CMOS-Compatible Silicon Nanoplasmonics for On-Chip Integration
Although silicon photonic devices provide a significantly larger bandwidth and dissipate a substantially less power than the electronic devices, they suffer from a large size due to the fundamental diffraction limit and the weak optical response of Si. A potential solution is to exploit Si plasmonics, which may not only miniaturize the photonic device far beyond the diffraction limit, but also enhance the optical response in Si due to the electromagnetic field confinement. In this paper, we discuss and summarize the recently developed metal-insulator-Si-insulator-metal nanoplasmonic waveguide as well as various passive and active plasmonic components based on this waveguide, including coupler, bend, power splitter, ring resonator, MZI, modulator, detector, etc. All these plasmonic components are CMOS compatible and could be integrated with electronic and conventional dielectric photonic devices on the same SOI chip. More potential plasmonic devices as well as plasmonic nanocircuits with complex functionalities are also addressed.
Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1063399Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1594
 M. Dragoman and D. Dragoman, "Plasmonics: applications to nanoscale terahertz and optical devices," Prog. Quant. Electron. 32(1), 1-41 (2008).
 D. K. Gramotnev and S. I. Bozhevolnyi, "Plasmonics beyond the diffraction limit," Nat. Photonics 4, 83-91 (2010).
 R. F. Oulton, G. Bartal, D. F. P. Pile, and X Zhang, "Confinement and propagation characteristics of subwavelength plasmonic modes," New J. of Phys. 10, 105018 (2008).
 E. Ozbay, "Plasmonics: merging photonics and electronics at nanoscale dimensions," Science 311(5758), 189-193 (2006).
 R. Zia, J. A. Schuller, A. Chandran, and M. L. Brongersma, "Plasmonics: the next chip-scale technology," Mater. Today 9(7-8), 20¬27 (2006).
 S. I. Bozhevolnyi and J. Jung, "Scaling for gap plasmon based waveguides," Opt. Express 16(4), 2676-2684 (2008).
 R. F. Oulton, V. J. Sorger, D. A. Genov, D. F. P. Pile, and X Zhang, "A hybrid plasmonic waveguide for subwavelength confinement and long-range propagation," Nat. Photonics 2, 496-500 (2008).
 T. Holmgaard and S. I. Bozhevolnyi, "Theoretical analysis of dielectric —loaded surface plasmon-polariton waveguides," Phys. Rev. B 75, art. 245405 (2007).
 S. Y. Zhu, T. Y. Liow, G. Q. Lo, and D. L. Kwong, "Fully complementary metal-oxide-semiconductor compatible nanoplasmonic slot waveguides for silicon electronic photonic integrated circuits," Appl. Phys. Lett. 98, art. 021107 (2011).
 S. Y. Zhu, T. Y. Liow, G. Q. Lo, and D. L. Kwong, "Silicon-based horizontal nanoplasmonic slot waveguides for on-chip integration," Opt. Express 19, 8888-8902 (2011).
 S. Y. Zhu, G. Q. Lo, and D. L. Kwong, "Components for silicon plasmonic nanocircuits based on horizontal Cu-SiO2-Si-SiO2-Cu nanoplasmonic waveguides," Opt. Express 20, 5867-5881 (2012).
 S. Y. Zhu, G. Q. Lo, and D. L. Kwong, "Nanoplasmonic power splitters based on the horizontal nanoplasmonic slot waveguide," Appl. Phys. Lett. 99, art. 031112 (2011).
 S. Y. Zhu, G. Q. Lo, and D. L. Kwong, "Experimental demonstration of horizontal nanoplasmonic slot waveguide-ring resonators with submicron radius," IEEE Photonic Techn. Lett. 23(24), 1896-1898, (2011).
 S. Y. Zhu, G. Q. Lo, and D. L. Kwong, "Theoretical investigation of silicon MOS-type plasmonic slot waveguide based MZI modulators," Opt. Express 18, 27802-27819 (2010).
 S. Y. Zhu, G. Q. Lo, and D. L. Kwong, "Electro-absorption modulation in horizontal metal-insulator-silicon-insulator-metal nanoplasmonic slot waveguides," Appl. Phys. Lett. 99, art. 151114 (2011).
 S. Y. Zhu, G. Q. Lo, and D. L. Kwong, "Theoretical investigation of silicon Schottky barrier detector integrated in horizontal metal-insulator-silicon-insulator-metal nanoplasmonic slot waveguide," Opt. Express 19, 15843-15854 (2011).
 S. Roberts, "Optical properties of copper", Physical Review 118(6), 1509-1518 (1960).
 Z. Han, V. Van, W. N. Herman, and P. T. Ho, "Aperture-coupled MIM plasmonic ring resonators with sub-diffraction modal volumes", Optics Express 17(15), 12678-12684 (2009).
 T. Holmgaard, Z. Chen, S. I. Bozhevolnyi, L. Markey, and A. Dereux, "Dielectric-loaded plasmonic waveguide-ring resonators", Optics Express 17(4), 968-2975 (2009).