Search results for: Static output feedback controller.
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 2760

Search results for: Static output feedback controller.

1320 Haptics Enabled of ine AFM Image Analysis

Authors: Bhatti A., Nahavandi S., Hossny M.

Abstract:

Current advancements in nanotechnology are dependent on the capabilities that can enable nano-scientists to extend their eyes and hands into the nano-world. For this purpose, a haptics (devices capable of recreating tactile or force sensations) based system for AFM (Atomic Force Microscope) is proposed. The system enables the nano-scientists to touch and feel the sample surfaces, viewed through AFM, in order to provide them with better understanding of the physical properties of the surface, such as roughness, stiffness and shape of molecular architecture. At this stage, the proposed work uses of ine images produced using AFM and perform image analysis to create virtual surfaces suitable for haptics force analysis. The research work is in the process of extension from of ine to online process where interaction will be done directly on the material surface for realistic analysis.

Keywords: Haptics, AFM, force feedback, image analysis.

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1319 Comparison of the DC/DC-Converters for Fuel Cell Applications

Authors: Oleksandr Krykunov

Abstract:

The source voltage of high-power fuel cell shows strong load dependence at comparatively low voltage levels. In order to provide the voltage of 750V on the DC-link for feeding electrical energy into the mains via a three phase inverter a step-up converter with a large step-up ratio is required. The output voltage of this DC/DC-converter must be stabile during variations of the load current and the voltage of the fuel cell. This paper presents the methods and results of the calculation of the efficiency and the expense for the realization for the circuits of the DC/DC-converter that meet these requirements.

Keywords: DC/DC-converter, calculation, efficiency, fuel cell.

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1318 Remote Monitoring and Control System of Potentiostat Based on the Internet of Things

Authors: Liang Zhao, Guangwen Wang, Guichang Liu

Abstract:

Constant potometer is an important component of pipeline anti-corrosion systems in the chemical industry. Based on Internet of Things (IoT) technology, Programmable Logic Controller (PLC) technology and database technology, this paper developed a set of a constant potometer remote monitoring management system. The remote monitoring and remote adjustment of the working status of the constant potometer are realized. The system has real-time data display, historical data query, alarm push management, user permission management, and supporting Web access and mobile client application (APP) access. The actual engineering project test results show the stability of the system, which can be widely used in cathodic protection systems.

Keywords: Internet of Things, pipe corrosion protection, potentiostat, remote monitoring.

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1317 Urban Planning Formulation Problems in China and the Corresponding Optimization Ideas under the Vision of the Hypercycle Theory

Authors: Hong Dongchen, Chen Qiuxiao, Wu Shuang

Abstract:

Systematic Science reveals the complex nonlinear mechanisms of behavior in urban system. However, when confronted with such system, most city planners in China are still utilizing simple linear thinking to learn and understand this open complex giant system. In this paper, the hypercycle theory was introduced, which is one of the basis theories of systematic science. Based on the analysis of the reasons for the failure of current urban planning in China, and in consideration of the nonlinear characteristics of the urban system as well, optimization ideas for urban planning formulation were presented such as the shift from blueprint planning to progressive planning and from the rigid urban planning management control to its dynamically monitor and in time feedback.

Keywords: Systematic science, hypercycle theory, urban planning.

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1316 Effect of Inclusions on the Shape and Size of Crack Tip Plastic Zones by Element Free Galerkin Method

Authors: A. Jameel, G. A. Harmain, Y. Anand, J. H. Masoodi, F. A. Najar

Abstract:

The present study investigates the effect of inclusions on the shape and size of crack tip plastic zones in engineering materials subjected to static loads by employing the element free Galerkin method (EFGM). The modeling of the discontinuities produced by cracks and inclusions becomes independent of the grid chosen for analysis. The standard displacement approximation is modified by adding additional enrichment functions, which introduce the effects of different discontinuities into the formulation. The level set method has been used to represent different discontinuities present in the domain. The effect of inclusions on the extent of crack tip plastic zones is investigated by solving some numerical problems by the EFGM.

Keywords: EFGM, stress intensity factors, crack tip plastic zones, inclusions.

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1315 Matrix-Based Linear Analysis of Switched Reluctance Generator with Optimum Pole Angles Determination

Authors: Walid A. M. Ghoneim, Hamdy A. Ashour, Asmaa E. Abdo

Abstract:

In this paper, linear analysis of a Switched Reluctance Generator (SRG) model is applied on the most common configurations (4/2, 6/4 and 8/6) for both conventional short-pitched and fully-pitched designs, in order to determine the optimum stator/rotor pole angles at which the maximum output voltage is generated per unit excitation current. This study is focused on SRG analysis and design as a proposed solution for renewable energy applications, such as wind energy conversion systems. The world’s potential to develop the renewable energy technologies through dedicated scientific researches was the motive behind this study due to its positive impact on economy and environment. In addition, the problem of rare earth metals (Permanent magnet) caused by mining limitations, banned export by top producers and environment restrictions leads to the unavailability of materials used for rotating machines manufacturing. This challenge gave authors the opportunity to study, analyze and determine the optimum design of the SRG that has the benefit to be free from permanent magnets, rotor windings, with flexible control system and compatible with any application that requires variable-speed operation. In addition, SRG has been proved to be very efficient and reliable in both low-speed or high-speed applications. Linear analysis was performed using MATLAB simulations based on the (Modified generalized matrix approach) of Switched Reluctance Machine (SRM). About 90 different pole angles combinations and excitation patterns were simulated through this study, and the optimum output results for each case were recorded and presented in detail. This procedure has been proved to be applicable for any SRG configuration, dimension and excitation pattern. The delivered results of this study provide evidence for using the 4-phase 8/6 fully pitched SRG as the main optimum configuration for the same machine dimensions at the same angular speed.

Keywords: Generalized matrix approach, linear analysis, renewable applications, switched reluctance generator, SRG.

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1314 Dimensioning of Subsynchronous Cascade for Speed Regulation of Two-Motors 6kv Conveyer Drives

Authors: M. Kasumović, A. Hodžić, M. Tešanović

Abstract:

One way for optimum loading of overdimensioning conveyers is speed (capacity) decrement, with attention for production capabilities and demands. At conveyers which drives with three phase slip-ring induction motor, technically reasonable solution for conveyer (driving motors) speed regulation is using constant torque subsynchronous cascade with static semiconductor converter and transformer for energy reversion to the power network. In the paper is described mathematical model for parameter calculation of two-motors 6 kV subsynchronous cascade. It is also demonstrated that applying of this cascade gave several good properties, foremost in electrical energy saving, also in improving of other energy indexes, and finally that results in cost reduction of complete electrical motor drive.

Keywords: Conveyer with rubber belt, electrical motor drive, sub synchronous cascade

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1313 A Generic e-Tutor for Graphical Problems

Authors: B.W. Field

Abstract:

For a variety of safety and economic reasons, engineering undergraduates in Australia have experienced diminishing access to the real hardware that is typically the embodiment of their theoretical studies. This trend will delay the development of practical competence, decrease the ability to model and design, and suppress motivation. The author has attempted to address this concern by creating a software tool that contains both photographic images of real machinery, and sets of graphical modeling 'tools'. Academics from a range of disciplines can use the software to set tutorial tasks, and incorporate feedback comments for a range of student responses. An evaluation of the software demonstrated that students who had solved modeling problems with the aid of the electronic tutor performed significantly better in formal examinations with similar problems. The 2-D graphical diagnostic routines in the Tutor have the potential to be used in a wider range of problem-solving tasks.

Keywords: CAL, graphics, modeling, structural distillation, tutoring.

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1312 Achieving Business and IT Alignment from Organisational Learning Perspectives

Authors: Hamad Hussain Balhareth, Kecheng Liu, Sharm Manwani

Abstract:

Business and IT alignment has continued as a top concern for business and IT executives for almost three decades. Many researchers have conducted empirical studies on the relationship between business-IT alignment and performance. Yet, these approaches, lacking a social perspective, have had little impact on sustaining performance and competitive advantage. In addition to the limited alignment literature that explores organisational learning that is represented in shared understanding, communication, cognitive maps and experiences. Hence, this paper proposes an integrated process that enables social and intellectual dimensions through the concept of organisational learning. In particular, the feedback and feedforward process which provide a value creation across dynamic multilevel of learning. This mechanism enables on-going effectiveness through development of individuals, groups and organisations, which improves the quality of business and IT strategies and drives to performance.

Keywords: business-IT alignment, social dimension, intellectual dimension, organisational learning

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1311 Video Quality assessment Measure with a Neural Network

Authors: H. El Khattabi, A. Tamtaoui, D. Aboutajdine

Abstract:

In this paper, we present the video quality measure estimation via a neural network. This latter predicts MOS (mean opinion score) by providing height parameters extracted from original and coded videos. The eight parameters that are used are: the average of DFT differences, the standard deviation of DFT differences, the average of DCT differences, the standard deviation of DCT differences, the variance of energy of color, the luminance Y, the chrominance U and the chrominance V. We chose Euclidean Distance to make comparison between the calculated and estimated output.

Keywords: video, neural network MLP, subjective quality, DCT, DFT, Retropropagation

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1310 Genetic Combined with a Simplex Algorithm as an Efficient Method for the Detection of a Depressed Ellipsoidal Flaw using the Boundary Element Method

Authors: Clio G. Vossou, Ioannis N. Koukoulis, Christopher G. Provatidis

Abstract:

The present work encounters the solution of the defect identification problem with the use of an evolutionary algorithm combined with a simplex method. In more details, a Matlab implementation of Genetic Algorithms is combined with a Simplex method in order to lead to the successful identification of the defect. The influence of the location and the orientation of the depressed ellipsoidal flaw was investigated as well as the use of different amount of static data in the cost function. The results were evaluated according to the ability of the simplex method to locate the global optimum in each test case. In this way, a clear impression regarding the performance of the novel combination of the optimization algorithms, and the influence of the geometrical parameters of the flaw in defect identification problems was obtained.

Keywords: Defect identification, genetic algorithms, optimization.

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1309 Multi-Level Meta-Modeling for Enabling Dynamic Subtyping for Industrial Automation

Authors: Zoltan Theisz, Gergely Mezei

Abstract:

Modern industrial automation relies on service oriented concepts of Internet of Things (IoT) device modeling in order to provide a flexible and extendable environment for service meta-repository. However, state-of-the-art meta-modeling techniques prefer design-time modeling, which results in a heavy usage of class sometimes unnecessary static subtyping. Although this approach benefits from clear-cut object-oriented design principles, it also seals the model repository for further dynamic extensions. In this paper, a dynamic multi-level modeling approach is introduced that enables dynamic subtyping through a more relaxed partial instantiation mechanism. The approach is demonstrated on a simple sensor network example.

Keywords: Meta-modeling, dynamic subtyping, DMLA, industrial automation, arrowhead.

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1308 Haptics Enabled Offline AFM Image Analysis

Authors: Bhatti A., Nahavandi S., Hossny M.

Abstract:

Current advancements in nanotechnology are dependent on the capabilities that can enable nano-scientists to extend their eyes and hands into the nano-world. For this purpose, a haptics (devices capable of recreating tactile or force sensations) based system for AFM (Atomic Force Microscope) is proposed. The system enables the nano-scientists to touch and feel the sample surfaces, viewed through AFM, in order to provide them with better understanding of the physical properties of the surface, such as roughness, stiffness and shape of molecular architecture. At this stage, the proposed work uses of ine images produced using AFM and perform image analysis to create virtual surfaces suitable for haptics force analysis. The research work is in the process of extension from of ine to online process where interaction will be done directly on the material surface for realistic analysis.

Keywords: Haptics, AFM, force feedback, image analysis.

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1307 Design and Simulation Interface Circuit for Piezoresistive Accelerometers with Offset Cancellation Ability

Authors: Mohsen Bagheri, Ahmad Afifi

Abstract:

This paper presents a new method for read out of the piezoresistive accelerometer sensors. The circuit works based on Instrumentation amplifier and it is useful for reducing offset In Wheatstone Bridge. The obtained gain is 645 with 1μv/°c Equivalent drift and 1.58mw power consumption. A Schmitt trigger and multiplexer circuit control output node. a high speed counter is designed in this work .the proposed circuit is designed and simulated In 0.18μm CMOS technology with 1.8v power supply.

Keywords: Piezoresistive accelerometer, zero offset, Schmitt trigger, bidirectional reversible counter

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1306 The Robot Hand System that can Control Grasping Power by SEMG

Authors: Tsubasa Seto, Kentaro Nagata, Kazushige Magatani

Abstract:

SEMG (Surface Electromyogram) is one of the bio-signals and is generated from the muscle. And there are many research results that use forearm EMG to detect hand motions. In this paper, we will talk about our developed the robot hand system that can control grasping power by SEMG. In our system, we suppose that muscle power is proportional to the amplitude of SEMG. The power is estimated and the grip power of a robot hand is able to be controlled using estimated muscle power in our system. In addition, to perform a more precise control can be considered to build a closed loop feedback system as an object to a subject to pressure from the edge of hand. Our objectives of this study are the development of a method that makes perfect detection of the hand grip force possible using SEMG patterns, and applying this method to the man-machine interface.

Keywords: SEMG, multi electrode, robot hand, power control

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1305 Maximum Wind Power Extraction Strategy and Decoupled Control of DFIG Operating in Variable Speed Wind Generation Systems

Authors: Abdellatif Kasbi, Abderrafii Rahali

Abstract:

This paper appraises the performances of two control scenarios, for doubly fed induction generator (DFIG) operating in wind generation system (WGS), which are the direct decoupled control (DDC) and indirect decoupled control (IDC). Both control scenarios studied combines vector control and Maximum Power Point Tracking (MPPT) control theory so as to maximize the captured power through wind turbine. Modeling of DFIG based WGS and details of both control scenarios have been presented, a proportional integral controller is employed in the active and reactive power control loops for both control methods. The performance of the both control scenarios in terms of power reference tracking and robustness against machine parameters inconstancy has been shown, analyzed and compared, which can afford a reference to the operators and engineers of a wind farm. All simulations have been implemented via MATLAB/Simulink.

Keywords: DFIG, WGS, DDC, IDC, vector control, MPPT.

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1304 Modeling and Analysis of Twelve-phase (Multi- Phase) DSTATCOM for Multi-Phase Load Circuits

Authors: Zakir Husain

Abstract:

This paper presents modeling and analysis of 12-phase distribution static compensator (DSTATCOM), which is capable of balancing the source currents in spite of unbalanced loading and phase outages. In addition to balance the supply current, the power factor can be set to a desired value. The theory of instantaneous symmetrical components is used to generate the twelve-phase reference currents. These reference currents are then tracked using current controlled voltage source inverter, operated in a hysteresis band control scheme. An ideal compensator in place of physical realization of the compensator is used. The performance of the proposed DTATCOM is validated through MATLAB simulation and detailed simulation results are given.

Keywords: DSTATCOM, Modeling, Load balancing, Multiphase, Power factor correction.

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1303 A Research on DC Voltage Offsets Generated by PWM-Controlled Inverters

Authors: Marios N. Moschakis

Abstract:

The increasing penetration of Distributed Generation and storage connected to the distribution network via PWM converters increases the possibility of a DC-component (offset) in voltage or current flowing into the grid. This occurs when even harmonics are present in the network voltage. DC-components can affect the operation and safety of several grid components. Therefore, an investigation of the way they are produced is important in order to take appropriate measures for their elimination. Further research on DC-components that appear on output voltage of converters is performed for different parameters of PWM technique and characteristics of even harmonics.

Keywords: Asymmetric even harmonics, DC-offsets, distributed generation, electric machine drive systems, power quality.

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1302 Harmonic Analysis of 240 V AC Power Supply using TMS320C6713 DSK

Authors: Dody Ismoyo, Mohammad Awan, Norashikin Yahya

Abstract:

The presence of harmonic in power system is a major concerned to power engineers for many years. With the increasing usage of nonlinear loads in power systems, the harmonic pollution becomes more serious. One of the widely used computation algorithm for harmonic analysis is fast Fourier transform (FFT). In this paper, a harmonic analyzer using FFT was implemented on TMS320C6713 DSK. The supply voltage of 240 V 59 Hz is stepped down to 5V using a voltage divider in order to match the power rating of the DSK input. The output from the DSK was displayed on oscilloscope and Code Composer Studio™ software. This work has demonstrated the possibility of analyzing the 240V power supply harmonic content using the DSK board.

Keywords: Harmonic Analysis, DSP.

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1301 A Simple Autonomous Hovering and Operating Control of Multicopter Using Only Web Camera

Authors: Kazuya Sato, Toru Kasahara, Junji Kuroda, Tomoyuki Izu

Abstract:

In this paper, an autonomous hovering control method of multicopter using only Web camera is proposed. Recently, various control method of an autonomous flight for multicopter are proposed. But, in the previous proposed methods, a motion capture system (i. e., OptiTrack) and laser range finder are often used to measure the position and posture of multicopter. To achieve an autonomous flight control of multicopter with simple equipments, we propose an autonomous flight control method using AR marker and Web camera. AR marker can measure the position of multicopter with Cartesian coordinate in three dimensional, then its position connects with aileron, elevator, and accelerator throttle operation. A simple PID control method is applied to the each operation and adjust the controller gains. Experimental results are given to show the effectiveness of our proposed method. Moreover, another simple operation method for autonomous flight control multicopter is also proposed.

Keywords: Autonomous hovering control, multicopter, Web camera.

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1300 Global Chaos Synchronization of Identical and Nonidentical Chaotic Systems Using Only Two Nonlinear Controllers

Authors: Azizan Bin Saaban, Adyda Binti Ibrahim, Mohammad Shehzad, Israr Ahmad

Abstract:

In chaos synchronization, the main goal is to design such controller(s) that synchronizes the states of master and slave system asymptotically globally. This paper studied and investigated the synchronization problem of two identical Chen, and identical Tigan chaotic systems and two non-identical Chen and Tigan chaotic systems using Non-linear active control algorithm. In this study, based on Lyapunov stability theory and using non-linear active control algorithm, it has been shown that the proposed schemes have excellent transient performance using only two nonlinear controllers and have shown analytically as well as graphically that synchronization is asymptotically globally stable.

Keywords: Nonlinear Active Control, Chen and Tigan Chaotic systems, Lyapunov Stability theory, Synchronization.

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1299 Multiagent Systems Simulation

Authors: G. Balakayeva, A. Aktymbayeva

Abstract:

In this paper, we consider components of discrete event imitating model, implementing a simulation model by using JAVA and performing an input analysis of the data and an output analysis of the simulation results. Was lead development of imitating model of mass service system with n (n≥1) devices of service. On the basis of the developed process of a multithreading simulated the distributed processes with presence of synchronization. Was developed the algorithm of event-oriented simulation, was received results of system functioning with n devices of service.

Keywords: Imitating modeling, Mass service system, Multi agentsystem.

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1298 Fin Spacing Effect of the Tube Fin Heat Exchanger at the Floor Heating Convector

Authors: F. Lemfeld, K. Frana

Abstract:

This article deals with numerical simulation of the floor heating convector in 3D. Numerical simulation is focused on cooling mode of the floor heating convector. Geometrical model represents section of the heat exchanger – two fins with the gap between, pipes are not involved. Two types of fin are examined – sinusoidal and angular shape with different fin spacing. Results of fin spacing in case of constant Reynolds number are presented. For the numerical simulation was used commercial software Ansys Fluent.

Keywords: fin spacing, cooling output, floor heating convector, numerical simulation.

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1297 XPM Response of Multiple Quantum Well chirped DFB-SOA All Optical Flip-Flop Switching

Authors: Masoud Jabbari, Mohammad Kazem Moravvej-Farshi, Rahim Ghayour, Abbas Zarifkar

Abstract:

In this paper, based on the coupled-mode and carrier rate equations, derivation of a dynamic model and numerically analysis of a MQW chirped DFB-SOA all-optical flip-flop is done precisely. We have analyzed the effects of strains of QW and MQW and cross phase modulation (XPM) on the dynamic response, and rise and fall times of the DFB-SOA all optical flip flop. We have shown that strained MQW active region in under an optimized condition into a DFB-SOA with chirped grating can improve the switching ON speed limitation in such a of the device, significantly while the fall time is increased. The values of the rise times for such an all optical flip-flop, are obtained in an optimized condition, areas tr=255ps.

Keywords: All-Optical Flip-Flop (AO-FF), Distributed feedback semiconductor optical amplifier (DFB-SOA), Optical Bistability, Multi quantum well (MQW)

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1296 Design of Angular Estimator of Inertial Sensor Using the Least Square Method

Authors: Ji Hoon Kim, Hyung Gi Min, Jae Dong Cho, Jae Hoon Jang, Sung-Ha Kwon, Eun Tae Jeung

Abstract:

Since MEMS gyro sensors measure not angle of rotation but angular rate, an estimator is designed to estimate the angles in many applications. Gyro and accelerometer are used to improve estimating accuracy of the angle. This paper presents a method of finding filter coefficients of the well-known estimator which is to get rotation angles from gyro and accelerometer data. In order to verify the performance of our method, the estimated angle is compared with the encoder output in a rotary pendulum system.

Keywords: gyro, accelerometer, estimator, least square.

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1295 Pseudo-polynomial Motion Commands for Vibration Suppression of Belt-driven Rotary Platforms

Authors: Giovanni Incerti

Abstract:

The motion planning technique described in this paper has been developed to eliminate or reduce the residual vibrations of belt-driven rotary platforms, while maintaining unchanged the motion time and the total angular displacement of the platform. The proposed approach is based on a suitable choice of the motion command given to the servomotor that drives the mechanical device; this command is defined by some numerical coefficients which determine the shape of the displacement, velocity and acceleration profiles. Using a numerical optimization technique, these coefficients can be changed without altering the continuity conditions imposed on the displacement and its time derivatives at the initial and final time instants. The proposed technique can be easily and quickly implemented on an actual device, since it requires only a simple modification of the motion command profile mapped in the memory of the electronic motion controller.

Keywords: Command shaping, residual vibrations, belt transmission, servomechanism.

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1294 Airplane Stability during Climb/Descend Phase Using a Flight Dynamics Simulation

Authors: Niloufar Ghoreishi, Ali Nekouzadeh

Abstract:

The stability of the flight during maneuvering and in response to probable perturbations is one of the most essential features of an aircraft that should be analyzed and designed for. In this study, we derived the non-linear governing equations of aircraft dynamics during the climb/descend phase and simulated a model aircraft. The corresponding force and moment dimensionless coefficients of the model and their variations with elevator angle and other relevant aerodynamic parameters were measured experimentally. The short-period mode and phugoid mode response were simulated by solving the governing equations numerically and then compared with the desired stability parameters for the particular level, category, and class of the aircraft model. To meet the target stability, a controller was designed and used. This resulted in significant improvement in the stability parameters of the flight.

Keywords: Flight stability, phugoid mode, short period mode, climb phase, damping coefficient.

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1293 An Enhanced Situational Awareness of AUV's Mission by Multirate Neural Control

Authors: Igor Astrov, Mikhail Pikkov

Abstract:

This paper focuses on a critical component of the situational awareness (SA), the neural control of depth flight of an autonomous underwater vehicle (AUV). Constant depth flight is a challenging but important task for AUVs to achieve high level of autonomy under adverse conditions. With the SA strategy, we proposed a multirate neural control of an AUV trajectory using neural network model reference controller for a nontrivial mid-small size AUV "r2D4" stochastic model. This control system has been demonstrated and evaluated by simulation of diving maneuvers using software package Simulink. From the simulation results it can be seen that the chosen AUV model is stable in the presence of high noise, and also can be concluded that the fast SA of similar AUV systems with economy in energy of batteries can be asserted during the underwater missions in search-and-rescue operations.

Keywords: Autonomous underwater vehicles, multirate systems, neurocontrollers, situational awareness.

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1292 Multiple Crack Identification Using Frequency Measurement

Authors: J.W. Xiang, M. Liang

Abstract:

This paper presents a method to detect multiple cracks based on frequency information. When a structure is subjected to dynamic or static loads, cracks may develop and the modal frequencies of the cracked structure may change. To detect cracks in a structure, we construct a high precision wavelet finite element (EF) model of a certain structure using the B-spline wavelet on the interval (BSWI). Cracks can be modeled by rotational springs and added to the FE model. The crack detection database will be obtained by solving that model. Then the crack locations and depths can be determined based on the frequency information from the database. The performance of the proposed method has been numerically verified by a rotor example.

Keywords: Rotor, frequency measurement, multiple cracks, wavelet finite element method, identification.

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1291 The Design, Development, and Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9 DOF Platform

Authors: Andrew Randles, Ilker Ocak, Cheam Daw Don, Navab Singh, Alex Gu

Abstract:

Nine Degrees of Freedom (9 DOF) systems are already in development in many areas. In this paper, an integrated pressure sensor is proposed that will make use of an already existing monolithic 9 DOF inertial MEMS platform. Capacitive pressure sensors can suffer from limited sensitivity for a given size of membrane. This novel pressure sensor design increases the sensitivity by over 5 times compared to a traditional array of square diaphragms while still fitting within a 2 mm x 2 mm chip and maintaining a fixed static capacitance. The improved design uses one large diaphragm supported by pillars with fixed electrodes placed above the areas of maximum deflection. The design optimization increases the sensitivity from 0.22 fF/kPa to 1.16 fF/kPa. Temperature sensitivity was also examined through simulation.

Keywords: Capacitive pressure sensor, 9 DOF, 10 DOF, sensor, capacitive, inertial measurement unit, IMU, inertial navigation system, INS.

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