Search results for: NURBS surfaces.

Authors: S. V. Ukwungwu, A. J. Abbas, G. G. Nasr

Abstract:

The increasing high price of natural gas and oil with attendant increase in energy demand on world markets in recent years has stimulated interest in recovering residual oil saturation across the globe. In order to meet the energy security, efforts have been made in developing new technologies of enhancing the recovery of oil and gas, utilizing techniques like CO₂ flooding, water injection, hydraulic fracturing, surfactant flooding etc. Surfactant flooding however optimizes production but poses risk to the environment due to their toxic nature. Amongst proven records that have utilized other type of bacterial in producing biosurfactants for enhancing oil recovery, this research uses a technique to combine biosurfactants that will achieve a scale of EOR through lowering interfacial tension/contact angle. In this study, three biosurfactants were produced from three Bacillus species from freeze dried cultures using sucrose 3 % (w/v) as their carbon source. Two of these produced biosurfactants were screened with the TEMCO Pendant Drop Image Analysis for reduction in IFT and contact angle. Interfacial tension was greatly reduced from 56.95 mN.m^-1 to 1.41 mN.m^-1 when biosurfactants in cell-free culture (Bacillus licheniformis) were used compared to 4. 83mN.m^-1 cell-free culture of Bacillus subtilis. As a result, cell-free culture of (Bacillus licheniformis) changes the wettability of the biosurfactant treatment for contact angle measurement to more water-wet as the angle decreased from 130.75^o to 65.17^o. The influence of microbial treatment on crushed rock samples was also observed by qualitative wettability experiments. Treated samples with biosurfactants remained in the aqueous phase, indicating a water-wet system. These results could prove that biosurfactants can effectively change the chemistry of the wetting conditions against diverse surfaces, providing a desirable condition for efficient oil transport in this way serving as a mechanism for EOR. The environmental friendly effect of biosurfactants applications for industrial purposes play important advantages over chemically synthesized surfactants, with various possible structures, low toxicity, eco-friendly and biodegradability.

Keywords: Bacillus, biosurfactant, enhanced oil recovery, residual oil, wettability.

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Authors: S. Varnagiris, M. Urbonavicius, S. Tuckute, M. Lelis, K. Bockute

Abstract:

Amongst many water purification techniques, TiO₂ photocatalysis is recognized as one of the most promising sustainable methods. It is known that for photocatalytical applications anatase is the most suitable TiO₂ phase, however heterojunction of anatase/rutile phases could improve the photocatalytical activity of TiO₂ even further. Despite the relative simplicity of TiO₂ different synthesis methods lead to the highly dispersed crystal phases and photocatalytic activity of the corresponding samples. Accordingly, suggestions and investigations of various innovative methods of TiO₂ synthesis are still needed. In this work structural and photocatalytical properties of TiO₂ films deposited by the unconventional method of simultaneous co-sputtering from two magnetrons powered by pulsed-Direct Current (pDC) and Radio Frequency (RF) power sources with negative bias voltage have been studied. More specifically, TiO₂ film thickness, microstructure, surface roughness, crystal structure, optical transmittance and photocatalytical properties were investigated by profilometer, scanning electron microscope, atomic force microscope, X-ray diffractometer and UV-Vis spectrophotometer respectively. The proposed unconventional two magnetron co-sputtering based TiO₂ film formation method showed very promising results for crystalline TiO₂ film formation while keeping process temperatures below 100 °C. XRD analysis revealed that by using proper combination of power source type and bias voltage various TiO₂ phases (amorphous, anatase, rutile or their mixture) can be synthesized selectively. Moreover, strong dependency between power source type and surface roughness, as well as between the bias voltage and band gap value of TiO₂ films was observed. Interestingly, TiO₂ films deposited by two magnetron co-sputtering without bias voltage had one of the highest band gap values between the investigated films but its photocatalytic activity was superior compared to all other samples. It is suggested that this is due to the dominating nanocrystalline anatase phase with various exposed surfaces including photocatalytically the most active {001}.

Keywords: Films, magnetron co-sputtering, photocatalysis, TiO2.

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Authors: Manish Kumar, Pradeep Rout Aditya Kumar Jha, Pankaj Gupta

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Wings are structural components of an aeroplane that are used to produce lift while the aircraft is in flight. The initial assault angle of the wing is definite. Due to the pressure difference at the top and bottom surfaces of the wing, lift force is produced when the flow passes over it. This paper explains the fundamental concept of the structural behaviour of a wing threatened by flowing loads during the voyage. The study comprises the use of concepts and analysis with the help of finite element analysis. Wing assembly is the first stage of wing model and design, which are determined by fascinating factual features. The basic gathering wing consists of a thin membrane, two poles, and several ribs. It has two spars, the major spar and the secondary spar. Here, NACA 23015 is selected as the standard model for all types of aerofoil structures since it is more akin to the custom aerofoil utilized in large aircraft, specifically the Airbus A320. Two rods mostly endure the twisting moment and trim strength, which is finished with titanium contamination to ensure enough inflexibility. The covering and wing spars are made of aluminium amalgam to lessen the structural heaviness. Following that, a static underlying examination is performed, and the general contortion, equivalent flexible strain, and comparing Von-Mises pressure are obtained to aid in investigations of the mechanical behaviour of the wing. Moreover, the modular examination is being upheld to decide the normal pace of repetition as well as the modular state of the three orders, which are obtained through the pre-stress modular investigation. The findings of the modular investigation assist engineers in reducing their excitement about regular events and turning away the wing from the whirlwind. Based on the findings of the study, planners can prioritise union and examination of the pressure mindfulness range and tremendous twisting region. All in all, the entertainment outcomes demonstrate that the game plan is feasible and further develop the data grade of the lifting surface.

Keywords: FEM, Airbus, NACA, modulus of elasticity, aircraft wing.

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Authors: Payman Davoodi-Nasab, Ahmad Rahbar-Kelishami, Jaber Safdari, Hossein Abolghasemi

Abstract:

The high purity rare earth elements (REEs) have been vastly used in the field of chemical engineering, metallurgy, nuclear energy, optical, magnetic, luminescence and laser materials, superconductors, ceramics, alloys, catalysts, and etc. Neodymium is one of the most abundant rare earths. By development of a neodymium–iron–boron (Nd–Fe–B) permanent magnet, the importance of neodymium has dramatically increased. Solvent extraction processes have many operational limitations such as large inventory of extractants, loss of solvent due to the organic solubility in aqueous solutions, volatilization of diluents, etc. One of the promising methods of liquid membrane processes is emulsion liquid membrane (ELM) which offers an alternative method to the solvent extraction processes. In this work, a study on Nd extraction through multi-walled carbon nanotubes (MWCNTs) assisted ELM using response surface methodology (RSM) has been performed. The ELM composed of diisooctylphosphinic acid (CYANEX 272) as carrier, MWCNTs as nanoparticles, Span-85 (sorbitan triooleate) as surfactant, kerosene as organic diluent and nitric acid as internal phase. The effects of important operating variables namely, surfactant concentration, MWCNTs concentration, and treatment ratio were investigated. Results were optimized using a central composite design (CCD) and a regression model for extraction percentage was developed. The 3D response surfaces of Nd(III) extraction efficiency were achieved and significance of three important variables and their interactions on the Nd extraction efficiency were found out. Results indicated that introducing the MWCNTs to the ELM process led to increasing the Nd extraction due to higher stability of membrane and mass transfer enhancement. MWCNTs concentration of 407 ppm, Span-85 concentration of 2.1 (%v/v) and treatment ratio of 10 were achieved as the optimum conditions. At the optimum condition, the extraction of Nd(III) reached the maximum of 99.03%.

Keywords: Emulsion liquid membrane, extraction of neodymium, multi-walled carbon nanotubes, response surface method.

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Authors: Parisa Shirzadeh

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Drug delivery systems in which drugs are traditionally used, multi-stage and at specified intervals by patients, do not meet the needs of the world's up-to-date drug delivery. In today's world, we are dealing with a huge number of recombinant peptide and protean drugs and analogues of hormones in the body, most of which are made with genetic engineering techniques. Most of these drugs are used to treat critical diseases such as cancer. Due to the limitations of the traditional method, researchers sought to find ways to solve the problems of the traditional method to a large extent. Following these efforts, controlled drug release systems were introduced, which have many advantages. Using controlled release of the drug in the body, the concentration of the drug is kept at a certain level, and in a short time, it is done at a higher rate. Graphene is a natural material that is biodegradable, non-toxic, natural and wide surfaces of graphene plates makes it more effective to modify graphene than carbon nanotubes. Graphene oxide is often synthesized using concentrated oxidizers such as sulfuric acid, nitric acid, and potassium permanganate based on Hummer method. graphene oxide is very hydrophilic and easily dissolves in water and creates a stable solution. Graphene oxide (GO) has been modified by chitosan (CS) covalently, developed for control release of doxorubicin (DOX). In this study, GO is produced by the hummer method under acidic conditions. Then, it is chlorinated by oxalyl chloride to increase its reactivity against amine. After that, in the presence of CS, the amino reaction was performed to form amide transplantation, and the DOX was connected to the carrier surface by π-π interaction in buffer phosphate. GO, GO-CS, and GO-CS-DOX were characterized by FT-IR and TGA to recognize new functional groups which show the new bonding of CS to GO, RAMA and SEM to recognize size of layers that show changing in size and number of layers. The ability to load and release is determined by UV-Visible spectroscopy. The loading result showed a high capacity of DOX absorption (99%) and pH dependence identified as a result of DOX release from GO-CS nanosheet at pH 5.3 and 7.4, which show a fast release rate in acidic conditions.

Keywords: Graphene oxide, chitosan, nanosheet, controlled drug release, doxorubicin.

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Authors: Esam Jassim

Abstract:

Industries using conventional fossil fuels have an  interest in better understanding the mechanism of particulate  formation during combustion since such is responsible for emission  of undesired inorganic elements that directly impact the atmospheric  pollution level. Fine and ultrafine particulates have tendency to  escape the flue gas cleaning devices to the atmosphere. They also  preferentially collect on surfaces in power systems resulting in  ascending in corrosion inclination, descending in the heat transfer  thermal unit, and severe impact on human health. This adverseness  manifests particularly in the regions of world where coal is the  dominated source of energy for consumption.  This study highlights the behavior of calcium transformation as  mineral grains verses organically associated inorganic components  during pulverized coal combustion. The influence of existing type of  calcium on the coarse, fine and ultrafine mode formation mechanisms  is also presented. The impact of two sub-bituminous coals on particle  size and calcium composition evolution during combustion is to be  assessed. Three mixed blends named Blends 1, 2, and 3 are selected  according to the ration of coal A to coal B by weight. Calcium  percentage in original coal increases as going from Blend 1 to 3.  A mathematical model and a new approach of describing  constituent distribution are proposed. Analysis of experiments of  calcium distribution in ash is also modeled using Poisson distribution.  A novel parameter, called elemental index λ, is introduced as a  measuring factor of element distribution.  Results show that calcium in ash that originally in coal as mineral  grains has index of 17, whereas organically associated calcium  transformed to fly ash shown to be best described when elemental  index λ is 7.  As an alkaline-earth element, calcium is considered the  fundamental element responsible for boiler deficiency since it is the  major player in the mechanism of ash slagging process. The  mechanism of particle size distribution and mineral species of ash  particles are presented using CCSEM and size-segregated ash  characteristics. Conclusions are drawn from the analysis of  pulverized coal ash generated from a utility-scale boiler.

 

Keywords: Calcium transformation, Coal Combustion, Inorganic Element, Poisson distribution.

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Authors: Melis Inalpulat, Levent Genc

Abstract:

Land Use Land Cover (LULC) changes due to human activities and natural causes have become a major environmental concern. Assessment of temporal remote sensing data provides information about LULC impacts on environment. Land Surface Temperature (LST) is one of the important components for modeling environmental changes in climatological, hydrological, and agricultural studies. In this study, LULC changes (September 7, 1984 and July 8, 2014) especially in agricultural lands together with population changes (1985-2014) and LST status were investigated using remotely sensed and census data in South Marmara Watershed, Turkey. LULC changes were determined using Landsat TM and Landsat OLI data acquired in 1984 and 2014 summers. Six-band TM and OLI images were classified using supervised classification method to prepare LULC map including five classes including Forest (F), Grazing Land (G), Agricultural Land (A), Water Surface (W), Residential Area-Bare Soil (R-B) classes. The LST image was also derived from thermal bands of the same dates. LULC classification results showed that forest areas, agricultural lands, water surfaces and residential area-bare soils were increased as 65751 ha, 20163 ha, 1924 ha and 20462 ha respectively. In comparison, a dramatic decrement occurred in grazing land (107985 ha) within three decades. The population increased 29% between years 1984-2014 in whole study area. Along with the natural causes, migration also caused this increase since the study area has an important employment potential. LULC was transformed among the classes due to the expansion in residential, commercial and industrial areas as well as political decisions. In the study, results showed that agricultural lands around the settlement areas transformed to residential areas in 30 years. The LST images showed that mean temperatures were ranged between 26-32°C in 1984 and 27-33°C in 2014. Minimum temperature of agricultural lands was increased 3°C and reached to 23°C. In contrast, maximum temperature of A class decreased to 41°C from 44°C. Considering temperatures of the 2014 R-B class and 1984 status of same areas, it was seen that mean, min and max temperatures increased by 2°C. As a result, the dynamism of population, LULC and LST resulted in increasing mean and maximum surface temperatures, living spaces/industrial areas and agricultural lands.

Keywords: Census data, landsat, land surface temperature (LST), land use land cover (LULC).

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Authors: Abbas Ghanbari-Malidarreh

Abstract:

In most wheat growing moderate regions and especially in the north of Iran climate, is affected grain filling by several physical and abiotic stresses. In this region, grain filling often occurs when temperatures are increasing and moisture supply is decreasing. The experiment was designed in RCBD with split plot arrangements with four replications. Four irrigation treatments included (I0) no irrigation (check); (I1) one irrigation (50 mm) at heading stage; (I2) two irrigation (100 mm) at heading and anthesis stage; and (I3) three irrigation (150 mm) at heading, anthesis and early grain filling growth stage, two wheat cultivars (Milan and Shanghai) were cultured in the experiment. Totally raining was 453 mm during the growth season. The result indicated that biological yield, grain yield and harvest index were significantly affected by irrigation levels. I3 treatment produced more tillers number in m2, fertile tillers number in m2, harvest index and biological yield. Milan produced more tillers number in m2, fertile tillers in m2, while Shanghai produced heavier tillers and grain 1000 weight. Plant height was significant in wheat varieties while were not statistically significant in irrigation levels. Milan produced more grain yield, harvest index and biological yield. Grain yield shown that I1, I2, and I3 produced increasing of 5228 (21%), 5460 (27%) and 5670 (29%) kg ha-1, respectively. There was an interaction of irrigation and cultivar on grain yields. In the absence of the irrigation reduced grain 1000 weight from 45 to 40 g. No irrigation reduced soil moisture extraction during the grain filling stage. Current assimilation as a source of carbon for grain filling depends on the light intercepting viable green surfaces of the plant after anthesis that due to natural senescence and the effect of various stresses. At the same time the demand by the growing grain is increasing. It is concluded from research work that wheat crop irrigated Milan cultivar could increase the grain yield in comparison with Shanghai cultivar. Although, the grain yield of Shanghai under irrigation was slightly lower than Milan. This grain yield also was related to weather condition, sowing date, plant density and location conditions and management of fertilizers, because there was not significant difference in biological and straw yield. The best result was produced by I1 treatment. I2 and I3 treatments were not significantly difference with I1 treatment. Grain yield of I1 indicated that wheat is under soil moisture deficiency. Therefore, I1 irrigation was better than I0.

Keywords: anthesis, grain yield, irrigation, supplementary, Wheat.

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Authors: Shinji Kajiwara

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The basic ability of a vehicle is to “run”, “turn” and “stop”. The safeness and comfort during a drive on various road surfaces and speed depends on the performance of these basic abilities of the vehicle. Stability and maneuverability of a vehicle are vital in automotive engineering. The stability of a vehicle is the ability of the vehicle to revert back to a stable state during a drive when faced with crosswinds and irregular road conditions. Maneuverability of a vehicle is the ability of the vehicle to change direction during a drive swiftly based on the steering of the driver. The stability and maneuverability of a vehicle can also be defined as the driving stability of the vehicle. Since the fossil fueled vehicle is the main type of transportation today, the environmental factor in automotive engineering is also vital. By improving the fuel efficiency of the vehicle, the overall carbon emission will be reduced, thus reducing the effect of global warming and greenhouse gas on the Earth. Another main focus of the automotive engineering is the safety performance of the vehicle, especially with the worrying increase of vehicle collision every day. With better safety performance of a vehicle, every driver will be more confident driving every day. Next, let us focus on the “turn” ability of a vehicle. By improving this particular ability of the vehicle, the cornering limit of the vehicle can be improved, thus increasing the stability and maneuverability factor. In order to improve the cornering limit of the vehicle, a study to find the balance between the steering systems, the stability of the vehicle, higher lateral acceleration and the cornering limit detection must be conducted. The aim of this research is to study and develop a new suspension system that will boost the lateral acceleration of the vehicle and ultimately improving the cornering limit of the vehicle. This research will also study environmental factor and the stability factor of the new suspension system. The double wishbone suspension system is widely used in a four-wheel vehicle, especially for high cornering performance sports car and racing car. The double wishbone designs allow the engineer to carefully control the motion of the wheel by controlling such parameters as camber angle, caster angle, toe pattern, roll center height, scrub radius, scuff, and more. The development of the new suspension system will focus on the ability of the new suspension system to optimize the camber control and to improve the camber limit during a cornering motion. The research will be carried out using the CAE analysis tool. Using this analysis tool we will develop a JSAE Formula Machine equipped with the double wishbone system and also the new suspension system and conduct simulation and conduct studies on the performance of both suspension systems.

Keywords: Automobile, Camber Thrust, Cornering force, Suspension.

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Authors: Adewale O. Adegbenjo, Elsie Nsiah-Baafi, Mxolisi B. Shongwe, Mercy Ramakokovhu, Peter A. Olubambi

Abstract:

The sintering step in powder metallurgy (P/M) processes is very sensitive as it determines to a large extent the properties of the final component produced. Spark plasma sintering over the past decade has been extensively used in consolidating a wide range of materials including metallic alloy powders. This novel, non-conventional sintering method has proven to be advantageous offering full densification of materials, high heating rates, low sintering temperatures, and short sintering cycles over conventional sintering methods. Ti6Al4V has been adjudged the most widely used α+β alloy due to its impressive mechanical performance in service environments, especially in the aerospace and automobile industries being a light metal alloy with the capacity for fuel efficiency needed in these industries. The P/M route has been a promising method for the fabrication of parts made from Ti6Al4V alloy due to its cost and material loss reductions and the ability to produce near net and intricate shapes. However, the use of this alloy has been largely limited owing to its relatively poor hardness and wear properties. The effect of sintering temperature on the densification, hardness, and wear behaviors of spark plasma sintered Ti6Al4V powders was investigated in this present study. Sintering of the alloy powders was performed in the 650–850°C temperature range at a constant heating rate, applied pressure and holding time of 100°C/min, 50 MPa and 5 min, respectively. Density measurements were carried out according to Archimedes’ principle and microhardness tests were performed on sectioned as-polished surfaces at a load of 100gf and dwell time of 15 s. Dry sliding wear tests were performed at varied sliding loads of 5, 15, 25 and 35 N using the ball-on-disc tribometer configuration with WC as the counterface material. Microstructural characterization of the sintered samples and wear tracks were carried out using SEM and EDX techniques. The density and hardness characteristics of sintered samples increased with increasing sintering temperature. Near full densification (99.6% of the theoretical density) and Vickers’ micro-indentation hardness of 360 HV were attained at 850°C. The coefficient of friction (COF) and wear depth improved significantly with increased sintering temperature under all the loading conditions examined, except at 25 N indicating better mechanical properties at high sintering temperatures. Worn surface analyses showed the wear mechanism was a synergy of adhesive and abrasive wears, although the former was prevalent.

Keywords: Hardness, powder metallurgy, Spark plasma sintering, wear.

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Authors: Pavana Manvikar, G K Purohit

Abstract:

The functional performance of machined components, often, depends on surface topography, hardness, nature of stress and strain induced on the surface, etc. Invariably, surfaces of metallic components obtained by turning, milling, etc., consist of irregularities such as machining marks are responsible for the above. Surface finishing/coating processes used to produce improved surface quality/textures are classified as chip-removal and chip-less processes. Burnishing is chip-less cold working process carried out to improve surface finish, hardness and resistance to fatigue and corrosion; not obtainable by other surface coating and surface treatment processes. It is a very simple, but effective method which improves surface characteristics and is reported to introduce compressive stresses.

Of late, considerable attention is paid to post-machining, finishing operations, such as burnishing. During burnishing the micro-irregularities start to deform plastically, initially the crests are gradually flattened and zones of reduced deformation are formed. When all the crests are deformed, the valleys between the micro-irregularities start moving in the direction of the newly formed surface. The grain structure is then condensed, producing a smoother and harder surface with superior load-carrying and wear-resistant capabilities.

Burnishing can be performed on a lathe with a highly polished ball or roller type tool which is traversed under force over a rotating/stationary work piece. Often, several passes are used to obtain the work piece surface with the desired finish and hardness.

This paper presents the findings of an experimental investigation on the effect of ball burnishing parameters such as, burnishing speed, feed, force and number of passes; on surface roughness (Ra) and micro-hardness (Hv) of a 60/40 copper/zinc alloy, using a 2-level fractional factorial design of experiments (DoE). Mathematical models were developed to predict surface roughness and hardness generated by burnishing in terms of the above process parameters. A ball-type tool, designed and constructed from a high chrome steel material (HR_C=63 and Ra=0.012 µm), was used for burnishing of fine-turned cylindrical bars (0.68-0.78µm and 145Hv). They are given by,

 

Ra= 0.305-0.005X₁ - 0.0175X₂ + 0.0525X₄ + 0.0125X₁X₄ -0.02X₂X₄ - 0.0375X₃X₄

 

Hv=160.625 -2.37 5X₁ + 5.125X₂ + 1.875X₃ + 4.375X₄ - 1.625X₁X₄ + 4.375X₂X₄ - 2.375X₃X₄

 

High surface microhardness (175H_V) was obtained at 400rpm, 2passes, 0.05mm/rev and 15kgf., and high surface finish (0.20µm) was achieved at 30kgf, 0.1mm/rev, 112rpm and single pass. In other words, surface finish improved by 350% and microhardness improved by 21% compared to as machined conditions.

Keywords: Ball burnishing, surface roughness, micro-hardness.

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Authors: C. Amer, M. Sahin

Abstract:

The design of an optimised horizontal axis 5-meter-long wind turbine rotor blade in according with IEC 61400-2 standard is a research and development project in order to fulfil the requirements of high efficiency of torque from wind production and to optimise the structural components to the lightest and strongest way possible. For this purpose, a research study is presented here by focusing on the structural characteristics of a composite wind turbine blade via finite element modelling and analysis tools. In this work, first, the required data regarding the general geometrical parts are gathered. Then, the airfoil geometries are created at various sections along the span of the blade by using CATIA software to obtain the two surfaces, namely; the suction and the pressure side of the blade in which there is a hat shaped fibre reinforced plastic spar beam, so-called chassis starting at 0.5m from the root of the blade and extends up to 4 m and filled with a foam core. The root part connecting the blade to the main rotor differential metallic hub having twelve hollow threaded studs is then modelled. The materials are assigned as two different types of glass fabrics, polymeric foam core material and the steel-balsa wood combination for the root connection parts. The glass fabrics are applied using hand wet lay-up lamination with epoxy resin as METYX L600E10C-0, is the unidirectional continuous fibres and METYX XL800E10F having a tri-axial architecture with fibres in the 0,+45,-45 degree orientations in a ratio of 2:1:1. Divinycell H45 is used as the polymeric foam. The finite element modelling of the blade is performed via MSC PATRAN software with various meshes created on each structural part considering shell type for all surface geometries, and lumped mass were added to simulate extra adhesive locations. For the static analysis, the boundary conditions are assigned as fixed at the root through aforementioned bolts, where for dynamic analysis both fixed-free and free-free boundary conditions are made. By also taking the mesh independency into account, MSC NASTRAN is used as a solver for both analyses. The static analysis aims the tip deflection of the blade under its own weight and the dynamic analysis comprises normal mode dynamic analysis performed in order to obtain the natural frequencies and corresponding mode shapes focusing the first five in and out-of-plane bending and the torsional modes of the blade. The analyses results of this study are then used as a benchmark prior to modal testing, where the experiments over the produced wind turbine rotor blade has approved the analytical calculations.

Keywords: Dynamic analysis, Fiber Reinforced Composites, Horizontal axis wind turbine blade, Hand-wet layup, Modal Testing.

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Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

Abstract:

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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