Search results for: separation of concerns
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 785

Search results for: separation of concerns

575 A Completed Adaptive De-mixing Algorithm on Stiefel Manifold for ICA

Authors: Jianwei Wu

Abstract:

Based on the one-bit-matching principle and by turning the de-mixing matrix into an orthogonal matrix via certain normalization, Ma et al proposed a one-bit-matching learning algorithm on the Stiefel manifold for independent component analysis [8]. But this algorithm is not adaptive. In this paper, an algorithm which can extract kurtosis and its sign of each independent source component directly from observation data is firstly introduced.With the algorithm , the one-bit-matching learning algorithm is revised, so that it can make the blind separation on the Stiefel manifold implemented completely in the adaptive mode in the framework of natural gradient.

Keywords: Independent component analysis, kurtosis, Stiefel manifold, super-gaussians or sub-gaussians.

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574 Hydrogen and Diesel Combustion on a Single Cylinder Four Stroke Diesel Engine in Dual Fuel mode with Varying Injection Strategies

Authors: Probir Kumar Bose, Rahul Banerjee, Madhujit Deb

Abstract:

The present energy situation and the concerns about global warming has stimulated active research interest in non-petroleum, carbon free compounds and non-polluting fuels, particularly for transportation, power generation, and agricultural sectors. Environmental concerns and limited amount of petroleum fuels have caused interests in the development of alternative fuels for internal combustion (IC) engines. The petroleum crude reserves however, are declining and consumption of transport fuels particularly in the developing countries is increasing at high rates. Severe shortage of liquid fuels derived from petroleum may be faced in the second half of this century. Recently more and more stringent environmental regulations being enacted in the USA and Europe have led to the research and development activities on clean alternative fuels. Among the gaseous fuels hydrogen is considered to be one of the clean alternative fuel. Hydrogen is an interesting candidate for future internal combustion engine based power trains. In this experimental investigation, the performance and combustion analysis were carried out on a direct injection (DI) diesel engine using hydrogen with diesel following the TMI(Time Manifold Injection) technique at different injection timings of 10 degree,45 degree and 80 degree ATDC using an electronic control unit (ECU) and injection durations were controlled. Further, the tests have been carried out at a constant speed of 1500rpm at different load conditions and it can be observed that brake thermal efficiency increases with increase in load conditions with a maximum gain of 15% at full load conditions during all injection strategies of hydrogen. It was also observed that with the increase in hydrogen energy share BSEC started reducing and it reduced to a maximum of 9% as compared to baseline diesel at 10deg ATDC injection during maximum injection proving the exceptional combustion properties of hydrogen.

Keywords: Hydrogen, performance, combustion, alternative fuels.

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573 A Brief Review on Recent Trends in Alternative Sources of Energy

Authors: Divya S., Jibin Joseph

Abstract:

Alternative energy is any energy source that is an alternative to fossil fuel. These alternatives are intended to address concerns about such fossil fuels. Today, because of the variety of energy choices and differing goals of their advocates, defining some energy types as "alternative" is highly controversial. Most of the recent and existing alternative sources of energy are discussed below

Keywords: Athra Quinone Disulphonic Acid (AQDS), Renewable Methanol (RM), Solid Oxide Fuel Cell (SOFC), Maximum Power Point Tracking (MPPT).

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572 Enhancing the Peer-To-Peer Architecture with a Roaming Service and OWL

Authors: Younes Djaghloul, Zizette Boufaida

Abstract:

This paper addresses the problem of building a unified structure to describe a peer-to-peer system. Our approach uses the well-known notations in the P2P area, and provides a global architecture that puts a separation between the platform specific characteristics and the logical ones. In order to enable the navigation of the peer across platforms, a roaming layer is added. The latter provides a capability to define a unique identification of peer and assures the mapping between this identification and those used in each platform. The mapping task is assured by special wrapper. In addition, ontology is proposed to give a clear presentation of the structure of the P2P system without interesting in the content and the resource managed by the peer. The ontology is created according to the web semantic paradigm and using OWL language; so, the structure of the system is considered as a web resource.

Keywords: Peer to peer, ontology, owl.

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571 Good Urban Planning and Management: New Aspects and Methodologies

Authors: Fattaneh Daneshmand Malayeri

Abstract:

In this paper, in addition to introducing good urban planning and its effects on globalization, some new methodologies in urban management and another urban aspects has been presented. Some new concerns in increasing of urban population , metropolitans and its relations on big problems has been focused in this paper. It is very important matter that future urban planning with based on globalization will be with full of basically changes in its management and perspectives.

Keywords: Urban planning, urban management, good governance, globalization, metropolitan, strategic planning

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570 Study of a Four-Bed Pressure Swing Adsorption for Oxygen Separation from Air

Authors: Moghadazadeh Zahra, Towfighi Jafar, Mofarahi Masoud

Abstract:

This article is presented an experimental and modeling study of a four-bed pressure swing adsorption process using zeolite13X to provide oxygen-enriched air. The binary mixture N2/O2 (79/21 vol %) was used as a feed stream. The effects of purge/feed ratio (P/F), adsorption pressure, cyclic time and product flow rate on product purity and recovery under nonisothermal condition were studied. The adsorption dynamics of process were determined using a mathematical model incorporated mass and energy balances. A Mathlab code using finite difference method was developed to solve the set of coupled differential-algebraic equations, and the simulation results are agreed well with experimental results.

Keywords: Pressure swing adsorption (PSA), Oxygen, Zeolite 13X.

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569 Morphological Description of Cervical Cell Images for the Pathological Recognition

Authors: N. Lassouaoui, L. Hamami, N. Nouali

Abstract:

The tracking allows to detect the tumor affections of cervical cancer, it is particularly complex and consuming time, because it consists in seeking some abnormal cells among a cluster of normal cells. In this paper, we present our proposed computer system for helping the doctors in tracking the cervical cancer. Knowing that the diagnosis of the malignancy is based in the set of atypical morphological details of all cells, herein, we present an unsupervised genetic algorithm for the separation of cell components since the diagnosis is doing by analysis of the core and the cytoplasm. We give also the various algorithms used for computing the morphological characteristics of cells (Ratio core/cytoplasm, cellular deformity, ...) necessary for the recognition of illness.

Keywords: Cervical cell, morphological analysis, recognition, segmentation.

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568 SQL Generator Based On MVC Pattern

Authors: Chanchai Supaartagorn

Abstract:

Structured Query Language (SQL) is the standard de facto language to access and manipulate data in a relational database. Although SQL is a language that is simple and powerful, most novice users will have trouble with SQL syntax. Thus, we are presenting SQL generator tool which is capable of translating actions and displaying SQL commands and data sets simultaneously. The tool was developed based on Model-View-Controller (MVC) pattern. The MVC pattern is a widely used software design pattern that enforces the separation between the input, processing, and output of an application. Developers take full advantage of it to reduce the complexity in architectural design and to increase flexibility and reuse of code. In addition, we use White-Box testing for the code verification in the Model module.

Keywords: MVC, relational database, SQL, White-Box testing.

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567 Effect of Span 60, Labrasol, and Cholesterol on Labisia pumila Loaded Niosomes Quality

Authors: H. Binti Ya’akob, C. Siew Chin, A. Abd Aziz, I. Ware, M. Fauzi Abd Jalil, N. Rashidah Ahmed, R. Sabtu

Abstract:

Labisia pumila (LP) plant extract has the potential to be applied in cosmeceutical products due to its anti-photoaging properties. The main purpose of this study was to improve transdermal delivery of LP by encapsulating LP in niosomes. Niosomes loaded LPs were prepared by coacervation phase separation method using non-ionic surfactant (Span 60), labrasol, and cholesterol. The optimum formula obtained were Span 60, labrasol and cholesterol at the mole ratio of 6:1:4. At the optimum formulation, the niosome obtained significantly improved the quality of transdermal penetration of LP compared to free LP.

Keywords: Labisia pumila, niosomes, transdermal, quality.

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566 C4H6 Adsorption on the Surface of a BN Nanotube: DFT Studies

Authors: Maziar Noei

Abstract:

Adsorption of a boron nitride nanotube (BNNT) was examined toward ethylacetylene (C4H6) molecule by using density functional theory (DFT) calculations at the B3LYP/6-31G (d) level, and it was found that the adsorption energy (Ead) of ethylacetylene the pristine nanotubes is about -1.60kcal/mol. But when nanotube has been doped with Si and Al atoms, the adsorption energy of ethylacetylene molecule was increased. Calculation showed that when the nanotube is doping by Al, the adsorption energy is about - 24.19kcal/mol and also the amount of HOMO/LUMO energy gap (Eg) will reduce significantly. Boron nitride nanotube is a suitable adsorbent for ethylacetylene and can be used in separation processes ethylacetylene. It is seem that nanotube (BNNT) is a suitable semiconductor after doping, and the doped BNNT in the presence of ethylacetylene an electrical signal is generating directly and therefore can potentially be used for ethylacetylene sensors.

Keywords: Sensor, Nanotube, DFT, Ethylacetylene.

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565 A Sliding Mesh Technique and Compressibility Correction Effects of Two-equation Turbulence Models for a Pintle-Perturbed Flow Analysis

Authors: J. Y. Heo, H. G. Sung

Abstract:

Numerical simulations have been performed for assessment of compressibility correction of two-equation turbulence models suitable for large scale separation flows perturbed by pintle strokes. In order to take into account pintle movement, a sliding mesh method was applied. The chamber pressure, mass flow rate, and thrust have been analyzed, and the response lag and sensitivity at the chamber and nozzle were estimated for a movable pintle. The nozzle performance for pintle reciprocating as its insertion and extraction processes, were analyzed to better understand the dynamic performance of the pintle nozzle.

Keywords: Pintle, sliding mesh, turbulent model, compressibility correction.

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564 Comparison of Machine Learning and Deep Learning Algorithms for Automatic Classification of 80 Different Pollen Species

Authors: Endrick Barnacin, Jean-Luc Henry, Jimmy Nagau, Jack Molinié

Abstract:

Palynology is a field of interest in many disciplines due to its multiple applications: chronological dating, climatology, allergy treatment, and honey characterization. Unfortunately, the analysis of a pollen slide is a complicated and time consuming task that requires the intervention of experts in the field, which are becoming increasingly rare due to economic and social conditions. In this context, the automation of this task is urgent. In this work, we compare classical feature extraction methods (Shape, GLCM, LBP, and others) and Deep Learning (CNN and Transfer Learning) to perform a recognition task over 80 regional pollen species. It has been found that the use of Transfer Learning seems to be more precise than the other approaches.

Keywords: Image segmentation, stuck particles separation, Sobel operator, thresholding.

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563 Preliminary Study for Separation of Heavy Rare Earth Concentrates from Egyptian Crude Monazite

Authors: Sherien H. Ahmed, Osama S. Helaly, Mohamed S. Abd El-Ghany

Abstract:

Heavy rare earth (HRE) oxalate concentrates were prepared from the Egyptian crude monazite sand (graded about 47%). The concentrates were specified quantitatively for their constituents of individual rare earth elements using ion chromatograph (IC) and qualitatively by scanning electron microscope (SEM) for the other major constituents. The 1st concentrate was composed of 10.5% HREE where 7.25% of them represented yttrium. The 2nd concentrate contained about 41.7% LREE, 17.5% HREE and 13.6% Th. The LREE involved 18.3% Ce, 10.5% La and 8% Nd while the HREE were 8.7% Y, 3.5% Gd and 2.9% Dy. The 3rd concentrate was containing about 8.0% LREE (3.7% Ce, 2.0% La and 1.5% Nd), 10.2% HREE (6.4% yttrium and 2.0% Dy) and 2.1% uranium. The final concentrate comprised 0.84% uranium beside iron, chromium and traces of REE.

Keywords: Oxalic Acid Precipitation, Rare Earth Concentrates, Thorium, Uranium.

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562 Hippocratic Database: A Privacy-Aware Database

Authors: Norjihan Abdul Ghani, Zailani Mohd Sidek

Abstract:

Nowadays, organizations and business has several motivating factors to protect an individual-s privacy. Confidentiality refers to type of sharing information to third parties. This is always referring to private information, especially for personal information that usually needs to keep as a private. Because of the important of privacy concerns today, we need to design a database system that suits with privacy. Agrawal et. al. has introduced Hippocratic Database also we refer here as a privacy-aware database. This paper will explain how HD can be a future trend for web-based application to enhance their privacy level of trustworthiness among internet users.

Keywords: Hippocratic database, privacy, privacy-aware.

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561 Introduce the FWA in the Band 3300-3400 MHz

Authors: Lway F. Abdulrazak, Zaid A. Shamsan, Ali K. Aswad, Tharek Abd. Rahman

Abstract:

This paper gives a study about forging solution to deploy the fixed wireless access (FWA) in the band 3300-3400MHz instead of 3400-3600MHz to eschew the harmful interference between from the FWA towards fixed satellite services receiver presented in this band. The impact of FWA services toward the FSS and the boundaries of spectrum emission mask had been considered to calculate the possible Guard band required in this case. In addition, supplementary separation distance added to improve the coexistence between the two adjacent bands. Simulation had been done using Matlab software base on ITU models reliance on the most popular specification used for the tropical weather countries. Review the current problem of interference between two systems and some mitigation techniques which adopted in Malaysia as a case study is a part of this research.

Keywords: Coexistence, FSS, FWA, mask.

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560 Gas Permeation Behavior of Single and Mixed Gas Components Using an Asymmetric Ceramic Membrane

Authors: Ngozi Nwogu, Edward Gobina

Abstract:

A dip-coating process has been used to form an asymmetric silica membrane with improved membrane performance and reproducibility. First, we deposited repeatedly silica on top of a commercial alumina membrane support to improve its structural make up. The membrane is further processed under clean room conditions to avoid dust impurity and subsequent drying in an oven for high thermal, chemical and physical stability. The resulting asymmetric membrane exhibits a gradual change in the membrane layer thickness. Compared to the support, the dual-layer process improves the gas flow rates. For the scientific applications for natural gas purification, CO2, CH4 and H2 gas flow rates were. In addition, the membrane selectively separated hydrogen.

Keywords: Gas permeation, Silica membrane, separation factor, membrane layer thickness.

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559 New Approach for Manipulation of Stratified Programs

Authors: Amel Grissa-Touzi, Chadlia Jerad, Habib Ounelli

Abstract:

Negation is useful in the majority of the real world applications. However, its introduction leads to semantic and canonical problems. We propose in this paper an approach based on stratification to deal with negation problems. This approach is based on an extension of predicates nets. It is characterized with two main contributions. The first concerns the management of the whole class of stratified programs. The second contribution is related to usual operations optimizations on stratified programs (maximal stratification, incremental updates ...).

Keywords: stratified programs, stratification, standard model, update operations, SEPN formalism.

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558 Health Risk Assessment of PET Bottles in GCC

Authors: M. M. Mortula

Abstract:

Bottle water is getting very popular all through the world; especially in the gulf countries as the main source of drinking water. However, concerns over leaching of toxic chemicals are increasing. In this study, a health risk assessment was conducted in accordance with the guidelines indicated by United States Environmental Protection Agency (USEPA). It is conducted based on leaching of Diethyl Phthalate (DEP) from Polyethylene terephthalate (PET). The toxicity and exposure assessment of diethyl phthalate was conducted to characterize its risk on human health. Risk management is also discussed.

Keywords: Toxicity, diethyl phthalate, PET, risk Assessment.

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557 Open Cloud Computing with Fault Tolerance

Authors: K. Zuva, T. Zuva, K. O. M. Mapoka

Abstract:

Cloud Computing (CC) has become one of the most talked about emerging technologies that provides powerful computing and large storage environments through the use of the Internet. Cloud computing provides different dynamically scalable computing resources as a service. It brings economic benefits to individuals and businesses that adopt the technology. In theory adoption of cloud computing reduces capital and operational expenditure on information technology. For this to be a reality there is need to solve some challenges and at the same time addressing concerns that consumers have about cloud computing. This paper looks at Cloud Computing in general then highlights the challenges of Cloud Computing and finally suggests solutions to some of the challenges.

Keywords: Cloud Computing, SaaS, PaaS, IaaS, Internet.

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556 Towards a Deconstructive Text: Beyond Language and the Politics of Absences in Samuel Beckett’s Waiting for Godot

Authors: Afia Shahid

Abstract:

The writing of Samuel Beckett is associated with meaning in the meaninglessness and the production of what he calls ‘literature of unword’. The casual escape from the world of words in the form of silences and pauses, in his play Waiting for Godot, urges to ask question of their existence and ultimately leads to investigate the theory behind their use in the play. This paper proposes that these absences (silence and pause) in Beckett’s play force to think ‘beyond’ language. This paper asks how silence and pause in Beckett’s text speak for the emergence of poststructuralist text. It aims to identify the significant features of the philosophy of deconstruction in the play of Beckett to demystify the hostile complicity between literature and philosophy. With the interpretive paradigm of poststructuralism this research focuses on the text as a research data. It attempts to delineate the relationship between poststructuralist theoretical concerns and text of Beckett. Keeping in view the theoretical concerns of Poststructuralist theorist Jacques Derrida, the main concern of the discussion is directed towards the notion of ‘beyond’ language into the absences that are aimed at silencing the existing discourse with the ‘radical irony’ of this anti-formal art that contains its own denial and thus represents the idea of ceaseless questioning and radical contradiction in art and any text. This article asks how text of Beckett vibrates with loud silence and has disrupted language to demonstrate the emptiness of words and thus exploring the limitless void of absences. Beckett’s text resonates with silence and pause that is neither negation nor affirmation rather a poststructuralist’s suspension of reality that is ever changing with the undecidablity of all meanings. Within the theoretical notion of Derrida’s Différance this study interprets silence and pause in Beckett’s art. The silence and pause behave like Derrida’s Différance and have questioned their own existence in the text to deconstruct any definiteness and finality of reality to extend an undecidable threshold of poststructuralists that aims to evade the ‘labyrinth of language’.

Keywords: Différance, language, pause, poststructuralism, silence, text.

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555 Applications of Big Data in Education

Authors: Faisal Kalota

Abstract:

Big Data and analytics have gained a huge momentum in recent years. Big Data feeds into the field of Learning Analytics (LA) that may allow academic institutions to better understand the learners’ needs and proactively address them. Hence, it is important to have an understanding of Big Data and its applications. The purpose of this descriptive paper is to provide an overview of Big Data, the technologies used in Big Data, and some of the applications of Big Data in education. Additionally, it discusses some of the concerns related to Big Data and current research trends. While Big Data can provide big benefits, it is important that institutions understand their own needs, infrastructure, resources, and limitation before jumping on the Big Data bandwagon.

Keywords: Analytics, Big Data in Education, Hadoop, Learning Analytics.

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554 Experimental and Numerical Investigation of Flow Control Using a Novel Active Slat

Authors: Basman Elhadidi, Islam Elqatary, Osama Mohamady, Hesham Othman

Abstract:

An active slat is developed to increase the lift and delay the separation for a DU96-W180 airfoil. The active slat is a fixed slat that can be closed, fully opened or intermittently opened by a rotating vane depending on the need. Experimental results show that the active slat has reduced the mean pressure and increased the mean velocity on the suction side of the airfoil for all positive angles of attack, indicating an increase of lift. The experimental data and numerical simulations also show that the direction of actuator vane rotation can influence the mixing of the flow streams on the suction side and hence influence the aerodynamic performance.

Keywords: Active slat, flow control.

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553 Recovery of Acetonitrile from Aqueous Solutions by Extractive Distillation–Effect of Entrainer

Authors: Aleksandra Yu. Sazonova, Valentina M. Raeva

Abstract:

The aim of this work was to apply extractive distillation for acetonitrile removal from water solutions, to validate thermodynamic criterion based on excess Gibbs energy to entrainer selection process for acetonitrile – water mixture separation and show its potential efficiency at isothermal conditions as well as at isobaric (conditions of real distillation process), to simulate and analyze an extractive distillation process with chosen entrainers: optimize amount of trays and feeds, entrainer/original mixture and reflux ratios. Equimolar composition of the feed stream was chosen for the process, comparison of the energy consumptions was carried out. Glycerol was suggested as the most energetically and ecologically suitable entrainer.

Keywords: Acetonitrile, entrainer, extractive distillation, water.

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552 PIV Investigation into the Evolution of Vortical Structures in the Zero Pressure Gradient Boundary Layer

Authors: Ishtiaq A. Chaudhry, Zia R. Tahir

Abstract:

Experimental investigation has been carried out towards understanding the complex fluid dynamics involved in the interaction of vortical structures with zero pressure gradient boundary layer. A laminar boundary layer is produced on the flat plate placed in the water flume and the synthetic jet actuator is deployed on top of the plate at a definite distance from the leading edge. The synthetic jet actuator has been designed in such a way that the to and fro motion of the diaphragm is maneuvered at will by varying the operating parameters to produce the typical streamwise vortical structures namely hairpin and tilted vortices. PIV measurements are made on the streamwise plane normal to the plate to evaluate their interaction with the near wall fluid.

Keywords: Boundary layer, synthetic jet actuator, flow separation control, vortical structures.

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551 Agrowaste: Phytosterol from Durian Seed

Authors: D. Mohd Nazrul Hisham, J. Mohd Lip, R. Suri, H. Mohamed Shafit, Z.Kharis, K. Shazlin, A. Normah, M.F. Nurul Nabilah

Abstract:

Presence of phytosterol compound in Durian seed (Durio zibethinus) or known as King of fruits has been discovered from screening work using reagent test. Further analysis work has been carried out using mass spectrometer in order to support the priliminary finding. Isolation and purification of the major phytosterol has been carried out using an open column chromatography. The separation was monitored using thin layer chromatography (TLC). Major isolated compounds and purified phytosterol were identified using mass spectrometer and nuclear magnetic resonance (NMR). This novel finding could promote utilization of durian seeds as a functional ingredient in food products through production of standardized extract based on phytosterol content.

Keywords: Agrowaste, durian, seed, phytosterol

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550 Balanced and Unbalanced Voltage Sag Mitigation Using DSTATCOM with Linear and Nonlinear Loads

Authors: H. Nasiraghdam, A. Jalilian

Abstract:

DSTATCOM is one of the equipments for voltage sag mitigation in power systems. In this paper a new control method for balanced and unbalanced voltage sag mitigation using DSTATCOM is proposed. The control system has two loops in order to regulate compensator current and load voltage. Delayed signal cancellation has been used for sequence separation. The compensator should protect sensitive loads against different types of voltage sag. Performance of the proposed method is investigated under different types of voltage sags for linear and nonlinear loads. Simulation results show appropriate operation of the proposed control system.

Keywords: Custom power, power quality, voltage sagmitigation, current vector control.

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549 NSBS: Design of a Network Storage Backup System

Authors: Xinyan Zhang, Zhipeng Tan, Shan Fan

Abstract:

The first layer of defense against data loss is the backup data. This paper implements an agent-based network backup system used the backup, server-storage and server-backup agent these tripartite construction, and the snapshot and hierarchical index are used in the NSBS. It realizes the control command and data flow separation, balances the system load, thereby improving efficiency of the system backup and recovery. The test results show the agent-based network backup system can effectively improve the task-based concurrency, reasonably allocate network bandwidth, the system backup performance loss costs smaller and improves data recovery efficiency by 20%.

Keywords: Agent, network backup system, three architecture model, NSBS.

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548 An Application for Web Mining Systems with Services Oriented Architecture

Authors: Thiago M. R. Dias, Gray F. Moita, Paulo E. M. Almeida

Abstract:

Although the World Wide Web is considered the largest source of information there exists nowadays, due to its inherent dynamic characteristics, the task of finding useful and qualified information can become a very frustrating experience. This study presents a research on the information mining systems in the Web; and proposes an implementation of these systems by means of components that can be built using the technology of Web services. This implies that they can encompass features offered by a services oriented architecture (SOA) and specific components may be used by other tools, independent of platforms or programming languages. Hence, the main objective of this work is to provide an architecture to Web mining systems, divided into stages, where each step is a component that will incorporate the characteristics of SOA. The separation of these steps was designed based upon the existing literature. Interesting results were obtained and are shown here.

Keywords: Web Mining, Service Oriented Architecture, WebServices.

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547 Robust H8 Fuzzy Control Design for Nonlinear Two-Time Scale System with Markovian Jumps based on LMI Approach

Authors: Wudhichai Assawinchaichote, Sing Kiong Nguang

Abstract:

This paper examines the problem of designing a robust H8 state-feedback controller for a class of nonlinear two-time scale systems with Markovian Jumps described by a Takagi-Sugeno (TS) fuzzy model. Based on a linear matrix inequality (LMI) approach, LMI-based sufficient conditions for the uncertain Markovian jump nonlinear two-time scale systems to have an H8 performance are derived. The proposed approach does not involve the separation of states into slow and fast ones and it can be applied not only to standard, but also to nonstandard nonlinear two-time scale systems. A numerical example is provided to illustrate the design developed in this paper.

Keywords: TS fuzzy, Markovian jumps, LMI, two-time scale systems.

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546 Wetting Characterization of High Aspect Ratio Nanostructures by Gigahertz Acoustic Reflectometry

Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

Abstract:

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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