Search results for: TMAH

Authors: V. Swarnalatha, A. V. Narasimha Rao, P. Pal

Abstract:

The present research reports the investigation of fast etching of silicon for the fabrication of microelectromechanical systems (MEMS) structures using silicon wet bulk micromachining. Low concentration tetramethyl-ammonium hydroxide (TMAH) and hydroxylamine (NH₂OH) are used as main etchant and additive, respectively. The concentration of NH₂OH is varied to optimize the composition to achieve best etching characteristics such as high etch rate, significantly high undercutting at convex corner for the fast release of the microstructures from the substrate, and improved etched surface morphology. These etching characteristics are studied on Si{100} and Si{110} wafers as they are most widely used in the fabrication of MEMS structures as wells diode, transistors and integrated circuits.

Keywords: KOH, MEMS, micromachining, silicon, TMAH, wet anisotropic etching

Procedia PDF Downloads 174

Authors: F. Deng, R. Sanchez, A. Beltran, S. Maestre

Abstract:

The high nutritional value associated with seafood is related to the presence of essential trace elements. Moreover, seafood is considered an important source of energy, proteins, and long-chain polyunsaturated fatty acids. Generally, seafood is consumed cooked. Consequently, the nutritional value could be degraded. Seafood, such as fish, shellfish, and seaweed, could be considered as one of the main iodine sources. The deficient or excessive consumption of iodine could cause dysfunction and pathologies related to the thyroid gland. The main objective of this work is to evaluated iodine stability in hake (Merluccius) undergone different culinary techniques. The culinary process considered were: boiling, steaming, microwave cooking, baking, cooking en papillote (twisted cover with the shape of a sweet wrapper) and coating with a batter of flour and deep-frying. The determination of iodine was carried by Inductively Coupled Plasma Mass Spectrometry (ICP-MS). Regarding sample handling strategies, liquid-liquid extraction has demonstrated to be a powerful pre-concentration and clean-up approach for trace metal analysis by ICP techniques. Extraction with tetramethylammonium hydroxide (TMAH reagent) was used as a sample preparation method in this work. Based on the results, it can be concluded that the stability of iodine was degraded with the cooking processes. The major degradation was observed for the boiling and microwave cooking processes. The content of iodine in hake decreased up to 60% and 52%, respectively. However, if the boiling cooking liquid is preserved, this loss that has been generated during cooking is reduced. Only when the fish was cooked by following the cooking en papillote process the iodine content was preserved.

Keywords: cooking process, ICP-MS, iodine, hake

Procedia PDF Downloads 111