Search results for: microswitch

3 The Response of Optical Properties to Temperature in Three-Layer Micro Device Under Influence of Casimir Force

Authors: Motahare Aali, Fatemeh Tajik

Abstract:

Here, we investigate the sensitivity the Casimir force and consequently dynamical actuation of a three-layer microswitch to some ambient conditions. In fact, we have considered the effect of optical properties on the stable operation of the microswitch for both good (e.g. metals) and poor conductors via a three layer Casimir oscillator. Indeed, gold (Au) has been chosen as a good conductor which is widely used for Casimir force measurements, and highly doped conductive silicon carbide (SiC) has been considered as a poor conductor which is a promising material for device operating under harsh environments. Also, the intervening stratum is considered ethanol or water. It is also supposed that the microswitches are frictionless and autonomous. Using reduction factor diagrams and bifurcation curves, it has been shown how performance of the microswitches is sensitive to temperature and intervening stratum, moreover it is investigated how the conductivity of the components can affect this sensitivity.

Keywords: Casimir force, optical properties, Lifshitz theory, dielectric function

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2 Microswitches with Sputtered Au, Aupd, Au-on-Aupt, and Auptcu Alloy - Electric Contacts

Authors: Nikolay Konukhov

Abstract:

This paper to report on a new analytic model for predicting microcontact resistance and the design, fabrication, and testing of microelectromechanical systems (MEMS) metal contact switches with sputtered bimetallic (i.e., gold (Au)-on-Au-platinum (Pt), (Au-on-Au-(6.3at%)Pt)), binary alloy (i.e., Au-palladium (Pd), (Au-(3.7at%)Pd)), and ternary alloy (i.e., Au-Pt-copper (Cu), (Au-(5.0at%)Pt-(0.5at%)Cu)) electric contacts. The microswitches with bimetallic and binary alloy contacts resulted in contact resistance values between 1–2

Keywords: alloys, electric contacts, microelectromechanical systems (MEMS), microswitch

Procedia PDF Downloads 130

1 Critical Analysis of Different Actuation Techniques for a Micro Cantilever

Authors: B. G. Sheeparamatti, Prashant Hanasi, Vanita Abbigeri

Abstract:

The objective of this work is to carry out a critical comparison of different actuation mechanisms like electrostatic, thermal, piezoelectric, and magnetic with reference to a microcantilever. The relevant parameters like force generated, displacement are compared in actuation methods. With these results, they help in choosing the best actuation method for a particular application. In this study, Comsol/Multiphysics software is used. Modeling and simulation are done by considering the microcantilever of same dimensions as an actuator using all the above-mentioned actuation techniques. In addition to their small size, micro actuators consume very little power and are capable of accurate results. In this work, a comparison of actuation mechanisms is done to decide the efficient system in the micro domain.

Keywords: actuation techniques, microswitch, micro actuator, microsystems

Procedia PDF Downloads 367