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Control of the Thermal Evaporation of Organic Semiconductors via Exact Linearization

Authors: Martin Steinberger, Martin Horn


In this article, a high vacuum system for the evaporation of organic semiconductors is introduced and a mathematical model is given. Based on the exact input output linearization a deposition rate controller is designed and tested with different evaporation materials.

Keywords: Effusion cell, organic semiconductors, deposition rate, exact linearization.

Digital Object Identifier (DOI):

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