Search results for: Local appearance feature

Authors: Richard A. Wasniowski

Abstract:

In this paper we propose a framework for multisensor intrusion detection called Fuzzy Agent-Based Intrusion Detection System. A unique feature of this model is that the agent uses data from multiple sensors and the fuzzy logic to process log files. Use of this feature reduces the overhead in a distributed intrusion detection system. We have developed an agent communication architecture that provides a prototype implementation. This paper discusses also the issues of combining intelligent agent technology with the intrusion detection domain.

Keywords: Intrusion detection, fuzzy logic, agents, networksecurity.

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Authors: Chiung-Ju Huang, Yuan-Hong Ho

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This paper develops the fiscal health index of 21 local governments in Taiwan over the 1984 to 2010 period. A quantile regression analysis was used to explore the extent that economic variables, political budget cycles, and legislative checks and balances, impact different quantiles of fiscal health index for a country over a sample period of time. Our findings suggest that local governments at the lower quantile are significantly benefited from political budget cycles and the increase in central government revenues, while legislative effective checks and balances and the increase in central government expenditures have a significantly negative effect on local fiscal health. When local governments are in the upper tail of the distribution, legislative checks and balances and growth in macroeconomics have significant and adverse effects on the fiscal health of local governments. However, increases in central government revenues have significant and positive effects on the health status of local government in Taiwan.

Keywords: Fiscal health, political budget cycles, legislative checks and balances, quantile regression.

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Authors: Ahmed Mostafa, Mohamed Mahmoud, Nesreen H. Hafez, Mohamed Fahim

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This retrospective study includes 60 patients with pre-invasive breast cancer. Aim of the study: Evaluation of premalignant lesions of the breast (DCIS), different treatment methods and outcome. Patients and methods: 60 patients with DCIS were studied from the period between 2005 to 2012, for 38 patients the primary surgical method was wide local resection (WLE) (63.3%) and the other cases (22 patients, 36.7%) had mastectomy, fourteen cases from those who underwent local excision received radiotherapy, while no adjuvant radiotherapy was given for those who underwent mastectomy. In case of hormonal receptor positive DCIS lesions hormonal treatment (Tamoxifen) was given after local control. Results: No difference in overall survival between mastectomy & breast conserving therapy (wide local excision and adjuvant radiotherapy), however local recurrence rate is higher in case of breast conserving therapy, also no role of Axillary evacuation in case of DCIS. The use of hormonal therapy decreases the incidence of local recurrence by about 98%. Conclusion: The main management of DCIS is local treatment (wide local excision and radiotherapy) with hormonal treatment in case of hormone receptor positive lesions.

Keywords: Ductal carcinoma in situ, surgical treatment, radiotherapy, breast conserving therapy, hormonal treatment.

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Authors: L. Sterken, S. Sebben, L. Löfdahl

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In this paper an alternative visualisation approach of the wake behind different vehicle body shapes with simplified and fully-detailed underbody has been proposed and analysed. This allows for a more clear distinction among the different wake regions. This visualisation is based on a transformation of the cartesian coordinates of a chosen wake plane to polar coordinates, using as filter velocities lower than the freestream. This transformation produces a polar wake plot that enables the division and quantification of the wake in a number of sections. In this paper, local drag has been used to visualise the drag contribution of the flow by the different sections. Visually, a balanced wake can be observed by the concentric behaviour of the polar plots. Alternatively, integration of the local drag of each degree section as a ratio of the total local drag yields a quantifiable approach of the wake uniformity, where different sections contribute equally to the local drag, with the exception of the wheels.

Keywords: Coordinate transformation, ground vehicle, local drag, wake.

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Authors: Adel Aloraini

Abstract:

Financial forecasting using machine learning techniques has received great efforts in the last decide . In this ongoing work, we show how machine learning of graphical models will be able to infer a visualized causal interactions between different banks in the Saudi equities market. One important discovery from such learned causal graphs is how companies influence each other and to what extend. In this work, a set of graphical models named Gaussian graphical models with developed ensemble penalized feature selection methods that combine ; filtering method, wrapper method and a regularizer will be shown. A comparison between these different developed ensemble combinations will also be shown. The best ensemble method will be used to infer the causal relationships between banks in Saudi equities market.

Keywords: Causal interactions , banks, feature selection, regularizere,

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Authors: Wardoyo, Humairoh

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In global competition nowadays, the world economy heavily depends upon high technology and capital intensive industries that are mainly owned by well-established economic and developed countries, such as United States of America, United Kingdom, Japan, and South Korea. Indonesia as a developing country is building its economic activities towards industrial country as well, although a slightly different approach was implemented. For example, similar to the concept of one village one product (OVOP) implemented in Japan, Indonesia also adopted this concept by promoting local traditional products to improve incomes of village people and to enhance local economic activities. Analysis on how OVOP program increase local people’s income and influence customer satisfaction were the objective of this paper. Behavioral intention to purchase and re-purchase, customer satisfaction and promotion are key factors for local products to play significant roles in improving local income and economy of the region. The concepts of OVOP and key factors that influence economic activities of local people and the region will be described and explained in the paper. Results of research, in a case study based on 300 respondents, customers of a local restaurant at Tangerang City, Banten Province of Indonesia, indicated that local product, service quality and behavioral intention individually have significant influence to customer satisfaction; whereas simultaneous tests to the variables indicated positive and significant influence to the behavioral intention through customer satisfaction as the intervening variable.

Keywords: Behavioral intention, customer satisfaction, local products, one village one product.

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Authors: Prateep Wajeetongratana

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The purpose of this research was to study the influence of learning efficiency on local accountants’ job performance effectiveness. This paper drew upon the survey data collected from 335 local accountants survey conducted at Nakhon Ratchasima province, Thailand. The statistics utilized in this paper included percentage, mean, standard deviation, and regression analysis. The findings revealed that the majority of samples were between 31-40 years old, married, held an undergraduate degree, and had an average income between 10,000-15,000 baht. The majority of respondents had less than five years of accounting experience and worked for local administrations. The overall learning efficiency score was in the highest level while the local accountants’ job performance effectiveness score was also in the high level. The hypothesis testing’s result disclosed that learning efficiency factors which were knowledge, Skill, and Attitude had an influence on local accountants’ job the performance effectiveness.

Keywords: Accountants, Leaning Efficiency, Performance Effectiveness.

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Authors: Leon Fu, Xiangyang Xue

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In this paper, we propose a new approach to query-by-humming, focusing on MP3 songs database. Since MP3 songs are much more difficult in melody representation than symbolic performance data, we adopt to extract feature descriptors from the vocal sounds part of the songs. Our approach is based on signal filtering, sub-band spectral processing, MDCT coefficients analysis and peak energy detection by ignorance of the background music as much as possible. Finally, we apply dual dynamic programming algorithm for feature similarity matching. Experiments will show us its online performance in precision and efficiency.

Keywords: DP, MDCT, MP3, QBH.

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Authors: Kuo-Cheng Liu

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In this paper, we propose ablock-wise watermarking scheme for color image authentication to resist malicious tampering of digital media. The thresholding technique is incorporated into the scheme such that the tampered region of the color image can be recovered with high quality while the proofing result is obtained. The watermark for each block consists of its dual authentication data and the corresponding feature information. The feature information for recovery iscomputed bythe thresholding technique. In the proofing process, we propose a dual-option parity check method to proof the validity of image blocks. In the recovery process, the feature information of each block embedded into the color image is rebuilt for high quality recovery. The simulation results show that the proposed watermarking scheme can effectively proof the tempered region with high detection rate and can recover the tempered region with high quality.

Keywords: thresholding technique, tamper proofing, tamper recovery

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Authors: Turgay Temel, John Hallam

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A recent neurospiking coding scheme for feature extraction from biosonar echoes of various plants is examined with avariety of stochastic classifiers. Feature vectors derived are employedin well-known stochastic classifiers, including nearest-neighborhood,single Gaussian and a Gaussian mixture with EM optimization.Classifiers' performances are evaluated by using cross-validation and bootstrapping techniques. It is shown that the various classifers perform equivalently and that the modified preprocessing configuration yields considerably improved results.

Keywords: Classification, neuro-spike coding, non-parametricmodel, parametric model, Gaussian mixture, EM algorithm.

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Authors: Yanting Cao, Kazumitsu Nawata

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As smartphones are continually upgrading, their software and hardware are getting smarter, so the smartphone-based human activity recognition will be described more refined, complex and detailed. In this context, we analyzed a set of experimental data, obtained by observing and measuring 30 volunteers with six activities of daily living (ADL). Due to the large sample size, especially a 561-feature vector with time and frequency domain variables, cleaning these intractable features and training a proper model become extremely challenging. After a series of feature selection and parameters adjustments, a well-performed SVM classifier has been trained. 

Keywords: smart sensors, human activity recognition, artificial intelligence, SVM

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Authors: Essam Al Daoud

Abstract:

To improve the classification rate of the face recognition, features combination and a novel non-linear kernel are proposed. The feature vector concatenates three different radius of local binary patterns and Gabor wavelet features. Gabor features are the mean, standard deviation and the skew of each scaling and orientation parameter. The aim of the new kernel is to incorporate the power of the kernel methods with the optimal balance between the features. To verify the effectiveness of the proposed method, numerous methods are tested by using four datasets, which are consisting of various emotions, orientations, configuration, expressions and lighting conditions. Empirical results show the superiority of the proposed technique when compared to other methods.

Keywords: Face recognition, Gabor wavelet, LBP, Non-linearkerner

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Authors: Mawloud Mosbah, Bachir Boucheham

Abstract:

Color Histogram is considered as the oldest method used by CBIR systems for indexing images. In turn, the global histograms do not include the spatial information; this is why the other techniques coming later have attempted to encounter this limitation by involving the segmentation task as a preprocessing step. The weak segmentation is employed by the local histograms while other methods as CCV (Color Coherent Vector) are based on strong segmentation. The indexation based on local histograms consists of splitting the image into N overlapping blocks or sub-regions, and then the histogram of each block is computed. The dissimilarity between two images is reduced, as consequence, to compute the distance between the N local histograms of the both images resulting then in N*N values; generally, the lowest value is taken into account to rank images, that means that the lowest value is that which helps to designate which sub-region utilized to index images of the collection being asked. In this paper, we make under light the local histogram indexation method in the hope to compare the results obtained against those given by the global histogram. We address also another noteworthy issue when Relying on local histograms namely which value, among N*N values, to trust on when comparing images, in other words, which sub-region among the N*N sub-regions on which we base to index images. Based on the results achieved here, it seems that relying on the local histograms, which needs to pose an extra overhead on the system by involving another preprocessing step naming segmentation, does not necessary mean that it produces better results. In addition to that, we have proposed here some ideas to select the local histogram on which we rely on to encode the image rather than relying on the local histogram having lowest distance with the query histograms.

Keywords: CBIR, Color Global Histogram, Color Local Histogram, Weak Segmentation, Euclidean Distance.

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Authors: Elia Favarelli, Enrico Testi, Andrea Giorgetti

Abstract:

Autonomous structural health monitoring (SHM) of many structures and bridges became a topic of paramount importance for maintenance purposes and safety reasons. This paper proposes a set of machine learning (ML) tools to perform automatic feature selection and detection of anomalies in a bridge from vibrational data and compare different feature extraction schemes to increase the accuracy and reduce the amount of data collected. As a case study, the Z-24 bridge is considered because of the extensive database of accelerometric data in both standard and damaged conditions. The proposed framework starts from the first four fundamental frequencies extracted through operational modal analysis (OMA) and clustering, followed by time-domain filtering (tracking). The fundamental frequencies extracted are then fed to a dimensionality reduction block implemented through two different approaches: feature selection (intelligent multiplexer) that tries to estimate the most reliable frequencies based on the evaluation of some statistical features (i.e., entropy, variance, kurtosis), and feature extraction (auto-associative neural network (ANN)) that combine the fundamental frequencies to extract new damage sensitive features in a low dimensional feature space. Finally, one-class classification (OCC) algorithms perform anomaly detection, trained with standard condition points, and tested with normal and anomaly ones. In particular, principal component analysis (PCA), kernel principal component analysis (KPCA), and autoassociative neural network (ANN) are presented and their performance are compared. It is also shown that, by evaluating the correct features, the anomaly can be detected with accuracy and an F1 score greater than 95%.

Keywords: Anomaly detection, dimensionality reduction, frequencies selection, modal analysis, neural network, structural health monitoring, vibration measurement.

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Authors: Marjone Van Der Bank, C. M. Van Der Bank

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This paper presents an overview of the foundation and evolution of environmental related problems in local governments with specific reference on air pollution in South Africa. Local government has a direct mandate in terms of the Constitution of the Republic of South Africa, 1996 (hereafter, the Constitution). This mandate to protect, fulfil, respect and promote the Bill of Rights by local governments in respect of the powers and functions creates confusion around the role of where a local government fits in, in addressing the problem of climate change in South Africa. A reflection of the evolving legislations, developments, and processes regarding climate change that shaped local government dispensation in South Africa is addressed by the notion of developmental local governments. This paper seeks to examine the advances for mitigation and adaptation regulation of air pollution and application in South Africa. This study involves a qualitative approach that will involve South African national legislation as well as an interpretation of international strategies. A literature review study was conducted to undertake the various aspects of law in order to support the argument undertaken of mitigation and adaptation strategies. The paper presents a detailed discussion of the current legislation and the position as it currently stands, as well as the relevant protections as outlined in the National Environmental Management Act and the National Environmental Management: Air Quality Act. It then proceeds to outline the responsibilities of local governments in South Africa to mitigate and adapt to air pollution strategies.

Keywords: Adaptation, climate change, disaster, local governments, mitigation.

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Authors: Sorin Soviany, Cristina Soviany, Mariana Jurian

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The paper presents a multimodal approach for biometric authentication, based on multiple classifiers. The proposed solution uses a post-classification biometric fusion method in which the biometric data classifiers outputs are combined in order to improve the overall biometric system performance by decreasing the classification error rates. The paper shows also the biometric recognition task improvement by means of a carefully feature selection, as much as not all of the feature vectors components support the accuracy improvement.

Keywords: biometric fusion, multiple classifiers

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Authors: Chanisada Choosuk, Napisporn Memongkol Runchana Sinthavalai, Fareeda Lambensah

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The objective of this research is to explore the role of actors at the local level in managing the Pre-hospital Emergency Medical Service (EMS) system in Thailand. The research method was done through documentary research, individual interviews, and one forum conducted in each province. This paper uses the case of three provinces located in three regions in Thailand including; Ubon Ratchathani (North-eastern region), Lampang (Northern Region), and Songkhla (Southern Region). The result shows that, recently, the role of the local government in being the service provider for their local people is increasingly concerned. In identifying the key success factors towards the EMS system, it includes; (i) the local executives- vision and influence that the decisions made by them, for both PAO (Provincial Administration Organisation (PAO) and TAO (Tambon Administration Organisation), is vital to address the overall challenges in EMS development, (ii) the administrative system through reforming their working style create the flexibility in running the EMS task, (iii) the network-based management among different agencies at the local level leads to the better EMS practices, and (iv) the development in human resource is very vital in delivering the effective services.

Keywords: Local governments, Management, Emergency Medical Services (EMS), Thailand

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Authors: Sanpachai Huvanandana

Abstract:

A human verification system is presented in this paper. The system consists of several steps: background subtraction, thresholding, line connection, region growing, morphlogy, star skelatonization, feature extraction, feature matching, and decision making. The proposed system combines an advantage of star skeletonization and simple statistic features. A correlation matching and probability voting have been used for verification, followed by a logical operation in a decision making stage. The proposed system uses small number of features and the system reliability is convincing.

Keywords: Human verification, object recognition, videounderstanding, segmentation.

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Authors: Laila Y. Fannas, Ahmed Y. Ben Sasi

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This research presents a handwritten signature recognition based on angle feature vector using Artificial Neural Network (ANN). Each signature image will be represented by an Angle vector. The feature vector will constitute the input to the ANN. The collection of signature images will be divided into two sets. One set will be used for training the ANN in a supervised fashion. The other set which is never seen by the ANN will be used for testing. After training, the ANN will be tested for recognition of the signature. When the signature is classified correctly, it is considered correct recognition otherwise it is a failure.

Keywords: Signature Recognition, Artificial Neural Network, Angle Features.

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Authors: S. Balaji

Abstract:

An edge based local search algorithm, called ELS, is proposed for the maximum clique problem (MCP), a well-known combinatorial optimization problem. ELS is a two phased local search method effectively £nds the near optimal solutions for the MCP. A parameter ’support’ of vertices de£ned in the ELS greatly reduces the more number of random selections among vertices and also the number of iterations and running times. Computational results on BHOSLIB and DIMACS benchmark graphs indicate that ELS is capable of achieving state-of-the-art-performance for the maximum clique with reasonable average running times.

Keywords: Maximum clique, local search, heuristic, NP-complete.

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Authors: B. Tondu, N. Bardou

Abstract:

The recent development of humanoid robots has led robot designers to imagine a great variety of anthropomorphic forms for human-like machine. Which form is the best ? We try to answer this question from a double meaning of the anthropomorphism : a positive anthropomorphism corresponing to the realization of an effective anthropomorphic form object and a negative one corresponding to our natural tendency in certain circumstances to give human attributes to non-human beings. We postulate that any humanoid robot is concerned by both these two anthropomorphism kinds. We propose to use gestalt theory and Heider-s balance theory in order to analyze how negative anthropomorphism can influence our perception of human-like robots. From our theoretical approach we conclude that an “even shape" as defined by gestalt theory is not a sufficient condition for a good integration of future humanoid robots into a human community. Aesthetic perception of the robot cannot be splitted from a social perception : a humanoid robot, any how the efforts made for improving its appearance, could be rejected if it is devoted to a task with too high affective implications.

Keywords: Robot appearance, humanoid robot, uncanny valley, human-robot-interaction.

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Authors: Yun-Tao Zhang, Jong-Yeop Bae, Whoi-Yul Kim

Abstract:

Background modeling and subtraction in video analysis has been widely used as an effective method for moving objects detection in many computer vision applications. Recently, a large number of approaches have been developed to tackle different types of challenges in this field. However, the dynamic background and illumination variations are the most frequently occurred problems in the practical situation. This paper presents a favorable two-layer model based on codebook algorithm incorporated with local binary pattern (LBP) texture measure, targeted for handling dynamic background and illumination variation problems. More specifically, the first layer is designed by block-based codebook combining with LBP histogram and mean value of each RGB color channel. Because of the invariance of the LBP features with respect to monotonic gray-scale changes, this layer can produce block wise detection results with considerable tolerance of illumination variations. The pixel-based codebook is employed to reinforce the precision from the output of the first layer which is to eliminate false positives further. As a result, the proposed approach can greatly promote the accuracy under the circumstances of dynamic background and illumination changes. Experimental results on several popular background subtraction datasets demonstrate very competitive performance compared to previous models.

Keywords: Background subtraction, codebook model, local binary pattern, dynamic background, illumination changes.

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Authors: Usman Qamar, Younus Javed

Abstract:

Frequent pattern mining is the process of finding a pattern (a set of items, subsequences, substructures, etc.) that occurs frequently in a data set. It was proposed in the context of frequent itemsets and association rule mining. Frequent pattern mining is used to find inherent regularities in data. What products were often purchased together? Its applications include basket data analysis, cross-marketing, catalog design, sale campaign analysis, Web log (click stream) analysis, and DNA sequence analysis. However, one of the bottlenecks of frequent itemset mining is that as the data increase the amount of time and resources required to mining the data increases at an exponential rate. In this investigation a new algorithm is proposed which can be uses as a pre-processor for frequent itemset mining. FASTER (FeAture SelecTion using Entropy and Rough sets) is a hybrid pre-processor algorithm which utilizes entropy and roughsets to carry out record reduction and feature (attribute) selection respectively. FASTER for frequent itemset mining can produce a speed up of 3.1 times when compared to original algorithm while maintaining an accuracy of 71%.

Keywords: Rough-sets, Classification, Feature Selection, Entropy, Outliers, Frequent itemset mining.

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Authors: Cheng-Hong Yang, Tsung-Mu Shih, Li-Yeh Chuang

Abstract:

Serial Analysis of Gene Expression is a powerful quantification technique for generating cell or tissue gene expression data. The profile of the gene expression of cell or tissue in several different states is difficult for biologists to analyze because of the large number of genes typically involved. However, feature selection in machine learning can successfully reduce this problem. The method allows reducing the features (genes) in specific SAGE data, and determines only relevant genes. In this study, we used a genetic algorithm to implement feature selection, and evaluate the classification accuracy of the selected features with the K-nearest neighbor method. In order to validate the proposed method, we used two SAGE data sets for testing. The results of this study conclusively prove that the number of features of the original SAGE data set can be significantly reduced and higher classification accuracy can be achieved.

Keywords: Serial Analysis of Gene Expression, Feature selection, Genetic Algorithm, K-nearest neighbor method.

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Authors: Dim En Nyaung, Thin Lai Lai Thein

Abstract:

Due to the rapid increase of Internet, web opinion sources dynamically emerge which is useful for both potential customers and product manufacturers for prediction and decision purposes. These are the user generated contents written in natural languages and are unstructured-free-texts scheme. Therefore, opinion mining techniques become popular to automatically process customer reviews for extracting product features and user opinions expressed over them. Since customer reviews may contain both opinionated and factual sentences, a supervised machine learning technique applies for subjectivity classification to improve the mining performance. In this paper, we dedicate our work is the task of opinion summarization. Therefore, product feature and opinion extraction is critical to opinion summarization, because its effectiveness significantly affects the identification of semantic relationships. The polarity and numeric score of all the features are determined by Senti-WordNet Lexicon. The problem of opinion summarization refers how to relate the opinion words with respect to a certain feature. Probabilistic based model of supervised learning will improve the result that is more flexible and effective.

Keywords: Opinion Mining, Opinion Summarization, Sentiment Analysis, Text Mining.

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Authors: Sanghyeok Oh, Keechul Jung

Abstract:

Although lots of research work has been done for human pose recognition, the view-point of cameras is still critical problem of overall recognition system. In this paper, view-point insensitive human pose recognition is proposed. The aims of the proposed system are view-point insensitivity and real-time processing. Recognition system consists of feature extraction module, neural network and real-time feed forward calculation. First, histogram-based method is used to extract feature from silhouette image and it is suitable for represent the shape of human pose. To reduce the dimension of feature vector, Principle Component Analysis(PCA) is used. Second, real-time processing is implemented by using Compute Unified Device Architecture(CUDA) and this architecture improves the speed of feed-forward calculation of neural network. We demonstrate the effectiveness of our approach with experiments on real environment.

Keywords: computer vision, neural network, pose recognition, view-point insensitive, PCA, CUDA.

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Authors: Safdar Tanweer, Abdul Mobin, Afshar Alam

Abstract:

The performance and analysis of speech recognition system is illustrated in this paper. An approach to recognize the English word corresponding to digit (0-9) spoken by 2 different speakers is captured in noise free environment. For feature extraction, speech Mel frequency cepstral coefficients (MFCC) has been used which gives a set of feature vectors from recorded speech samples. Neural network model is used to enhance the recognition performance. Feed forward neural network with back propagation algorithm model is used. However other speech recognition techniques such as HMM, DTW exist. All experiments are carried out on Matlab.

Keywords: Speech Recognition, MFCC, Neural Network, classifier.

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Authors: Hyunchul Ahn, William X. S. Wong

Abstract:

Corporate credit rating prediction is one of the most important topics, which has been studied by researchers in the last decade. Over the last decade, researchers are pushing the limit to enhance the exactness of the corporate credit rating prediction model by applying several data-driven tools including statistical and artificial intelligence methods. Among them, multiclass support vector machine (MSVM) has been widely applied due to its good predictability. However, heuristics, for example, parameters of a kernel function, appropriate feature and instance subset, has become the main reason for the critics on MSVM, as they have dictate the MSVM architectural variables. This study presents a hybrid MSVM model that is intended to optimize all the parameter such as feature selection, instance selection, and kernel parameter. Our model adopts genetic algorithm (GA) to simultaneously optimize multiple heterogeneous design factors of MSVM.

Keywords: Corporate credit rating prediction, feature selection, genetic algorithms, instance selection, multiclass support vector machines.

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Authors: J.S.C. Prentice

Abstract:

The RK5GL3 method is a numerical method for solving initial value problems in ordinary differential equations, and is based on a combination of a fifth-order Runge-Kutta method and 3-point Gauss-Legendre quadrature. In this paper we describe an effective local error control algorithm for RK5GL3, which uses local extrapolation with an eighth-order Runge-Kutta method in tandem with RK5GL3, and a Hermite interpolating polynomial for solution estimation at the Gauss-Legendre quadrature nodes.

Keywords: RK5GL3, RKrGLm, Runge-Kutta, Gauss-Legendre, Hermite interpolating polynomial, initial value problem, local error.

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Authors: Woei-Shyan Lee, Shuo-Ling Chang

Abstract:

The nanoindentation behaviour and phase transformation of annealed single-crystal silicon wafers are examined. The silicon specimens are annealed at temperatures of 250, 350 and 450ºC, respectively, for 15 minutes and are then indented to maximum loads of 30, 50 and 70 mN. The phase changes induced in the indented specimens are observed using transmission electron microscopy (TEM) and micro-Raman scattering spectroscopy (RSS). For all annealing temperatures, an elbow feature is observed in the unloading curve following indentation to a maximum load of 30 mN. Under higher loads of 50 mN and 70 mN, respectively, the elbow feature is replaced by a pop-out event. The elbow feature reveals a complete amorphous phase transformation within the indented zone, whereas the pop-out event indicates the formation of Si XII and Si III phases. The experimental results show that the formation of these crystalline silicon phases increases with an increasing annealing temperature and indentation load. The hardness and Young’s modulus both decrease as the annealing temperature and indentation load are increased.

Keywords: Nanoindentation, silicon, phase transformation, amorphous, annealing.

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