Search results for: Wavelength Routing.
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 436

Search results for: Wavelength Routing.

16 Intelligent Parking Systems for Quasi-Close Communities

Authors: Ayodele Adekunle Faiyetole, Olumide Olawale Jegede

Abstract:

This paper presents the experimental design and needs justifications for a localized intelligent parking system (L-IPS), ideal for quasi-close communities with increasing vehicular volume that depends on limited or constant parking facilities. For a constant supply in parking facilities, the demand for an increasing vehicular volume could lead to poor time conservation or extended travel time, traffic congestion or impeded mobility, and safety issues. Increased negative environmental and economic externalities are other associated and consequent downsides of disparities in demand and supply. This L-IPS is designed using a microcontroller, ultrasonic sensors, LED indicators, such that the current status, in terms of parking spots availability, can be known from the main entrance to the community or a parking zone on a LCD screen. As an advanced traffic management system (ATMS), the L-IPS is designed to resolve aspects of infrastructure-to-driver (I2D) communication and parking detection issues. Thus, this L-IPS can act as a timesaver for users by helping them know the availability of parking spots. Providing on-time, informed routing, to a next preference or seamless moving to berth on the available spot on a proximate facility as the case may be. Its use could also increase safety and increase mobility, and fuel savings and costs, therefore, reducing negative environmental and economic externalities due to transportation systems.

Keywords: Intelligent parking systems, localized intelligent parking system, intelligent transport systems, advanced traffic management systems, infrastructure-to-drivers communication.

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15 MinRoot and CMesh: Interconnection Architectures for Network-on-Chip Systems

Authors: Mohammad Ali Jabraeil Jamali, Ahmad Khademzadeh

Abstract:

The success of an electronic system in a System-on- Chip is highly dependent on the efficiency of its interconnection network, which is constructed from routers and channels (the routers move data across the channels between nodes). Since neither classical bus based nor point to point architectures can provide scalable solutions and satisfy the tight power and performance requirements of future applications, the Network-on-Chip (NoC) approach has recently been proposed as a promising solution. Indeed, in contrast to the traditional solutions, the NoC approach can provide large bandwidth with moderate area overhead. The selected topology of the components interconnects plays prime rule in the performance of NoC architecture as well as routing and switching techniques that can be used. In this paper, we present two generic NoC architectures that can be customized to the specific communication needs of an application in order to reduce the area with minimal degradation of the latency of the system. An experimental study is performed to compare these structures with basic NoC topologies represented by 2D mesh, Butterfly-Fat Tree (BFT) and SPIN. It is shown that Cluster mesh (CMesh) and MinRoot schemes achieves significant improvements in network latency and energy consumption with only negligible area overhead and complexity over existing architectures. In fact, in the case of basic NoC topologies, CMesh and MinRoot schemes provides substantial savings in area as well, because they requires fewer routers. The simulation results show that CMesh and MinRoot networks outperforms MESH, BFT and SPIN in main performance metrics.

Keywords: MinRoot, CMesh, NoC, Topology, Performance Evaluation

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14 FPGA Hardware Implementation and Evaluation of a Micro-Network Architecture for Multi-Core Systems

Authors: Yahia Salah, Med Lassaad Kaddachi, Rached Tourki

Abstract:

This paper presents the design, implementation and evaluation of a micro-network, or Network-on-Chip (NoC), based on a generic pipeline router architecture. The router is designed to efficiently support traffic generated by multimedia applications on embedded multi-core systems. It employs a simplest routing mechanism and implements the round-robin scheduling strategy to resolve output port contentions and minimize latency. A virtual channel flow control is applied to avoid the head-of-line blocking problem and enhance performance in the NoC. The hardware design of the router architecture has been implemented at the register transfer level; its functionality is evaluated in the case of the two dimensional Mesh/Torus topology, and performance results are derived from ModelSim simulator and Xilinx ISE 9.2i synthesis tool. An example of a multi-core image processing system utilizing the NoC structure has been implemented and validated to demonstrate the capability of the proposed micro-network architecture. To reduce complexity of the image compression and decompression architecture, the system use image processing algorithm based on classical discrete cosine transform with an efficient zonal processing approach. The experimental results have confirmed that both the proposed image compression scheme and NoC architecture can achieve a reasonable image quality with lower processing time.

Keywords: Generic Pipeline Network-on-Chip Router Architecture, JPEG Image Compression, FPGA Hardware Implementation, Performance Evaluation.

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13 High Aspect Ratio SiO2 Capillary Based On Silicon Etching and Thermal Oxidation Process for Optical Modulator

Authors: N. V. Toan, S. Sangu, T. Saitoh, N. Inomata, T. Ono

Abstract:

This paper presents the design and fabrication of an optical window for an optical modulator toward image sensing applications. An optical window consists of micrometer-order SiO2 capillaries (porous solid) that can modulate transmission light intensity by moving the liquid in and out of porous solid. A high optical transmittance of the optical window can be achieved due to refractive index matching when the liquid is penetrated into the porous solid. Otherwise, its light transmittance is lower because of light reflection and scattering by air holes and capillary walls. Silicon capillaries fabricated by deep reactive ion etching (DRIE) process are completely oxidized to form the SiO2 capillaries. Therefore, high aspect ratio SiO2 capillaries can be achieved based on silicon capillaries formed by DRIE technique. Large compressive stress of the oxide causes bending of the capillary structure, which is reduced by optimizing the design of device structure. The large stress of the optical window can be released via thin supporting beams. A 7.2 mm x 9.6 mm optical window area toward a fully integrated with the image sensor format is successfully fabricated and its optical transmittance is evaluated with and without inserting liquids (ethanol and matching oil). The achieved modulation range is approximately 20% to 35% with and without liquid penetration in visible region (wavelength range from 450 nm to 650 nm).

Keywords: Thermal oxidation process, SiO2 capillaries, optical window, light transmittance, image sensor, liquid penetration.

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12 Laser Registration and Supervisory Control of neuroArm Robotic Surgical System

Authors: Hamidreza Hoshyarmanesh, Hosein Madieh, Sanju Lama, Yaser Maddahi, Garnette R. Sutherland, Kourosh Zareinia

Abstract:

This paper illustrates the concept of an algorithm to register specified markers on the neuroArm surgical manipulators, an image-guided MR-compatible tele-operated robot for microsurgery and stereotaxy. Two range-finding algorithms, namely time-of-flight and phase-shift, are evaluated for registration and supervisory control. The time-of-flight approach is implemented in a semi-field experiment to determine the precise position of a tiny retro-reflective moving object. The moving object simulates a surgical tool tip. The tool is a target that would be connected to the neuroArm end-effector during surgery inside the magnet bore of the MR imaging system. In order to apply flight approach, a 905-nm pulsed laser diode and an avalanche photodiode are utilized as the transmitter and receiver, respectively. For the experiment, a high frequency time to digital converter was designed using a field-programmable gate arrays. In the phase-shift approach, a continuous green laser beam with a wavelength of 530 nm was used as the transmitter. Results showed that a positioning error of 0.1 mm occurred when the scanner-target point distance was set in the range of 2.5 to 3 meters. The effectiveness of this non-contact approach exhibited that the method could be employed as an alternative for conventional mechanical registration arm. Furthermore, the approach is not limited by physical contact and extension of joint angles.

Keywords: 3D laser scanner, intraoperative MR imaging, neuroArm, real time registration, robot-assisted surgery, supervisory control.

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11 Development and Validation of a UPLC Method for the Determination of Albendazole Residues on Pharmaceutical Manufacturing Equipment Surfaces

Authors: R. S. Chandan, M. Vasudevan, Deecaraman, B. M. Gurupadayya

Abstract:

In Pharmaceutical industries, it is very important to remove drug residues from the equipment and areas used. The cleaning procedure must be validated, so special attention must be devoted to the methods used for analysis of trace amounts of drugs. A rapid, sensitive and specific reverse phase ultra performance liquid chromatographic (UPLC) method was developed for the quantitative determination of Albendazole in cleaning validation swab samples. The method was validated using an ACQUITY HSS C18, 50 x 2.1mm, 1.8μ column with a isocratic mobile phase containing a mixture of 1.36g of Potassium dihydrogenphosphate in 1000mL MilliQ water, 2mL of triethylamine and pH adjusted to 2.3 ± 0.05 with ortho-phosphoric acid, Acetonitrile and Methanol (50:40:10 v/v). The flow rate of the mobile phase was 0.5 mL min-1 with a column temperature of 350C and detection wavelength at 254nm using PDA detector. The injection volume was 2µl. Cotton swabs, moisten with acetonitrile were used to remove any residue of drug from stainless steel, teflon, rubber and silicon plates which mimic the production equipment surface and the mean extraction-recovery was found to be 91.8. The selected chromatographic condition was found to effectively elute Albendazole with retention time of 0.67min. The proposed method was found to be linear over the range of 0.2 to 150µg/mL and correlation coefficient obtained is 0.9992. The proposed method was found to be accurate, precise, reproducible and specific and it can also be used for routine quality control analysis of these drugs in biological samples either alone or in combined pharmaceutical dosage forms.

Keywords: Cleaning validation, Albendazole, residues, swab analysis, UPLC.

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10 Advanced Stochastic Models for Partially Developed Speckle

Authors: Jihad S. Daba (Jean-Pierre Dubois), Philip Jreije

Abstract:

Speckled images arise when coherent microwave, optical, and acoustic imaging techniques are used to image an object, surface or scene. Examples of coherent imaging systems include synthetic aperture radar, laser imaging systems, imaging sonar systems, and medical ultrasound systems. Speckle noise is a form of object or target induced noise that results when the surface of the object is Rayleigh rough compared to the wavelength of the illuminating radiation. Detection and estimation in images corrupted by speckle noise is complicated by the nature of the noise and is not as straightforward as detection and estimation in additive noise. In this work, we derive stochastic models for speckle noise, with an emphasis on speckle as it arises in medical ultrasound images. The motivation for this work is the problem of segmentation and tissue classification using ultrasound imaging. Modeling of speckle in this context involves partially developed speckle model where an underlying Poisson point process modulates a Gram-Charlier series of Laguerre weighted exponential functions, resulting in a doubly stochastic filtered Poisson point process. The statistical distribution of partially developed speckle is derived in a closed canonical form. It is observed that as the mean number of scatterers in a resolution cell is increased, the probability density function approaches an exponential distribution. This is consistent with fully developed speckle noise as demonstrated by the Central Limit theorem.

Keywords: Doubly stochastic filtered process, Poisson point process, segmentation, speckle, ultrasound

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9 Long Wavelength Coherent Pulse of Sound Propagating in Granular Media

Authors: Rohit Kumar Shrivastava, Amalia Thomas, Nathalie Vriend, Stefan Luding

Abstract:

A mechanical wave or vibration propagating through granular media exhibits a specific signature in time. A coherent pulse or wavefront arrives first with multiply scattered waves (coda) arriving later. The coherent pulse is micro-structure independent i.e. it depends only on the bulk properties of the disordered granular sample, the sound wave velocity of the granular sample and hence bulk and shear moduli. The coherent wavefront attenuates (decreases in amplitude) and broadens with distance from its source. The pulse attenuation and broadening effects are affected by disorder (polydispersity; contrast in size of the granules) and have often been attributed to dispersion and scattering. To study the effect of disorder and initial amplitude (non-linearity) of the pulse imparted to the system on the coherent wavefront, numerical simulations have been carried out on one-dimensional sets of particles (granular chains). The interaction force between the particles is given by a Hertzian contact model. The sizes of particles have been selected randomly from a Gaussian distribution, where the standard deviation of this distribution is the relevant parameter that quantifies the effect of disorder on the coherent wavefront. Since, the coherent wavefront is system configuration independent, ensemble averaging has been used for improving the signal quality of the coherent pulse and removing the multiply scattered waves. The results concerning the width of the coherent wavefront have been formulated in terms of scaling laws. An experimental set-up of photoelastic particles constituting a granular chain is proposed to validate the numerical results.

Keywords: Discrete elements, Hertzian Contact, polydispersity, weakly nonlinear, wave propagation.

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8 Maximization of Lifetime for Wireless Sensor Networks Based on Energy Efficient Clustering Algorithm

Authors: Frodouard Minani

Abstract:

Since last decade, wireless sensor networks (WSNs) have been used in many areas like health care, agriculture, defense, military, disaster hit areas and so on. Wireless Sensor Networks consist of a Base Station (BS) and more number of wireless sensors in order to monitor temperature, pressure, motion in different environment conditions. The key parameter that plays a major role in designing a protocol for Wireless Sensor Networks is energy efficiency which is a scarcest resource of sensor nodes and it determines the lifetime of sensor nodes. Maximizing sensor node’s lifetime is an important issue in the design of applications and protocols for Wireless Sensor Networks. Clustering sensor nodes mechanism is an effective topology control approach for helping to achieve the goal of this research. In this paper, the researcher presents an energy efficiency protocol to prolong the network lifetime based on Energy efficient clustering algorithm. The Low Energy Adaptive Clustering Hierarchy (LEACH) is a routing protocol for clusters which is used to lower the energy consumption and also to improve the lifetime of the Wireless Sensor Networks. Maximizing energy dissipation and network lifetime are important matters in the design of applications and protocols for wireless sensor networks. Proposed system is to maximize the lifetime of the Wireless Sensor Networks by choosing the farthest cluster head (CH) instead of the closest CH and forming the cluster by considering the following parameter metrics such as Node’s density, residual-energy and distance between clusters (inter-cluster distance). In this paper, comparisons between the proposed protocol and comparative protocols in different scenarios have been done and the simulation results showed that the proposed protocol performs well over other comparative protocols in various scenarios.

Keywords: Base station, clustering algorithm, energy efficient, wireless sensor networks.

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7 Optical Reflectance of Pure and Doped Tin Oxide: From Thin Films to Poly-Crystalline Silicon/Thin Film Device

Authors: Smaali Assia, Outemzabet Ratiba, Media El Mahdi, Kadi Mohamed

Abstract:

Films of pure tin oxide SnO2 and in presence of antimony atoms (SnO2-Sb) deposited onto glass substrates have shown a sufficiently high energy gap to be transparent in the visible region, a high electrical mobility and a carrier concentration which displays a good electrical conductivity [1]. In this work, the effects of polycrystalline silicon substrate on the optical properties of pure and Sb doped tin oxide is investigated. We used the APCVD (atmospheric pressure chemical vapour deposition) technique, which is a low-cost and simple technique, under nitrogen ambient, for growing this material. A series of SnO2 and SnO2-Sb have been deposited onto polycrystalline silicon substrates with different contents of antimony atoms at the same conditions of deposition (substrate temperature, flow oxygen, duration and nitrogen atmosphere of the reactor). The effect of the substrate in terms of morphology and nonlinear optical properties, mainly the reflectance, was studied. The reflectance intensity of the device, compared to the reflectance of tin oxide films deposited directly on glass substrate, is clearly reduced on the overall wavelength range. It is obvious that the roughness of the poly-c silicon plays an important role by improving the reflectance and hence the optical parameters. A clear shift in the minimum of the reflectance upon doping level is observed. This minimum corresponds to strong free carrier absorption, resulting in different plasma frequency. This effect is followed by an increase in the reflectance depending of the antimony doping. Applying the extended Drude theory to the combining optical and electrical obtained results these effects are discussed.

Keywords: Doping, oxide, reflectance.

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6 RF Permeability Test in SOC Structure for Establishing USN(Ubiquitous Sensor Network)

Authors: Byung – wan Jo, Jung – hoon Park, Jang - wook Kim

Abstract:

Recently, as information industry and mobile communication technology are developing, this study is conducted on the new concept of intelligent structures and maintenance techniques that applied wireless sensor network, USN (Ubiquitous Sensor Network), to social infrastructures such as civil and architectural structures on the basis of the concept of Ubiquitous Computing that invisibly provides human life with computing, along with mutually cooperating, compromising and connecting networks each other by having computers within all objects around us. Therefore, the purpose of this study is to investigate the capability of wireless communication of sensor node embedded in reinforced concrete structure with a basic experiment on an electric wave permeability of sensor node by fabricating molding with variables of concrete thickness and steel bars that are mostly used in constructing structures to determine the feasibility of application to constructing structures with USN. At this time, with putting the pitches of steel bars, the thickness of concrete placed, and the intensity of RF signal of a transmitter-receiver as variables and when wireless communication module was installed inside, the possible communication distance of plain concrete and the possible communication distance by the pitches of steel bars was measured in the horizontal and vertical direction respectively. Besides, for the precise measurement of diminution of an electric wave, the magnitude of an electric wave in the range of used frequencies was measured by using Spectrum Analyzer. The phenomenon of diminution of an electric wave was numerically analyzed and the effect of the length of wavelength of frequencies was analyzed by the properties of a frequency band area. As a result of studying the feasibility of an application to constructing structures with wireless sensor, in case of plain concrete, it shows 45cm for the depth of permeability and in case of reinforced concrete with the pitches of 5cm, it shows 37cm and 45cm for the pitches of 15cm.

Keywords: Ubiquitous, Concrete, Permeability, Wireless, Sensor

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5 Spatial Clustering Model of Vessel Trajectory to Extract Sailing Routes Based on AIS Data

Authors: Lubna Eljabu, Mohammad Etemad, Stan Matwin

Abstract:

The automatic extraction of shipping routes is advantageous for intelligent traffic management systems to identify events and support decision-making in maritime surveillance. At present, there is a high demand for the extraction of maritime traffic networks that resemble the real traffic of vessels accurately, which is valuable for further analytical processing tasks for vessels trajectories (e.g., naval routing and voyage planning, anomaly detection, destination prediction, time of arrival estimation). With the help of big data and processing huge amounts of vessels’ trajectory data, it is possible to learn these shipping routes from the navigation history of past behaviour of other, similar ships that were travelling in a given area. In this paper, we propose a spatial clustering model of vessels’ trajectories (SPTCLUST) to extract spatial representations of sailing routes from historical Automatic Identification System (AIS) data. The whole model consists of three main parts: data preprocessing, path finding, and route extraction, which consists of clustering and representative trajectory extraction. The proposed clustering method provides techniques to overcome the problems of: (i) optimal input parameters selection; (ii) the high complexity of processing a huge volume of multidimensional data; (iii) and the spatial representation of complete representative trajectory detection in the context of trajectory clustering algorithms. The experimental evaluation showed the effectiveness of the proposed model by using a real-world AIS dataset from the Port of Halifax. The results contribute to further understanding of shipping route patterns. This could aid surveillance authorities in stable and sustainable vessel traffic management.

Keywords: Vessel trajectory clustering, trajectory mining, Spatial Clustering, marine intelligent navigation, maritime traffic network extraction, sdailing routes extraction.

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4 Destination Port Detection for Vessels: An Analytic Tool for Optimizing Port Authorities Resources

Authors: Lubna Eljabu, Mohammad Etemad, Stan Matwin

Abstract:

Port authorities have many challenges in congested ports to allocate their resources to provide a safe and secure loading/unloading procedure for cargo vessels. Selecting a destination port is the decision of a vessel master based on many factors such as weather, wavelength and changes of priorities. Having access to a tool which leverages Automatic Identification System (AIS) messages to monitor vessel’s movements and accurately predict their next destination port promotes an effective resource allocation process for port authorities. In this research, we propose a method, namely, Reference Route of Trajectory (RRoT) to assist port authorities in predicting inflow and outflow traffic in their local environment by monitoring AIS messages. Our RRo method creates a reference route based on historical AIS messages. It utilizes some of the best trajectory similarity measures to identify the destination of a vessel using their recent movement. We evaluated five different similarity measures such as Discrete Frechet Distance (DFD), Dynamic Time ´ Warping (DTW), Partial Curve Mapping (PCM), Area between two curves (Area) and Curve length (CL). Our experiments show that our method identifies the destination port with an accuracy of 98.97% and an f-measure of 99.08% using Dynamic Time Warping (DTW) similarity measure.

Keywords: Spatial temporal data mining, trajectory mining, trajectory similarity, resource optimization.

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3 C-LNRD: A Cross-Layered Neighbor Route Discovery for Effective Packet Communication in Wireless Sensor Network

Authors: K. Kalaikumar, E. Baburaj

Abstract:

One of the problems to be addressed in wireless sensor networks is the issues related to cross layer communication. Cross layer architecture shares the information across the layer, ensuring Quality of Services (QoS). With this shared information, MAC protocol adapts effective functionality maintenance such as route selection on changeable sensor network environment. However, time slot assignment and neighbour route selection time duration for cross layer have not been carried out. The time varying physical layer communication over cross layer causes high traffic load in the sensor network. Though, the traffic load was reduced using cross layer optimization procedure, the computational cost is high. To improve communication efficacy in the sensor network, a self-determined time slot based Cross-Layered Neighbour Route Discovery (C-LNRD) method is presented in this paper. In the presented work, the initial process is to discover the route in the sensor network using Dynamic Source Routing based Medium Access Control (MAC) sub layers. This process considers MAC layer operation with dynamic route neighbour table discovery. Then, the discovered route path for packet communication employs Broad Route Distributed Time Slot Assignment method on Cross-Layered Sensor Network system. Broad Route means time slotting on varying length of the route paths. During packet communication in this sensor network, transmission of packets is adjusted over the different time with varying ranges for controlling the traffic rate. Finally, Rayleigh fading model is developed in C-LNRD to identify the performance of the sensor network communication structure. The main task of Rayleigh Fading is to measure the power level of each communication under MAC sub layer. The minimized power level helps to easily reduce the computational cost of packet communication in the sensor network. Experiments are conducted on factors such as power factor, on packet communication, neighbour route discovery time, and information (i.e., packet) propagation speed.

Keywords: Medium access control, neighbour route discovery, wireless sensor network, Rayleigh fading, distributed time slot assignment

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2 Sediment Wave and Cyclic Steps as Mechanism for Sediment Transport in Submarine Canyons Thalweg

Authors: Taiwo Olusoji Lawrence, Peace Mawo Aaron

Abstract:

Seismic analysis of bedforms has proven to be one of the best ways to study deepwater sedimentary features. Canyons are known to be sediment transportation conduit. Sediment wave are large-scale depositional bedforms in various parts of the world's oceans formed predominantly by suspended load transport. These undulating objects usually have tens of meters to a few kilometers in wavelength and a height of several meters. Cyclic steps have long long-wave upstream-migrating bedforms confined by internal hydraulic jumps. They usually occur in regions with high gradients and slope breaks. Cyclic steps and migrating sediment waves are the most common bedform on the seafloor. Cyclic steps and related sediment wave bedforms are significant to the morpho-dynamic evolution of deep-water depositional systems architectural elements, especially those located along tectonically active margins with high gradients and slope breaks that can promote internal hydraulic jumps in turbidity currents. This report examined sedimentary activities and sediment transportation in submarine canyons and provided distinctive insight into factors that created a complex seabed canyon system in the Ceara Fortaleza basin Brazilian Equatorial Margin (BEM). The growing importance of cyclic steps made it imperative to understand the parameters leading to their formation, migration, and architecture as well as their controls on sediment transport in canyon thalweg. We extracted the parameters of the observed bedforms and evaluated the aspect ratio and asymmetricity. We developed a relationship between the hydraulic jump magnitude, depth of the hydraulic fall and the length of the cyclic step therein. It was understood that an increase in the height of the cyclic step increases the magnitude of the hydraulic jump and thereby increases the rate of deposition on the preceding stoss side. An increase in the length of the cyclic steps reduces the magnitude of the hydraulic jump and reduces the rate of deposition at the stoss side. Therefore, flat stoss side was noticed at most preceding cyclic step and sediment wave.

Keywords: Ceara Fortaleza, sediment wave, cyclic steps, submarine canyons.

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1 Wetting Characterization of High Aspect Ratio Nanostructures by Gigahertz Acoustic Reflectometry

Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

Abstract:

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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