%0 Journal Article
	%A Andy Tirta and  Yus Prasetyo and  Eung-Ryul. Baek and  Chul-Jin. Choi  and  Hye-Moon. Lee
	%D 2009
	%J International Journal of Industrial and Manufacturing Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 29, 2009
	%T Advanced Micromanufacturing for Ultra Precision Part by Soft Lithography and Nano Powder Injection Molding
	%U https://publications.waset.org/pdf/356
	%V 29
	%X Recently, the advanced technologies that offer high
precision product, relative easy, economical process and also rapid
production are needed to realize the high demand of ultra precision
micro part. In our research, micromanufacturing based on soft
lithography and nanopowder injection molding was investigated. The
silicone metal pattern with ultra thick and high aspect ratio succeeds to
fabricate Polydimethylsiloxane (PDMS) micro mold. The process
followed by nanopowder injection molding (PIM) by a simple vacuum
hot press. The 17-4ph nanopowder with diameter of 100 nm, succeed
to be injected and it forms green sample microbearing with thickness,
microchannel and aspect ratio is 700μm, 60μm and 12, respectively.
Sintering process was done in 1200 C for 2 hours and heating rate
0.83oC/min. Since low powder load (45% PL) was applied to achieve
green sample fabrication, ~15% shrinkage happen in the 86% relative
density. Several improvements should be done to produce high
accuracy and full density sintered part.
	%P 505 - 508