Search results for: Brain Computer Interface (BCI)

Authors: M. Nageswara Rao

Abstract:

In this paper, a topology for high voltage gain half-bridge z-source inverter with low voltage stress on capacitors is proposed. The proposed inverter has only one impedance network. It can generate symmetric and asymmetric voltages with different magnitudes during both half-cycles. By selecting the duty cycle it can also produce conventional half-bridge inverter characteristics. It is used in special applications like, electrochemical and electro plating applications. Calculations of voltage ripple of capacitors, capacitors voltage stress inductors current ripple are presented. The proposed topology is simulated using PSCAD software and the simulated values are compared with the theoretical values.

Keywords: Half-bridge inverter, impedance network-source inverter, high voltage gain inverter, power system computer aided design.

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Authors: Rajoo Pandey

Abstract:

Most of the commonly used blind equalization algorithms are based on the minimization of a nonconvex and nonlinear cost function and a neural network gives smaller residual error as compared to a linear structure. The efficacy of complex valued feedforward neural networks for blind equalization of linear and nonlinear communication channels has been confirmed by many studies. In this paper we present two neural network models for blind equalization of time-varying channels, for M-ary QAM and PSK signals. The complex valued activation functions, suitable for these signal constellations in time-varying environment, are introduced and the learning algorithms based on the CMA cost function are derived. The improved performance of the proposed models is confirmed through computer simulations.

Keywords: Blind Equalization, Neural Networks, Constant Modulus Algorithm, Time-varying channels.

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Authors: Sepehr Aslani, Homayoun Mahdavi-Nasab

Abstract:

Automated motion detection and tracking is a challenging task in traffic surveillance. In this paper, a system is developed to gather useful information from stationary cameras for detecting moving objects in digital videos. The moving detection and tracking system is developed based on optical flow estimation together with application and combination of various relevant computer vision and image processing techniques to enhance the process. To remove noises, median filter is used and the unwanted objects are removed by applying thresholding algorithms in morphological operations. Also the object type restrictions are set using blob analysis. The results show that the proposed system successfully detects and tracks moving objects in urban videos.

Keywords: Optical flow estimation, moving object detection, tracking, morphological operation, blob analysis.

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Authors: Hasanifard Goran, Habib Nejad Korayem Moharam, Nikoobin Amin

Abstract:

A new robust nonlinear control scheme of a manipulator is proposed in this paper which is robust against modeling errors and unknown disturbances. It is based on the principle of variable structure control, with sliding mode control (SMC) method. The variable structure control method is a robust method that appears to be well suited for robotic manipulators because it requers only bounds on the robotic arm parameters. But there is no single systematic procedure that is guaranteed to produce a suitable control law. Also, to reduce chattring of the control signal, we replaced the sgn function in the control law by a continuous approximation such as tangant function. We can compute the maximum load with regard to applied torque into joints. The effectivness of the proposed approach has been evaluated analitically demonstrated through computer simulations for the cases of variable load and robot arm parameters.

Keywords: Variable structure control, robust control, switching surface, robot manipulator.

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Authors: C. Senanayake, S. Veera Ragavan

Abstract:

Warehousing is commonly used in factories for the storage of products until delivery of orders. As the amount of products stored increases it becomes tedious to be carried out manually. In recent years, the manual storing has converted into fully or partially computer controlled systems, also known as Automated Storage and Retrieval Systems (AS/RS). This paper discusses an ASRS system, which was designed such that the best storage location for the products is determined by utilizing a fuzzy control system. The design maintains the records of the products to be/already in store and the storage/retrieval times along with the availability status of the storage locations. This paper discusses on the maintenance of the above mentioned records and the utilization of the concept of fuzzy logic in order to determine the optimum storage location for the products. The paper will further discuss on the dynamic splitting and merging of the storage locations depending on the product sizes.

Keywords: ASRS, fuzzy control systems, MySQL database, dynamic splitting and merging.

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Authors: Tetsuki Taniguchi, Yoshio Karasawa

Abstract:

This paper describes a subarray based low computational design method of multiuser massive multiple input multiple output (MIMO) system. In our previous works, use of large array is assumed only in transmitter, but this study considers the case both of transmitter and receiver sides are equipped with large array antennas. For this aim, receive arrays are also divided into several subarrays, and the former proposed method is modified for the synthesis of a large array from subarrays in both ends. Through computer simulations, it is verified that the performance of the proposed method is degraded compared with the original approach, but it can achieve the improvement in the aspect of complexity, namely, significant reduction of the computational load to the practical level.

Keywords: Massive multiple input multiple output (MIMO), multiuser, large array, subarray, zero forcing, singular value decomposition.

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Authors: H. Özkan

Abstract:

In this paper, a novel and fast algorithm for segmental and subsegmental lung vessel segmentation is introduced using Computed Tomography Angiography images. This process is quite important especially at the detection of pulmonary embolism, lung nodule, and interstitial lung disease. The applied method has been realized at five steps. At the first step, lung segmentation is achieved. At the second one, images are threshold and differences between the images are detected. At the third one, left and right lungs are gathered with the differences which are attained in the second step and Exact Lung Image (ELI) is achieved. At the fourth one, image, which is threshold for vessel, is gathered with the ELI. Lastly, identifying and segmentation of segmental and subsegmental lung vessel have been carried out thanks to image which is obtained in the fourth step. The performance of the applied method is found quite well for radiologists and it gives enough results to the surgeries medically.

Keywords: Computed tomography angiography (CTA), Computer aided detection (CAD), Lung segmentation, Lung vessel segmentation

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Authors: Santanu Santra, Utpal Roy

Abstract:

The most important mathematical operation for any computing system is addition. An efficient adder can be of greater assistance in designing of any arithmetic circuits. Quantum-dot Cellular Automata (QCA) is a promising nanotechnology to create electronic circuits for computing devices and suitable candidate for next generation of computing systems. The article presents a modest approach to implement a novel XOR gate. The gate is simple in structure and powerful in terms of implementing digital circuits. By applying the XOR gate, the hardware requirement for a QCA circuit can be decrease and circuits can be simpler in level, clock phase and cell count. In order to verify the functionality of the proposed device some implementation of Half Adder (HA) and Full Adder (FA) is checked by means of computer simulations using QCA-Designer tool. Simulation results and physical relations confirm its usefulness in implementing every digital circuit.

Keywords: Clock, Computing system, Majority gate, QCA, QCA Designer.

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Authors: Whee Yen Wong, Chan Wai Lee, Kim Yeow Tshai

Abstract:

Producing IT products/services required carefully designed. IT development process is intangible and labour intensive. Making optimal use of available resources, both soft (knowledge, skill-set etc.) and hard (computer system, ancillary equipment etc.), is vital if IT development is to achieve sensible economical advantages. Apart from the norm of Project Life Cycle and System Development Life Cycle (SDLC), there is an urgent need to establish a general yet widely acceptable guideline on the most effective and efficient way to precede an IT project in the broader view of Product Life Cycle. The current paper proposes such a framework with two major areas of concern: (1) an integration of IT Products and IT Services within an existing IT Process architecture and; (2) how IT Product and IT Services are built into the framework of Product Life Cycle, Project Life Cycle and SDLC.

Keywords: Mapping of Quality Relationship, IT Processes/IT Products/IT Services, Product Life Cycle, System Development Life Cycle.

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Authors: J. Dzugan, M. Spaniel, P. Konopík, J. Ruzicka, J. Kuzelka

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The modeling of inelastic behavior of plastic materials requires measurements providing information on material response to different multiaxial loading conditions. Different triaxiality conditions and values of Lode parameters have to be covered for complex description of the material plastic behavior. Samples geometries providing material plastic behavoiur over the range of interest are proposed with the use of FEM analysis. Round samples with 3 different notches and smooth surface are used together with butterfly type of samples tested at angle ranging for 0 to 90°. Identification of ductile damage parameters is carried out on the basis of obtained experimental data for austenitic stainless steel. The obtained material plastic damage parameters are subsequently applied to FEM simulation of notched CT normally samples used for fracture mechanics testing and results from the simulation are compared with real tests.

Keywords: baqus, austenitic steel, computer simulation, ductile damage, triaxiality

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Authors: Sameh H. Ghwanmeh

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In this study a clustering technique has been implemented which is K-Means like with hierarchical initial set (HKM). The goal of this study is to prove that clustering document sets do enhancement precision on information retrieval systems, since it was proved by Bellot & El-Beze on French language. A comparison is made between the traditional information retrieval system and the clustered one. Also the effect of increasing number of clusters on precision is studied. The indexing technique is Term Frequency * Inverse Document Frequency (TF * IDF). It has been found that the effect of Hierarchical K-Means Like clustering (HKM) with 3 clusters over 242 Arabic abstract documents from the Saudi Arabian National Computer Conference has significant results compared with traditional information retrieval system without clustering. Additionally it has been found that it is not necessary to increase the number of clusters to improve precision more.

Keywords: Hierarchical K-mean like clustering (HKM), Kmeans, cluster centroids, initial partition, and document distances

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Authors: Nobuhiko Hishinuma, Jun Igari, Rentaro Yoshioka

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When programming in languages such as C, Java, etc., it is difficult to reconstruct the programmer's ideas only from the program code. This occurs mainly because, much of the programmer's ideas behind the implementation are not recorded in the code during implementation. For example, physical aspects of computation such as spatial structures, activities, and meaning of variables are not required as instructions to the computer and are often excluded. This makes the future reconstruction of the original ideas difficult. AIDA, which is a multimedia programming language based on the cyberFilm model, can solve these problems allowing to describe ideas behind programs using advanced annotation methods as a natural extension to programming. In this paper, a development environment that implements the AIDA language is presented with a focus on the annotation methods. In particular, an actual scientific numerical computation code is created and the effects of the annotation methods are analyzed.

Keywords: cyberFilm, development environment, knowledge engineering, multimedia programming language

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Authors: Tadayoshi Horita, Masakazu Akiba, Mina Terauchi, Tsuneo Kanno

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This paper gives a consideration of the achievement of productive level parallel programming skills, based on the data of the graduation studies in the Polytechnic University of Japan. The data show that most students can achieve only parallel programming skills during the graduation study (about 600 to 700 hours), if the programming environment is limited to GPGPUs. However, the data also show that it is a very high level task that a student achieves productive level parallel programming skills during only the graduation study. In addition, it shows that the parallel programming environments for GPGPU, such as CUDA and OpenCL, may be more suitable for parallel computing education than other environments such as MPI on a cluster system and Cell.B.E. These results must be useful for the areas of not only software developments, but also hardware product developments using computer technologies.

Keywords: Parallel computing, programming education, GPU, GPGPU, CUDA, OpenCL, MPI, Cell.B.E.

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Authors: Tsai-Sheng Kao

Abstract:

The ideal sinc filter, ignoring the noise statistics, is often applied for generating an arbitrary sample of a bandlimited signal by using the uniformly sampled data. In this article, an optimal interpolator is proposed; it reaches a minimum mean square error (MMSE) at its output in the presence of noise. The resulting interpolator is thus a Wiener filter, and both the optimal infinite impulse response (IIR) and finite impulse response (FIR) filters are presented. The mean square errors (MSE-s) for the interpolator of different length impulse responses are obtained by computer simulations; it shows that the MSE-s of the proposed interpolators with a reasonable length are improved about 0.4 dB under flat power spectra in noisy environment with signal-to-noise power ratio (SNR) equal 10 dB. As expected, the results also demonstrate the improvements for the MSE-s with various fractional delays of the optimal interpolator against the ideal sinc filter under a fixed length impulse response.

Keywords: Interpolator, minimum mean square error, Wiener filter.

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Authors: Ramin Karimzadeh, Nazi Rahimi, Mohammad Ghashghaee

Abstract:

In the present research, steam cracking of two types of feedstocks i.e., naphtha and ethane is simulated for Pyrocrack1-1 and 2/2 coil configurations considering two key parameters of coil outlet temperature (COT) and coil capacity using a radical based kinetic model. The computer model is confirmed using the industrial data obtained from Amirkabir Petrochemical Complex. The results are in good agreement with performance data for naphtha cracking in a wide range of severity (0.4-0.7), and for ethane cracking on various conversions (50-70). It was found that Pyrocrack2-2 coil type is an appropriate choice for steam cracking of ethane at reasonable ethylene yield while resulting in much lower tube wall temperature while Pyrocrack1-1 coil type is a proper selection for liquid feedstocks i.e. naphtha. It can be used for cracking of liquid feedstocks at optimal ethylene yield whereas not exceeding the allowable maximum tube temperature.

Keywords: Coil configuration, Ethane, Naphtha, Steamcracking.

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Authors: Guangyu Liu

Abstract:

In the last decade, energy based control theory has undergone a significant breakthrough in dealing with underactated mechanical systems with two successful and similar tools, controlled Lagrangians and controlled Hamiltanians (IDA-PBC). However, because of the complexity of these tools, successful case studies are lacking, in particular, MIMO cases. The seminal theoretical paper of controlled Lagrangians proposed by Bloch and his colleagues presented a benchmark example–a 4 d.o.f underactuated pendulum on a cart but a detailed and completed design is neglected. To compensate this ignorance, the note revisit their design idea by addressing explicit control functions for a similar device motivated by a vector thrust body hovering in the air. To the best of our knowledge, this system is the first MIMO, underactuated example that is stabilized by using energy based tools at the courtesy of the original design idea. Some observations are given based on computer simulation.

Keywords: Controlled Lagrangian, Energy Shaping, Spherical Inverted Pendulum, Controlled Hamiltonian.

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Authors: Chunming Xu

Abstract:

Sparse representation which can represent high dimensional data effectively has been successfully used in computer vision and pattern recognition problems. However, it doesn-t consider the label information of data samples. To overcome this limitation, we develop a novel dimensionality reduction algorithm namely dscriminatively regularized sparse subspace learning(DR-SSL) in this paper. The proposed DR-SSL algorithm can not only make use of the sparse representation to model the data, but also can effective employ the label information to guide the procedure of dimensionality reduction. In addition,the presented algorithm can effectively deal with the out-of-sample problem.The experiments on gene-expression data sets show that the proposed algorithm is an effective tool for dimensionality reduction and gene-expression data classification.

Keywords: sparse representation, dimensionality reduction, labelinformation, sparse subspace learning, gene-expression data classification.

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Authors: Fernando Miguel Campos, Carlos Ferreira, João Pestana, Pedro Campos, Nils Ehrenberg, Wojciech Hydzik

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The current trend of organizations offering their workers open-office spaces and co-working offices has been primed for stimulating teamwork and collaboration. However, this is not always valid as these kinds of spaces bring other types of challenges that compromise workers productivity and creativity. We present an approach for improving creativity and productivity at the workspace by redesigning an office chair that incorporates subtle technological elements that help users focus, relax and being more productive and creative. This sheds light on how we can better design interactive furniture for such popular contexts, as we develop this new chair through a multidisciplinary approach using ergonomics, interior design, interaction design, hardware and software engineering and psychology.

Keywords: Creativity, co-working, ergonomics, human-computer interaction, interaction, interactive furniture, productivity.

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Authors: Fangfang Chen, Chunlu Wang, Zhihong Tian, Shuyuan Jin, Tianle Zhang

Abstract:

Attack graph is an integral part of modeling the overview of network security. System administrators use attack graphs to determine how vulnerable their systems are and to determine what security measures to deploy to defend their systems. Previous methods on AGG(attack graphs generation) are aiming at the whole network, which makes the process of AGG complex and non-scalable. In this paper, we propose a new approach which is simple and scalable to AGG by decomposing the whole network into atomic domains. Each atomic domain represents a host with a specific privilege. Then the process for AGG is achieved by communications among all the atomic domains. Our approach simplifies the process of design for the whole network, and can gives the attack graphs including each attack path for each host, and when the network changes we just carry on the operations of corresponding atomic domains which makes the process of AGG scalable.

Keywords: atomic domain, vulnerability, attack graphs, generation, computer security

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Authors: N. A. Muhamad, S.A.M. Ali

Abstract:

Condition monitoring of electrical power equipment has attracted considerable attention for many years. The aim of this paper is to use Labview with Fuzzy Logic controller to build a simulation system to diagnose transformer faults and monitor its condition. The front panel of the system was designed using LabVIEW to enable computer to act as customer-designed instrument. The dissolved gas-in-oil analysis (DGA) method was used as technique for oil type transformer diagnosis; meanwhile terminal voltages and currents analysis method was used for dry type transformer. Fuzzy Logic was used as expert system that assesses all information keyed in at the front panel to diagnose and predict the condition of the transformer. The outcome of the Fuzzy Logic interpretation will be displayed at front panel of LabVIEW to show the user the conditions of the transformer at any time.

Keywords: LabVIEW, Fuzzy Logic, condition monitoring, oiltransformer, dry transformer, DGA, terminal values.

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Authors: M. Izvercianu, L. Ivascu

Abstract:

This paper presents an innovative computer system that contributes to sustainable development of the enterprise. The research refers to a rethinking of traditional systems of collaboration and risk assessment, present in any organization, leading to a sustainable enterprise. This concept integrates emerging tools that allow the implementation and exploitation of the collective intelligence of the enterprise, allowing the exchange of contextual, agile and simplified information, and collaboration with networks of customers and partners in an environment where risks are controlled. Risk assessment is done in a systemic way: the enterprise as the system compared to the contained departments and the enterprise as a subsystem compared to: families of international standards and sustainability-s responsibilities. The enterprise, in this systemic vision, responds to the requirements that any existing system to operate continuously in an indefinite future without reaching key resource depletion. The research is done by integrating collaborative science, engineering, management, psychology, obtaining thus a cornerstone of sustainable development of the enterprise.

Keywords: Enterprise 2.0, ISO, Risk management, Sustainable development

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Authors: Suken Nayak, Aditya Kambli, Bharati Ingale, Gauri Shukla

Abstract:

The technological concepts such as wireless hospital and portable cardiac telemetry system require the development of physiological signal acquisition devices to be easily integrated into the hospital database. In this paper we present the low cost, portable wireless ECG acquisition hardware that transmits ECG signals to a dedicated computer.The front end of the system obtains and processes incoming signals, which are then transmitted via a microcontroller and wireless Bluetooth module. A monitoring purpose Bluetooth based end user application integrated with patient database management module is developed for the computers. The system will act as a continuous event recorder, which can be used to follow up patients who have been resuscitatedfrom cardiac arrest, ventricular tachycardia but also for diagnostic purposes for patients with arrhythmia symptoms. In addition, cardiac information can be saved into the patient-s database of the hospital.

Keywords: ECG, Bluetooth communication, monitoring application, patient database

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Authors: Denis Trcek

Abstract:

Trust is essential for further and wider acceptance of contemporary e-services. It was first addressed almost thirty years ago in Trusted Computer System Evaluation Criteria standard by the US DoD. But this and other proposed approaches of that period were actually solving security. Roughly some ten years ago, methodologies followed that addressed trust phenomenon at its core, and they were based on Bayesian statistics and its derivatives, while some approaches were based on game theory. However, trust is a manifestation of judgment and reasoning processes. It has to be dealt with in accordance with this fact and adequately supported in cyber environment. On the basis of the results in the field of psychology and our own findings, a methodology called qualitative algebra has been developed, which deals with so far overlooked elements of trust phenomenon. It complements existing methodologies and provides a basis for a practical technical solution that supports management of trust in contemporary computing environments. Such solution is also presented at the end of this paper.

Keywords: internet security, trust management, multi-agent systems, reasoning and judgment, modeling and simulation, qualitativealgebra

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Authors: Ali M. Alakeel

Abstract:

Load balancing in distributed computer systems is the process of redistributing the work load among processors in the system to improve system performance. Most of previous research in using fuzzy logic for the purpose of load balancing has only concentrated in utilizing fuzzy logic concepts in describing processors load and tasks execution length. The responsibility of the fuzzy-based load balancing process itself, however, has not been discussed and in most reported work is assumed to be performed in a distributed fashion by all nodes in the network. This paper proposes a new fuzzy dynamic load balancing algorithm for homogenous distributed systems. The proposed algorithm utilizes fuzzy logic in dealing with inaccurate load information, making load distribution decisions, and maintaining overall system stability. In terms of control, we propose a new approach that specifies how, when, and by which node the load balancing is implemented. Our approach is called Centralized-But-Distributed (CBD).

Keywords: Dynamic load balancing, fuzzy logic, distributed systems, algorithm.

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Authors: Badr Hssina, Belaid Bouikhalene, Abdelkrim Merbouha

Abstract:

This article presents our prototype MASET (Multi Agents System for E-Tutoring Learners engaged in online collaborative work). MASET that we propose is a system which basically aims to help tutors in monitoring the collaborative work of students and their various interactions. The evaluation of such interactions by the tutor is based on the results provided by the automatic analysis of the interaction indicators. This system is predicated upon the middleware JADE (Java Agent Development Framework) and e-learning Moodle platform. The MASET environment is modeled by AUML which allows structuring the different interactions between agents for the fulfillment and performance of online collaborative work. This multi-agent system has been the subject of a practical experimentation based on the interactions data between Master Computer Engineering and System students.

Keywords: AUML, Collaborative work, E-learning, E-tutoring, JADE, Moodle, SMA, Web Agent.

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Authors: Hazim Abdulsada

Abstract:

The inspection of underneath vehicle system has been given significant attention by governments after the threat of terrorism become more prevalent. New technologies such as mobile robots and computer vision are led to have more secure environment. This paper proposed that a mobile robot like Aria robot can be used to search and inspect the bombs under parking a lot vehicle. This robot is using fuzzy logic and subsumption algorithms to control the robot that movies underneath the vehicle. An OpenCV library and laser Hokuyo are added to Aria robot to complete the experiment for under vehicle inspection. This experiment was conducted at the indoor environment to demonstrate the efficiency of our methods to search objects and control the robot movements under vehicle. We got excellent results not only by controlling the robot movement but also inspecting object by the robot camera at same time. This success allowed us to know the requirement to construct a new cost effective robot with more functionality.

Keywords: Fuzzy logic, Mobile robots, OpenCV, Subsumption, Under vehicle inspection.

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Authors: Mountassar Maamoun, Abdelhamid Meraghni, Abdelhalim Benbelkacem, Daoud Berkani

Abstract:

This paper describes an efficient hardware implementation of a new technique for interfacing the data exchange between the microprocessor-based systems and the external devices. This technique, based on the use of software/hardware system and a reduced physical address, enlarges the interfacing capacity of the microprocessor-based systems, uses the Direct Memory Access (DMA) to increases the frequency of the new bus, and improves the speed of data exchange. While using this architecture in microprocessor-based system or in computer, the input of the hardware part of our system will be connected to the bus system, and the output, which is a new bus, will be connected to an external device. The new bus is composed of a data bus, a control bus and an address bus. A Xilinx Integrated Software Environment (ISE) 7.1i has been used for the programmable logic implementation.

Keywords: Interfacing, Software/hardware System, CPLD, programmable logic, DMA.

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Authors: I. Abuiziah, A. Oulhaj, K. Sebari, D. Ouazar

Abstract:

The primary objectives of transient analysis are to determine the values of transient pressures that can result from flow control operations and to establish the design criteria for system equipment and devices (such as control devices and pipe wall thickness) so as to provide an acceptable level of protection against system failure due to pipe collapse or bursting. Because of the complexity of the equations needed to describe transients, numerical computer models are used to analyze transient flow hydraulics. An effective numerical model allows the hydraulic engineer to analyze potential transient events and to identify and evaluate alternative solutions for controlling hydraulic transients, thereby protecting the integrity of the hydraulic system. This paper presents the influence of using the protection devices to control the adverse effects due to excessive and low pressure occurs in the transient.

Keywords: Flow Transient, Water hammer, Pipeline System, Surge Tank, Simulation Model, Protection Devices.

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Authors: Md. Mahmudul Hasan

Abstract:

Wavelet analysis has some strong advantages over Fourier analysis, as it allows a time-frequency domain analysis, allowing optimal resolution and flexibility. As a result, they have been satisfactorily applied in almost all the fields of communication systems including OFDM which is a strong candidate for next generation of wireless technology. In this paper, the performances of wavelet based Multiuser Multiple Input and Multiple Output Orthogonal Frequency Division Multiplexing (MU-MIMO OFDM) systems are analyzed in terms of BER. It has been shown that the wavelet based systems outperform the classical FFT based systems. This analysis also unfolds an interesting result, where wavelet based OFDM system will have a constant error performance using Regularized Channel Inversion (RCI) beamforming for any number of users, and outperforms in all possible scenario in a multiuser environment. An extensive computer simulations show that a PAPR reduction of up to 6.8dB can be obtained with M=64.

Keywords: Wavelet Based OFDM, Optimal Beam-forming, Multiuser MIMO OFDM, Signal to Leakage Ratio.

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Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

Abstract:

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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