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Surface Morphology and Formation of Nanostructured Porous GaN by UV-assisted Electrochemical Etching

Authors: L. S. Chuah, Z. Hassan, C. W. Chin, H. Abu Hassan


This article reports on the studies of porous GaN prepared by ultra-violet (UV) assisted electrochemical etching in a solution of 4:1:1 HF: CH3OH:H2O2 under illumination of an UV lamp with 500 W power for 10, 25 and 35 minutes. The optical properties of porous GaN sample were compared to the corresponding as grown GaN. Porosity induced photoluminescence (PL) intensity enhancement was found in these samples. The resulting porous GaN displays blue shifted PL spectra compared to the as-grown GaN. Appearance of the blue shifted emission is correlated with the development of highly anisotropic structures in the morphology. An estimate of the size of the GaN nanostructure can be obtained with the help of a quantized state effective mass theory.

Keywords: Photoluminescence, electrochemical etching, porous GaN, RF-MBE

Digital Object Identifier (DOI):

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