Advanced Micromanufacturing for Ultra Precision Part by Soft Lithography and Nano Powder Injection Molding

Authors: Andy Tirta, Yus Prasetyo, Eung-Ryul. Baek, Chul-Jin. Choi , Hye-Moon. Lee

Abstract:

Recently, the advanced technologies that offer high precision product, relative easy, economical process and also rapid production are needed to realize the high demand of ultra precision micro part. In our research, micromanufacturing based on soft lithography and nanopowder injection molding was investigated. The silicone metal pattern with ultra thick and high aspect ratio succeeds to fabricate Polydimethylsiloxane (PDMS) micro mold. The process followed by nanopowder injection molding (PIM) by a simple vacuum hot press. The 17-4ph nanopowder with diameter of 100 nm, succeed to be injected and it forms green sample microbearing with thickness, microchannel and aspect ratio is 700μm, 60μm and 12, respectively. Sintering process was done in 1200 C for 2 hours and heating rate 0.83oC/min. Since low powder load (45% PL) was applied to achieve green sample fabrication, ~15% shrinkage happen in the 86% relative density. Several improvements should be done to produce high accuracy and full density sintered part.

Keywords: Micromanufacturing, Nano PIM, PDMS micro mould.

Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1328186

References:

[1] Suzuki, Kazuaki et al. Microlithography Science and Technology. CRC Press. Florida: 2007.
[2] Jackson, Mark J. Micro and Nanomanufacturing. Springer Science and Buisness. United States : 2007
[3] S. Supriadi, E.R. Baek, C.J. Choi, and B.T.Lee, Binder Sstem for STS 316 Nanopowder Feedstocks in Micro-Metal Injection Molding, 2007,Journal of Materials Processing Technology, Vol:187-188,p270-273
[4] Donggang Yao and Byung. Simulation of the filling process in micro channels for polymeric materials. J. Micromech. Microeng. 12 (2002) 604-610
[5] H. Mekaru, T. yamada, S. Yan, T. Hattori. "Microfabrication by hot embossing and injection molding at LASTI". MicrosystemTechnologies 10 (2004) 672-688, Springer-Verlag 2004.