Model Predictive Control Using Thermal Inputs for Crystal Growth Dynamics

Authors: Takashi Shimizu, Tomoaki Hashimoto

Abstract:

Recently, crystal growth technologies have made progress by the requirement for the high quality of crystal materials. To control the crystal growth dynamics actively by external forces is useuful for reducing composition non-uniformity. In this study, a control method based on model predictive control using thermal inputs is proposed for crystal growth dynamics of semiconductor materials. The control system of crystal growth dynamics considered here is governed by the continuity, momentum, energy, and mass transport equations. To establish the control method for such thermal fluid systems, we adopt model predictive control known as a kind of optimal feedback control in which the control performance over a finite future is optimized with a performance index that has a moving initial time and terminal time. The objective of this study is to establish a model predictive control method for crystal growth dynamics of semiconductor materials.

Keywords: Model predictive control, optimal control, crystal growth, process control.

Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1477935

References:

[1] T. Hashimoto, Y. Yoshioka, T. Ohtsuka, Receding Horizon Control with Numerical Solution for Thermal Fluid Systems, Proceedings of SICE Annual Conference, pp. 1298-1303, 2012.
[2] T. Hashimoto, Y. Takiguchi and T. Ohtsuka, Receding Horizon Control for High-Dimensional Burgersf Equations with Boundary Control Inputs, Transactions of the Japan Society for Aeronautical and Space Sciences, Vol. 56, No.3, pp. 137-144, 2013.
[3] R. Satoh, T. Hashimoto and T. Ohtsuka, Receding Horizon Control for Mass Transport Phenomena in Thermal Fluid Systems, Proceedings of Australian Control Conference, pp. 273-278, 2014.
[4] T. Hashimoto, Optimal Feedback Control Method Using Magnetic Force for Crystal Growth Dynamics, International Journal of Science and Engineering Investigations, Vol. 4, Issue 45, pp. 1-6, 2015.
[5] T. Hashimoto, Y. Yoshioka, T. Ohtsuka, Receding Horizon Control with Numerical Solution for Spatiotemporal Dynamic Systems, Proceedings of IEEE Conference on Decision and Control, pp. 2920-2925, 2012.
[6] T. Hashimoto, Y. Takiguchi and T. Ohtsuka, Output Feedback Receding Horizon Control for Spatiotemporal Dynamic Systems, Proceedings of Asian Control Conference, 2013.
[7] T. Hashimoto, Y. Yoshioka and T. Ohtsuka, Receding Horizon Control for Hot Strip Mill Cooling Systems, IEEE/ASME Transactions on Mechatronics, Vol. 18, No. 3, pp. 998-1005, 2013.
[8] T. Hashimoto, Y. Yoshioka and T. Ohtsuka, Receding Horizon Control With Numerical Solution for Nonlinear Parabolic Partial Differential Equations, IEEE Transactions on Automatic Control, Vol. 58, No. 3, pp. 725-730, 2013.
[9] T. Hashimoto, Receding Horizon Control for a Class of Discrete-time Nonlinear Implicit Systems, Proceedings of IEEE Conference on Decision and Control, pp. 5089-5094, 2014.
[10] T. Hashimoto, R. Satoh and T. Ohtsuka, Receding Horizon Control for Spatiotemporal Dynamic Systems, Mechanical Engineering Journal, Vol. 3, No. 2, 15-00345, 2016.
[11] T. Hashimoto, I. Yoshimoto, T. Ohtsuka, Probabilistic Constrained Model Predictive Control for Schr¨odinger Equation with Finite Approximation, Proceedings of SICE Annual Conference, pp. 1613-1618, 2012.
[12] T. Hashimoto, Stability of Stochastic Model Predictive Control for Schr¨odinger Equation with Finite Approximation, International Journal of Mathematical, Computational, Physical, Electrical and Computer Engineering, Vol. 11, No. 1, pp. 12-17, 2017.
[13] T. Hashimoto, Probabilistic Constrained Model Predictive Control for Linear Discrete-time Systems with Additive Stochastic Disturbances, Proceedings of IEEE Conference on Decision and Control, pp. 6434-6439, 2013.
[14] T. Hashimoto, Computational Simulations on Stability of Model Predictive Control for Linear Discrete-time Stochastic Systems, International Journal of Computer, Electrical, Automation, Control and Information Engineering, Vol. 9, No. 8, pp. 1385-1390, 2015.
[15] T. Hashimoto, Stochastic Model Predictive Control for Linear Discrete-time Systems with Random Dither Quantization, International Journal of Mathematical, Computational, Physical, Electrical and Computer Engineering, Vol. 11, No. 2, pp. 130-134, 2017.
[16] T. Hashimoto, Conservativeness of Probabilistic Constrained Optimal Control Method for Unknown Probability Distribution, International Journal of Mathematical, Computational, Physical, Electrical and Computer Engineering, Vol. 9, No. 9, pp. 11-15, 2015.
[17] T. Hashimoto, A Method for Solving Optimal Control Problems subject to Probabilistic Affine State Constraints for Linear Discrete-time Uncertain Systems, International Journal of Mechanical and Production Engineering, Vol. 3, Issue 12, pp. 6-10, 2015.
[18] T. Hashimoto, Solutions to Probabilistic Constrained Optimal Control Problems Using Concentration Inequalities, International Journal of Mathematical, Computational, Physical, Electrical and Computer Engineering, Vol. 10, No. 10, pp. 441-446, 2016.
[19] T. Hashimoto, T. Amemiya and H. A. Fujii, Stabilization of Linear Uncertain Delay Systems with Antisymmetric Stepwise Configurations, Journal of Dynamical and Control Systems, Vol. 14, No. 1, pp. 1-31, 2008.
[20] T. Hashimoto, T. Amemiya and H. A. Fujii, Output Feedback Stabilization of Linear Time-varying Uncertain Delay Systems, Mathematical Problems in Engineering, Vol. 2009, Article ID. 457468, 2009.
[21] T. Hashimoto and T. Amemiya, Stabilization of Linear Time-varying Uncertain Delay Systems with Double Triangular Configuration, WSEAS Transactions on Systems and Control, Vol. 4, No.9, pp.465-475, 2009.
[22] T. Hashimoto, Stabilization of Abstract Delay Systems on Banach Lattices using Nonnegative Semigroups, Proceedings of the 50th IEEE Conference on Decision and Control, pp. 1872-1877, 2011.
[23] T. Hashimoto, A Variable Transformation Method for Stabilizing Abstract Delay Systems on Banach Lattices, Journal of Mathematics Research, Vol. 4, No. 2, pp.2-9, 2012.
[24] T. Hashimoto, An Optimization Algorithm for Designing a Stabilizing Controller for Linear Time-varying Uncertain Systems with State Delays, Computational Mathematics and Modeling, Vol.24, No.1, pp.90-102, 2013.