Stealth Laser Dicing Process Improvement via Shuffled Frog Leaping Algorithm
Authors: Pongchanun Luangpaiboon, Wanwisa Sarasang
Abstract:
In this paper, performances of shuffled frog leaping algorithm was investigated on the stealth laser dicing process. Effect of problem on the performance of the algorithm was based on the tolerance of meandering data. From the customer specification it could be less than five microns with the target of zero microns. Currently, the meandering levels are unsatisfactory when compared to the customer specification. Firstly, the two-level factorial design was applied to preliminarily study the statistically significant effects of five process variables. In this study one influential process variable is integer. From the experimental results, the new operating condition from the algorithm was superior when compared to the current manufacturing condition.
Keywords: Stealth Laser Dicing Process, Meandering, Metaheuristics, Shuffled Frog Leaping Algorithm.
Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1338188
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2639References:
[1] W. Sarasan and P. Luangpaiboon, “Meandering Improvement of Stealth Laser Dicing Process via Mixed Integer Linear Constrained Response Surface Optimisation Model”, Proceedings of the National Operations Research Co-operative Research Network Conference, Bangkok, Thailand, 2011.
[2] M. Kumagai, N. Uchiyama, E.Ohmura, R. Sugiura, K. Atsumi and K. Fukumitsu, “Advance Dicing Technology for Semiconductor Wafer- Stealth Dicing”, IEEE Transaction on Semiconductor Manufacturing, vol. 20, no. 3, 2007.
[3] M.M. Eusuff, K.E. Lansey, “Optimisation of Water Distribution Network Design using the Shuffled Frog Leaping Algorithm”, Journal of Water Resources Planning and Management-Asce, vol. 129, no. 3, pp. 210-225, 2003.
[4] P. Aungkulanon and P.Luangpaiboon, “Hybridisations of Variable Neighbourhood Search and Modified Simplex Elements to Harmony Search and Shuffled Frog Leaping Algorithms for Process Optimisations”, AIP Conference Proceedings, 1285, pp. 44-58, 2010.
[5] P. Luangpaiboon, Y. Suwankham and S. Homrossukon, “Constrained Response Surface Optimisation for Precisely Atomising Spraying Process”, IAENG Transactions on Engineering Technologies, vol. 5, pp. 286-300, 2010. DOI: 10.1063/1.3510555