Search results for: Power system control

Authors: C. Sathiyakumar, K. Duraiswamy

Abstract:

In MANET, mobile nodes communicate with each other using the wireless channel where transmission takes place with significant interference. The wireless medium used in MANET is a shared resource used by all the nodes available in MANET. Packet reserving is one important resource management scheme which controls the allocation of bandwidth among multiple flows through node cooperation in MANET. This paper proposes packet reserving and clogging control via Routing Aware Packet Reserving (RAPR) framework in MANET. It mainly focuses the end-to-end routing condition with maximal throughput. RAPR is complimentary system where the packet reserving utilizes local routing information available in each node. Path setup in RAPR estimates the security level of the system, and symbolizes the end-to-end routing by controlling the clogging. RAPR reaches the packet to the destination with high probability ratio and minimal delay count. The standard performance measures such as network security level, communication overhead, end-to-end throughput, resource utilization efficiency and delay measure are considered in this work. The results reveals that the proposed packet reservation and clogging control via Routing Aware Packet Reserving (RAPR) framework performs well for the above said performance measures compare to the existing methods.

Keywords: Packet reserving, Clogging control, Packet reservation in MANET, RAPR.

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Authors: Saeed Mian Qaisar, Laurent Fesquet, Marc Renaudin

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The mobile systems are powered by batteries. Reducing the system power consumption is a key to increase its autonomy. It is known that mostly the systems are dealing with time varying signals. Thus, we aim to achieve power efficiency by smartly adapting the system processing activity in accordance with the input signal local characteristics. It is done by completely rethinking the processing chain, by adopting signal driven sampling and processing. In this context, a signal driven filtering technique, based on the level crossing sampling is devised. It adapts the sampling frequency and the filter order by analysing the input signal local variations. Thus, it correlates the processing activity with the signal variations. It leads towards a drastic computational gain of the proposed technique compared to the classical one.

Keywords: Level Crossing Sampling, Activity Selection, Adaptive Rate Filtering, Computational Complexity.

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Authors: Abdur Rosyid, Mohamed El-Madany, Mohanad Alata

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Due to simplicity and low cost, rotordynamic system is often modeled by using lumped parameters. Recently, finite elements have been used to model rotordynamic system as it offers higher accuracy. However, it involves high degrees of freedom. In some applications such as control design, this requires higher cost. For this reason, various model reduction methods have been proposed. This work demonstrates the quality of model reduction of rotor-bearing-support system through substructuring. The quality of the model reduction is evaluated by comparing some first natural frequencies, modal damping ratio, critical speeds, and response of both the full system and the reduced system. The simulation shows that the substructuring is proven adequate to reduce finite element rotor model in the frequency range of interest as long as the number and the location of master nodes are determined appropriately. However, the reduction is less accurate in an unstable or nearly-unstable system.

Keywords: Finite element model, rotordynamic system, model reduction, substructuring.

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Authors: Muhammad Tahir Qadri, M. Irfan Anis, M. Nawaz Irshad Khan

Abstract:

This paper discusses the approach of real-time controlling of the energy management system using the data acquisition tool of LabVIEW. The main idea of this inspiration was to interface the Station (PC) with the system and publish the data on internet using LabVIEW. In this venture, controlling and switching of 3 phase AC loads are effectively and efficiently done. The phases are also sensed through devices. In case of any failure the attached generator starts functioning automatically. The computer sends command to the system and system respond to the request. The modern feature is to access and control the system world-wide using world wide web (internet). This controlling can be done at any time from anywhere to effectively use the energy especially in developing countries where energy management is a big problem. In this system totally integrated devices are used to operate via remote location.

Keywords: VI-server, Remote Access, Telemetry, Data Acquisition, web server.

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Authors: Ayad Al-Mahturi, Herman Wahid

Abstract:

This paper presents an optimal state feedback controller based on Linear Quadratic Regulator (LQR) for a two-rotor aero-dynamical system (TRAS). TRAS is a highly nonlinear multi-input multi-output (MIMO) system with two degrees of freedom and cross coupling. There are two parameters that define the behavior of LQR controller: state weighting matrix and control weighting matrix. The two parameters influence the performance of LQR. Particle Swarm Optimization (PSO) is proposed to optimally tune weighting matrices of LQR. The major concern of using LQR controller is to stabilize the TRAS by making the beam move quickly and accurately for tracking a trajectory or to reach a desired altitude. The simulation results were carried out in MATLAB/Simulink. The system is decoupled into two single-input single-output (SISO) systems. Comparing the performance of the optimized proportional, integral and derivative (PID) controller provided by INTECO, results depict that LQR controller gives a better performance in terms of both transient and steady state responses when PSO is performed.

Keywords: Linear quadratic regulator, LQR controller, optimal control, particle swarm optimization, PSO, two-rotor aero-dynamical system, TRAS.

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Authors: Wang Zhan-Xi, Zhang Yi-Ming, Chen Hang, Wang Gang

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Manual polishing has problems such as high labor intensity, low production efficiency and difficulty in guaranteeing the consistency of polishing quality. The use of robot polishing instead of manual polishing can effectively avoid these problems. Polishing force directly affects the quality of polishing, so accurate tracking and control of polishing force is one of the most important conditions for improving the accuracy of robot polishing. The traditional force control strategy is difficult to adapt to the strong coupling of force control and position control during the robot polishing process. Therefore, based on the analysis of force-based impedance control and position-based impedance control, this paper proposed a type of adaptive controller. Based on force feedback control of active compliance control, the controller can adaptively estimate the stiffness and position of the external environment and eliminate the steady-state force error produced by traditional impedance control. The simulation results of the model show that the adaptive controller has good adaptability to changing environmental positions and environmental stiffness, and can accurately track and control polishing force.

Keywords: robot polishing, force feedback, impedance control, adaptive control

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Authors: A. S. Telang, P. P. Bedekar

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In today’s world, electrical energy has become an indispensable component of all aspects of modern human life. Reliability, security and stability are the key aspects of any power system. Failure to meet any of these three aspects results into a great impediment to modern life. Modern power systems are being subjected to heavily stressed conditions leading to voltage stability problems. If the voltage stability problems are not mitigated properly through proper voltage stability assessment methods, cascading events may occur which may lead to voltage collapse or blackout events. Modern FACTS devices like STATCOM are one of the measures to overcome the blackout problems. As these devices are very costly, they must be installed properly at suitable locations, mostly at weak bus. Line voltage stability indices such as FVSI, Lmn and LQP play important role for identification of a weak bus. This paper presents evaluation of these line stability indices for the assessment of reliable information about the closeness of the power system to voltage collapse. PSAT is a user-friendly MATLAB toolbox, of which CPF is an important feature which has been extensively used for the placement of STATCOM to assess the stability. Novelty of the present research work lies in that the active and reactive load has been changed simultaneously at all the load buses under consideration. MATLAB code has been developed for the same and tested successfully on various standard IEEE test systems. The results for standard IEEE14 bus test system, specifically, are presented in this paper.

Keywords: Voltage stability analysis, voltage collapse, PSAT, CPF, VSI, FVSI, Lmn, LQP.

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Authors: Arslan Qamar Malik, Jehanzeb Ahmad

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The paper presents a novel idea to control computer mouse cursor movement with human eyes. In this paper, a working of the product has been described as to how it helps the special people share their knowledge with the world. Number of traditional techniques such as Head and Eye Movement Tracking Systems etc. exist for cursor control by making use of image processing in which light is the primary source. Electro-oculography (EOG) is a new technology to sense eye signals with which the mouse cursor can be controlled. The signals captured using sensors, are first amplified, then noise is removed and then digitized, before being transferred to PC for software interfacing.

Keywords: Human Computer Interaction, Real-Time System, Electro-oculography, Signal Processing.

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Authors: R. R. Chen, K. Khorasani

Abstract:

In this paper, a robust decentralized congestion control strategy is developed for a large scale network with Differentiated Services (Diff-Serv) traffic. The network is modeled by a nonlinear fluid flow model corresponding to two classes of traffic, namely the premium traffic and the ordinary traffic. The proposed congestion controller does take into account the associated physical network resource limitations and is shown to be robust to the unknown and time-varying delays. Our proposed decentralized congestion control strategy is developed on the basis of Diff-Serv architecture by utilizing a robust adaptive technique. A Linear Matrix Inequality (LMI) condition is obtained to guarantee the ultimate boundedness of the closed-loop system. Numerical simulation implementations are presented by utilizing the QualNet and Matlab software tools to illustrate the effectiveness and capabilities of our proposed decentralized congestion control strategy.

Keywords: Congestion control, Large scale networks, Decentralized control, Differentiated services traffic, Time-delay systems.

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Authors: S. Panda, S. C. Swain, A. K. Baliarsingh, A. K. Mohanty, C. Ardil

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Many real-world optimization problems involve multiple conflicting objectives and the use of evolutionary algorithms to solve the problems has attracted much attention recently. This paper investigates the application of multi-objective optimization technique for the design of a Thyristor Controlled Series Compensator (TCSC)-based controller to enhance the performance of a power system. The design objective is to improve both rotor angle stability and system voltage profile. A Genetic Algorithm (GA) based solution technique is applied to generate a Pareto set of global optimal solutions to the given multi-objective optimisation problem. Further, a fuzzy-based membership value assignment method is employed to choose the best compromise solution from the obtained Pareto solution set. Simulation results are presented to show the effectiveness and robustness of the proposed approach.

Keywords: Multi-objective optimisation, thyristor controlled series compensator, power system stability, genetic algorithm, pareto solution set, fuzzy ranking.

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Authors: Victor Birikorang Danquah

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Ghana's primary energy supply is heavily reliant on petroleum, biomass, and hydropower. Currently, Ghana gets its energy from hydropower (Akosombo and Bui), thermal power plants powered by crude oil, natural gas, and diesel, solar power, and imports from La Cote d'Ivoire. Until the early 2000s, large hydroelectric dams dominated Ghana's electricity generation. Due to the unreliable weather patterns, Ghana increased its reliance on thermal power. Thermal power contributes the highest percentage in terms of electricity generation in Ghana and is predominantly supplied by Independent Power Producers (IPPs). Ghana's electricity industry operates the corporate utility model as its business model. This model is typically 'vertically integrated', with a single corporation selling the majority of power generated by its generation assets to its retail business, which then sells the electricity to retail market consumers. The corporate utility model has a straightforward value proposition that is based on increasing the number of energy units sold. The unit volume business model drives the entire energy value chain to increase throughput, locking system users into unsustainable practices. This report uses the qualitative research approach to explore the electricity industry in Ghana. There is the need for increasing renewable energy such as wind and solar in the electricity generation. The research recommends two critical business models for the penetration of renewable energy in Ghana's power sector. The first model is the peer-to-peer electricity trading model which relies on a software platform to connect consumers and generators in order for them to trade energy directly with one another. The second model is about encouraging local energy generation, incentivizing optimal time-of-use behaviour, and allow any financial gains to be shared among the community members.

Keywords: business model innovation, electricity generation, renewable energy, solar energy, sustainability, wind energy

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Authors: S. W. Chen, W. K. Lin, J. R. Wang, C. Shih, H. T. Lin, H. C. Chang, W. Y. Li

Abstract:

Kuosheng nuclear power plant (NPP) is a BWR/6 type NPP and located on the northern coast of Taiwan. First, Kuosheng NPP TRACE model were developed in this research. In order to assess the system response of Kuosheng NPP TRACE model, startup tests data were used to evaluate Kuosheng NPP TRACE model. Second, the overpressurization transient analysis of Kuosheng NPP TRACE model was performed. Besides, in order to confirm the mechanical property and integrity of fuel rods, FRAPTRAN analysis was also performed in this study.

Keywords: TRACE, Safety analysis, BWR/6, FRAPTRAN.

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Authors: Chen-Yuan Chen, Wan-I Lee, Yi-Chaio Sui, Cheng-Wu Chen

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This study focuses on the development of triangular fuzzy numbers, the revising of triangular fuzzy numbers, and the constructing of a HCFN (half-circle fuzzy number) model which can be utilized to perform more plural operations. They are further transformed for trigonometric functions and polar coordinates. From half-circle fuzzy numbers we can conceive cylindrical fuzzy numbers, which work better in algebraic operations. An example of fuzzy control is given in a simulation to show the applicability of the proposed half-circle fuzzy numbers.

Keywords: triangular fuzzy number, half-circle fuzzy numbers, predictions, polar coordinates, Lyapunov method

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Authors: Altab Hossain, Ataur Rahman, A. K. M. Mohiuddin, Yulfian Aminanda

Abstract:

Fuzzy logic system (FLS) is used in this study to predict the tractive performance in terms of traction force, and motion resistance for an intelligent air cushion track vehicle while it operates in the swamp peat. The system is effective to control the intelligent air –cushion system with measuring the vehicle traction force (TF), motion resistance (MR), cushion clearance height (CH) and cushion pressure (CP). Ultrasonic displacement sensor, pull-in solenoid electromagnetic switch, pressure control sensor, micro controller, and battery pH sensor are incorporated with the Fuzzy logic system to investigate experimentally the TF, MR, CH, and CP. In this study, a comparison for tractive performance of an intelligent air cushion track vehicle has been performed with the results obtained from the predicted values of FLS and experimental actual values. The mean relative error of actual and predicted values from the FLS model on traction force, and total motion resistance are found as 5.58 %, and 6.78 % respectively. For all parameters, the relative error of predicted values are found to be less than the acceptable limits. The goodness of fit of the prediction values from the FLS model on TF, and MR are found as 0.90, and 0.98 respectively.

Keywords: Cushion pressure, Fuzzy logic, Motion resistance, Traction force.

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Authors: Karamitsos Ioannis, Orfanidis Konstantinos

Abstract:

In this paper an analysis of blackouts in electric power transmission systems is implemented using a model and studied in simple networks with a regular topology. The proposed model describes load demand and network improvements evolving on a slow timescale as well as the fast dynamics of cascading overloads and outages.

Keywords: Blackout, Generator, Load, Power Load.

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Authors: T. Messikh, S. Mekhilef, N. A. Rahim

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This paper presents an effective technique for harmonic current mitigation using an adaptive notch filter (ANF) to estimate current harmonics. The proposed filter consists of multiple units of ANF connected in parallel structure; each unit is governed by two ordinary differential equations. The frequency estimation is carried out based on the output of these units. The simulation and experimental results show the ability of the proposed tracking scheme to accurately estimate harmonics. The proposed filter was implemented digitally in TMS320F2808 and used in the control of hybrid active power filter (HAPF). The theoretical expectations are verified and demonstrated experimentally.

Keywords: Adaptive notch filter, Active power filter, harmonic filtering, Time varying frequency.

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Authors: Shuen-Tai Wang, Ying-Chuan Chen, Yu-Ching Lin

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There has been renewal of interest in the relation between Green IT and cloud computing in recent years. Cloud computing has to be a highly elastic environment which provides stable services to users. The growing use of cloud computing facilities has caused marked energy consumption, putting negative pressure on electricity cost of computing center or data center. Each year more and more network devices, storages and computers are purchased and put to use, but it is not just the number of computers that is driving energy consumption upward. We could foresee that the power consumption of cloud computing facilities will double, triple, or even more in the next decade. This paper aims at resource allocation and scheduling technologies that are short of or have not well developed yet to reduce energy utilization in cloud computing platform. In particular, our approach relies on recalling services dynamically onto appropriate amount of the machines according to user’s requirement and temporarily shutting down the machines after finish in order to conserve energy. We present initial work on integration of resource and power management system that focuses on reducing power consumption such that they suffice for meeting the minimizing quality of service required by the cloud computing platform.

Keywords: Cloud computing, energy utilization, power consumption, resource allocation.

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Authors: Ammar Anwar Khan, Nissar R. Wani, Nazar Malik, Abdulrehman Al-Arainy, and Saad Alghuwainem

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Power cables are vulnerable to failure due to aging or defects that occur with the passage of time under continuous operation and loading stresses. PD detection and characterization provide information on the location, nature, form and extent of the degradation. As a result, PD monitoring has become an important part of condition based maintenance (CBM) program among power utilities. Online partial discharge (PD) localization of defect sources in power cable system is possible using the time of flight method. The information regarding the time difference between the main and reflected pulses and cable length can help in locating the partial discharge source along the cable length. However, if the length of the cable is not known and the defect source is located at the extreme ends of the cable or in the middle of the cable, then double ended measurement is required to indicate the location of PD source. Use of multiple sensors can also help in discriminating the cable PD or local/ external PD. This paper presents the experience and results from online partial discharge measurements conducted in the laboratory and the challenges in partial discharge source localization.

Keywords: Power cables, partial discharge localization, HFCT, condition based monitoring.

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Authors: Nor Asrina Binti Ramlee

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Voltage sag, voltage swell, high-frequency noise and voltage transients are kinds of disturbances in power quality. They are also known as power quality events. Equipment used in the industry nowadays has become more sensitive to these events with the increasing complexity of equipment. This leads to the importance of distributing clean power quality to the consumer. To provide better service, the best analysis on power quality is very vital. Thus, this paper presents the events detection focusing on voltage sag and swell. The method is developed by applying time domain signal analysis using wavelet transform approach in MATLAB. Four types of mother wavelet namely Haar, Dmey, Daubechies, and Symlet are used to detect the events. This project analyzed real interrupted signal obtained from 22 kV transmission line in Skudai, Johor Bahru, Malaysia. The signals will be decomposed through the wavelet mothers. The best mother is the one that is capable to detect the time location of the event accurately.

Keywords: Power quality, voltage sag, voltage swell, wavelet transform.

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Authors: Y. Areepong

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The main goal of this paper is to study Statistical Process Control (SPC) with Exponentially Weighted Moving Average (EWMA) control chart when observations are serially-correlated. The characteristic of control chart is Average Run Length (ARL) which is the average number of samples taken before an action signal is given. Ideally, an acceptable ARL of in-control process should be enough large, so-called (ARL₀). Otherwise it should be small when the process is out-of-control, so-called Average of Delay Time (ARL₁) or a mean of true alarm. We find explicit formulas of ARL for EWMA control chart for Seasonal Autoregressive and Moving Average processes (SARMA) with Exponential white noise. The results of ARL obtained from explicit formula and Integral equation are in good agreement. In particular, this formulas for evaluating (ARL₀) and (ARL₁) be able to get a set of optimal parameters which depend on smoothing parameter (λ) and width of control limit (H) for designing EWMA chart with minimum of (ARL₁).

Keywords: Average Run Length1, Optimal parameters, Exponentially Weighted Moving Average (EWMA) control chart.

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Authors: Mostafa.A. Fellani, Daw .E. Abaid

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This paper deals with stability analysis for synchronous reluctance motors drive. Special attention is paid to the transient performance with variations in motor's parameters such as Ld and Rs. A study of the dynamic control using d-q model is presented first in order to clarify the stability of the motor drive system. Based on the experimental parameters of the synchronous reluctance motor, this paper gives some simulation results using MATLAB/SIMULINK software packages. It is concluded that the motor parameters, especially Ld, affect the estimator stability and hence the whole drive system.

Keywords: Dynamic Simulation, MATLAB, PWM-inverter, Reluctance Machine, Sensorless Control

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Authors: Ching-Shoei Chiang, Sheng-Hsin Tsai, James Chen

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The PH curve can be constructed by given parameters, but the shape of the curve is not so easy to image from the value of the parameters. On the contract, Bézier curve can be constructed by the control polygon, and from the control polygon, we can image the figure of the curve. In this paper, we want to use the hodograph of Bézier curve to construct PH curve by selecting part of the control vectors, and produce other control vectors, so the property of PH curve exists.

Keywords: PH curve, hodograph, Bézier curve.

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Authors: Igor Astrov, Andrus Pedai

Abstract:

This paper focuses on a critical component of the situational awareness (SA), the neural control of depth flight of an autonomous underwater vehicle (AUV). Constant depth flight is a challenging but important task for AUVs to achieve high level of autonomy under adverse conditions. With the SA strategy, we proposed a multirate neural control of an AUV trajectory for a nontrivial mid-small size AUV “r2D4" stochastic model. This control system has been demonstrated and evaluated by simulation of diving maneuvers using software package Simulink. From the simulation results it can be seen that the chosen AUV model is stable in the presence of noises, and also can be concluded that the proposed research technique will be useful for fast SA of similar AUV systems in real-time search-and-rescue operations.

Keywords: Autonomous underwater vehicles, multirate systems, neurocontrollers, situational awareness.

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Authors: Y. J. Huang, J. D. Yu, B. W. Hong, C. H. Tai, T. C. Kuo

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In this paper, a multi-agent robot system is presented. The system consists of four robots. The developed robots are able to automatically enter and patrol a harmful environment, such as the building infected with virus or the factory with leaking hazardous gas. Further, every robot is able to perform obstacle avoidance and search for the victims. Several operation modes are designed: remote control, obstacle avoidance, automatic searching, and so on.

Keywords: autonomous robot, field programmable gate array, obstacle avoidance, ultrasonic sensor, wireless communication.

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Authors: M. Zerikat, S. Chekroun

Abstract:

This paper proposes an effective adaptation learning algorithm based on artificial neural networks for speed control of an induction motor assumed to operate in a high-performance drives environment. The structure scheme consists of a neural network controller and an algorithm for changing the NN weights in order that the motor speed can accurately track of the reference command. This paper also makes uses a very realistic and practical scheme to estimate and adaptively learn the noise content in the speed load torque characteristic of the motor. The availability of the proposed controller is verified by through a laboratory implementation and under computation simulations with Matlab-software. The process is also tested for the tracking property using different types of reference signals. The performance and robustness of the proposed control scheme have evaluated under a variety of operating conditions of the induction motor drives. The obtained results demonstrate the effectiveness of the proposed control scheme system performances, both in steady state error in speed and dynamic conditions, was found to be excellent and those is not overshoot.

Keywords: Electric drive, Induction motor, speed control, Adaptive control, neural network, High Performance.

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Authors: Firas M. Tuaimah

Abstract:

This paper presents an Artificial Neural Network based approach for short-term load forecasting and exactly for two days ahead. Two seasons have been discussed for Iraqi power system, namely summer and winter; the hourly load demand is the most important input variables for ANN based load forecasting. The recorded daily load profile with a lead time of 1-48 hours for July and December of the year 2012 was obtained from the operation and control center that belongs to the Ministry of Iraqi electricity.

The results of the comparison show that the neural network gives a good prediction for the load forecasting and for two days ahead.

Keywords: Short-Term Load Forecasting, Artificial Neural Networks, Back propagation learning.

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Authors: Y. Harold Robinson, M. Rajaram, E. Golden Julie, S. Balaji

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In wireless sensor networks, locality and positioning information can be captured using Global Positioning System (GPS). This message can be congregated initially from spot to identify the system. Users can retrieve information of interest from a wireless sensor network (WSN) by injecting queries and gathering results from the mobile sink nodes. Routing is the progression of choosing optimal path in a mobile network. Intermediate node employs permutation of device nodes into teams and generating cluster heads that gather the data from entity cluster’s node and encourage the collective data to base station. WSNs are widely used for gathering data. Since sensors are power-constrained devices, it is quite vital for them to reduce the power utilization. A tree-based data fusion clustering routing algorithm (TBDFC) is used to reduce energy consumption in wireless device networks. Here, the nodes in a tree use the cluster formation, whereas the elevation of the tree is decided based on the distance of the member nodes to the cluster-head. Network simulation shows that this scheme improves the power utilization by the nodes, and thus considerably improves the lifetime.

Keywords: WSN, TBDFC, LEACH, PEGASIS, TREEPSI.

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Authors: Edward P. Guillen, Julián J. López, Cesar Y. Barahona

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Powerline Communications –PLC– as an alternative method for broadband networking, has the advantage of transmitting over channels already used for electrical distribution or even transmission. But these channels have been not designed with usual wired channels requirements for broadband applications such as stable impedance or known attenuation, and the network have to reject noises caused by electrical appliances that share the same channel. Noise control standards are difficult to complain or simply do not exist on Latin-American environments. This paper analyzes PLC throughput for home connectivity by probing noisy channel scenarios in a PLC network and the statistical results are shown.

Keywords: Power Line Communications, OFDM, Noise Analysis, Throughput Analysis, PLC, Home Network.

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Authors: Richard W. Longman

Abstract:

Iterative learning control aims to achieve zero tracking error of a specific command. This is accomplished by iteratively adjusting the command given to a feedback control system, based on the tracking error observed in the previous iteration. One would like the iterations to converge to zero tracking error in spite of any error present in the model used to design the learning law. First, this need for stability robustness is discussed, and then the need for robustness of the property that the transients are well behaved. Methods of producing the needed robustness to parameter variations and to singular perturbations are presented. Then a method involving reverse time runs is given that lets the world behavior produce the ILC gains in such a way as to eliminate the need for a mathematical model. Since the real world is producing the gains, there is no issue of model error. Provided the world behaves linearly, the approach gives an ILC law with both stability robustness and good transient robustness, without the need to generate a model.

Keywords: Iterative learning control, stability robustness, monotonic convergence.

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Authors: Youngji Yoo, Cheong-Sool Park, Jun Seok Kim, Young-Hak Lee, Sung-Shick Kim, Jun-Geol Baek

Abstract:

In the semiconductor manufacturing process, large amounts of data are collected from various sensors of multiple facilities. The collected data from sensors have several different characteristics due to variables such as types of products, former processes and recipes. In general, Statistical Quality Control (SQC) methods assume the normality of the data to detect out-of-control states of processes. Although the collected data have different characteristics, using the data as inputs of SQC will increase variations of data, require wide control limits, and decrease performance to detect outof- control. Therefore, it is necessary to separate similar data groups from mixed data for more accurate process control. In the paper, we propose a regression tree using split algorithm based on Pearson distribution to handle non-normal distribution in parametric method. The regression tree finds similar properties of data from different variables. The experiments using real semiconductor manufacturing process data show improved performance in fault detecting ability.

Keywords: Semiconductor, non-normal mixed process data, clustering, Statistical Quality Control (SQC), regression tree, Pearson distribution system.

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