WASET
	%0 Journal Article
	%A Martin Steinberger and  Martin Horn
	%D 2011
	%J International Journal of Physical and Mathematical Sciences
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 59, 2011
	%T Control of the Thermal Evaporation of Organic Semiconductors via Exact Linearization
	%U https://publications.waset.org/pdf/6327
	%V 59
	%X In this article, a high vacuum system for the evaporation of organic semiconductors is introduced and a mathematical model is given. Based on the exact input output linearization a deposition rate controller is designed and tested with different evaporation materials.

	%P 1776 - 1779