Commenced in January 2007
Paper Count: 30172
Electrical Characterization and Reliability Analysis of HfO2-TiO2-Al MOSCAPs
Abstract:MOSCAPs of various combinations of Hafnium oxide and Titanium oxide of varying thickness with Aluminum as gate electrode have been fabricated and electrically characterized. The effects of voltage stress on the I-V characteristics for prolonged time durations have been studied and compared. Results showed hard breakdown and negligible degradation of reliability under stress.
Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1086229Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1111
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