A Simple Low-Cost 2-D Optical Measurement System for Linear Guideways

Authors: Wen-Yuh Jywe, Bor-Jeng Lin, Jing-Chung Shen, Jeng-Dao Lee, Hsueh-Liang Huang, Tung-Hsien Hsieh

Abstract:

In this study, a simple 2-D measurement system based on optical design was developed to measure the motion errors of the linear guideway. Compared with the transitional methods about the linear guideway for measuring the motion errors, our proposed 2-D optical measurement system can simultaneously measure horizontal and vertical running straightness errors for the linear guideway.

The performance of the 2-D optical measurement system is verified by experimental results. The standard deviation of the 2-D optical measurement system is about 0.4μm in the measurement range of 100 mm. The maximum measuring speed of the proposed automatic measurement instrument is 1 m/sec.

Keywords: 2-D measurement, linear guideway, motion errors, running straightness.

Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1336514

References:

[1] M. Rahman, M. A. Mansur, L. K. Lee and J. K. Lum, "Development of a polymer impregnated concrete damping carriage for linear guideways for machine tools,” International Journal of Machine Tools & Manufacture, Vol. 41, pp. 431-441, 2001.
[2] J. Ni and S.M. Wu, "An On-Line Measurement Technique for Machine Volumetric Error Compensation,” ASME Journal of Engineering for Industry, Vol. 115, pp.85-92, 1993.
[3] K. S. Lee, Y. Cai and A. Joneja, "High resolution multidimensional displacement monitoring system,” Optical Engineering, Vol. 36, No. 8, pp. 2287-2293, 1997.
[4] J.A. Kim, E. W. Bae, S.H. Kim and Y. K. Kwak, "Multidimensional motion measurement of a bimorph-type piezoelectric actuator using a diffraction grating target,” Review of Scientific Instruments, Vol. 72, Issue 9, pp. 3731-3733, 2001.
[5] K. C. Fan, C. L. Chu, J. L. Liao and J. I. Mou, " Development of a high precision straightness measuring system with DVD pick-up head,” Measurement Science and Technology, Vol.14, pp.47-54, 2003.
[6] C. H. Liu and W. Y. Jywe, "A four-degree-of-freedom micro-stage for the compensation of eccentricity of a roundness Measuring machine,” International Journal of Machine Tools & Manufacture, Vol. 44, No.4,pp. 365-371, 2004.
[7] C. H. Liu, W. Y. Jywe, C. C. Hsu and T. H. Hsu, "Development of a laser-based high-precision six-degree-of-freedom motion errors measurement system for linear stage,” Review of Scientific Instruments, Vol. 76, Issue 5, Article 055110, pp.1-6, 2005.
[8] C.H. Liu, Y. R. Jeng, W. Y. Jywe, S.Y. Deng and T.H. Hsu, "Automatic Straightness Measurement of a Linear Guide Using a Real-time Straightness Self-compensating Scanning Stage,” Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, Vol. 233, Issue 9, pp. 1171-1179, 2009.
[9] S.L. Chen, W. Y. Jywe, T.H. Hsieh and C.H. Liu, "The Development of a 3-dimensional vibration measuring system with corner cubes and quadrant detectors,” Journal of the Chinese Institute of Engineers, Vol. 33, No. 1, pp. 71-81, 2010.
[10] T.H. Hsieh, W. Y. Jywe, S.L. Chen, C.H. Liu and H.L. Huang "Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage,” Review of Scientific Instruments, Vol.82, Issue 5, Article 056101, pp.1-3, 2011.
[11] C.H. Liu and C.H. Cheng, "Development of a grating based multi-degree-of-freedom laser linear encoder using diffracted light,” Sensors and Actuators A: Physical, Vol. 181, pp. 87-93, 2012.