Al alloy has been investigated in this study by performing tensile and compression tests at temperatures from 1100 to 1200oC. Rectangular ingots of which the dimensions were 300×300×100 in millimeter were cast using vacuum induction melting. Phase equilibrium was calculated using the FactSage®, thermodynamic software and database. Tensile strength of cast Fe-20Cr-5Al alloy was 4 MPa at 1200oC. With temperature decreased, tensile strength increased rapidly and reached up to 13 MPa at 1100oC. Elongation also increased from 18 to 80% with temperature decreased from 1200oC to 1100oC. Microstructure observation revealed that M23C6 carbide was precipitated along the grain boundary and within the matrix.

Keywords: 20 Cr-5Al ferritic stainless, high temperature deformation, aging treatment, microstructure, mechanical properties

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Authors: Jun Young Moon, Hyeonggeon Lee, Jong Tae Kim

Abstract:

In this paper, we present Cortex-M3 based virtual platform which can virtualize wearable hardware platform and evaluate hardware performance. Cortex-M3 is very popular microcontroller in wearable devices, hardware sensors and display devices. This platform can be used to implement software layer for specific hardware architecture. By using the proposed platform the software development process can be parallelized with hardware development process. We present internal mechanism to implement the proposed virtual platform and describe how to use the proposed platform to develop software by using case study which is low cost wearable device that uses Cortex-M3.

Keywords: electronic system level design, software development, virtual platform, wearable device

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Authors: Myoung-Gon Yoon, Jung-Ho Moon, Tae Kwon Ha

Abstract:

Tensile specimens of nonflammable AZ91D Mg alloy were fabricated in this study via cold chamber die-casting process. Dimensions of tensile specimens were 25mm in length, 4mm in width, and 0.8 or 3.0mm in thickness. Microstructure observation was conducted before and after tensile tests at room temperature. In the die casting process, various injection distances from 150 to 260mm were employed to obtain optimum process conditions. Distribution of Al12Mg17 phase was the key factor to determine the mechanical properties of die-cast Mg alloy. Specimens with 3mm of thickness showed superior mechanical properties to those with 0.8mm of thickness. Closed networking of Al12Mg17 phase along grain boundary was found to be detrimental to mechanical properties of die-cast Mg alloy.

Keywords: non-flammable magnesium alloy, AZ91D, die-casting, microstructure, mechanical properties

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Authors: Eunji Choi, Borang Park, Youngjae Choi, Jinwoo Moon

Abstract:

In this study, a predictive model for estimating the metabolism (MET) of human body was developed for the optimal control of indoor thermal environment. Human body images for indoor activities and human body joint coordinated values were collected as data sets, which are used in predictive model. A deep learning algorithm was used in an initial model, and its number of hidden layers and hidden neurons were optimized. Lastly, the model prediction performance was analyzed after the model being trained through collected data. In conclusion, the possibility of MET prediction was confirmed, and the direction of the future study was proposed as developing various data and the predictive model.

Keywords: deep learning, indoor quality, metabolism, predictive model

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Authors: Jae Moon Lee

Abstract:

Generally the predator will continuously aim to attack the prey, while the prey will maintain a safe distance from the predator in order to avoid it . If the predator has enough energy to chase a certain amount of distance, it will begin to attack the prey. The prey needs to approach the predator for various reasons such as getting food. However, it will also try to keep a safe distance because of the threat of predators. The safe distance is dependent on the amount of the energy of predator, and the behaviors of prey is changed according to the size of the safe distance. This paper is to simulate the behaviors of preys to avoid the pursuit of predator based on the safe distance. The simulations will be executed experimentally under single predator and multiple preys. The results of the simulations show that the amount of energy of predator gives a great influence on the behavior of the prey.

Keywords: predator, prey, energy, safe distance, simulation

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Authors: Jong-Ho Moon, Dong-Ho Lee, Hyunuk Kim, Young Cheol Park, Jong-Seop Lee, Jae-deok Jeon, Hyung-Keun Lee

Abstract:

A novel membrane reactor process for DMC synthesis from carbon dioxide has been developing in Korea Institute of Energy Research. The scheme of direct synthesis of DMC from CO₂ and Methanol is 'CO₂ + 2MeOH ↔ DMC + H₂O'. Among them, reactants are CO₂ and MeOH, product is DMC, and byproduct is H₂O (water). According to Le Chatelier’s principle, removing byproduct (water) can shift the reaction equilibrium to the right (DMC production). The main purpose of this process is removing water during the reaction. For efficient in situ water removal (dehydration) and DMC separation, zeolite 4A membranes with very small pore diameter and hydrophilicity were introduced. In this study, pervaporation performances of binary and ternary DMC / methanol / water mixtures were evaluated.

Keywords: dimehtyl carbonate, methanol, water, zeolite membrane, pervaporation

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Authors: Yik Sin Chan, Bee Ling Chuah, Wei Quan Chan, Ri Jin Cheng, Yan Hang Oon, Kong Soo Khoo, Nam Weng Sit

Abstract:

Traditionally, medicinal plants have been used to treat different kinds of ailments including infectious diseases. They serve as a good source of lead compounds for the development of new and safer anti-infective agents. This study aimed to investigate the antimicrobial potential of the leaves of three medicinal plants, namely Catunaregam spinosa (Rubiaceae; Mountain pomegranate), Houttuynia cordata (Saururaceae; "fishy-smell herb") and Rhapis excelsa (Arecaceae; “broadleaf lady palm”). The leaves extracts were obtained by sequential extraction using hexane, chloroform, ethyl acetate, ethanol, methanol and water. The antibacterial and antifungal activities were assessed using a colorimetric broth microdilution method against a panel of human pathogenic bacteria (Gram-positive: Bacillus cereus and Staphylococcus aureus; Gram-negative: Escherichia coli, Klebsiella pneumoniae and Pseudomonas aeruginosa) and fungi (yeasts: Candida albicans, Candida parapsilosis and Cryptococcus neoformans; Moulds: Aspergillus fumigatus and Trichophyton mentagrophytes) respectively; while antiviral activity was evaluated against the Chikungunya virus on monkey kidney epithelial (Vero) cells by neutral red uptake assay. All the plant extracts showed bacteriostatic activity, however, only 72% of the extracts (13/18) were found to have bactericidal activity. The lowest minimum inhibitory concentration (MIC) and minimum bactericidal concentration (MBC) were given by the hexane extract of C. spinosa against S. aureus with the values of 0.16 and 0.31 mg/mL respectively. All the extracts also possessed fungistatic activity. Only the hexane, chloroform and ethyl acetate extracts of H. cordata exerted inhibitory activity against A. fumigatus, giving the lowest fungal susceptibility index of 16.7%. In contrast, only 61% of the extracts (11/18) showed fungicidal activity. The ethanol extract of R. excelsa exhibited the strongest fungicidal activity against C. albicans, C. parapsilosis and T. mentagrophytes with minimum fungicidal concentration (MFC) values of 0.04–0.08 mg/mL, in addition to its methanol extract against T. mentagrophytes (MFC=0.02 mg/mL). For anti-Chikungunya virus activity, only chloroform and ethyl acetate extracts of R. excelsa showed significant antiviral activity with 50% effective concentrations (EC50) of 29.9 and 78.1 g/mL respectively. Extracts of R. excelsa warrant further investigations into their active principles responsible for antifungal and antiviral properties.

Keywords: bactericidal, Chikungunya virus, extraction, fungicidal

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Authors: Nguyen Chan Hung, Mai Ngoc Anh, Nguyen Xuan Ha, Tran Xuan Duc, Dang Bao Lam, Nguyen Hoang Viet

Abstract:

This paper presents a design and implementation of a navigation controller for a humanoid mobile robot platform to operate in indoor office environments. In order to fulfil the requirement of recognizing and approaching human to provide service while avoiding random obstacles, a behavior-based fuzzy logic controller was designed to simultaneously coordinate multiple behaviors. Experiments in real office environment showed that the fuzzy controller deals well with complex scenarios without colliding with random objects and human.

Keywords: behavior control, fuzzy logic, humanoid robot, mobile robot

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Authors: Jung-Ho Moon, Myung-Gon Yoon, Tae Kwon Ha

Abstract:

This paper presents a wireless sensor network protocol for a car parking monitoring system. A wireless sensor network for the purpose is composed of multiple sensor nodes, a sink node, a gateway, and a server. Each of the sensor nodes is equipped with a 3-axis AMR sensor and deployed in the center of a parking space. The sensor node reads its sensor values periodically and transmits the data to the sink node if the current and immediate past sensor values show a difference exceeding a threshold value. The operations of the sink and sensor nodes are described in detail along with flow diagrams. The protocol allows a low-duty cycle operation of the sensor nodes and a flexible adjustment of the threshold value used by the sensor nodes.

Keywords: car parking monitoring, sensor node, wireless sensor network, network protocol

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Authors: Moon-Tak Oh, Kyung-Min Park, Tae-Eun Yoon, Hoon Choi, Chil-Woo Lee

Abstract:

This paper is about middle-ware which enables group-user applications on mobile devices in physical proximity to interact with other devices without intervention of a central server. Requirements of the middle-ware are identified from service usage scenarios, and the functional architecture of the middle-ware is specified. These requirements include group management, synchronization, and resource management. Group Management needs to provide various capabilities to such applications with respect to managing multiple users (e.g., creation of groups, discovery of group or individual users, member join/leave, election of a group manager and service-group association) using D2D communication technology. We designed the middle-ware for the above requirements on the Android platform.

Keywords: group user, middleware, mobile service, physical proximity

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Authors: Jeongim Kang, Moon Hee Kim, Seong Baeg Kim

Abstract:

This paper proposes a novel e-learning model that is based on a dynamic formative evaluation. On evaluating the existing format of e-learning, conditions regarding repetitive learning to achieve mastery, causes issues for learners to lose tension and become neglectful of learning. The dynamic formative evaluation proposed is able to supplement limitation of the existing approaches. Since a repetitive learning method does not provide a perfect feedback, this paper puts an emphasis on the dynamic formative evaluation that is able to maximize learning achievement. Through the dynamic formative evaluation, the instructor is able to refer to the evaluation result when making estimation about the learner. To show the flow chart of learning, based on the dynamic formative evaluation, the model proves its effectiveness and validity.

Keywords: online learning, dynamic formative evaluation, mastery learning, repetitive learning method, learning achievement

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Authors: Jung-Ho Moon, Tae Kwon Ha

Abstract:

Continually increasing working temperature and growing need for greater efficiency and reliability of automotive exhaust require systematic investigation into the thermal fatigue properties especially of high temperature stainless steels. In this study, thermal fatigue properties of 300 series austenitic stainless steels have been evaluated in the temperature ranges of 200-800°C and 200-900°C. Systematic methods for control of temperatures within the predetermined range and measurement of load applied to specimens as a function of temperature during thermal cycles have been established. Thermal fatigue tests were conducted under fully constrained condition, where both ends of specimens were completely fixed. Load relaxation behavior at the temperatures of thermal cycle was closely related with the thermal fatigue property.

Keywords: austenitic stainless steel, automotive exhaust, thermal fatigue, microstructure, load relaxation

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Authors: Areena Bhatti

Abstract:

The geometric arrangement of planet and moon is the result of a self-organizing system. In our solar system, the planets and moons are constantly orbiting around the sun. The aim of this theory is to compare the motion of a solar system with the motion of water droplet when poured into a water body. The basic methodology is to compare both motions to know how they are related to each other. The difference between both systems will be that one is extremely fast, and the other is extremely slow. The role of this theory is that by looking at the fast system we can conclude how slow the system will get to an end. Just like ripples are formed around water droplet that move away from the droplet and water droplet forming those ripples become small in size will tell us how solar system will behave in the same way. So it is concluded that large and small systems can work under the same process but with different motions of time, and motion of the solar system is the slowest form of water droplet motion.

Keywords: motion, water, sun, time

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Authors: Youn-Hwan Kim, Hae-Joong Kim, Jae-Won Moon

Abstract:

This paper introduces the results of the study on the development of accelerated life test methods for the motor used in machine tools. In recent years, as well as efficiency for motors, there is a growing need for research on life expectancy of motors. It is considered impossible to calculate the acceleration coefficient by increasing the rotational load or temperature load as the acceleration stress in the motor system because the temperature of the copper exceeds the wire thermal class rating. This paper describes the equipment development procedure for the highly accelerated life test (HALT) of the 12kW three-phase squirrel-cage induction motors (SCIMs). After the test, the lifetime analysis was carried out and it is compared with the bearing life expectancy by ISO 281.

Keywords: acceleration coefficient, bearing, HALT, life expectancy, motor

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Authors: J. C. Cheng, Y. L. Tsay, Z. D. Chan, C. H. Yang

Abstract:

In this study the physical system under consideration is a three-dimensional (3-D) cabinet with arrays of block heat sources mounted on one of the walls of the cabinet. The block heat sources dissipate heat to the cabinet surrounding through the conjugate conduction and natural convection. The results illustrate that the difference in hot spot temperatures of the system (θH) for the situations with and without consideration of thermal interaction is higher for smaller Rayleigh number (Ra), and can be up to 94.73% as Ra=10^5. In addition, the heat transfer characteristics depends strongly on the dimensionless heat conductivity of cabinet wall (Kwf), heat conductivity of block (Kpf) and length of cabinet (Ax). The maximum reduction in θH is 70.01% when Kwf varies from 10 to 1000, and it is 30.07% for Ax from 0.5 to 1. While the hot spot temperature of system is not sensitive to the cabinet angle (Φ).

Keywords: block heat sources, 3-D cabinet, thermal interaction, heat transfer

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Authors: SKhan Park, Seok Jin Lee, Jong Sun Kim, Jun Ho Lee, Bong Chan Kim

Abstract:

Because of the large economic losses caused by traffic congestion in metropolitan areas, various studies on the underground network design and construction techniques has been performed various studies in the developed countries. In Korea, it has performed a study to develop a versatile double-deck of deep tunnel model. This paper is an introduction to develop a ground reinforcement method to enable the safe tunnel construction in the weakened pillar section like as junction of tunnel. Applicable ground reinforcement method in the weakened section is proposed and it is expected to verify the method by the field application tests.

Keywords: double-deck tunnel, ground reinforcement, tunnel construction, weakened pillar section

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Authors: Sanjay Narayan Deo, Badam Singh Kushvah

Abstract:

Bennu(101955) is a half kilometer potentially hazardous near-Earth asteroid. We analyze the influence of Yarkovsky effect and relativistic effect of the Sun on the motion of the asteroid Bennu. The transverse model is used to compute Yarkovsky force on asteroid Bennu. Our dynamical model includes Newtonian perturbations of eight planets, the Moon, the Sun and three massive asteroid (1Ceres, 2Palas and 4Vesta). We showed the variation in orbital elements of nominal orbit of the asteroid. In the presence of Yarkovsky effect, the Semi-major axis of the orbit of the asteroid is decreases by 350 m over one period of orbital motion. The magnitude of Yarkovsky force is computed. We find that maximum magnitude of Yarkovsky force is 0.09 N at the perihelion . We also found that the magnitude of the Sun relativity effect is greater than the Yarkovsky effect on the motion the asteroid Bennu.

Keywords: Bennu, orbital elements, relativistic effect, Yarkovsky effect

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Authors: Young Nam Jo, Moon Jeong Kang, Hong Hee Yoo

Abstract:

Most human vibration models have been modeled as a multibody system consisting of some rigid bodies and spring-dampers. These models are developed for certain posture and conditions. So, the models cannot be used in vibration analysis in various posture and conditions. The purpose of this study is to develop a human vibration model that represent human vibration characteristics under various conditions by employing a musculoskeletal model. To do this, the human vibration model is developed based on biomechanical models. In addition, muscle models are employed instead of spring-dampers. Activations of muscles are controlled by PD controller to maintain body posture under vertical vibration is applied. Each gain value of the controller is obtained to minimize the difference of apparent mass and acceleration transmissibility between experim ent and analysis by using an optimization method.

Keywords: human vibration analysis, hill type muscle model, PD control, whole-body vibration

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Authors: Hoon Yi, Minho Sung, Hangil Ko, Moon Kyu Kwak, Hoon Eui Jeong

Abstract:

Inspired by the remarkable adhesion properties of gecko lizards, bio-inspired dry adhesives with smart adhesion properties have been developed in the last decade. Compared to earlier dry adhesives, the recently developed ones exhibit excellent adhesion strength, smart directional adhesion, and structural robustness. With these unique adhesion properties, bio-inspired dry adhesive pads have strong potential for use in precision industries such as semiconductor or display manufacturing. In this communication, we present a new manufacturing technology based on advanced dry adhesive systems that enable precise manipulation of large-area substrates over repeating cycles without any requirement for external force application. This new manufacturing technique is also highly accurate and environment-friendly, and thus has strong potential as a next-generation clean manufacturing technology.

Keywords: gecko, manufacturing robot, precision manufacturing

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Authors: Young Cheol Choi, Eun-Jin Moon, Sung-Won Yoo, Sang-Hwa Jung, In-Hwan Yang

Abstract:

Stainless steel slag (STS) is a by-product generated from the stainless steel refining process. The recycling of STS produced in Korea for construction applications is limited due to its poor hydraulic properties. On the other hand, STS has high carbonation reactivity to CO2 as it contains gamma-C2S content. This material is ideal for mineral carbonation which is one of the techniques proposed for carbon emission reduction. The objective of this study is to investigate the feasibility of developing a zero-cement STS binder activated by carbonation as alternative cementitious material. The quantitative analyses for CO2 uptake of STS powder and STS blended cement were investigated using thermogravimetric analysis (TGA), X-ray diffraction (XRD). In addition, the compressive strength and microstructure of STS pastes after CO2 curing were evaluated. Test results showed that STS can be activated by carbonation to gain a sufficient strength as alternative cementitious material.

Keywords: gamma-C2S, CO2 uptake, carbonation, stainless steel slag

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Authors: Hafizan Junoh, Kumaran Palanisamy, Yip Chan Heng, Pua Fei Ling

Abstract:

This study investigates the influence of low temperature thermo-chemical pretreatment of organic food waste on the performance of COD solubilisation. Both temperature and alkaline agent were reported to have an effect on solubilizing any possible biomass including organic food waste. The three independent variables considered in this pretreatment were temperature (50-90oC), pretreatment time (30-120 minutes) and alkaline concentration, sodium hydroxide, NaOH (0.7-15 g/L). The optimal condition obtained were 90oC, 15 g/L NaOH for 2 hours. Solubilisation has potential in enhancing methane production by providing a high amount of soluble components at an early stage during anaerobic digestion.

Keywords: food waste, pretreatments, respond surface methodology, ANOVA, anaerobic digestion

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Authors: Byungsik Moon

Abstract:

Electron beam inspection (EBI) has played an important role in detecting defects during the Fab process. The study focused on capturing buried Cu metal voids for 5nm technology nodes in Qualcomm Snapdragon mass production. This paper illustrates a case study where Cu metal voids can be detected without side effects with optimized EBI scanning conditions. The voids were buried in the VIA and not detected effectively by bright field inspection. EBI showed higher detectability, about 10 times that of bright fields, and a lower landing energy of EBI can avoid film damage. A comparison of detectability between EBI and bright field inspection was performed, and TEM confirmed voids that were detected by EBI. Therefore, a much higher detectability of buried Cu metal voids can be achieved without causing film damage.

Keywords: electron beam inspection, EBI, landing energy, Cu metal voids, bright field inspection

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