Commenced in January 2007
Paper Count: 30124
Method and Experiment of Fabricating and Cutting the Burr for Y Shape Nanochannel
Abstract:The present paper proposes using atomic force microscopy (AFM) and the concept of specific down force energy (SDFE) to establish a method for fabricating and cutting the burr for Y shape nanochannel on silicon (Si) substrate. For fabricating Y shape nanochannel, it first makes the experimental cutting path planning for fabricating Y shape nanochannel until the fifth cutting layer. Using the constant down force by AFM and SDFE theory and following the experimental cutting path planning, the cutting depth and width of each pass of Y shape nanochannel can be predicted by simulation. The paper plans the path for cutting the burr at the edge of Y shape nanochannel. Then, it carries out cutting the burr along the Y nanochannel edge by using a smaller down force. The height of standing burr at the edge is required to be below the set value of 0.54 nm. The results of simulation and experiment of fabricating and cutting the burr for Y shape nanochannel is further compared.
Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1125413Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 615
 S.M. Hwang, N.S. Kim and J.H. Lee, IEEE Electron Device Letters, vol.31, 2010, pp. 698-700.
 G. Binning, C.F. Quate and C. Gerber, Physical Review Letters, vol.56, 1986, pp. 930-933.
 A.A. Tseng, S. Jou, A. Notargiacomo and T.P. Chen, Journal of Nanoscience and Nanotechnology, vol.8, 2008, pp. 2167–2186.
 T.H. Fang, C.I. Weng and J.G. Chang, Nanotechnology, vol.11, 2000, pp. 181-187.
 H.W. Schumacher, U.F. Keyser and U. Zeitler, Fabrication of a single-electron transistor, Physical. vol.6, 2000, pp. 860-863.
 Y. Yan, T. Sun, Y.C. Liang and S. Dong, International Journal of Machine Tools and Manufacture, vol.47 ,2007, pp. 1651-1659.
 Z.Q. Wang, N.D. Jiao, S. Tung and Z.L. Dong, Chinese Science Bulletin, vol.55, 2010, pp. 3466-3471.
 J.C.T. Eijkel, W. Sparreboom, L. Shui, G.B. Salieb-Beugelaar, and A. van den Berg, Nanofluidics: fundamentals and applications, vol.978, 2009, pp. 4193-4244.
 L.L. Shui, C.T. Jan Eijkel and A. van den Berg, Sensors and Actuators B, vol.121, 2007, pp. 263-276.
 Z.C. Lin, Y.C. Hsu, Applied Surface Science, vol.258 , 2012, pp. 4513-4522.