Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 2

Search results for: microswitch

2 Microswitches with Sputtered Au, Aupd, Au-on-Aupt, and Auptcu Alloy - Electric Contacts

Authors: Nikolay Konukhov

Abstract:

This paper to report on a new analytic model for predicting microcontact resistance and the design, fabrication, and testing of microelectromechanical systems (MEMS) metal contact switches with sputtered bimetallic (i.e., gold (Au)-on-Au-platinum (Pt), (Au-on-Au-(6.3at%)Pt)), binary alloy (i.e., Au-palladium (Pd), (Au-(3.7at%)Pd)), and ternary alloy (i.e., Au-Pt-copper (Cu), (Au-(5.0at%)Pt-(0.5at%)Cu)) electric contacts. The microswitches with bimetallic and binary alloy contacts resulted in contact resistance values between 1–2

Keywords: alloys, electric contacts, microelectromechanical systems (MEMS), microswitch

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1 Critical Analysis of Different Actuation Techniques for a Micro Cantilever

Authors: B. G. Sheeparamatti, Prashant Hanasi, Vanita Abbigeri

Abstract:

The objective of this work is to carry out a critical comparison of different actuation mechanisms like electrostatic, thermal, piezoelectric, and magnetic with reference to a microcantilever. The relevant parameters like force generated, displacement are compared in actuation methods. With these results, they help in choosing the best actuation method for a particular application. In this study, Comsol/Multiphysics software is used. Modeling and simulation are done by considering the microcantilever of same dimensions as an actuator using all the above-mentioned actuation techniques. In addition to their small size, micro actuators consume very little power and are capable of accurate results. In this work, a comparison of actuation mechanisms is done to decide the efficient system in the micro domain.

Keywords: actuation techniques, microswitch, micro actuator, microsystems

Procedia PDF Downloads 323