{"title":"Model Predictive Control Using Thermal Inputs for Crystal Growth Dynamics","authors":"Takashi Shimizu, Tomoaki Hashimoto","volume":142,"journal":"International Journal of Computer and Systems Engineering","pagesStart":958,"pagesEnd":963,"ISSN":"1307-6892","URL":"https:\/\/publications.waset.org\/pdf\/10009731","abstract":"Recently, crystal growth technologies have made
\r\nprogress by the requirement for the high quality of crystal materials.
\r\nTo control the crystal growth dynamics actively by external forces
\r\nis useuful for reducing composition non-uniformity. In this study,
\r\na control method based on model predictive control using thermal
\r\ninputs is proposed for crystal growth dynamics of semiconductor
\r\nmaterials. The control system of crystal growth dynamics considered
\r\nhere is governed by the continuity, momentum, energy, and mass
\r\ntransport equations. To establish the control method for such thermal
\r\nfluid systems, we adopt model predictive control known as a kind
\r\nof optimal feedback control in which the control performance over
\r\na finite future is optimized with a performance index that has a
\r\nmoving initial time and terminal time. The objective of this study
\r\nis to establish a model predictive control method for crystal growth
\r\ndynamics of semiconductor materials.","references":"[1] T. Hashimoto, Y. Yoshioka, T. Ohtsuka, Receding Horizon Control with\r\nNumerical Solution for Thermal Fluid Systems, Proceedings of SICE\r\nAnnual Conference, pp. 1298-1303, 2012.\r\n[2] T. Hashimoto, Y. Takiguchi and T. Ohtsuka, Receding Horizon Control\r\nfor High-Dimensional Burgersf Equations with Boundary Control\r\nInputs, Transactions of the Japan Society for Aeronautical and Space\r\nSciences, Vol. 56, No.3, pp. 137-144, 2013.\r\n[3] R. Satoh, T. Hashimoto and T. Ohtsuka, Receding Horizon Control for\r\nMass Transport Phenomena in Thermal Fluid Systems, Proceedings of\r\nAustralian Control Conference, pp. 273-278, 2014.\r\n[4] T. Hashimoto, Optimal Feedback Control Method Using Magnetic Force\r\nfor Crystal Growth Dynamics, International Journal of Science and\r\nEngineering Investigations, Vol. 4, Issue 45, pp. 1-6, 2015.\r\n[5] T. Hashimoto, Y. Yoshioka, T. 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Satoh and T. Ohtsuka, Receding Horizon Control\r\nfor Spatiotemporal Dynamic Systems, Mechanical Engineering Journal,\r\nVol. 3, No. 2, 15-00345, 2016.\r\n[11] T. Hashimoto, I. Yoshimoto, T. Ohtsuka, Probabilistic Constrained\r\nModel Predictive Control for Schr\u00a8odinger Equation with Finite\r\nApproximation, Proceedings of SICE Annual Conference, pp.\r\n1613-1618, 2012.\r\n[12] T. Hashimoto, Stability of Stochastic Model Predictive Control for\r\nSchr\u00a8odinger Equation with Finite Approximation, International Journal\r\nof Mathematical, Computational, Physical, Electrical and Computer\r\nEngineering, Vol. 11, No. 1, pp. 12-17, 2017.\r\n[13] T. Hashimoto, Probabilistic Constrained Model Predictive Control for\r\nLinear Discrete-time Systems with Additive Stochastic Disturbances,\r\nProceedings of IEEE Conference on Decision and Control, pp.\r\n6434-6439, 2013.\r\n[14] T. 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Amemiya, Stabilization of Linear Time-varying\r\nUncertain Delay Systems with Double Triangular Configuration, WSEAS\r\nTransactions on Systems and Control, Vol. 4, No.9, pp.465-475, 2009.\r\n[22] T. Hashimoto, Stabilization of Abstract Delay Systems on Banach\r\nLattices using Nonnegative Semigroups, Proceedings of the 50th IEEE\r\nConference on Decision and Control, pp. 1872-1877, 2011.\r\n[23] T. Hashimoto, A Variable Transformation Method for Stabilizing\r\nAbstract Delay Systems on Banach Lattices, Journal of Mathematics\r\nResearch, Vol. 4, No. 2, pp.2-9, 2012.\r\n[24] T. Hashimoto, An Optimization Algorithm for Designing a Stabilizing\r\nController for Linear Time-varying Uncertain Systems with State\r\nDelays, Computational Mathematics and Modeling, Vol.24, No.1,\r\npp.90-102, 2013.","publisher":"World Academy of Science, Engineering and Technology","index":"Open Science Index 142, 2018"}