%0 Journal Article %A Martin Steinberger and Martin Horn %D 2011 %J International Journal of Physical and Mathematical Sciences %B World Academy of Science, Engineering and Technology %I Open Science Index 59, 2011 %T Control of the Thermal Evaporation of Organic Semiconductors via Exact Linearization %U https://publications.waset.org/pdf/6327 %V 59 %X In this article, a high vacuum system for the evaporation of organic semiconductors is introduced and a mathematical model is given. Based on the exact input output linearization a deposition rate controller is designed and tested with different evaporation materials. %P 1776 - 1779