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The Performance Analysis of Valveless Micropump with Contoured Nozzle/Diffuser

Authors: Cheng-Chung Yang, Jr-Ming Miao, Fuh-Lin Lih, Tsung-Lung Liu, Ming-Hui Ho


The operation performance of a valveless micro-pump is strongly dependent on the shape of connected nozzle/diffuser and Reynolds number. The aims of present work are to compare the performance curves of micropump with the original straight nozzle/diffuser and contoured nozzle/diffuser under different back pressure conditions. The tested valveless micropumps are assembled of five pieces of patterned PMMA plates with hot-embracing technique. The structures of central chamber, the inlet/outlet reservoirs and the connected nozzle/diffuser are fabricated with laser cutting machine. The micropump is actuated with circular-type PZT film embraced on the bottom of central chamber. The deformation of PZT membrane with various input voltages is measured with a displacement laser probe. A simple testing facility is also constructed to evaluate the performance curves for comparison. In order to observe the evaluation of low Reynolds number multiple vortex flow patterns within the micropump during suction and pumping modes, the unsteady, incompressible laminar three-dimensional Reynolds-averaged Navier-Stokes equations are solved. The working fluid is DI water with constant thermo-physical properties. The oscillating behavior of PZT film is modeled with the moving boundary wall in way of UDF program. With the dynamic mesh method, the instants pressure and velocity fields are obtained and discussed.Results indicated that the volume flow rate is not monotony increased with the oscillating frequency of PZT film, regardless of the shapes of nozzle/diffuser. The present micropump can generate the maximum volume flow rate of 13.53 ml/min when the operation frequency is 64Hz and the input voltage is 140 volts. The micropump with contoured nozzle/diffuser can provide 7ml/min flow rate even when the back pressure is up to 400 mm-H2O. CFD results revealed that the flow central chamber was occupied with multiple pairs of counter-rotating vortices during suction and pumping modes. The net volume flow rate over a complete oscillating periodic of PZT

Keywords: valveless micropump、PZT diagraph、contoured, nozzle/diffuser、vortex flow

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