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Synthesis and Characterization of Plasma Polymerized Thin Films Deposited from Benzene and Hexamethyldisiloxane using (PECVD) Method

Authors: Hisham M. Abourayana, Nuri A. Zreiba, Abdulkader M. Elamin


Polymer-like organic thin films were deposited on both aluminum alloy type 6061 and glass substrates at room temperature by Plasma Enhanced Chemical Vapor Deposition (PECVD) methodusing benzene and hexamethyldisiloxane (HMDSO) as precursor materials. The surface and physical properties of plasma-polymerized organic thin films were investigated at different r.f. powers. The effects of benzene/argon ratio on the properties of plasma polymerized benzene films were also investigated. It is found that using benzene alone results in a non-coherent and non-adherent powdery deposited material. The chemical structure and surface properties of the asgrown plasma polymerized thin films were analyzed on glass substrates with FTIR and contact angle measurements. FTIR spectra of benzene deposited film indicated that the benzene rings are preserved when increasing benzene ratio and/or decreasing r.f. powers. FTIR spectra of HMDSO deposited films indicated an increase of the hydrogen concentration and a decrease of the oxygen concentration with the increase of r.f. power. The contact angle (θ) of the films prepared from benzene was found to increase by about 43% as benzene ratio increases from 10% to 20%. θ was then found to decrease to the original value (51°) when the benzene ratio increases to 100%. The contact angle, θ, for both benzene and HMDSO deposited films were found to increase with r.f. power. This signifies that the plasma polymerized organic films have substantially low surface energy as the r.f power increases. The corrosion resistance of aluminum alloy substrate both bare and covered with plasma polymerized thin films was carried out by potentiodynamic polarization measurements in standard 3.5 wt. % NaCl solution at room temperature. The results indicate that the benzene and HMDSO deposited films are suitable for protection of the aluminum substrate against corrosion. The changes in the processing parameters seem to have a strong influence on the film protective ability. Surface roughness of films deposited on aluminum alloy substrate was investigated using scanning electron microscopy (SEM). The SEM images indicate that the surface roughness of benzene deposited films increase with decreasing the benzene ratio. SEM images of benzene and HMDSO deposited films indicate that the surface roughness decreases with increasing r.f. power. Studying the above parameters indicate that the films produced are suitable for specific practical applications.

Keywords: Plasma polymerization, Contact angle, potentiodynamic test

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[1] S. H. Cho, Z. T. Park, J. G. Kim, and J. H. Boo, "Physical and optical properties of plasma polymerized thin films deposited by PECVD method", Surface and Coatings Technology, Elsevier Science B. V., 174 -175, 2003, 1111-1115.
[2] F. Arefi, V. Andre, P. Motjtazer-Rahmati, and J. Amouroux, "Plasma polymerization and surface treatment of polymers", Pure & Appl. Chem., Great Britain, IUPAC, Vol. 64, No. 5, 1992 pp. 715-723.
[3] I. S. Bae, S. H. Cho, S. B. Lee, Y. Kim, and J. H. Boo, "Growth of plasma polymerized thin films by PECVD method and study on their surface and optical characteristics", Surface & Coatings Technology, Elsevier Science B. V., 193, 2005, 142-146.
[4] S. Gaur, G. Vergason, and Van Etten, "Plasma Polymerization: Theory and Practice", 43rd Annual Technical Conference Proceedings - Denver, April 15-20, 2000.
[5] Y. J. Yu, J. G. Kim, and J. H. Boo, "Plasma-polymerized thiophene films for corrosion protection in microelectronic devices", Journal of Material Science Letters 21, Kluwer Academic Publishers, 2002, 951- 953.
[6] Y. J. Yu, J. G. Kim, S. H. Cho, and J. H. Boo, "Plasma-polymerized toluene films for corrosion inhibition in microelectronic devices", Surface and Coatings Technology, Elsevier Science B. V., 162, 2003, 161-166.
[7] J. C. S Fernandes, M. G. S. Ferreira, D. B. Haddow, A. Goruppa, R. Short, and D. G. Dixon, "Plasma-polymerised coatings used as pretreatment for aluminium alloys", Surface and Coatings Technology, Elsevier Science B. V., 154, 2002, 8-13.
[8] A. R. Denes, M. A. Tshabalala, R. Rowell, F. Denes, and R. A. Young, "Hexamethyldisiloxane-Plasma Coating of Wood Surfaces for Creating Water Repellent Characteristics" Walter de Gruyter, Holzforschung, 53, 1999, 318-326.
[9] A. Cremona, L. Laguardia, E. Vassallo, G. Ambrosone, U. Coscia, F. Orsini and G. Poletti, "Optical and structural properties of siliconlike films prepared by plasma-enhanced chemical-vapor deposition", Journal of Applied Physics, 97, 023533, 2005.
[10] M. L. P. da Silva, I. H. Tan, A. P. Nascimento Filho, E. Galeazzo and D. P. Jesus, "Use of plasma polymerized highly hydrophobic hexamethyldissilazane (HMDS) films for sensor development", Sensors and Actuators B 91, 2003, 362-369.