Search results for: mixtures
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 222

Search results for: mixtures

12 Laboratory Evaluation of Asphalt Concrete Prepared with Over Burnt Brick Aggregate Treated by Zycosoil

Authors: D. Sarkar, M. Pal, A. K. Sarkar

Abstract:

Asphaltic concrete for pavement construction in India are produced by using crushed stone, gravels etc. as aggregate. In north-Eastern region of India, there is a scarcity of stone aggregate. Therefore the road engineers are always in search of an optional material as aggregate which can replace the regularly used material. The purpose of this work was to evaluate the utilization of substandard or marginal aggregates in flexible pavement construction. The investigation was undertaken to evaluate the effects of using lower quality aggregates such as over burnt brick aggregate on the preparation of asphalt concrete for flexible pavements. The scope of this work included a review of available literature and existing data, a laboratory evaluation organized to determine the effects of marginal aggregates and potential techniques to upgrade these substandard materials, and a laboratory evaluation of these upgraded marginal aggregate asphalt mixtures. Over burnt brick aggregates are water susceptible and can leads to moisture damage. Moisture damage is the progressive loss of functionality of the material owing to loss of the adhesion bond between the asphalt binder and the aggregate surface. Hence zycosoil as an anti striping additive were evaluated in this study. This study summarizes the results of the laboratory evaluation carried out to investigate the properties of asphalt concrete prepared with zycosoil modified over burnt brick aggregate. Marshall specimen were prepared with stone aggregate, zycosoil modified stone aggregate, over burnt brick aggregate and zycosoil modified over burnt brick aggregate. Results show that addition of zycosoil with stone aggregate increased stability by 6% and addition of zycosoil with over burnt brick aggregate increased stability by 30%.

Keywords: Asphalt Concrete, Over Burnt Brick Aggregate, Marshall Stability, Zycosoil.

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11 Experimental and Numerical Study on the Effects of Oxygen Methane Flames with Water Dilution for Different Pressures

Authors: J. P. Chica Cano, G. Cabot, S. de Persis, F. Foucher

Abstract:

Among all possibilities to combat global warming, CO2 capture and sequestration (CCS) is presented as a great alternative to reduce greenhouse gas (GHG) emission. Several strategies for CCS from industrial and power plants are being considered. The concept of combined oxy-fuel combustion has been the most alternative solution. Nevertheless, due to the high cost of pure O2 production, additional ways recently emerged. In this paper, an innovative combustion process for a gas turbine cycle was studied: it was composed of methane combustion with oxygen enhanced air (OEA), exhaust gas recirculation (EGR) and H2O issuing from STIG (Steam Injection Gas Turbine), and the CO2 capture was realized by membrane separator. The effect on this combustion process was emphasized, and it was shown that a study of the influence of H2O dilution on the combustion parameters by experimental and numerical approaches had to be carried out. As a consequence, the laminar burning velocities measurements were performed in a stainless steel spherical combustion from atmospheric pressure to high pressure (up to 0.5 MPa), at 473 K for an equivalence ratio at 1. These experimental results were satisfactorily compared with Chemical Workbench v.4.1 package in conjunction with GRIMech 3.0 reaction mechanism. The good correlations so obtained between experimental and calculated flame speed velocities showed the validity of the GRIMech 3.0 mechanism in this domain of combustion: high H2O dilution, low N2, medium pressure. Finally, good estimations of flame speed and pollutant emissions were determined in other conditions compatible with real gas turbine. In particular, mixtures (composed of CH4/O2/N2/H2O/ or CO2) leading to the same adiabatic temperature were investigated. Influences of oxygen enrichment and H2O dilution (compared to CO2) were disused.

Keywords: CO2 capture, oxygen enrichment, water dilution, laminar burning velocity, pollutants emissions.

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10 Reutilization of Organic and Peat Soils by Deep Cement Mixing

Authors: Bee-Lin Tang, Ismail Bakar, Chee - Ming Chan

Abstract:

Limited infrastructure development on peats and organic soils is a serious geotechnical issues common to many countries of the world especially Malaysia which distributed 1.5 mill ha of those problematic soil. These soils have high water content and organic content which exhibit different mechanical properties and may also change chemically and biologically with time. Constructing structures on peaty ground involves the risk of ground failure and extreme settlement. Nowdays, much efforts need to be done in making peatlands usable for construction due to increased landuse. Deep mixing method employing cement as binders, is generally used as measure again peaty/ organic ground failure problem. Where the technique is widely adopted because it can improved ground considerably in a short period of time. An understanding of geotechnical properties as shear strength, stiffness and compressibility behavior of these soils was requires before continues construction on it. Therefore, 1- 1.5 meter peat soil sample from states of Johor and an organic soil from Melaka, Malaysia were investigated. Cement were added to the soil in the pre-mixing stage with water cement ratio at range 3.5,7,14,140 for peats and 5,10,30 for organic soils, essentially to modify the original soil textures and properties. The mixtures which in slurry form will pour to polyvinyl chloride (pvc) tube and cured at room temperature 250C for 7,14 and 28 days. Laboratory experiments were conducted including unconfined compressive strength and bender element , to monitor the improved strength and stiffness of the 'stabilised mixed soils'. In between, scanning electron miscroscopic (SEM) were observations to investigate changes in microstructures of stabilised soils and to evaluated hardening effect of a peat and organic soils stabilised cement. This preliminary effort indicated that pre-mixing peat and organic soils contributes in gaining soil strength while help the engineers to establish a new method for those problematic ground improvement in further practical and long term applications.

Keywords: peat soils, organic soils, cement stabilisation, strength, stiffness.

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9 Trapping Efficiency of Diesel Particles Through a Square Duct

Authors: Francis William S, Imtiaz Ahmed Choudhury, Ananda Kumar Eriki, A. John Rajan

Abstract:

Diesel Engines emit complex mixtures of inorganic and organic compounds in the form of both solid and vapour phase particles. Most of the particulates released are ultrafine nanoparticles which are detrimental to human health and can easily enter the body by respiration. The emissions standards on particulate matter release from diesel engines are constantly upgraded within the European Union and with future regulations based on the particles numbers released instead of merely mass, the need for effective aftertreatment devices will increase. Standard particulate filters in the form of wall flow filters can have problems with high soot accumulation, producing a large exhaust backpressure. A potential solution would be to combine the standard filter with a flow through filter to reduce the load on the wall flow filter. In this paper soot particle trapping has been simulated in different continuous flow filters of monolithic structure including the use of promoters, at laminar flow conditions. An Euler Lagrange model, the discrete phase model in Ansys used with user defined functions for forces acting on particles. A method to quickly screen trapping of 5 nm and 10 nm particles in different catalysts designs with tracers was also developed. Simulations of square duct monoliths with promoters show that the strength of the vortices produced are not enough to give a high amount of particle deposition on the catalyst walls. The smallest particles in the simulations, 5 and 10 nm particles were trapped to a higher extent, than larger particles up to 1000 nm, in all studied geometries with the predominant deposition mechanism being Brownian diffusion. The comparison of the different filters designed with a wall flow filter does show that the options for altering a design of a flow through filter, without imposing a too large pressure drop penalty are good.

Keywords: Diesel Engine trap, thermophoresis, Exhaust pipe, PM-Simulation modeling.

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8 An Investigation into the Potential of Industrial Low Grade Heat in Membrane Distillation for Freshwater Production

Authors: Yehia Manawi, Ahmad Kayvani Fard

Abstract:

Membrane distillation is an emerging technology which has been used to produce freshwater and purify different types of aqueous mixtures. Qatar is an arid country where almost 100% of its freshwater demand is supplied through the energy-intensive thermal desalination process. The country’s need for water has reached an all-time high which stipulates finding an alternative way to augment freshwater without adding any drastic affect to the environment. The objective of this paper was to investigate the potential of using the industrial low grade waste heat to produce freshwater using membrane distillation. The main part of this work was conducting a heat audit on selected Qatari chemical industries to estimate the amounts of freshwater produced if such industrial waste heat were to be recovered. By the end of this work, the main objective was met and the heat audit conducted on the Qatari chemical industries enabled us to estimate both the amounts of waste heat which can be potentially recovered in addition to the amounts of freshwater which can be produced if such waste heat were to be recovered.

By the end, the heat audit showed that around 605 Mega Watts of waste heat can be recovered from the studied Qatari chemical industries which resulted in a total daily production of 5078.7 cubic meter of freshwater.

This water can be used in a wide variety of applications such as human consumption or industry. The amount of produced freshwater may look small when compared to that produced through thermal desalination plants; however, one must bear in mind that this water comes from waste and can be used to supply water for small cities or remote areas which are not connected to the water grid. The idea of producing freshwater from the two widely-available wastes (thermal rejected brine and waste heat) seems promising as less environmental and economic impacts will be associated with freshwater production which may in the near future augment the conventional way of producing freshwater currently being thermal desalination. This work has shown that low grade waste heat in the chemical industries in Qatar and perhaps the rest of the world can contribute to additional production of freshwater using membrane distillation without significantly adding to the environmental impact.

Keywords: Membrane distillation, desalination, heat recovery, environment.

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7 Development of Mechanical Properties of Self Compacting Concrete Contain Rice Husk Ash

Authors: M. A. Ahmadi, O. Alidoust, I. Sadrinejad, M. Nayeri

Abstract:

Self-compacting concrete (SCC), a new kind of high performance concrete (HPC) have been first developed in Japan in 1986. The development of SCC has made casting of dense reinforcement and mass concrete convenient, has minimized noise. Fresh self-compacting concrete (SCC) flows into formwork and around obstructions under its own weight to fill it completely and self-compact (without any need for vibration), without any segregation and blocking. The elimination of the need for compaction leads to better quality concrete and substantial improvement of working conditions. SCC mixes generally have a much higher content of fine fillers, including cement, and produce excessively high compressive strength concrete, which restricts its field of application to special concrete only. To use SCC mixes in general concrete construction practice, requires low cost materials to make inexpensive concrete. Rice husk ash (RHA) has been used as a highly reactive pozzolanic material to improve the microstructure of the interfacial transition zone (ITZ) between the cement paste and the aggregate in self compacting concrete. Mechanical experiments of RHA blended Portland cement concretes revealed that in addition to the pozzolanic reactivity of RHA (chemical aspect), the particle grading (physical aspect) of cement and RHA mixtures also exerted significant influences on the blending efficiency. The scope of this research was to determine the usefulness of Rice husk ash (RHA) in the development of economical self compacting concrete (SCC). The cost of materials will be decreased by reducing the cement content by using waste material like rice husk ash instead of. This paper presents a study on the development of Mechanical properties up to 180 days of self compacting and ordinary concretes with rice-husk ash (RHA), from a rice paddy milling industry in Rasht (Iran). Two different replacement percentages of cement by RHA, 10%, and 20%, and two different water/cementicious material ratios (0.40 and 0.35), were used for both of self compacting and normal concrete specimens. The results are compared with those of the self compacting concrete without RHA, with compressive, flexural strength and modulus of elasticity. It is concluded that RHA provides a positive effect on the Mechanical properties at age after 60 days. Base of the result self compacting concrete specimens have higher value than normal concrete specimens in all test except modulus of elasticity. Also specimens with 20% replacement of cement by RHA have the best performance.

Keywords: Self compacting concrete (SCC), Rice husk ash(RHA), Mechanical properties.

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6 Dry Binder Mixing of Field Trial Investigation Using Soil Mix Technology: A Case Study on Contaminated Site Soil

Authors: M. Allagoa, A. Al-Tabbaa

Abstract:

The study explores the use of binders and additives, such as Portland cement, pulverized fuel ash, ground granulated blast furnace slag, and MgO, to reduce the concentration and leachability of pollutants in contaminated site soils. The research investigates their effectiveness and associated risks of binders, with a focus on Total Heavy Metals (THM) and Total Petroleum Hydrocarbon (TPH). The goal of this research is to evaluate the performance and effectiveness of binders and additives in remediating soil pollutants. The study aims to assess the suitability of the mixtures for ground improvement purposes, determine the optimal dosage, and investigate the associated risks. The research utilizes physical (unconfined compressive strength) and chemical tests (batch leachability test) to assess the efficacy of the binders and additives. A completely randomized design one-way ANOVA is used to determine the significance within mix binders of THM. The study also employs incremental lifetime cancer risk (ILCR) assessments and other indices to evaluate the associated risks. The study finds that Ground Granulated Blast Furnace Slag (GGBS): MgO is the most effective binder for remediation, particularly when using low dosages of MgO combined with higher dosages of GGBS binders on TPH. The results indicate that binders and additives can encapsulate and immobilize pollutants, thereby reducing their leachability and toxicity. The mean unconfined compressive strength of the soil ranges from 285.0-320.5 kPa, while THM levels with a combination of Ground granulated blast furnace slag and Magnesium oxide, Portland cement and Pulverised fuel ash were less than 10 µg/l. Portland cement was below 1 µg/l. The ILCR ranged from 6.77E-02 - 2.65E-01 and 5.444E-01 - 3.20 E+00, with the highest values observed under extreme conditions. The hazard index (HI), risk allowable daily dose intake (ADI), and risk chronic daily intake (CDI) were all less than 1 for the THM. The study identifies MgO as the best additive for use in soil remediation.

Keywords: Risk daily dose intake, risk chronic daily intake, incremental lifetime cancer risk, ILCR, novel binders, additives binders, hazard index.

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5 Utilization of Rice Husk Ash with Clay to Produce Lightweight Coarse Aggregates for Concrete

Authors: Shegufta Zahan, Muhammad A. Zahin, Muhammad M. Hossain, Raquib Ahsan

Abstract:

Rice Husk Ash (RHA) is one of the agricultural waste byproducts available widely in the world and contains a large amount of silica. In Bangladesh, stones cannot be used as coarse aggregate in infrastructure works as they are not available and need to be imported from abroad. As a result, bricks are mostly used as coarse aggregates in concrete as they are cheaper and easily produced here. Clay is the raw material for producing brick. Due to rapid urban growth and the industrial revolution, demand for brick is increasing, which led to a decrease in the topsoil. This study aims to produce lightweight block aggregates with sufficient strength utilizing RHA at low cost and use them as an ingredient of concrete. RHA, because of its pozzolanic behavior, can be utilized to produce better quality block aggregates at lower cost, replacing clay content in the bricks. The whole study can be divided into three parts. In the first part, characterization tests on RHA and clay were performed to determine their properties. Six different types of RHA from different mills were characterized by XRD and SEM analysis. Their fineness was determined by conducting a fineness test. The result of XRD confirmed the amorphous state of RHA. The characterization test for clay identifies the sample as “silty clay” with a specific gravity of 2.59 and 14% optimum moisture content. In the second part, blocks were produced with six different types of RHA with different combinations by volume with clay. Then mixtures were manually compacted in molds before subjecting them to oven drying at 120 °C for 7 days. After that, dried blocks were placed in a furnace at 1200 °C to produce ultimate blocks. Loss on ignition test, apparent density test, crushing strength test, efflorescence test, and absorption test were conducted on the blocks to compare their performance with the bricks. For 40% of RHA, the crushing strength result was found 60 MPa, where crushing strength for brick was observed 48.1 MPa. In the third part, the crushed blocks were used as coarse aggregate in concrete cylinders and compared them with brick concrete cylinders. Specimens were cured for 7 days and 28 days. The highest compressive strength of block cylinders for 7 days curing was calculated as 26.1 MPa, whereas, for 28 days curing, it was found 34 MPa. On the other hand, for brick cylinders, the value of compressing strength of 7 days and 28 days curing was observed as 20 MPa and 30 MPa, respectively. These research findings can help with the increasing demand for topsoil of the earth, and also turn a waste product into a valuable one.

Keywords: Characterization, furnace, pozzolanic behavior, rice husk ash.

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4 Improving the Utilization of Telfairia occidentalis Leaf Meal with Cellulase-Glucanase-Xylanase Combination and Selected Probiotic in Broiler Diets

Authors: Ayodeji Fasuyi

Abstract:

Telfairia occidentalis is a leafy vegetable commonly grown in the tropics for nutritional benefits. The use of enzymes and probiotics is becoming prominent due to the ban on antibiotics as growth promoters in many parts of the world. It is conceived that with enzymes and probiotics additives, fibrous leafy vegetables can be incorporated into poultry feeds as protein source. However, certain antinutrients were also found in the leaves of Telfairia occidentalis. Four broiler starter and finisher diets were formulated for the two phases of the broiler experiments. A mixture of fiber degrading enzymes, Roxazyme G2 (combination of cellulase, glucanase and xylanase) and probiotics (Turbotox), a growth promoter, were used in broiler diets at 1:1. The Roxazyme G2/Turbotox mixtures were used in diets containing four varying levels of Telfairia occidentalis leaf meal (TOLM) at 0, 10, 20 and 30%. Diets 1 were standard broiler diets without TOLM and Roxazyme G2 and Turbotox additives. Diets 2, 3 and 4 had enzymes and probiotics additives. Certain mineral elements such as Ca, P, K, Na, Mg, Fe, Mn, Cu and Zn were found in notable quantities viz. 2.6 g/100 g, 1.2 g/100 g, 6.2 g/100 g, 5.1 g/100 g, 4.7 g/100 g, 5875 ppm, 182 ppm, 136 ppm and 1036 ppm, respectively. Phytin, phytin-P, oxalate, tannin and HCN were also found in ample quantities viz. 189.2 mg/100 g, 120.1 mg/100 g, 80.7 mg/100 g, 43.1 mg/100 g and 61.2 mg/100 g, respectively. The average weight gain was highest at 46.3 g/bird/day for birds on 10% TOLM diet but similar (P > 0.05) to 46.2 g/bird/day for birds on 20% TOLM. The feed conversion ratio (FCR) of 2.27 was the lowest and optimum for birds on 10% TOLM although similar (P > 0.05) to 2.29 obtained for birds on 20% TOLM. FCR of 2.61 was the highest at 2.61 for birds on 30% TOLM diet. The lowest FCR of 2.27 was obtained for birds on 10% TOLM diet although similar (P > 0.05) to 2.29 for birds on 20% TOLM diet. Most carcass characteristics and organ weights were similar (P > 0.05) for the experimental birds on the different diets except for kidney, gizzard and intestinal length. The values for kidney, gizzard and intestinal length were significantly higher (P < 0.05) for birds on the TOLM diets. The nitrogen retention had the highest value of 72.37 ± 0.10% for birds on 10% TOLM diet although similar (P > 0.05) to 71.54 ± 1.89 obtained for birds on the control diet without TOLM and enzymes/probiotics mixture. There was evidence of a better utilization of TOLM as a plant protein source. The carcass characteristics and organ weights all showed evidence of uniform tissue buildup and muscles development particularly in diets containing 10% of TOLM level. There was also better nitrogen utilization in birds on the 10% TOLM diet. Considering the cheap cost of TOLM, it is envisaged that its introduction into poultry feeds as a plant protein source will ultimately reduce the cost of poultry feeds.

Keywords: Telfairia occidentalis leaf meal, enzymes, probiotics, additives.

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3 Response of Local Cowpea to Intra Row Spacing and Weeding Regimes in Yobe State, Nigeria

Authors: A. G. Gashua, T. T. Bello, I. Alhassan, K. K. Gwiokura

Abstract:

Weeds are known to interfere seriously with crop growth, thereby affecting the productivity and quality of crops. Crops are also known to compete for natural growth resources if they are not adequately spaced, also affecting the performance of the growing crop. Farmers grow cowpea in mixtures with cereals and this is known to affect its yield. For this reason, a field experiment was conducted at Yobe State College of Agriculture Gujba, Damaturu station in the 2014 and 2015 rainy seasons to determine the appropriate intra row spacing and weeding regime for optimum growth and yield of cowpea (Vigna unguiculata L.) in pure stand in Sudan Savanna ecology. The treatments consist of three levels of spacing within rows (20 cm, 30 cm and 40 cm) and four weeding regimes (none, once at 3 weeks after sowing (WAS), twice at 3 and 6WAS, thrice at 3WAS, 6WAS and 9WAS); arranged in a Randomized Complete Block Design (RCBD) and replicated three times. The variety used was the local cowpea variety (white, early and spreading) commonly grown by farmers. The growth and yield data were collected and subjected to analysis of variance using SAS software, and the significant means were ranked by Students Newman Keul’s test (SNK). The findings of this study revealed better crop performance in 2015 than in 2014 despite poor soil condition. Intra row spacing significantly influenced vegetative growth especially the number of main branches, leaves and canopy spread at 6WAS and 9WAS with the highest values obtained at wider spacing (40 cm). The values obtained in 2015 doubled those obtained in 2014 in most cases. Spacing also significantly affected the number of pods in 2015, seed weight in both years and grain yield in 2014 with the highest values obtained when the crop was spaced at 30-40 cm. Similarly, weeding regime significantly influenced almost all the growth attributes of cowpea with higher values obtained from where cowpea was weeded three times at 3-week intervals, though statistically similar results were obtained even from where cowpea was weeded twice. Weeding also affected the entire yield and yield components in 2015 with the highest values obtained with increase weeding. Based on these findings, it is recommended that spreading cowpea varieties should be grown at 40 cm (or wider spacing) within rows and be weeded twice at three-week intervals for better crop performance in related ecologies.

Keywords: Intra row spacing, local cowpea, Nigeria, weeding.

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2 Permeable Asphalt Pavement as a Measure of Urban Green Infrastructure in the Extreme Events Mitigation

Authors: Márcia Afonso, Cristina Fael, Marisa Dinis-Almeida

Abstract:

Population growth in cities has led to an increase in the infrastructures construction, including buildings and roadways. This aspect leads directly to the soils waterproofing. In turn, changes in precipitation patterns are developing into higher and more frequent intensities. Thus, these two conjugated aspects decrease the rainwater infiltration into soils and increase the volume of surface runoff. The practice of green and sustainable urban solutions has encouraged research in these areas. The porous asphalt pavement, as a green infrastructure, is part of practical solutions set to address urban challenges related to land use and adaptation to climate change. In this field, permeable pavements with porous asphalt mixtures (PA) have several advantages in terms of reducing the runoff generated by the floods. The porous structure of these pavements, compared to a conventional asphalt pavement, allows the rainwater infiltration in the subsoil, and consequently, the water quality improvement. This green infrastructure solution can be applied in cities, particularly in streets or parking lots to mitigate the floods effects. Over the years, the pores of these pavements can be filled by sediment, reducing their function in the rainwater infiltration. Thus, double layer porous asphalt (DLPA) was developed to mitigate the clogging effect and facilitate the water infiltration into the lower layers. This study intends to deepen the knowledge of the performance of DLPA when subjected to clogging. The experimental methodology consisted on four evaluation phases of the DLPA infiltration capacity submitted to three precipitation events (100, 200 and 300 mm/h) in each phase. The evaluation first phase determined the behavior after DLPA construction. In phases two and three, two 500 g/m2 clogging cycles were performed, totaling a 1000 g/m2 final simulation. Sand with gradation accented in fine particles was used as clogging material. In the last phase, the DLPA was subjected to simple sweeping and vacuuming maintenance. A precipitation simulator, type sprinkler, capable of simulating the real precipitation was developed for this purpose. The main conclusions show that the DLPA has the capacity to drain the water, even after two clogging cycles. The infiltration results of flows lead to an efficient performance of the DPLA in the surface runoff attenuation, since this was not observed in any of the evaluation phases, even at intensities of 200 and 300 mm/h, simulating intense precipitation events. The infiltration capacity under clogging conditions decreased about 7% on average in the three intensities relative to the initial performance that is after construction. However, this was restored when subjected to simple maintenance, recovering the DLPA hydraulic functionality. In summary, the study proved the efficacy of using a DLPA when it retains thicker surface sediments and limits the fine sediments entry to the remaining layers. At the same time, it is guaranteed the rainwater infiltration and the surface runoff reduction and is therefore a viable solution to put into practice in permeable pavements.

Keywords: Clogging, double layer porous asphalt, infiltration capacity, rainfall intensity.

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1 Wetting Characterization of High Aspect Ratio Nanostructures by Gigahertz Acoustic Reflectometry

Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

Abstract:

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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